JP2001335755A - Method for manufacturing base coated with thin sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To precisely manufacture a base coated with a thin sheet without straining and distorting this sheet and without staining the base with excess adhesive. SOLUTION: A platen 21 having a flat surface 21a is placed and fixed on a chuck 20. A thin sheet glass 11 is allowed to adhere to the flat surface 21a of the platen 21, and an adhesive 12 is dropped on to the thin sheet glass 11. Then, a base 13 is placed on the adhesive 12, and the chuck 20 is rotated to diffuse the adhesive 12 between the thin sheet glass 11 and the base 13. Thus, the base coated with the sheet can be manufactured. Since the thin sheet glass 11 is placed on the flat surface 21 of the platen 21 all the time, this sheet glass 11 is neither strained nor distorted. Further, since the adhesive 12 between the thin sheet glass 11 and the base 13 is diffused by the rotation of the chuck 20 to outwardly discharge excess adhesive, the base 13 is never stained with excess adhesive 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of bonding a thin plate such as thin glass to a functional substrate having an optical film or the like bonded thereto via an adhesive, and thus manufacturing a substrate covered with the thin plate. About.

[0002]

2. Description of the Related Art Conventionally, a method of manufacturing a substrate covered with a thin plate is disclosed in Japanese Patent Application No. 10-340275. According to the method for manufacturing a substrate disclosed in Japanese Patent Application Laid-Open No. H10-340275, a substrate covered with a thin plate can be manufactured.

[0003]

According to the prior art as described above, it is possible to manufacture a substrate covered with a thin plate.
However, the sheet may be distorted during the manufacture of the substrate.

[0004] It is an object of the present invention to provide a method of manufacturing a substrate coated with a thin plate, which can accurately manufacture a substrate coated with the thin plate without warping or distorting the thin plate.

[0005]

SUMMARY OF THE INVENTION According to the present invention, there is provided a step of placing and fixing a platen having a flat surface on a rotatable chuck with the flat surface facing upward, and bringing the thin plate into close contact with the flat surface of the platen. A step of dropping a liquid adhesive on the thin plate, a step of placing the substrate on the adhesive, and a step of rotating the chuck to diffuse the adhesive between the thin plate and the substrate. A method for producing a substrate covered with a thin plate.

According to the present invention, the thin plate is adhered to the flat surface of the platen, so that the thin plate is not warped or bent during the production of the substrate covered with the thin plate. In addition, the rotation of the chuck allows the adhesive between the thin plate and the substrate to be diffused, so that the substrate is not contaminated by excess adhesive.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 7 are views showing a method of manufacturing a substrate covered with a thin plate according to the present invention.

1 to 7, a platen 21 (AL glass: manufactured by Asahi Glass Co., Ltd., having a thermal expansion coefficient of 37 × 10 ⁻⁷ ) having a flat upper surface (flat surface) 21 a on a rotatable chuck 20.
/ ° C, thickness 6.35 mm, 150 mm square, flatness 5 μm
(See FIG. 1). The chuck 20 has a vacuum suction function, and fixes the surface plate 21 by suction.

The chuck 20 is rotated as desired, and a stopper 22 is provided on the outer edge of the upper surface.

Next, the platen 21 is placed on the flat surface 21 of the platen 21.
Thinner glass 11 (AF45: manufactured by Shott Co., Ltd., thermal expansion coefficient 45 × 10 ⁻⁷ / ° C., thickness 50 μm, 30
(mm square) (see FIG. 7).

In this case, the thin glass 11 may be placed on the flat surface 21 of the platen 21 in advance, and then the platen 21 may be placed and fixed on the chuck 21.

The surface plate 21 has a flat surface 21a.
Since the platen 21 has the flat surface 21a, the thin glass 1
1 can be maintained, and the substrate glass 11 is not distorted when manufacturing a substrate covered with a thin plate. Further, as described later, during the rotation of the chuck 20, an uneven force is not applied from the platen 21 to the thin glass 11 side.

When the thin glass 11 is placed on the flat surface 21a of the surface plate 21, one thin glass 11 may be placed or a plurality of thin glasses 11 may be placed.

When the flat surface 21a of the surface plate 21 has a sufficient flatness, reliable vacuum adhesion can be performed between the flat surface 21a and the thin glass 11, but blow air 28 is blown against the thin plate 11. (FIG. 6).

That is, as shown in FIG.
Is covered with a hood 25, and blow air 28 is blown into the hood 25. The blow air 28 in the hood 25 is then discharged outward from the exhaust pipe 26 through the adhesive separation box 27. By blowing the blow air 28 into the hood 25 in this manner, the thin plate 11 is placed on the flat surface 21a of the surface plate 21.
Can be surely brought into close contact.

Further, in order to enhance the adhesion between the flat surface 21a of the surface plate 21 and the thin glass plate 21, a suitable amount of a volatile organic solvent may be applied onto the surface plate 21. The platen 21 and the thin glass 11 are both cleaned and used.
When the thin glass 11 is placed on the flat surface 21, the glass 11 is placed on a clean bench having a high degree of cleanliness in a clean room so that foreign matter or the like is not mixed between the surface plate 21 and the thin glass 11. Is also good.

By placing the thin glass 11 on the flat surface 21a of the surface plate 21 as described above, even if the thin glass 11 itself has some bending, the bending is corrected by the flat surface 21a of the surface plate 21. Is done.

Next, the adhesive 12 is dropped from the dispenser 23 onto the thin glass 11 placed and adhered on the flat surface 21a of the surface plate 21 (FIG. 1). The adhesive 12 is supplied to the dispenser 23 from a liquid feed tank (not shown) whose temperature is adjusted. The drop amount of the adhesive 12 can be controlled by opening and closing the electrolytic valve.

Next, as shown in FIG. 2, the substrate 13 is placed on the adhesive 12 dropped on the thin glass 11. As such a substrate 13, soda glass is used.
By mounting the substrate 13, the adhesive 12 between the thin glass 11 and the substrate 13 spreads outward.

Next, as shown in FIG. 3, the chuck 20 is rotated at a high speed. In this case, the thin glass 11 and the substrate 13
The adhesive 12 dropped between them spreads out to the outer periphery, and part of the adhesive 12 is released to the outside. Along with this, the thickness of the adhesive 12 decreases. The adhesive 12 released from between the thin glass 11 and the substrate 13 is removed from the exhaust pipe 26 shown in FIG. The substrate 13
Is held by the stopper 22, the substrate 13 does not shift on the surface plate 20 during the rotation of the chuck 20.

As described above, since the adhesive 12 between the thin glass 11 and the substrate 13 can be discharged outward by centrifugal force, the substrate 13 is not contaminated by the excess adhesive 12. Further, the thickness of the adhesive 12 between the thin glass 11 and the substrate 13 is adjusted by appropriately selecting the number of rotations of the chuck 20, the rotation time, and the viscosity of the adhesive 12.

When an ionizing radiation-curable adhesive is used as the adhesive 12, the adhesive 12 between the thin glass 11 and the substrate 13 is irradiated with ionizing radiation (ultraviolet light or electron beam). To cure.

Thus, the thin glass 11 and the substrate 13
And a substrate covered with a thin plate.

Thereafter, the thin glass 11 and the substrate 13 are peeled off from the surface plate 21 using a peeling spatula 30 (FIG. 5).
(a) (b) (c)). In this case, the blown air 28 (see FIG. 6) is used in place of the separation spatula 30, and the thin glass 11 is used.
And the substrate 13 may be separated from the surface plate 21. Further, by applying a repair agent (not shown) on the flat surface 21a of the platen 21, the thin glass 11 and the substrate 13 can be easily separated.

As described above, according to the present embodiment, a substrate covered with a substrate can be reliably manufactured without the thin glass 11 being distorted and the substrate 13 not being stained by the extra adhesive 12. be able to.

[0026]

As described above, according to the present invention, a substrate coated with a thin plate can be manufactured with high precision without distorting or distorting the thin plate and without staining the substrate with excess adhesive. be able to.

[Brief description of the drawings]

FIG. 1 is a process chart showing a method for producing a substrate covered with a thin plate according to the present invention.

FIG. 2 is a process chart showing a method for producing a substrate covered with a thin plate according to the present invention.

FIG. 3 is a process chart showing a method for producing a substrate covered with a thin plate according to the present invention.

FIG. 4 is a plan view showing a surface plate and a substrate.

FIG. 5 is a view showing a step of removing a substrate covered with a thin plate from a surface plate.

FIG. 6 is a diagram showing a state in which blow air is blown into a hood.

FIG. 7 is a diagram showing a state where thin glass is placed on a surface plate.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Thin glass 12 Adhesive 13 Substrate 20 Chuck 21 Surface plate 22 Stopper

Claims (5)

[Claims] 1. A step of mounting and fixing a platen having a flat surface on a rotatable chuck with the flat surface facing upward, a step of bringing a thin plate into close contact with the flat surface of the platen, and bonding a liquid to the thin plate. A step of dropping an agent, a step of placing the substrate on the adhesive, and a step of rotating the chuck to diffuse the adhesive between the thin plate and the substrate. Manufacturing method of the substrate. 2. The method according to claim 1, further comprising the step of: after the adhesive between the thin plate and the substrate is diffused, curing the adhesive between the thin plate and the substrate. Manufacturing method of the substrate. 3. The substrate coated with a thin plate according to claim 2, wherein the adhesive comprises an ionizing radiation curable adhesive, and wherein the step of curing the adhesive cures the adhesive by irradiation with ionizing radiation. Manufacturing method. 4. The method according to claim 1, further comprising a step of applying a repair agent to the flat surface of the surface plate, and thereafter removing the thin plate and the substrate from the flat surface of the surface plate. Substrate manufacturing method. 5. The method for producing a substrate covered with a thin plate according to claim 1, wherein a plurality of thin plates are adhered to a flat surface of the platen.