JP2001337389A - 投影装置 - Google Patents

投影装置

Info

Publication number
JP2001337389A
JP2001337389A JP2000154492A JP2000154492A JP2001337389A JP 2001337389 A JP2001337389 A JP 2001337389A JP 2000154492 A JP2000154492 A JP 2000154492A JP 2000154492 A JP2000154492 A JP 2000154492A JP 2001337389 A JP2001337389 A JP 2001337389A
Authority
JP
Japan
Prior art keywords
optical system
plane
image
imaging
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000154492A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001337389A5 (enExample
Inventor
Tomoko Sato
朋子 佐藤
Kokichi Kenno
孝吉 研野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP2000154492A priority Critical patent/JP2001337389A/ja
Publication of JP2001337389A publication Critical patent/JP2001337389A/ja
Publication of JP2001337389A5 publication Critical patent/JP2001337389A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lenses (AREA)
  • Projection Apparatus (AREA)
JP2000154492A 2000-05-25 2000-05-25 投影装置 Pending JP2001337389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000154492A JP2001337389A (ja) 2000-05-25 2000-05-25 投影装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000154492A JP2001337389A (ja) 2000-05-25 2000-05-25 投影装置

Publications (2)

Publication Number Publication Date
JP2001337389A true JP2001337389A (ja) 2001-12-07
JP2001337389A5 JP2001337389A5 (enExample) 2007-06-28

Family

ID=18659577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000154492A Pending JP2001337389A (ja) 2000-05-25 2000-05-25 投影装置

Country Status (1)

Country Link
JP (1) JP2001337389A (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450970A (ja) * 1990-06-15 1992-02-19 Canon Inc 画像形成装置
JPH0627028A (ja) * 1992-07-08 1994-02-04 Canon Inc 表面状態検査装置
JPH07159336A (ja) * 1993-12-07 1995-06-23 Canon Inc 表面状態検査装置及びそれを用いた露光装置
JPH11287949A (ja) * 1998-04-02 1999-10-19 Canon Inc 偏心結像光学系

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450970A (ja) * 1990-06-15 1992-02-19 Canon Inc 画像形成装置
JPH0627028A (ja) * 1992-07-08 1994-02-04 Canon Inc 表面状態検査装置
JPH07159336A (ja) * 1993-12-07 1995-06-23 Canon Inc 表面状態検査装置及びそれを用いた露光装置
JPH11287949A (ja) * 1998-04-02 1999-10-19 Canon Inc 偏心結像光学系

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