JP2001334931A5 - - Google Patents
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- Publication number
- JP2001334931A5 JP2001334931A5 JP2001076978A JP2001076978A JP2001334931A5 JP 2001334931 A5 JP2001334931 A5 JP 2001334931A5 JP 2001076978 A JP2001076978 A JP 2001076978A JP 2001076978 A JP2001076978 A JP 2001076978A JP 2001334931 A5 JP2001334931 A5 JP 2001334931A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP00810296 | 2000-04-04 | ||
| EP00112472.6 | 2000-06-10 | ||
| EP20000112472 EP1143487A1 (de) | 2000-04-04 | 2000-06-10 | Linearführung mit einem Luftlager |
| EP00810296.4 | 2000-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001334931A JP2001334931A (ja) | 2001-12-04 |
| JP2001334931A5 true JP2001334931A5 (enExample) | 2008-03-06 |
Family
ID=26071036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001076978A Pending JP2001334931A (ja) | 2000-04-04 | 2001-03-16 | 空気ベアリングを備えたリニアガイド装置 |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP1143487A1 (enExample) |
| JP (1) | JP2001334931A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007007247B4 (de) * | 2007-02-14 | 2015-04-16 | Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH | Anordnung und Verfahren zur Verhinderung der Wärmeleitung zwischen einer Wärmequelle und einer temperatursensiblen Baugruppe |
| JP7048136B1 (ja) | 2021-11-01 | 2022-04-05 | 啓太 遠藤 | 運搬システム、及び運搬台車 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62228963A (ja) * | 1986-03-31 | 1987-10-07 | キヤノン株式会社 | 移動ステ−ジ |
| JPH07106053B2 (ja) * | 1988-01-26 | 1995-11-13 | 株式会社安川電機 | リニア移動装置 |
| ATE128791T1 (de) * | 1988-02-26 | 1995-10-15 | Esec Sa | Verfahren und einrichtung zum bestücken von metallenen systemträgern mit elektronischen komponenten. |
| JP3141490B2 (ja) * | 1992-01-30 | 2001-03-05 | 株式会社ニコン | 移動ステージ装置 |
| JPH05318275A (ja) * | 1992-05-19 | 1993-12-03 | Canon Inc | 切削具の支持構造 |
| EP0597052B1 (de) * | 1992-06-03 | 1996-04-17 | Esec Sa | Transportroboter für eine bearbeitungs- bzw. behandlungslinie für systemträger |
| JPH084766A (ja) * | 1994-06-15 | 1996-01-09 | Nikon Corp | エアベアリング装置 |
| JPH11190339A (ja) * | 1997-12-25 | 1999-07-13 | Kyocera Corp | 静圧流体軸受 |
| JP2000028344A (ja) * | 1998-07-13 | 2000-01-28 | Nippon Seiko Kk | 位置決めテーブル |
-
2000
- 2000-06-10 EP EP20000112472 patent/EP1143487A1/de not_active Withdrawn
-
2001
- 2001-03-16 JP JP2001076978A patent/JP2001334931A/ja active Pending