JP2001349784A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2001349784A5 JP2001349784A5 JP2000169696A JP2000169696A JP2001349784A5 JP 2001349784 A5 JP2001349784 A5 JP 2001349784A5 JP 2000169696 A JP2000169696 A JP 2000169696A JP 2000169696 A JP2000169696 A JP 2000169696A JP 2001349784 A5 JP2001349784 A5 JP 2001349784A5
- Authority
- JP
- Japan
- Prior art keywords
- support region
- temperature
- detection element
- infrared
- infrared detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 15
- 239000004020 conductor Substances 0.000 claims description 9
- 239000006096 absorbing agent Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 210000003454 tympanic membrane Anatomy 0.000 claims description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- OOYGSFOGFJDDHP-KMCOLRRFSA-N kanamycin A sulfate Chemical group OS(O)(=O)=O.O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CN)O[C@@H]1O[C@H]1[C@H](O)[C@@H](O[C@@H]2[C@@H]([C@@H](N)[C@H](O)[C@@H](CO)O2)O)[C@H](N)C[C@@H]1N OOYGSFOGFJDDHP-KMCOLRRFSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000169696A JP3692908B2 (ja) | 2000-06-06 | 2000-06-06 | 赤外線検出素子および測温計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000169696A JP3692908B2 (ja) | 2000-06-06 | 2000-06-06 | 赤外線検出素子および測温計 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001349784A JP2001349784A (ja) | 2001-12-21 |
| JP2001349784A5 true JP2001349784A5 (https=) | 2005-03-03 |
| JP3692908B2 JP3692908B2 (ja) | 2005-09-07 |
Family
ID=18672519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000169696A Expired - Fee Related JP3692908B2 (ja) | 2000-06-06 | 2000-06-06 | 赤外線検出素子および測温計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3692908B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101059780B1 (ko) * | 2009-07-02 | 2011-08-26 | 한국화학연구원 | 근적외선 감지 소자 및 그 제조방법 |
-
2000
- 2000-06-06 JP JP2000169696A patent/JP3692908B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6300554B1 (en) | Method of fabricating thermoelectric sensor and thermoelectric sensor device | |
| JP2001349787A5 (https=) | ||
| US6203194B1 (en) | Thermopile sensor for radiation thermometer or motion detector | |
| US6565254B2 (en) | Infrared sensing element and temperature measuring device | |
| EP1333504A3 (en) | Monolithically-integrated infrared sensor | |
| JP2008145133A (ja) | 放射温度計 | |
| US20020172255A1 (en) | Microstructured thermosensor | |
| US20070227575A1 (en) | Thermopile element and infrared sensor by using the same | |
| JP3733847B2 (ja) | 測温計 | |
| JPH0666639A (ja) | 赤外線温度計 | |
| JP2007033154A (ja) | 赤外線検出器 | |
| JP3589083B2 (ja) | 感熱式フロ−センサ | |
| JP2001349784A5 (https=) | ||
| JP2002048649A5 (https=) | ||
| JP5179004B2 (ja) | 赤外線センサ | |
| JP2002156283A (ja) | サーモパイル型赤外線センサ | |
| JPH0394127A (ja) | 赤外線センサ | |
| JPH04299225A (ja) | 体温計 | |
| JP2003254824A (ja) | 赤外線センサ装置、非接触型測温計および非接触型体温計 | |
| JP3733839B2 (ja) | 赤外線検出素子および測温計 | |
| JP3388207B2 (ja) | 熱電式センサデバイスおよびその製造方法 | |
| JP3733838B2 (ja) | 赤外線検出素子および測温計 | |
| JP3692908B2 (ja) | 赤外線検出素子および測温計 | |
| JPH0634448A (ja) | 放射温度計 | |
| JP2002156279A (ja) | サーモパイル型赤外線センサ |