JP2001221626A - Device for holding object to be inspected - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately inspect and measure cut sheets, foil, etc. SOLUTION: By providing this holding device with both an adhering member which is partially provided with air suction openings and which comprises through-holes 35 at its upper surface and an air flow equalizing member 12 which is mounted on the adhering member, this enables holding flat a wafer- sheet shaped thin sheet and to perform accurate inspections and measurements, when performing automatic inspections and automatic measurements.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for holding an object to be inspected, which can accurately inspect and measure a cut sheet or foil.

[0002]

2. Description of the Related Art Conventionally, when inspecting / measuring a surface defect of a cut sheet having no air permeability, an inspection object as shown in FIG. The inspection is performed by placing the sheet-like inspection object 1 to be inspected on the holding device 31. In other words, the inspection object holding device 31 includes a surface plate 32 having a through hole 35 and a box 34 having an air suction device 33. Is held on a flat surface plate 32 to keep the inspection object 1 flat. Thus, the surface of the cut sheet or the like is kept flat, and the presence or absence of a defect such as a foreign substance or dirt present on the surface is inspected.

[0003]

However, the conventional inspection object holding apparatus has the following problems. Third
As shown in FIG. 2B, the smaller the thickness of the inspection object 1 is, the thinner and softer the inspection object 1 is. Due to the pressure, only the portion of the through hole 35 of the platen 32 was depressed as shown in FIG. When an inspection is performed with an image processing device or the like in this state,
In spite of the fact that the inspection object is actually free from defects, there is a problem that it is determined to be defective due to the depression 36 caused by the through hole 35 of the surface plate 32.

Further, as shown in FIG. 3C, when the inspection object is a material such as a chemical film or a metal foil, not only the depression 36 but also the through hole 35 on the surface plate 32. The air pockets 37 are likely to be generated in portions where there is no air. In this case as well, there is a problem that the inspection object is determined to be defective due to the air pocket 37 due to the through hole 35 of the surface plate 32, although the inspection object is actually free from defects. As described above, although the surface defect inspection cannot be performed unless the surface is originally flat, in the related art, the flat state is maintained by the dent 36 and the air pocket 37 generated by the inspection object holding device. I didn't. An object of the present invention is to provide an inspection object holding device having a mechanism for keeping the inspection object in a flat state when the inspection object is in the form of a cut thin sheet.

[0005]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a suction member having a partly provided with an air suction port and having a through hole on an upper surface, and mounted on the suction member. An inspection object holding device comprising an air flow equalizing member.

The present invention is the inspection object holding device according to the above invention, wherein the air flow equalizing member is a permeable member.

Further, the present invention is an apparatus for holding the inspection object in a surface defect inspection of a cut sheet-like inspection object, wherein the apparatus has an upper opening and at least a surface larger than the area of the inspection object. Box, a plate-like body having at least one or more through-holes sealed at the upper opening of the box, an air flow equalizing member placed on the plate-like body, and an air flow equalizing member In a state where the inspection object is placed on a member, the air in the box and the air existing between the inspection object and the plate-like body are passed through the air flow equalizing member and the standard. And a suction means for sucking the test object through a hole, wherein the test object is held on the surface plate by suction.

Further, the present invention is the inspection object holding device according to the above invention, wherein the air flow equalizing member is a cloth.

[0009]

FIG. 1A is a perspective view showing an embodiment of the present invention. Inspection object holding device 1 of the present invention
Reference numeral 1 denotes a plate-like platen 32 having a plurality of through-holes 35, a box 34 having an air suction device 33, and an air flow for uniformly diffusing air existing between the inspection object 1 and the platen 32. The equalizing member 12 is used.

The suction device 33 has a suction port for sucking air in the box. Air is suctioned from the suction port by a pump (not shown) or the like. The platen 32 of a plate-like body placed in a closed state on this box is made of, for example, a mirror-like iron plate, and the surface thereof has a diameter of 1 m.
It is configured to have a through hole 35 of m to 2 mm. The air equalizing member 12 is a breathable member, for example, having a thickness of 0.2 mm.
It is suitable to cut a silk cloth having a size of about 0.3 mm into the same size as the surface plate 32, and the like is placed on the surface plate 32, and the sheet-like inspection object 1 is placed on the silk cloth 12.

In this state, when air in the box 34 is sucked from the suction device 33 by a pump or the like (not shown), the inspection object 1 and the platen 32 are connected through the through holes 35 of the platen 32 through the silk cloth 12. Equalize and aspirate the air that is in between. Thereby, it does not depend on the through-hole 35 of the surface plate 32,
Further, the inspection object 1 can always be held in a flat state without causing the air pocket 37 as shown in FIG.

Next, an inspection process according to the present invention will be described with reference to FIG. Reference numeral 21 denotes a storage unit for the cut sheets, and reference numeral 22 denotes a robot mechanism that takes out the sheets 1 to be inspected one by one and places them on the inspection object holding device 11. On the linear rail 23 adjacent to the storage unit, the inspection object holding devices 11 are installed at regular intervals. There is an image capturing unit 24 that captures an image of the inspection object 1 held flat by the inspection object holding device 11 using a line sensor camera or the like. Judging units 25 and 26 for judging whether or not the object 1 has a defect are accumulation units for accumulating defective objects, and 27 is an accumulation unit for accumulating normal objects.

First, the inspection object 1 is placed from the sheet storage unit 21 on the inspection object holding device 11 installed on the linear rail 23 by the robot mechanism 22. At this time, the inspection object holding device 11
Is turned on. As a result, the sheet as the inspection object 1 moves while being sucked flat by the inspection object holding device 11 installed on the linear rail 23, and moves to a position to be captured by the image capturing unit 24. I do.

The image capturing unit 24 captures an image of the surface of the inspection object 1 and compares the captured image with a predetermined threshold to determine whether the image is a defect or a normal. When the image capturing is completed, the suction switch of the inspection object holding device 11 is set to O by a control device (not shown).
The state is set to the FF state. As a result of the inspection, a defect is accumulated in the accumulation unit 26 as an error, and a normal object is accumulated in the accumulation unit 27 as normal.

In this embodiment, the suction member is a platen 32.
Although the description has been given of the shape composed of the box and the box 34, the platen and the box may be integrally formed. Although the box 34 has been described as a square box, the box 34 may have another shape such as a round shape.

[0016]

According to the present invention, since a thin sheet having a sheet shape can be held flat, accurate inspection and measurement can be performed when performing automatic inspection and automatic measurement.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of an embodiment of the present invention.

FIG. 2 is a diagram showing an example of an inspection process according to the present invention.

FIG. 3 is a conventional diagram.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Inspection object 11 ... Inspection object holding device 12 ... Air diffusion means 21 ... Sheet storage part 22 ... Robot mechanism 23 ... Linear rail 24 ... Image taking part 25. ..Judgment unit 26 ・ ・ ・ Defective object accumulation unit 27 ・ ・ ・ Normal object accumulation unit 32 ・ ・ ・ Surface plate 33 ・ ・ ・ Suction device 35 ・ ・ ・ Through hole 36 ・ ・ ・ Dent 37 ・ ・ ・ Air pool

Continued on the front page F term (reference) 2F065 AA49 BB01 CC02 FF01 FF04 HH11 JJ02 JJ07 JJ25 PP11 QQ25 RR06 TT03 UU04 2F069 AA60 BB20 CC06 GG07 GG77 MM03 MM23 PP06 2G051 AA90 AB07 CA03 DA03 DA06 DA20

Claims (6)

[Claims] 1. An object to be inspected, comprising: a suction member partially provided with an air suction port and having a through hole on an upper surface; and an air flow equalizing member mounted on the suction member. Holding device. 2. The inspection device according to claim 1, wherein the suction member comprises a box opened upward and a plate-like body having a through hole placed in the opening of the box. Object holding device. 3. The inspection object holding apparatus according to claim 1, wherein the air flow equalizing member is a permeable member. 4. The inspection object holding device according to claim 1, wherein the surfaces of the suction member and the air flow equalizing member are larger than the inspection object. 5. An apparatus for holding an inspection object in a surface defect inspection of a cut sheet-like inspection object, comprising: a box having an upper side opened and having a surface at least larger than the area of the inspection object; A plate-like body having at least one or more through-holes closed at the upper opening of the box; an air flow equalizing member placed on the plate-like body; In a state where the inspection object is placed, the air in the box and the air existing between the inspection object and the plate-like body are passed through the air flow equalizing member and the standard through-hole. An inspection object holding device, comprising: suction means for sucking, wherein the inspection object is sucked and held on the surface plate. 6. An apparatus according to claim 5, wherein said air flow equalizing member is a permeable member.