JP2001251871A - Electrostatic actuator and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrostatic actuator which is capable of cost reduction and has high precision of electrode pitch. SOLUTION: In this electrostatic actuator, which has insulating layers interposed between a first electrode and a first electrode assembled wiring, there are installed a second electrode and a second electrode assembled wiring, a third electrode and a third electrode assembled wiring, and the second electrode assembled wiring and the third electrode assembled wiring, junction parts between the electrodes and the electrode assembled wirings.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic actuator powered by electrostatic force.

[0002]

2. Description of the Related Art An electrostatic actuator has a first electrode, a second electrode,
Since the electrode and the third electrode are formed on the same plane, a multi-layered structure must be used for managing the collective wiring. Generally, a manufacturing method of forming a multilayer structure by providing a via hole,
Japanese Patent Application Laid-Open No. 7-255185 proposes a method of forming a multilayer through an adhesive layer and an insulating layer.

[0003]

However, the manufacturing method of forming a multilayer structure by providing via holes increases the cost because the manufacturing process is complicated. In addition, the manufacturing method of forming a multilayer structure through an insulating layer can reduce the cost because the manufacturing process is relatively simple. However, as a first step, the first electrode, the first electrode collective wiring, and the second After forming the electrodes and the second electrode collective wiring at the same time, an insulating layer is formed on the second electrode collective wiring as a second step, and a third electrode and a third electrode collective wiring are formed as a third step In such a case, misalignment between the first electrode and the third electrode and between the second electrode and the third electrode is likely to occur. I will. In addition, the step of providing the adhesive layer becomes extra.

The present invention has been made to solve the above problems, and an object of the present invention is to provide an electrostatic actuator which can be manufactured at a low cost and has a high electrode pitch accuracy.

[0005]

According to the first aspect of the present invention, there is provided a first electrode, a first electrode collective wiring, a second electrode, a second electrode collective wiring, and a third electrode. An electrostatic actuator having an insulating layer interposed between the first and third electrode collective wirings and the second and third electrode collective wirings, wherein a junction between the electrodes and the electrode collective wirings is provided. And Specifically, the first electrode, the second electrode, and the third electrode, which require high alignment accuracy, are formed simultaneously using a single mask or the like, and an electrode assembly having relatively rough alignment accuracy is provided. By forming and joining the wiring in a separate process, it is possible to increase the precision of the electrode pitch, increase the degree of freedom in selecting the electrode material and the electrode thickness, and improve the characteristics of the electrostatic actuator.

According to another aspect of the present invention, a land portion is provided at a connection portion between an electrode and an electrode assembly wiring. This facilitates the alignment between the electrode and the electrode assembly wiring.

According to a third aspect of the present invention, there is provided a semiconductor device comprising: a connecting portion between an electrode and an electrode assembly wiring;
It is characterized in that the line width of the electrode assembly line is smaller than the line width of the electrode. This facilitates the alignment between the electrode and the electrode assembly wiring.

A fourth aspect of the present invention, which has been made to achieve the above object, specifically shows a manufacturing process of the electrostatic actuator according to the present invention. As a first step, a first electrode and a second electrode are used. And a third electrode at the same time, forming a first electrode collective wiring and a second electrode collective wiring as a second step, forming an insulating layer on the second electrode collective wiring as a third step, As a fourth step, a third electrode assembly line is formed. As a result, the electrode pitch can be made more precise, the degree of freedom in selecting the electrode material and the electrode thickness can be increased, and the improvement of the characteristics of the electrostatic actuator can be expected.

A fifth aspect of the present invention, which has been made to achieve the above object, specifically shows a manufacturing process of the electrostatic actuator according to the present invention. Forming a second electrode and a third electrode, forming a second electrode collective wiring as a second step, forming an insulating layer on the second electrode collective wiring as a third step, and forming a fourth step It is characterized in that a first electrode collective line and a third electrode collective line are formed. As a result, the electrode pitch can be made more precise, the degree of freedom in selecting the electrode material and the electrode thickness can be increased, and the improvement of the characteristics of the electrostatic actuator can be expected.

A sixth aspect of the present invention, which has been made to achieve the above object, specifically shows a manufacturing process of the electrostatic actuator according to the present invention, wherein a first electrode and a second electrode are used as a first step. And forming a third electrode and a second electrode collective line, forming an insulating layer on the second electrode collective line as a second step, and forming the first electrode collective line and the third electrode collective line as a third step. It is characterized by forming. As a result, the electrode pitch can be made more precise, the degree of freedom in selecting the electrode material and the electrode thickness can be increased, and the improvement of the characteristics of the electrostatic actuator can be expected.

The invention of claim 7 for achieving the above object specifically shows a manufacturing process of the electrostatic actuator according to the present invention, wherein a first electrode and a second electrode are used as a first step. And forming a third electrode, a first electrode collective line, and a second electrode collective line, forming an insulating layer on the second electrode collective line as a second step, and forming a third electrode collective line as a third step. It is characterized by forming. As a result, the electrode pitch can be made more precise, the degree of freedom in selecting the electrode material and the electrode thickness can be increased, and the improvement of the characteristics of the electrostatic actuator can be expected.

The invention according to claim 8 for achieving the above object specifically shows a manufacturing process of the electrostatic actuator of the present invention. As a first process, a second electrode assembly wiring is formed. Then, as a second step, an insulating layer is formed on the second electrode collective wiring, and as a third step, the first electrode, the first electrode collective wiring, the second electrode, the third electrode, and the third electrode collective line Is formed. As a result, the electrode pitch can be made more precise, the degree of freedom in selecting the electrode material and the electrode thickness can be increased, and the improvement of the characteristics of the electrostatic actuator can be expected.

According to a ninth aspect of the present invention, an electrode and an electrode assembly wiring are formed by a screen printing method. In the case of an electrostatic actuator, it is necessary to pattern fine wiring, but in the case of a screen printing method, patterning can be performed directly without removing unnecessary portions by etching or the like, thereby saving on electrode material costs. Becomes possible.

According to a tenth aspect of the present invention, an electrode and an electrode assembly wiring are formed by a gas deposition method (vapor deposition method). In the case of an electrostatic actuator, it is necessary to pattern fine wiring, but in the case of a gas deposition method (gas phase deposition method), patterning can be performed directly without removing unnecessary portions by etching or the like. Therefore, it is possible to save the electrode material cost.

According to another aspect of the present invention, an insulating layer is formed by a screen printing method. In the case of an electrostatic actuator, it is necessary to pattern fine wiring, but in the case of a screen printing method, patterning can be performed directly without removing unnecessary portions by etching or the like, thereby saving on electrode material costs. Becomes possible.

In order to achieve the above object, a twelfth aspect of the present invention is characterized in that the insulating layer is formed by a gas deposition method (vapor deposition method). In the case of an electrostatic actuator, it is necessary to pattern fine wiring, but in the case of a gas deposition method (gas phase deposition method), unnecessary portions need not be removed by etching or the like.
Since direct patterning can be performed, it is possible to reduce the cost of electrode materials.

[0017]

FIG. 1 shows a first preferred embodiment according to the present invention. The materials of the first electrode 1 and the second electrode 2, the third electrode 3, the collective wire 4 of the first electrode, the collective wire 5 of the second electrode, and the collective wire 6 of the third electrode include gold, silver, platinum,
Various materials such as copper, tungsten, molybdenum, TiC, and ITO can be used. Production methods include plating, PV
D, CVD, printing, transfer, etc. are adopted according to the material. Various materials such as alumina ceramics and glass can be used as the material of the insulating layer 7. As a manufacturing method,
A production method suitable for the material, such as PVD, CVD, printing, a sol-gel method, or a thermal spraying method, is adopted.

FIG. 2 shows a second embodiment according to the present invention.
A land portion 10 is provided at a connection portion 9 between the electrode 3 and the collective wiring 6 of the third electrode. This facilitates alignment between the third electrode 3 and the collective wiring 6 of the third electrode.

FIG. 3 shows a third embodiment according to the present invention.
At the connection portion 9 between the electrode 3 and the collective wiring 6 of the third electrode,
The electrode assembly wiring is thinner than the electrodes. This facilitates the alignment between the electrode and the electrode assembly wiring.

FIG. 4 shows a fourth embodiment according to the present invention, in which steps of forming electrodes, electrode assembly wirings, and insulating layers are shown for each process. As a first step, the first electrode 1 and the second
Forming an electrode 2, a third electrode 3, a first electrode collective wire 4 and a second electrode collective wire 5; forming a second step, forming an insulating layer 7 on the second electrode collective wire 5; The third electrode assembly line 6 is formed.

FIG. 5 shows a fifth embodiment according to the present invention.
FIG. 4 shows a procedure for forming an electrode assembly wiring and an insulating layer for each process. FIG. As a first step, a first electrode 1, a second electrode 2, a third electrode 3, and a second electrode collective wiring 5 are formed. As a second step, an insulating layer 7 is formed on the second electrode collective wiring 5. Then, the first electrode collective wiring 4 and the third electrode collective line 6 are formed as a third step.

FIG. 6 shows a sixth embodiment according to the present invention.
FIG. 4 shows a procedure for forming an electrode assembly wiring and an insulating layer for each process. FIG. As a first step, a second electrode collective wiring 5 is formed, as a second step, an insulating layer 7 is formed on the second electrode collective wiring 5, and as a third step, a first electrode 1 and a first electrode 1 are formed.
The electrode assembly wiring 4, the second electrode 2, the third electrode 3, and the third electrode assembly line 6 are formed.

FIG. 7 shows a sixth embodiment according to the present invention.
FIG. 4 shows a procedure for forming an electrode assembly wiring and an insulating layer for each process. FIG. As a first step, a first electrode 1, a second electrode 2, and a third electrode 3 are formed.
The electrode collective wiring 5 is formed, an insulating layer 7 is formed on the second electrode collective wiring 5 as a third step, and the first electrode collective wiring 4 and the third electrode collective line 6 are formed as a fourth step. .

FIG. 8 shows a sixth embodiment according to the present invention.
FIG. 4 shows a procedure for forming an electrode assembly wiring and an insulating layer for each process. FIG. As a first step, a first electrode 1, a second electrode 2, and a third electrode 3 are simultaneously formed. As a second step, a first electrode collective wiring 4 and a second electrode collective wiring 5 are formed. In this step, the insulating layer 7 is formed on the second electrode collective wiring 5, and in the fourth step, the third electrode collective line 6 is formed.

FIG. 9 shows a procedure for forming an electrode, an electrode assembly wiring, and an insulating layer in the conventional technique for each process.
As a first step, the first electrode 1 and the first electrode
After the second electrode 2 and the second electrode collective wiring 5 are formed simultaneously, an insulating layer 7 is formed on the second electrode collective wiring 5 as a second step, and the third electrode 3 is formed as a third step. And the third electrode assembly wiring 6 are formed.

[0026]

According to the present invention, the first electrode, the second electrode, and the third electrode, which are required to have high alignment accuracy, are formed by using one mask or the like.
By forming and joining electrode assembly wirings that are formed at the same time and have relatively rough alignment accuracy in a separate process, the accuracy of electrode pitch can be increased, the degree of freedom in selecting electrode materials and electrode thicknesses increases, and static An improvement in the characteristics of the electric actuator can be expected.

[Brief description of the drawings]

FIG. 1 is a plan view of a first embodiment according to the present invention.

FIG. 2 is a plan view of a second embodiment according to the present invention.

FIG. 3 is a plan view of a third embodiment according to the present invention.

FIG. 4 is a plan view of each step of a fourth embodiment according to the present invention.

FIG. 5 is a plan view of each step of a fifth embodiment according to the present invention.

FIG. 6 is a plan view of each step of a sixth embodiment according to the present invention.

FIG. 7 is a plan view of each step of a seventh embodiment according to the present invention.

FIG. 8 is a plan view of each step in Example 8 according to the present invention.

FIG. 9 is a plan view of each step in the prior art. 1 ... first electrode, 2 ... second electrode, 3 ... third electrode, 4 ... first
Collective wiring of electrodes, 5: collective wiring of second electrode, 6: collective wiring of third electrode, 7: insulating layer, 8: dielectric substrate, 9: junction between electrode and collective wiring, 10: land part , 11 ... thin line part

Claims (12)

[Claims] 1. A first electrode and a first electrode collective line, a second electrode and a second electrode collective line, a third electrode and a third electrode collective line, and a second electrode collective line and a third electrode collective line. An electrostatic actuator having an insulating layer interposed between the first, second and third electrodes and the first and second electrodes;
-An electrostatic actuator characterized in that at least one of the combinations with the third electrode collective wiring is provided with a joint. 2. The electrostatic actuator according to claim 1, wherein a land portion is provided at the joint. 3. The connection part according to claim 1, wherein the line width of the electrode assembly line is smaller than the line width of the electrode.
Alternatively, the electrostatic actuator according to claim 2. 4. A method of manufacturing an electrostatic actuator in which at least one of a combination of first, second, and third electrodes and first, second, and third electrode collective wirings is provided with a joint. ,
A first electrode, a second electrode, and a third electrode are simultaneously formed as a first step, a first electrode collective wiring and a second electrode collective wiring are formed as a second step, and a second electrode collective wiring is formed as a third step. A method for manufacturing an electrostatic actuator, comprising: forming an insulating layer on a wiring; and forming a third electrode assembly line as a fourth step. 5. A method for manufacturing an electrostatic actuator, wherein a joint is provided in at least one of a combination of first, second, and third electrodes and first, second, and third electrode collective wiring. ,
As a first step, a first electrode, a second electrode and a third electrode
Forming electrodes, forming a second electrode collective wiring as a second step, forming an insulating layer on the second electrode collective wiring as a third step, and forming a first electrode collective wiring and A method for manufacturing an electrostatic actuator, comprising forming a third electrode assembly line. 6. A method for manufacturing an electrostatic actuator, wherein a bonding portion is provided in at least one of combinations of first, second, and third electrodes and first, second, and third electrode collective wirings. ,
As a first step, a first electrode, a second electrode and a third electrode
Forming an electrode and a second electrode collective line, forming an insulating layer on the second electrode collective line as a second step, and forming a first electrode collective line and a third electrode collective line as a third step The manufacturing method of the electrostatic actuator characterized by the above-mentioned. 7. A method of manufacturing an electrostatic actuator in which at least one of a combination of first, second, and third electrodes and first, second, and third electrode collective wirings is provided with a joint. ,
As a first step, a first electrode, a second electrode and a third electrode
Forming an electrode, a first electrode collective line, and a second electrode collective line, forming an insulating layer on the second electrode collective line as a second step, and forming a third electrode collective line as a third step The manufacturing method of the electrostatic actuator characterized by the above-mentioned. 8. A method for manufacturing an electrostatic actuator, wherein a bonding portion is provided in at least one of combinations of first, second, and third electrodes and first, second, and third electrode collective wirings. ,
As a first step, a second electrode collective wiring is formed, as a second step, an insulating layer is formed on the second electrode collective wiring, and as a third step, the first electrode, the first electrode collective wiring and A method for manufacturing an electrostatic actuator, comprising forming a second electrode, a third electrode, and a third electrode assembly line. 9. An electrode of the electrostatic actuator, and
9. The method for manufacturing an electrostatic actuator according to claim 4, wherein the electrode assembly wiring is formed by a screen printing method. 10. The electrode of the electrostatic actuator and / or an electrode assembly wiring formed by a gas deposition method (gas phase deposition method).
The method for manufacturing an electrostatic actuator according to any one of the above. 11. The insulating layer of the electrostatic actuator,
5. The method according to claim 4, wherein the film is formed by a screen printing method.
11. The method for manufacturing an electrostatic actuator according to any one of items 1 to 10. 12. The insulating layer of the electrostatic actuator,
The method for manufacturing an electrostatic actuator according to claim 4, wherein the electrostatic actuator is formed by a gas deposition method (vapor deposition method).