JP2001337389A5 - - Google Patents

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Publication number
JP2001337389A5
JP2001337389A5 JP2000154492A JP2000154492A JP2001337389A5 JP 2001337389 A5 JP2001337389 A5 JP 2001337389A5 JP 2000154492 A JP2000154492 A JP 2000154492A JP 2000154492 A JP2000154492 A JP 2000154492A JP 2001337389 A5 JP2001337389 A5 JP 2001337389A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000154492A
Other languages
Japanese (ja)
Other versions
JP2001337389A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000154492A priority Critical patent/JP2001337389A/ja
Priority claimed from JP2000154492A external-priority patent/JP2001337389A/ja
Publication of JP2001337389A publication Critical patent/JP2001337389A/ja
Publication of JP2001337389A5 publication Critical patent/JP2001337389A5/ja
Pending legal-status Critical Current

Links

JP2000154492A 2000-05-25 2000-05-25 投影装置 Pending JP2001337389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000154492A JP2001337389A (ja) 2000-05-25 2000-05-25 投影装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000154492A JP2001337389A (ja) 2000-05-25 2000-05-25 投影装置

Publications (2)

Publication Number Publication Date
JP2001337389A JP2001337389A (ja) 2001-12-07
JP2001337389A5 true JP2001337389A5 (enExample) 2007-06-28

Family

ID=18659577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000154492A Pending JP2001337389A (ja) 2000-05-25 2000-05-25 投影装置

Country Status (1)

Country Link
JP (1) JP2001337389A (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450970A (ja) * 1990-06-15 1992-02-19 Canon Inc 画像形成装置
JP3099535B2 (ja) * 1992-07-08 2000-10-16 キヤノン株式会社 表面状態検査装置
JPH07159336A (ja) * 1993-12-07 1995-06-23 Canon Inc 表面状態検査装置及びそれを用いた露光装置
JPH11287949A (ja) * 1998-04-02 1999-10-19 Canon Inc 偏心結像光学系

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