JP2001334931A - 空気ベアリングを備えたリニアガイド装置 - Google Patents

空気ベアリングを備えたリニアガイド装置

Info

Publication number
JP2001334931A
JP2001334931A JP2001076978A JP2001076978A JP2001334931A JP 2001334931 A JP2001334931 A JP 2001334931A JP 2001076978 A JP2001076978 A JP 2001076978A JP 2001076978 A JP2001076978 A JP 2001076978A JP 2001334931 A JP2001334931 A JP 2001334931A
Authority
JP
Japan
Prior art keywords
linear guide
support member
guide device
transporter
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001076978A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001334931A5 (https=
Inventor
Urs Probst
ウルス・プロブスト
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Besi Switzerland AG
Original Assignee
Esec Trading AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Esec Trading AG filed Critical Esec Trading AG
Publication of JP2001334931A publication Critical patent/JP2001334931A/ja
Publication of JP2001334931A5 publication Critical patent/JP2001334931A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0446—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Die Bonding (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP2001076978A 2000-04-04 2001-03-16 空気ベアリングを備えたリニアガイド装置 Pending JP2001334931A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP00810296 2000-04-04
EP20000112472 EP1143487A1 (de) 2000-04-04 2000-06-10 Linearführung mit einem Luftlager
EP00810296.4 2000-06-10
EP00112472.6 2000-06-10

Publications (2)

Publication Number Publication Date
JP2001334931A true JP2001334931A (ja) 2001-12-04
JP2001334931A5 JP2001334931A5 (https=) 2008-03-06

Family

ID=26071036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001076978A Pending JP2001334931A (ja) 2000-04-04 2001-03-16 空気ベアリングを備えたリニアガイド装置

Country Status (2)

Country Link
EP (1) EP1143487A1 (https=)
JP (1) JP2001334931A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7048136B1 (ja) 2021-11-01 2022-04-05 啓太 遠藤 運搬システム、及び運搬台車

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007007247B4 (de) * 2007-02-14 2015-04-16 Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH Anordnung und Verfahren zur Verhinderung der Wärmeleitung zwischen einer Wärmequelle und einer temperatursensiblen Baugruppe

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62228963A (ja) * 1986-03-31 1987-10-07 キヤノン株式会社 移動ステ−ジ
JPH01194847A (ja) * 1988-01-26 1989-08-04 Yaskawa Electric Mfg Co Ltd リニア移動装置
JPH05209664A (ja) * 1992-01-30 1993-08-20 Nikon Corp 移動ステージ装置
JPH05318275A (ja) * 1992-05-19 1993-12-03 Canon Inc 切削具の支持構造
JPH084766A (ja) * 1994-06-15 1996-01-09 Nikon Corp エアベアリング装置
JP2000028344A (ja) * 1998-07-13 2000-01-28 Nippon Seiko Kk 位置決めテーブル

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE58909457D1 (de) * 1988-02-26 1995-11-09 Esec Sa Verfahren und Einrichtung zum Bestücken von metallenen Systemträgern mit elektronischen Komponenten.
WO1993024953A1 (de) * 1992-06-03 1993-12-09 Esec S.A. Transportroboter für eine bearbeitungs- bzw. behandlungslinie für systemträger
JPH11190339A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 静圧流体軸受

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62228963A (ja) * 1986-03-31 1987-10-07 キヤノン株式会社 移動ステ−ジ
JPH01194847A (ja) * 1988-01-26 1989-08-04 Yaskawa Electric Mfg Co Ltd リニア移動装置
JPH05209664A (ja) * 1992-01-30 1993-08-20 Nikon Corp 移動ステージ装置
JPH05318275A (ja) * 1992-05-19 1993-12-03 Canon Inc 切削具の支持構造
JPH084766A (ja) * 1994-06-15 1996-01-09 Nikon Corp エアベアリング装置
JP2000028344A (ja) * 1998-07-13 2000-01-28 Nippon Seiko Kk 位置決めテーブル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7048136B1 (ja) 2021-11-01 2022-04-05 啓太 遠藤 運搬システム、及び運搬台車
JP2023067327A (ja) * 2021-11-01 2023-05-16 啓太 遠藤 運搬システム、及び運搬台車

Also Published As

Publication number Publication date
EP1143487A1 (de) 2001-10-10

Similar Documents

Publication Publication Date Title
CN213437686U (zh) 芯片上料及共晶焊头系统
US8384253B2 (en) Positioning system for positioning a positioning unit along a longitudinal axis
US6571461B2 (en) Linear guide with an air bearing having provision for heating a support element of the linear guide to maintain fluid gap
KR19990029525A (ko) 접합체를 기판에 적용시키기 위한 반도체 실장기
CN212461620U (zh) 高精度智能共晶贴装设备
CN114078724A (zh) 芯片贴装装置及半导体器件的制造方法
JP2001334931A (ja) 空気ベアリングを備えたリニアガイド装置
WO2005020658A1 (en) Linear driving mechanism of electronic components mounting apparatus
US7120995B2 (en) Apparatus for mounting semiconductors
CN118315324B (zh) 一种多吸头芯片运输设备
EP1143489A1 (en) Linear guide with an air bearing
JP2004349697A (ja) 半導体の実装装置
US20230096476A1 (en) Linear motion device and electronic component mounting device
JP2705785B2 (ja) ステージ装置
CN100490623C (zh) 装配系统和为基底配备电气零部件的方法
KR102865183B1 (ko) 다이 본딩 스테이지
JP2022032960A (ja) ダイボンディング装置および半導体装置の製造方法
JPH02225857A (ja) ボールネジ装置
JP2005347690A (ja) 部品保持装置
JP2899250B2 (ja) 半導体製造装置
JP7602308B2 (ja) 圧電振動デバイス製造装置及び圧電振動デバイスの製造方法
EP4654253A2 (en) Stage device, charged particle beam apparatus, and vacuum device
JP2003115503A (ja) 高温処理部品の調整組立装置
KR20190027357A (ko) 본딩 시스템
CN118658826A (zh) 半导体制造装置、头部工作台以及半导体器件的制造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080122

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080122

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20080627

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100831

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110208