JP2001301353A - Mask for printing and manufacturing method for the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mask for printing having an inner wall surface of an opening including good plate removability of a paste and water repellency and a method for manufacturing the same. SOLUTION: A coating film 6 is formed of a water repellency treating agent 9 obtained by dissolving a fluororesin made of a perfluoro(4-vinyloxy-1-butene) polymer in a dilute liquid made of a tris(perfluorobutyl)amine on the inner wall surface 1c of the opening 1a of the mask for printing. Thus, a slip of the paste 4 on the surface 1c of the opening 1a of the mask 1 is increased. A shearing stress of the paste 4 to the surface 1c is decreased. Thus, the plate removability of the paste 4 filled in the opening 1a becomes good, and a printing quality of the paste 4 on a material 2 to be printed can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printing mask and a method of manufacturing the same, and more particularly, to printing a bump or an electronic device by printing a cream solder, a silver paste, a gold paste, a Cr paste, etc. on a printed circuit board or a silicon wafer. The present invention relates to a printing mask having openings formed of a predetermined printing pattern for forming circuits and the like, and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, a method of printing cream solder, silver paste, gold paste, Cr paste, or a paste-like resin (hereinafter, referred to as "paste") on a printing substrate such as a printed circuit board or a silicon wafer. As
A printing mask in which an opening made of a predetermined printing pattern is formed in a printing mask material is arranged to face a printing medium, and after the paste is filled in the opening of the printing mask, the printing mask is moved to the printing medium. There is known a method of printing the paste filled in the opening through the opening of the printing mask on the printing medium by peeling the paste from the printing mask. As a printing mask used for such paste printing, a metal mask using a so-called metal plate such as stainless steel, copper, copper alloy or iron, steel, nickel or an electroformed product of these alloys as a printing mask material, For printing, PMMA (thermoplastic acrylic resin), PC (polycarbonate), PS (polystyrene), PSF (polysulfone), PET (polyethylene terephthalate), polyethylene, polypropylene, UV cured acrylic resin, polyphenylene sulfide (PPS), etc. A plastic mask or the like as a mask material is used. Further, as is well known, the printing mask is manufactured by an etching method, an additive method, a punch press process, a thermal process using a YAG laser, a non-thermal process (ablation process) using an excimer laser, or the like. In addition, a half-etching process may be performed on a printing mask in which a fine opening is perforated.

FIGS. 5 (a), 5 (b) and 5 (c) show a process of printing a paste on a printing medium using the printing mask. First, as shown in FIG. 5 (a), a printing mask 1 in which an opening 1a having a predetermined printing pattern is formed in a printing mask material such as the metal plate or the plastic plate is arranged to face a printing medium 2. I do. Next, as shown in FIG. 5B, the paste 4 is squeezed with a squeegee 3 made of, for example, a rubber blade or the like, so as to fill the opening 1a of the printing mask 1 with the paste 4. After this, FIG.
As shown in (c), the printing mask 1 is peeled from the printing medium 2. Thereby, the opening 1a of the printing mask 1 is formed.
The paste 4 filled therein is printed on the printing medium 2 through the opening 1a.

The printing quality of the paste 4 printed on the printing medium 2 using such a printing mask 1 is shown in FIG.
The presence or absence of the seepage of the paste 4 filled in the opening 1a of the printing mask 1 into the opening peripheral part 1b as shown in FIG.
This depends on whether the paste 4 from a. The presence or absence of the seepage of the paste 4 into the opening peripheral portion 1b depends on the presence or absence of a gap between the printing mask 1 and the printing medium 2. Is greatly affected by the water repellency (surface energy) of the opposing surface. Whether the paste 4 can be removed from the opening 1a of the printing mask 1 is determined by the smoothness (surface roughness) and the wettability (water repellency) of the inner wall surface 1c of the opening 1a in the printing mask 1. It is known to be greatly affected.

That is, in this type of printing mask 1, the higher the water repellency (surface energy) of the surface facing the printing medium 2, the more the volume of the paste 4 attached to the surface is changed by the surface energy. Since the paste 4 tends to be small, the infiltration of the paste 4 into the gap between the printing mask 1 and the printing medium 2 by capillary action is prevented, and the paste 4
Bleeding into the opening peripheral portion 1b is reduced,
The printing quality of the paste 4 on the substrate is improved. On the other hand, when the printing mask 1 is peeled off from the printing medium 2, the paste 4 is removed from the opening 1 a of the printing mask 1 through the opening 1 a.
a, the tacking force (adhesive force) of the paste 4 filled in the inner surface 1 a of the paste 4 with the inner wall surface 1 c of the opening 1 a.
This is caused by the fact that the shear stress becomes larger than the shear stress generated between them. Therefore, in the printing mask 1, the smoothness of the inner wall surface 1 c of the opening 1 a is high (the surface roughness is small), and the wettability of the inner wall surface 1 c with the paste 4 is low (high water repellency). The slip between the inner wall surface 1c and the paste 4 becomes larger, the shear stress between the inner wall surface 1c and the paste 4 becomes smaller, and the plate 4 is removed from the opening 1a of the printing mask 1. And the print quality of the paste 4 on the printing medium 2 is improved.

[0006]

However, in the conventional printing mask, for example, the metal mask,
Although it differs depending on the processing method, the smoothness of the inner wall surface of the opening is reduced (the surface roughness is increased), and shear stress generated between the inner wall surface and the paste causes the paste to be applied to the printing medium by the paste. In some cases, the tacking force (adhesive force) was greater than the tacking force (adhesive force), and the paste removal property of the paste from the opening of the metal mask was sometimes deteriorated. Further, in the plastic mask, for example, the wettability of the inner wall surface is increased (water repellency is increased) by surface modification (exposing the functional group of the resin) of the inner wall surface of the opening accompanying ablation processing such as excimer laser. Is reduced), the shear stress between the inner wall surface and the paste becomes
In some cases, the tacking force (adhesive force) of the paste to a printing medium was larger than that of the paste, and the paste removal property of the paste from the opening of the plastic mask was sometimes reduced.

For this reason, in the conventional printing mask of this type, the paste is not printed on the printing medium and the opening is clogged due to the decrease in the removability of the paste from the opening as described above. In addition, the paste becomes thin in the form of a string, and falls into an adjacent printing portion, thereby causing unnecessary contact, thereby causing a problem that the printing quality of the paste on a printing medium is deteriorated. Further, in this type of conventional printing mask, no effective measure has been taken against the seepage of the paste filled in the opening into the periphery of the opening.

In order to increase the water repellency of the inner wall surface of the opening of such a printing mask, there is a method of plating the inner wall surface with nickel Teflon (registered trademark) composite plating. In this printing mask, in the initial state after the plating treatment, as shown in FIG. 6A, the opening 1a is formed by the Teflon particles 5 plated so as to cover the inner wall surface 1c of the opening 1a. The inner wall surface 1c has a high water repellency. However, since the Teflon particles 5 are relatively soft, as is well known, in this printing mask, paste printing as shown in FIGS. 5A, 5B and 5C is repeatedly performed. The inner wall surface 1
As shown in FIG. 6 (b), the Teflon particles 5 plated on the inner wall 1c of the opening 1a are worn or detached, and the smoothness (surface) of the inner wall 1c of the opening 1a is reduced. (Roughness) rather deteriorates, and the printability of the paste deteriorates.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a printing mask having an inner wall surface of an opening, which has good releasability to a paste and good water repellency, and a method of manufacturing the same. It is to be.

[0010]

According to a first aspect of the present invention, there is provided a printing mask in which an opening having a predetermined printing pattern is formed in a printing mask material, the printing mask being opposed to a printing medium. Then, after filling the paste into the opening of the printing mask, by peeling the printing mask from the printing medium, the paste filled into the opening through the opening of the printing mask on the printing medium. A printing mask for printing, wherein a fluororesin composed of a perfluoro (4-vinyloxy-1-butene) polymer is diluted with a diluting liquid composed of tris (perfluorobutyl) amine on an inner wall surface of an opening of the printing mask. The coating film is formed with the dissolved water repellent agent.

In this printing mask, a perfluoro (4-vinyloxy-1-butene) polymer is coated on the inner wall surface of the opening of the printing mask with a water-repellent treating agent in which tris (perfluorobutyl) amine is dissolved. Is formed. This water repellent agent has a water contact angle of 1
It has a high water repellency of 10 (deg) (details will be described later). Therefore, since the coating film made of the water repellent agent is formed on the inner wall surface of the opening of the printing mask, the inner wall surface has high smoothness (low surface roughness).
And the wettability of the inner wall surface with respect to the paste becomes low (the water repellency becomes high). Thereby, in this printing mask, the slip between the inner wall surface of the opening and the paste is increased, the shear stress between the inner wall surface and the paste is reduced, and the paste of the paste from the opening of the printing mask is reduced. As a result, the printing quality of the paste on the printing medium is improved.

According to a second aspect of the present invention, in the printing mask of the first aspect, the coating film is also formed on a surface of the printing mask that faces the printing medium. .

As described above, the presence or absence of the seepage of the paste filled in the opening of the printing mask into the periphery of the opening depends on the water repellency (surface energy) of the surface of the printing mask facing the printing object. ). In other words, if the surface of the printing mask facing the object to be printed is in a highly water-repellent surface state, the volume of the paste attached to the facing surface tends to be reduced by the surface energy, so that the printing mask and the The infiltration of the paste into the gap between the paste and the printing medium by capillary action is prevented, and the seepage of the paste into the periphery of the opening is reduced. Therefore, in this printing mask, the coating film is also formed on the surface of the printing mask facing the printing medium. As a result, the water repellency (surface energy) of the surface of the printing mask facing the printing medium is increased, the bleeding of the paste into the peripheral portion of the opening is reduced, and the printing quality of the paste on the printing medium is reduced. Be improved.

According to a third aspect of the present invention, in the printing mask according to the first or second aspect, the coating film is also formed on a surface of the printing mask that is not opposed to a printing medium. Things.

The surface of this type of printing mask that is not opposed to the printing medium, that is, the surface on which the paste is squeezed by the squeegee, has a certain degree to prevent the paste from slipping during the squeegee. It is said that it is preferable to have wettability. However, when the paste is not affected by the state of the non-facing surface of the printing mask and the printing medium, or in a state where the printing medium and the printing mask are superimposed,
In a case where the filling member for filling the paste is used to press-fit the paste into the opening of the printing mask to fill the paste, the paste attached to the non-opposite surface is removed smoothly. It is preferable that the non-facing surface of the printing mask not facing the printing medium is a surface having a high water repellency to the paste and a large slip. Therefore,
In this printing mask, the coating film is formed also on the surface of the printing mask that is not opposed to the printing medium. Thereby, the water repellency of the non-facing surface of the printing mask with respect to the printing medium with respect to the paste is improved, and squeezing of the paste and removal of the paste adhered to the facing surface can be easily performed.

According to a fourth aspect of the present invention, there is provided the method for manufacturing a printing mask according to the first aspect, wherein a protective film is laminated on a front surface and a back surface of the printing mask material, and the predetermined mask is formed on the printing mask material. Forming an opening made of a printed pattern of the above, and forming the coating film on at least the inner wall surface of the opening while the protective film remains laminated, and then removing the protective film. is there.

In this method of manufacturing a printing mask,
First, a protective film is laminated on the front and back surfaces of the printing mask material. Next, in this state, an opening made of the predetermined printing pattern is formed in the printing mask material.
Then, the coating film is formed on at least the inner wall surface of the opening while the protective film remains laminated. Thereafter, the protective film is removed. This prevents the water-repellent treatment agent from adhering to the front and back surfaces of the printing mask material, so that a printing mask having a coating film formed only on the inner wall surface of the opening of the printing mask material is compared. It can be easily manufactured.

According to a fifth aspect of the present invention, there is provided the method for manufacturing a printing mask according to the second aspect, wherein a protective film is laminated on a surface of the printing mask material that is not opposed to the printing medium, and the printing mask is formed. An opening made of the predetermined printing pattern is formed in the mask material for printing, and the protective film is left laminated, and at least the inner wall surface of the opening and the surface of the mask material for printing opposite to the printing medium. After forming the coating film, the protective film is removed.

In this method of manufacturing a printing mask,
First, a protective film is laminated on the surface of the printing mask material that does not face the printing medium. Next, in this state, an opening made of the predetermined printing pattern is formed in the printing mask material. Then, the coating film is formed on at least the inner wall surface of the opening and the surface of the printing mask material facing the printing medium while the protective film remains laminated. Thereafter, the protective film is removed. This allows
Since the adhesion of the water repellent treatment agent to the non-facing surface of the printing mask material with respect to the printing material is prevented, the inner wall surface of the opening of the printing mask material and the printing material of the printing mask material are prevented. It is possible to relatively easily manufacture a printing mask having a coating film formed only on the surface facing the substrate.

According to a sixth aspect of the present invention, there is provided a method of manufacturing a printing mask according to the first, second or third aspect, wherein the printing mask is formed of a plastic mask, and the printing mask is provided with a coating film forming surface. After irradiating the ultraviolet laser light, the coating film is formed by applying the water repellent treatment agent to the coating film forming surface irradiated with the ultraviolet laser light.

When the printing mask is formed of a plastic mask, the method of forming a coating film by simply applying the water repellent treatment agent (Cytop) to the coating film forming surface of the printing mask is not used. The water-repellent agent is repelled from the surface on which the coating film is formed, making it very difficult to form a coating film. Also, temporarily,
Even when a coating film can be formed by simply applying a water-repellent agent to the coating film forming surface, the adhesion of the coating film to the coating film forming surface is reduced. Incidentally, according to the rubbing test (described later in detail) performed by the present inventor, the coating film formed simply by application was easily peeled off. This is probably because the water repellent treatment agent itself has high water repellency. Therefore, in this method of manufacturing a printing mask,
After the surface of the plastic mask on which the coating film is formed is irradiated with ultraviolet laser light, the surface of the coating film on which the ultraviolet laser light is irradiated is coated with the above-mentioned water repellent agent to form a coating film. As a result, the amorphous fluorine-based resin is extremely firmly fixed to the coating film forming surface of the plastic mask, and a coating film having high water repellency and high fixing power is formed on the coating film forming surface. As described above, the reason why the amorphous fluororesin is extremely firmly fixed to the coating film forming surface is as follows.
Irradiation of the coating film forming surface with the ultraviolet laser light is considered to be due to modification of the surface of the plastic mask on which the ultraviolet laser light is irradiated and generation of a new functional group on the coating film forming surface. . As the ultraviolet laser light applied to the surface to be processed in the laser light irradiation step, for example, excimer laser light that oscillates high-intensity pulsed light in the ultraviolet region on the surface to be processed of plastic can be used. Excimer laser light can easily modify the surface to be processed of the plastic by ablation (direct etching). The excimer laser beam has a larger beam shape than other laser beams such as helium / neon laser, argon or krypton ion laser, and YAG laser. Since irradiation can be performed, a large-area surface to be processed can be easily modified.

According to a seventh aspect of the present invention, in the method for manufacturing a printing mask according to the sixth aspect, isopropyl alcohol is applied to the surface of the coating film on which the ultraviolet laser beam has been irradiated, and then the isopropyl alcohol is applied. The present invention is characterized in that the coating film is formed by applying the above-mentioned water repellent treatment agent on a film forming surface.

In this method of manufacturing a printing mask,
Prior to applying the water repellent treatment agent to the coating film forming surface of the plastic mask, isopropyl alcohol (IPA) is applied to the coating film forming surface of the plastic mask irradiated with the ultraviolet laser light. As a result, the adhesion of the amorphous fluorine-based resin to the coating film forming surface is increased, and the adhesion of the coating film formed on the plastic mask is improved. This is because isopropyl alcohol (IPA) is applied to the coating film forming surface, and the cleaning action of the isopropyl alcohol (IPA) causes the surface of the plastic mask to be irradiated with ultraviolet laser light (coating film forming surface).
It is considered that a binder component (impurity) which adheres to the surface and reduces a fixing force between the amorphous fluorine-based resin and the surface on which the coating film is formed is removed.

According to an eighth aspect of the present invention, in the method for manufacturing a printing mask according to the sixth or seventh aspect, the concentration of the water-repellent treatment agent applied to the surface on which the coating film is formed is 0.1 to 1%. It is a feature.

In this method of manufacturing a printing mask,
Since the concentration of the water repellent is 0.1 to 1%, the water repellency of the coating film formed on the plastic mask is improved. By the way, since it is difficult to fix water droplets on the coating film formed using the water repellent agent of the concentration, it shows super water repellency enough to make it impossible to accurately measure the contact angle of the water droplet with respect to the coating film. Was.

According to a ninth aspect of the present invention, in the method for manufacturing a printing mask according to the sixth, seventh or eighth aspect, the water-repellent agent applied to the surface on which the coating film is formed is dried at room temperature. is there.

In this method of manufacturing a printing mask,
Since the water-repellent agent applied to the coating film forming surface of the plastic mask is dried at room temperature, deformation and deterioration of dimensional accuracy due to the thermal influence of the plastic mask caused when the water-repellent agent is heated and dried. Can be prevented. Accordingly, when the water repellent treatment agent applied to the coating film forming surface of the plastic mask is dried, the print pattern (opening) of the plastic mask is not deformed by the influence of heat, and a plastic mask having high printing accuracy can be obtained. can get.

According to a tenth aspect of the present invention, in the method for manufacturing a printing mask according to the sixth, seventh, eighth or ninth aspect, the water-repellent agent applied to the coating film forming surface is formed on the surface of the coating film forming surface. It is characterized by being charged to a polarity opposite to the polarity of the charge.

In this method of manufacturing a printing mask,
A water-repellent agent is applied to the coating film forming surface of the plastic mask by electrostatic fixing force. As a method of charging the water-repellent treatment agent, for example, a method of spraying the atomized (mist-formed) water-repellent treatment agent in a predetermined electric field atmosphere can be used.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a printing mask to which the present invention is applied will be described. As shown in FIG. 1, the printing mask 1 according to the present embodiment
The coating film 6 is formed on the inner wall surface 1c of the opening 1a. Here, the coating film 6 is coated with a water-repellent treatment agent in which an amorphous fluororesin made of a perfluoro (4-vinyloxy-1-butene) polymer is dissolved in a diluent made of tris (perfluorobutyl) amine. It is formed by drying.

The above perfluoro (4-vinyloxy-1)
-Butene) The polymer has a glass transition temperature (° C.) of 108, no melting point (° C.), a density (g / cm ² ) of 2.03, a critical surface tension rc (mN / m) of 19, and a water absorption (%) of 0.1. 01, durometer hardness HDD78, coefficient of linear expansion (cm
/ Cm / ° C.) is an amorphous fluororesin having physical properties such as 7.4 × 10 ⁻⁵ (chemical formula; (C ₆ F ₁₀₎
O) n, chemical name: fluororesin, Chemical Substances Control Law number 6-209
2, Cas number 101182-89-2). The water-repellent agent is obtained by mixing the amorphous fluorine-based resin with the diluent;
Tris (perfluorobutyl) amine (chemical formula; (C ₄
F ₉ ) ₃ N, chemical name; TFPA, Chemical Substances Control Law number 2-17
3, Cas No. 311-89-7).

This water repellent agent is commercially available as CYTOP (trade name) manufactured by Asahi Glass Co., Ltd., and has a high water repellency of 110 (deg) at a contact angle of water.
Therefore, by applying the water-repellent treatment agent to the inner wall surface 1c of the opening 1a of the printing mask 1 to form the coating film 6, the inner wall surface 1c has high smoothness (low surface roughness),
In addition, the printing mask 1 having low wettability (high water repellency) of the inner wall surface 1c with the paste can be obtained. In the printing mask 1, the slip between the inner wall surface 1c of the opening 1a and the paste 4 is large, and the shear stress between the inner wall surface 1c and the paste 4 is reduced. As a result, the printing quality of the paste 4 on the printing medium 2 can be improved.

As shown in FIG. 5D, the paste 4 filled in the opening 1a of the printing mask 1 is used.
Is oozing into the opening peripheral portion 1b due to the capillary phenomenon at the time of peeling (pulling up) of the printing mask 1 depends on the surface (here, the lower surface in this case) of the printing mask 1 facing the printing medium 2. It is greatly affected by water repellency (surface energy).
In other words, when the surface of the printing mask 1 facing the printing medium 2 is in a surface state having high water repellency, the volume of the paste 4 attached to the facing surface tends to be reduced by the surface energy. Thereby, the printing mask 1 and the printing medium 2
The infiltration of the paste by the capillary phenomenon into the gap between the paste 4 is prevented, and the seepage of the paste 4 into the opening peripheral portion 1b is reduced. Also, when the printing mask 1 is peeled off (at the time of lifting).
Further, the phenomenon that the filled paste 4 is forcibly pulled out from the opening 1a can be prevented.

Therefore, as shown in FIG. 2, the printing mask 1 has an inner wall surface 1c of the opening 1a and a surface (here, a lower surface) of the printing mask 1 facing the printing medium 2, as shown in FIG. Alternatively, the coating film 6 may be formed. The printing mask 1 has a high water repellency (surface energy) on the surface facing the printing medium 2 and the paste 4
Of the paste 4 on the printing medium 2 can be improved.

On the other hand, the surface of the printing mask 1 of this type which is not opposed to the printing medium 2, that is, the surface on which the paste 4 is squeezed by the squeegee 3 as shown in FIG. It is stated that the upper surface) preferably has a certain degree of wettability in order to prevent the paste 4 from slipping during the squeegee. However, when the paste 4 is not affected by the state of the non-facing surface (upper surface) of the printing mask 1 with respect to the printing medium 2, the paste 4 attached to the non-facing surface is not affected. In order to facilitate the removal of the paste, it is desirable that the non-facing surface of the printing mask 1 facing the printing medium 2 is a surface having a high water repellency to the paste 4 and a large slip. In this way, by making the non-facing surface of the printing mask 1 facing the printing medium 2 a surface having high water repellency to the paste 4 and a large slip, the present inventors have proposed Japanese Patent Application No. 10-92316. As shown in the figure, the paste 4 is pressed into the opening 1a of the printing mask 1 by a filling member (squeegee) for filling the paste 4 in a state where the printing medium 2 and the printing mask 1 are overlapped. It is possible to improve the slip of the squeegee at the time of squeegeeing when filling is performed.

Therefore, as shown in FIG. 3 (a), the printing mask 1 is formed by a non-contact between the inner wall surface 1c of the opening 1a of the printing mask 1 and the printing medium 2 of the printing mask 1. The coating film 6 is formed on the opposing surface (upper surface), or, as shown in FIG. 3B, the inner wall surface 1c of the opening 1a of the printing mask 1 and the printing mask 1 The coating film 6 may be formed on a surface (lower surface) facing the printing medium 2 and a non-facing surface (upper surface) of the printing mask 1 on the printing material 2. In the printing mask 1, the water repellency of the non-facing surface of the printing mask 1 with respect to the printing medium to the paste 4 is improved. It becomes possible to easily remove the adhered paste 4 and squeeze.

Next, a method of manufacturing the printing mask 1 shown in FIG. 1 will be described. To manufacture the printing mask 1, first, as shown in FIG. 4A, protective films 7, 8 made of a resin film or the like are formed on the front surface (upper surface) and the back surface (lower surface) of the printing mask material 1A. Is laminated. Then
While the protective films 7 and 8 remain laminated, the openings 1a having a predetermined print pattern are formed in the print mask material 1A as shown in FIG. 4B. Then, with the protective films 7 and 8 being laminated,
As shown in FIG. 4C, the water-repellent treatment agent (Cytop) 9 is coated so as to cover the inner wall surface 1c of the opening 1a, and at least the coating film 6 is coated on the inner wall surface 1c of the opening 1a. To form Thereafter, as shown in FIG. 4D, the protective films 7, 8 laminated on the front surface (upper surface) and the back surface (lower surface) of the printing mask material 1A are removed. This prevents the water-repellent agent 9 from adhering to the front surface (upper surface) and the back surface (lower surface) of the printing mask material 1A, so that only the inner wall surface 1c of the opening 1a of the printing mask material 1A is prevented. Coating film 6 made of the water repellent agent 9
The printing mask 1 as shown in FIG. 1 on which is formed is manufactured.

Here, in the step shown in FIG. 4B, the protective film 7 is laminated only on the non-facing surface (here, the upper surface) of the printing mask material 1A with the printing medium 2. By performing the steps shown in FIGS. 4C and 4D, the adhesion of the water-repellent treatment agent 9 to the non-facing surface (upper surface) of the printing mask material 1A with respect to the printing medium 2 is reduced. The inner surface 1c of the opening 1a of the printing mask material 1A and the surface (lower surface) of the printing mask material 1A opposed to the printing medium 2 are prevented.
Only in this case, the printing mask 1 as shown in FIG. 2 in which the coating film 6 made of the water repellent agent 9 is formed can be manufactured.

Further, in the step shown in FIG.
If the protective film 8 is laminated only on the surface (here, the lower surface) of the printing mask material 1A facing the printing medium 2 and the steps shown in FIGS. 4C and 4D are performed. The adhesion of the water-repellent treatment agent 9 to the surface (lower surface) of the printing mask material 1A facing the printing medium 2 is prevented, so that the inner wall surface 1c of the opening 1a of the printing mask material 1A and The printing mask 1 as shown in FIG. 3A in which the coating film 6 made of the water-repellent agent 9 is formed only on the non-facing surface (upper surface) of the printing mask material 1A with respect to the printing medium 2. Can be manufactured.

Further, in the step shown in FIG.
Without laminating the protective films 7 and 8 on both the front surface (upper surface) and the back surface (lower surface) of the printing mask material 1A,
If the steps shown in FIGS. 4C and 4D are performed, the inner wall surface 1c of the opening 1a of the printing mask material 1A and the non-facing surface of the printing mask material 1A against the printing medium 2 ( A printing mask 1 as shown in FIG. 3B in which a coating film 6 made of the water-repellent agent 9 is formed on the upper surface) and the opposite surface (lower surface) is manufactured.

Here, the protective films 7 and 8 are kept until the printing mask material 1A is peeled off from the printing mask material 1A.
It also has a function of preventing the front or back surface of the printing mask material 1A from being scratched or adhering dust or the like at the time of transport or processing.

On the other hand, the printing cell shown in FIG.
When coating the water repellent agent 9 on the wood material 1A,
Depending on the material of the printing mask material 1A, the silane coupling
Pre-treatment such as coating agent treatment and primer treatment,
The adhesion of the water repellent agent 9 to the printing mask material 1A
It is preferable to provide. For example, the printing mask material
When the material of 1A is glass, the above silane coupling is used.
Priming agent for plastics
Preferably, a treatment is performed. The printing mask material
If the material of 1A is metal, no special pretreatment is required.
However, silane coupling agent treatment similar to glass is also available.
It is effective. Here, the silane coupling agent treatment is
For example, concentration using ethanol or water as a diluent solvent
= 0.05-1% silane coupling agent: H₂NC₃
H ₆Si (OC₂H₅)₃For example, the above printing mask material
1A is immersed for 1 to 30 minutes, cure = 30 minutes × 180 ° C.
Thereafter, a process of washing with ethanol is performed. In addition, the above ply
The mer treatment is performed, for example, by diluting (0.1 to 1 wt%)
This is a curing process using a limer. Where
When the material of the printing mask material 1A is a thermosetting resin
Requires a corona discharge treatment or the like in advance.

The method of drying after coating the water repellent agent 9 is as follows: when the drying time is 1 hour, when the film thickness after drying is 0.5 μm or less, the temperature is 80 ° C. or more; 120 ° C. or more when the film thickness is about 1 μm, 140 ° C. or more when the film thickness after drying is about 3 μm, and 150 ° C. or more (preferably 180 ° C.) when the film thickness after drying is 5 μm or more.
℃), the drying condition is a standard. In particular, the film thickness after drying is 2
Drying conditions when the surface is required to be smooth at a temperature of 50 ° C. for 0.5 hour (or more),
The time (to 180 ° C.) is preferably 180 ° C. for 1 hour. Further, the method of coating the water repellent treatment agent 9 includes spin coating and spraying when the film thickness of the coating film 6 is 10 μm or less, dip coating (immersion pulling) when the film thickness is 1 μm or less, When the film thickness is 1 to 20 μm, potting (dropping) is suitable.

When the printing mask 1 is made of a plastic mask, the coating film is formed by simply applying the water-repellent treatment agent (Cytop) to the coating film forming surface of the plastic mask. In the method, the water-repellent agent is repelled from the surface on which the coating film is formed, which makes it very difficult to form a coating film. Also, even if the coating film could be formed by simply applying the water repellent treatment agent to the coating film forming surface,
The adhesion of the coating film to the coating film forming surface is reduced. Incidentally, according to the rubbing test (described later in detail) performed by the present inventor, the coating film formed simply by application was easily peeled off.
This is probably because, as described above, a commercially available water repellent treatment agent (Cytop) itself has high water repellency.

Therefore, as a method of manufacturing the printing mask 1, the surface of the plastic mask on which the coating film is formed is irradiated with ultraviolet laser light, and the surface of the coating film on which the ultraviolet laser light is irradiated is subjected to the water repellent treatment. It is preferable to form a coating film by applying an agent. That is, after irradiating the coating film forming surface of the plastic mask with ultraviolet laser light, and applying the water repellent treatment agent to the coating film forming surface irradiated with the ultraviolet laser light, the amorphous fluorine-based resin becomes a plastic. The coating film is extremely firmly fixed to the coating film forming surface of the mask, and a coating film having high water repellency and high fixing power is formed on the coating film forming surface. As described above, the reason why the amorphous fluorine-based resin is extremely firmly fixed to the coating film forming surface is that the coating film forming surface is irradiated with the ultraviolet laser light so that the ultraviolet ray irradiating portion of the plastic mask is irradiated. It is considered that the surface is modified and a new functional group is generated on the surface on which the coating film is formed.

FIG. 7 shows that, as described above, after irradiating the ultraviolet laser light, the above-mentioned water repellent is applied and dried on the coating film forming surface irradiated with the ultraviolet laser light to form a coating film. An example of a water-repellent treatment method will be described. In this water repellent treatment method, a laser beam irradiation step and a water repellent treatment agent applying step are sequentially performed. First, in the laser beam irradiation step, as shown in FIG. 7A, an ultraviolet ray is applied to a coating film forming surface 10a of a plastic mask 10 made of a plastic material such as PET or polyimide to be subjected to a water-repellent treatment. The laser beam 20 is irradiated. in this way,
Coating film forming surface 10a of plastic mask 10
When the ultraviolet laser light 20 is irradiated on the surface, the surface of the ultraviolet laser light irradiated portion (plastic surface) of the plastic mask 10 is modified, and a new functional group is generated on the coating film forming surface 10a. It should be noted that irradiation of ultraviolet laser light modifies the surface of a plastic ultraviolet laser light irradiation portion to generate a new functional group. Lazaré et al. (S. Lazare and R. Sriniv)
asan, Journal of Physical
Chemistry, Vol. 90, p. 2124 (1
986). ).

Next, in the step of applying the water-repellent treatment agent, as shown in FIG. 7B, the surface of the plastic mask 10 whose surface has been modified by being irradiated with ultraviolet laser light in the laser light irradiation step is formed. A water-repellent agent 30 is applied to 10a. The water repellent 30 applied to the coating film forming surface 10a in the water repellent applying step
Is used as described above.

Next, the coating film forming surface 10a of the plastic mask 10 is applied in the water repellent treatment agent application step.
The water-repellent treatment agent 30 applied on the substrate is dried in the water-repellent treatment agent drying step. Thereby, the plastic mask 10
The amorphous fluororesin is extremely firmly fixed to the coating film forming surface 10a by the action of the functional group generated on the coating film forming surface 10a of FIG.
As shown in (1), a coating film 40 having high water repellency and high fixing force is formed on the coating film forming surface 10a of the plastic mask 10.

Here, as the ultraviolet laser light 20 used in the laser light irradiation step, the surface of the ultraviolet laser light irradiation portion of the plastic mask 10 is modified by the irradiation to form a new functional group on the coating film forming surface 10a. Any material may be used as long as it generates the light. For example, excimer laser light can be used. The excimer laser light oscillating the high intensity pulse light in the ultraviolet region is applied to a coating film forming surface 10 of a plastic mask 10 made of plastic.
By irradiating the surface a, the coating film forming surface 10a of the plastic mask 10 can be easily surface-modified by ablation (direct etching). The excimer laser beam has a larger beam shape than other laser beams such as a helium-neon laser, an argon or krypton ion laser, and a YAG laser. 1
Since 0a can be irradiated, it is possible to easily modify the coating film formation surface 10a having a large area.

The method of applying the water-repellent treatment agent 30 to the coating film forming surface 10a of the plastic mask 10 in the above-described water-repellent treatment agent application step is as follows. how to,
(2) A method of brush-coating the plastic mask 10 with the water-repellent agent 30 and (3) a method of applying the water-repellent agent 30 to the plastic mask 10 by electrostatic coating can be used. In the application method of applying the electrostatic coating of the above (3), the water-repellent treatment agent 30 applied to the coating film forming surface 10a of the plastic mask 10 is opposite to the polarity of the surface charge of the coating film forming surface 10a. By being charged to the polarity, the water repellent agent 30 is applied to the coating film forming surface 10a of the plastic mask 10 by electrostatic adhesion. The water repellent agent 3
As a method of charging 0, for example, as shown in Japanese Patent Application No. 10-131089 proposed by the present inventor, the water-repellent agent atomized (misted) is sprayed in a predetermined electric field atmosphere. A method can be used.

The water-repellent agent 30 applied to the coating film forming surface 10a of the plastic mask 10 in the above-described water-repellent agent drying step is naturally dried or blow-treated by blowing air onto the coating film-forming surface 10a of the plastic mask 10. Dried. At this time, it is desirable to dry the water repellent agent 30 at room temperature. That is, when the plastic mask 10 has thermoplasticity, the water repellent treatment agent 30 applied to the coating film forming surface 10a of the plastic mask 10 is heated and dried, so that the plastic mask 10 is affected by heat during drying. The mask 10 may be deformed. Therefore, in the case of such a work, by deforming the water repellent agent 30 at normal temperature, it is possible to prevent the work from being deformed due to the influence of heat. Drying the water-repellent agent 30 at room temperature in this manner requires the
This is particularly effective when performing a water-repellent treatment on a printing mask in which a printing pattern (opening) is likely to be deformed by thermal influence.

Next, another water-repellent treatment method for forming a coating film by applying and drying a water-repellent treatment agent on the plastic mask 10 will be described. In this water repellent treatment method, a laser beam irradiation step shown in FIG.
An IPA application step shown in (b), a water-repellent treatment agent application step shown in FIG. 8C, and a water-repellent treatment agent drying step shown in FIG. 8D are sequentially performed. Here, the laser beam irradiation step, the water-repellent treatment agent applying step, and the water-repellent treatment agent drying step are illustrated in FIG.
This is the same as each step shown in (b) and (c). That is, in this water repellent treatment method for a plastic mask, FIG.
After the laser irradiation step shown in FIG.
Prior to the execution of the water-repellent treatment agent application step shown in FIG. 8C, as shown in FIG. 8B, isopropyl alcohol (I) is formed on the coating film forming surface 10a of the plastic mask 10.
An IPA application step of applying PA) 50 is performed.

As described above, prior to the application of the water-repellent treatment agent 30 to the coating film forming surface 10a of the plastic mask 10, the above-described IPA coating process is performed, so that isopropyl alcohol is applied to the coating film forming surface 10a of the plastic mask 10. By applying 50, the adhesion of the amorphous fluororesin to the coating film forming surface 10a of the plastic mask 10 is increased, and the adhesion of the coating film 40 formed on the plastic mask 10 (plastic surface) is improved. . This is because the isopropyl alcohol 50 is applied to the coating film forming surface 10a of the plastic mask 10 and adheres to the coating film forming surface 10a of the plastic mask 10 due to the cleaning action of the isopropyl alcohol 50 to form the amorphous fluorine-based material. Binder component (impurity) that lowers the adhesion between resin and coating film forming surface 10a
Is considered to be due to the removal of

Table 1 shows the results of a test performed to examine the water repellency and adhesion of the coating film 40 formed on the coating film forming surface 10a of the plastic mask 10 by the above-described water repellent treatment method. In this test, PET was used as a material of the plastic mask 10. The water repellency of the coating film 40 is represented by the contact angle of a water droplet with respect to the coating film forming surface 10a of the plastic mask 10, and the adhesion of the coating film 40 is measured by a peel test for peeling off the adhesive tape attached to the coating film 40. After a predetermined number of rubbing tests were performed to rub the coating film 40 with a cloth at a predetermined pressure, the contact angles were compared and examined.

[0055]

[Table 1]

In Table 1, Comparative Example 1 is a test result in the case where the coating film forming surface 10a of the plastic mask 10 was not irradiated with the ultraviolet laser beam 20, and the isopropyl alcohol 50 and the water repellent 30 were not applied. So,
The water repellent angle in this case was 75 degrees at the maximum. In Comparative Example 2, the coating film-forming surface 10a of the plastic mask 10 was not irradiated with the ultraviolet laser light 20 and the isopropyl alcohol 50 was not applied.
4 is a test result when ski wax is applied,
The water repellent angle in this case was 104 degrees at the maximum. Comparative Example 3
Is the coating film forming surface 1 of the plastic mask 10
Irradiation of the ultraviolet laser beam 20 to the laser beam 0a and application of the isopropyl alcohol 50 to the coating film forming surface 10a were not performed.
Is a test result in the case of carbon coating. The water repellent angle in this case was 87 degrees at the maximum. In Comparative Example 4, the coating film forming surface 10a of the plastic mask 10 was irradiated with the ultraviolet laser light 20 and the isopropyl alcohol 50 was irradiated.
Is a test result when a CYTOP solution (0.5% C solution) having a concentration of 0.5% is applied as a water repellent agent 30 by doppling without applying the water repellent agent 30. The angle was up to 107 degrees. Comparative Example 5 is a plastic mask 1
0 laser beam 20 on the coating film forming surface 10a
Irradiation, without applying isopropyl alcohol 50,
This is a test result when a CYTOP solution having a concentration of 0.5% was applied as a water repellent agent 30 by brush coating, and the maximum water repellent angle in this case was 108 degrees. In Comparative Example 6, irradiation of an ultraviolet laser beam 20 onto the coating film forming surface 10a of the plastic mask 10 and isopropyl alcohol 5
0, and a concentration of 0.5% as a water-repellent treatment agent 30 was applied on the carbon-coated coating film forming surface 10a.
Is a test result when the CYTOP liquid was applied by doppling, and the water repellent angle in this case was 112 degrees at the maximum. In Comparative Example 7, the coating film forming surface 10a of the plastic mask 10 was not irradiated with the ultraviolet laser beam 20 and the isopropyl alcohol 50 was not applied, and the water-repellent treatment agent 30 was applied on the carbon-coated coating film forming surface 10a.
Is a test result when a CYTOP solution having a concentration of 0.5% was applied by brushing, and the water repellent angle in this case was 116 degrees at the maximum. Comparative Example 8 shows a coating film forming surface 10 of a carbon-coated plastic mask 10.
This is a test result in the case where the maximum beam of the ultraviolet laser beam 20 was irradiated to the sample a and the application of the isopropyl alcohol 50 was not performed. Comparative Example 9 is a carbon-coated plastic mask 10
This is a test result in a case where the coating film forming surface 10a is irradiated with the ultraviolet laser beam 20 without scanning, and the isopropyl alcohol 50 is not applied. Possible (up to about 10 degrees).

On the other hand, in the case of the work on which the coating film 40 was formed by the water-repellent treatment method of the present invention, the water-repellent angle was 150 to 180 degrees, and exhibited extremely high water-repellent property and fixability. For example, as shown in Example 1 of Table 1,
Coating film forming surface 10a of plastic mask 10
After irradiating the maximum beam of the ultraviolet laser light 20 to the water repellent agent 3 without applying isopropyl alcohol 50,
In the test results when the CYTOP solution having a concentration of 0.5% was applied by electrostatic coating as 0, the water repellency angle after 10 times of the tape peeling test showed a high water repellency and a high fixability of 122 degrees at the maximum. . Further, as in the second embodiment, the ultraviolet laser light 20 is applied to the coating film forming surface 10a of the plastic mask 10.
After irradiating the maximum beam of isopropyl alcohol 5
0, and a water repellent treatment agent 30 having a concentration of 0.5
% Of the CYTOP solution was applied by electrostatic coating, the water repellent angle after 20 rubbing tests was 118 at the maximum.
Degree. In the third embodiment, after irradiating the maximum beam of the ultraviolet laser beam 20 to the coating film forming surface 10a of the plastic mask 10, the isopropyl alcohol 50 is not applied, and the concentration of the water repellent agent 30 is 0.5%. This is a test result in a case where the CYTOP solution was applied by doppling and a rubbing test was performed 20 times, and the water repellent angle in this case was 102 degrees at the maximum. In the fourth embodiment, the ultraviolet laser light 2 is applied to the coating film forming surface 10a of the plastic mask 10.
After irradiating the maximum beam of 0, the isopropyl alcohol 50 is not applied, and the concentration of the water repellent agent 30 is set to 0.1.
The test results were obtained by applying a 5% CYTOP solution by brushing and performing a rubbing test 20 times. In this case, the water repellent angle was 110 degrees at the maximum. In the fifth embodiment, the coating film forming surface 10a of the plastic mask 10 is scanned and irradiated with ultraviolet laser light 20, and the coating film forming surface 10a of the plastic mask 10 is coated with isopropyl alcohol 50. A 0.5% CYTOP solution is applied by electrostatic coating.
This is a test result when the rubbing test was performed 00 times, and the water repellent angle in this case was 90 degrees at the maximum.

On the other hand, in the sixth embodiment, the plastic mask 1
The coating film-forming surface 10a of the plastic mask 10 is irradiated with an ultraviolet laser beam 20 by scanning irradiation.
Is a test result when a Cytop solution having a concentration of 0.1% is applied as a water repellent agent 30 by electrostatic coating, and a rubbing test is performed 20 times. In this case, water drops are repelled from the coating film 40 and the coating film 4 is removed.
It was in a completely water-repellent state such that the contact angle of a water drop with respect to 0 could not be measured accurately.

[0059]

According to the first to third aspects of the present invention, it is possible to provide a printing mask having a high printing quality of the paste on a printing medium having a good printing property of the paste from the opening of the printing mask. Has an effect.

In particular, according to the second aspect of the present invention, the water repellency (surface energy) of the surface of the printing mask opposed to the printing medium.
Therefore, there is an excellent effect that it is possible to provide a printing mask having a high printing quality of the paste on the printing medium, in which the bleeding of the paste into the peripheral portion of the opening is also reduced.

According to the third aspect of the present invention, there is provided an excellent effect that a printing mask capable of easily removing and squeezing paste adhered to a surface of the printing mask that is not opposed to the printing medium can be provided. is there.

According to the fourth aspect of the present invention, the printing mask according to the first aspect, in which a coating film made of a water repellent is formed only on the inner wall surface of the opening of the printing mask, is relatively easily manufactured. There is an excellent effect that it can be done.

According to the fifth aspect of the present invention, a coating film made of a water-repellent agent is formed only on the inner wall surface of the opening of the printing mask and the surface of the printing mask facing the object to be printed. There is an excellent effect that the printing mask described in 2 can be manufactured relatively easily.

According to the present invention, the surface of the plastic mask on which the coating film is formed is modified by the irradiation of the ultraviolet laser beam, and a new functional group is generated on the coating film forming surface. There is an excellent effect that a coating film made of an amorphous fluorine-based resin having high water repellency and adhesion can be formed on the mask.

In particular, according to the seventh aspect of the present invention, isopropyl alcohol (IPA) is applied to the surface of the plastic mask, on which the ultraviolet laser light has been irradiated, before applying the water repellent agent. There is an excellent effect that the adhesion of the amorphous fluorine-based resin to the coating film forming surface is increased, and the adhesion of the coating film formed on the plastic mask is improved.

According to the invention of claim 8, since the concentration of the water-repellent treatment agent is 0.1 to 1%, the contact angle of the water droplet with respect to the coating film formed on the plastic mask cannot be measured accurately. Indeed, there is an excellent effect that the water repellency of the coating film can be improved.

According to the ninth aspect of the present invention, since the water-repellent agent applied to the surface of the plastic mask on which the coating film is formed is dried at room temperature, the water-repellent agent is dried when heated. There is an excellent effect that deformation of the plastic mask due to the influence of heat can be prevented.

Further, according to the tenth aspect of the present invention, there is an excellent effect that the water repellent agent can be applied to the surface of the plastic mask on which the coating film is formed by the electrostatic fixing force.

[Brief description of the drawings]

FIG. 1 is an enlarged sectional view of a main part showing a schematic configuration of a printing mask according to an embodiment.

FIG. 2 is an enlarged sectional view of a main part showing a schematic configuration of a printing mask according to another embodiment.

FIGS. 3A and 3B are main-part enlarged cross-sectional views illustrating a schematic configuration of a printing mask according to still another embodiment.

FIGS. 4A, 4B, 4C, and 4D are schematic process diagrams for explaining a process of manufacturing the printing mask.

FIGS. 5A, 5B, 5C, and 5D are schematic process diagrams for explaining a process of printing a paste on a printing medium using the printing mask.

FIGS. 6A and 6B are enlarged cross-sectional views of a main part for describing a conventional method for improving the water repellency of the inner wall surface of the opening of the printing mask.

FIG. 7A is a schematic view showing a laser beam irradiation step in the method for treating a plastic mask for water repellency according to the present invention.
(B) is a schematic diagram showing a water-repellent treatment agent application step in the water-repellent treatment method. (C) is a schematic diagram showing a water-repellent treatment agent drying step in the water-repellent treatment method.

FIG. 8A is a schematic view showing a laser beam irradiation step in another water repellent treatment method of the plastic mask according to the present invention. (B) is a schematic diagram showing an IPA application step in the water repellent treatment method. (C) is a schematic diagram showing a water-repellent treatment agent application step in the water-repellent treatment method. (D) is a schematic diagram showing a water-repellent treatment agent drying step in the water-repellent treatment method.

[Explanation of symbols]

 Reference Signs List 1 printing mask 1a opening of printing mask 1b peripheral edge of opening of printing mask 1c inner wall surface of opening of printing mask 1A printing mask material 2 substrate to be printed 3 squeegee 4 paste 6 coating film 7,8 protective film 9 repellency Water treatment agent 10 Plastic mask 10a Coating film forming surface of plastic mask 20 Ultraviolet laser beam 30 Water repellent agent 40 Coating film 50 Isopropyl alcohol

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H05K 3/34 505 H05K 3/34 505D F-term (Reference) 2C035 FF22 2H084 AA30 AA36 AA40 BB04 BB13 BB20 CC09 2H114 AB09 AB15 AB17 BA01 DA32 DA41 DA49 EA02 EA04 FA14 GA34 GA35 GA36 GA38 5E319 BB05 CD29 5E343 BB23 BB25 BB38 BB72 FF12 GG08

Claims (10)

[Claims] 1. A printing mask in which an opening formed of a predetermined printing pattern is formed in a printing mask material, facing a printing medium, and a paste is filled in the opening of the printing mask. A printing mask for printing, on an object to be printed, paste filled in the opening through the opening of the printing mask by peeling the mask from the object to be printed. , Perfluoro (4
A printing mask, wherein a coating film is formed with a water-repellent agent obtained by dissolving a fluorine-based resin composed of a (vinyloxy-1-butene) polymer in a diluent composed of tris (perfluorobutyl) amine. 2. The printing mask according to claim 1, wherein the coating film is also formed on a surface of the printing mask opposite to a printing medium. 3. The printing mask according to claim 1, wherein the coating film is also formed on a surface of the printing mask that is not opposed to a printing medium. 4. The method of manufacturing a printing mask according to claim 1, wherein a protective film is laminated on the front and back surfaces of the printing mask material, and the printing mask material comprises the predetermined printing pattern. A method for manufacturing a printing mask, comprising: forming an opening, forming the coating film on at least the inner wall surface of the opening in a state where the protective film is laminated, and removing the protective film. 5. The method for manufacturing a printing mask according to claim 2, wherein a protective film is laminated on a surface of the printing mask material that is not opposed to the printing medium, and the printing mask material is provided on the printing mask material. An opening having a predetermined print pattern was formed, and the coating film was formed on at least the inner wall surface of the opening and the surface of the mask material for printing opposite to the printing object while the protective film was left laminated. Then, the method for manufacturing a printing mask, comprising removing the protective film. 6. The method of manufacturing a printing mask according to claim 1, wherein the printing mask is formed of a plastic mask, and the coating film forming surface of the printing mask is irradiated with ultraviolet laser light. And then applying the water-repellent treatment agent to the surface of the coating film on which the ultraviolet laser light has been irradiated to form the coating film. 7. The method of manufacturing a printing mask according to claim 6, wherein isopropyl alcohol is applied to the coating film forming surface irradiated with the ultraviolet laser light, and then the isopropyl alcohol is applied to the coating film forming surface. A method for manufacturing a printing mask, comprising forming a coating film by applying a water repellent agent. 8. The method for manufacturing a printing mask according to claim 6, wherein the concentration of the water-repellent treatment agent applied to the surface on which the coating film is formed is 0.1 to 1%. Manufacturing method of mask. 9. The method for manufacturing a printing mask according to claim 6, wherein the water repellent agent applied to the coating film forming surface is dried at room temperature. 10. The method for manufacturing a printing mask according to claim 6, 7, 8 or 9, wherein the water repellent treatment agent applied to the coating film forming surface is:
A method for manufacturing a printing mask, wherein the surface of the coating film is charged with a polarity opposite to the polarity of the surface charge.