JP2001339138A5 - - Google Patents
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- Publication number
- JP2001339138A5 JP2001339138A5 JP2000156522A JP2000156522A JP2001339138A5 JP 2001339138 A5 JP2001339138 A5 JP 2001339138A5 JP 2000156522 A JP2000156522 A JP 2000156522A JP 2000156522 A JP2000156522 A JP 2000156522A JP 2001339138 A5 JP2001339138 A5 JP 2001339138A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000156522A JP4563552B2 (ja) | 2000-05-26 | 2000-05-26 | 基板の検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000156522A JP4563552B2 (ja) | 2000-05-26 | 2000-05-26 | 基板の検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001339138A JP2001339138A (ja) | 2001-12-07 |
| JP2001339138A5 true JP2001339138A5 (enExample) | 2007-07-12 |
| JP4563552B2 JP4563552B2 (ja) | 2010-10-13 |
Family
ID=18661306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000156522A Expired - Fee Related JP4563552B2 (ja) | 2000-05-26 | 2000-05-26 | 基板の検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4563552B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101236286B1 (ko) | 2012-09-24 | 2013-02-26 | (주)대상이엔지 | 기판의 결함 검사장치 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0620091B2 (ja) * | 1985-01-31 | 1994-03-16 | 株式会社ニコン | 基板の搬送装置 |
| JPS622176A (ja) * | 1985-06-28 | 1987-01-08 | Yashima Seisakusho:Kk | バ−イン装置 |
| JPH0652754B2 (ja) * | 1987-10-23 | 1994-07-06 | 東京エレクトロン九州株式会社 | 基板搬送機構 |
| JPH0682145B2 (ja) * | 1989-03-27 | 1994-10-19 | ユアサ商事株式会社 | バーイン装置 |
| JPH0582610A (ja) * | 1991-09-19 | 1993-04-02 | Toshiba Corp | 半導体装置並びにその試験方法及びその試験装置 |
| JPH06274943A (ja) * | 1993-03-19 | 1994-09-30 | Hitachi Maxell Ltd | 情報記録媒体の自動検査装置 |
| JP3734295B2 (ja) * | 1995-09-04 | 2006-01-11 | 大日本スクリーン製造株式会社 | 基板搬送装置 |
| JP3420712B2 (ja) * | 1998-11-12 | 2003-06-30 | 東京エレクトロン株式会社 | 処理システム |
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2000
- 2000-05-26 JP JP2000156522A patent/JP4563552B2/ja not_active Expired - Fee Related