JP2001324459A5 - - Google Patents
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- JP2001324459A5 JP2001324459A5 JP2000148583A JP2000148583A JP2001324459A5 JP 2001324459 A5 JP2001324459 A5 JP 2001324459A5 JP 2000148583 A JP2000148583 A JP 2000148583A JP 2000148583 A JP2000148583 A JP 2000148583A JP 2001324459 A5 JP2001324459 A5 JP 2001324459A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000148583A JP4505946B2 (ja) | 2000-05-16 | 2000-05-16 | 荷電粒子線装置およびプローブ制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000148583A JP4505946B2 (ja) | 2000-05-16 | 2000-05-16 | 荷電粒子線装置およびプローブ制御方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001324459A JP2001324459A (ja) | 2001-11-22 |
| JP2001324459A5 true JP2001324459A5 (enExample) | 2006-09-07 |
| JP4505946B2 JP4505946B2 (ja) | 2010-07-21 |
Family
ID=18654586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000148583A Expired - Lifetime JP4505946B2 (ja) | 2000-05-16 | 2000-05-16 | 荷電粒子線装置およびプローブ制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4505946B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009277953A (ja) * | 2008-05-16 | 2009-11-26 | Hitachi High-Technologies Corp | 測定方法および検査装置 |
| DE102010010937A1 (de) * | 2009-10-26 | 2011-04-28 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren und Vorrichtung zur Herstellung einer Fresnel-Zonenplatte |
| WO2013132024A2 (en) | 2012-03-08 | 2013-09-12 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Method of producing a fresnel zone plate for applications in high energy radiation |
| KR102383571B1 (ko) * | 2014-06-30 | 2022-04-06 | 가부시키가이샤 히다치 하이테크 사이언스 | 자동 시료 제작 장치 |
| US12169208B2 (en) | 2021-11-30 | 2024-12-17 | Innovatum Instruments Inc. | Probe tip X-Y location identification using a charged particle beam |
| US12306241B2 (en) | 2022-02-14 | 2025-05-20 | Innovatum Instruments Inc. | Automated probe landing |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2708547B2 (ja) * | 1989-05-10 | 1998-02-04 | 株式会社日立製作所 | デバイス移植方法 |
| JP3577839B2 (ja) * | 1996-06-04 | 2004-10-20 | 株式会社日立製作所 | 不良検査方法および装置 |
| EP0927880A4 (en) * | 1997-07-22 | 2010-11-17 | Hitachi Ltd | METHOD AND DEVICE FOR PREPARING SAMPLES |
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2000
- 2000-05-16 JP JP2000148583A patent/JP4505946B2/ja not_active Expired - Lifetime