JP2001208731A - 超音波検査にかけられた陰極スパッターターゲットにおける欠陥の実際寸法の測定 - Google Patents

超音波検査にかけられた陰極スパッターターゲットにおける欠陥の実際寸法の測定

Info

Publication number
JP2001208731A
JP2001208731A JP2000330109A JP2000330109A JP2001208731A JP 2001208731 A JP2001208731 A JP 2001208731A JP 2000330109 A JP2000330109 A JP 2000330109A JP 2000330109 A JP2000330109 A JP 2000330109A JP 2001208731 A JP2001208731 A JP 2001208731A
Authority
JP
Japan
Prior art keywords
defect
internal
measurement
size
actual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2000330109A
Other languages
English (en)
Japanese (ja)
Inventor
Paul S Gilman
ポール・エス・ギルマン
Alfred Snowman
アルフレッド・スノウマン
Andre Desert
アンドレ・デザート
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair ST Technology Inc
Original Assignee
Praxair ST Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair ST Technology Inc filed Critical Praxair ST Technology Inc
Publication of JP2001208731A publication Critical patent/JP2001208731A/ja
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/11—Analysing solids by measuring attenuation of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/044—Internal reflections (echoes), e.g. on walls or defects

Landscapes

  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
JP2000330109A 1999-11-01 2000-10-30 超音波検査にかけられた陰極スパッターターゲットにおける欠陥の実際寸法の測定 Ceased JP2001208731A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/431,745 US6269699B1 (en) 1999-11-01 1999-11-01 Determination of actual defect size in cathode sputter targets subjected to ultrasonic inspection
US09/431745 1999-11-01

Publications (1)

Publication Number Publication Date
JP2001208731A true JP2001208731A (ja) 2001-08-03

Family

ID=23713247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000330109A Ceased JP2001208731A (ja) 1999-11-01 2000-10-30 超音波検査にかけられた陰極スパッターターゲットにおける欠陥の実際寸法の測定

Country Status (6)

Country Link
US (1) US6269699B1 (fr)
JP (1) JP2001208731A (fr)
KR (1) KR100451673B1 (fr)
FR (1) FR2800467B1 (fr)
GB (1) GB2358249B (fr)
TW (1) TW463048B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012102380A (ja) * 2010-11-11 2012-05-31 Ulvac Japan Ltd スパッタリング用ターゲット材料の検査方法及びスパッタリングターゲットの製造方法

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* Cited by examiner, † Cited by third party
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WO1999036769A1 (fr) * 1998-01-16 1999-07-22 Tosoh Smd, Inc. Procede de caracterisation en ligne de texture par ultrasons
US6439054B1 (en) * 2000-05-31 2002-08-27 Honeywell International Inc. Methods of testing sputtering target materials
KR100841915B1 (ko) * 2001-04-04 2008-06-30 토소우 에스엠디, 인크 알루미늄 또는 알루미늄 합금 스퍼터링 타겟 내의알루미늄 산화물 함유물에 대한 임계 크기 결정 방법
JP4349904B2 (ja) * 2001-08-09 2009-10-21 トーソー エスエムディー，インク． 寸法と位置によって分類された欠陥の種類による、非破壊的なターゲット清浄度特性決定のための方法と装置
US6732587B2 (en) * 2002-02-06 2004-05-11 Lockheed Martin Corporation System and method for classification of defects in a manufactured object
US20060268284A1 (en) * 2005-03-01 2006-11-30 Zhiguo Zhang Method and apparatus for surface roughness measurement
JP4897113B2 (ja) * 2009-12-25 2012-03-14 Ｊｘ日鉱日石金属株式会社 パーティクルの発生の少ないスパッタリングターゲット及び同ターゲットの製造方法
CA3006975C (fr) 2015-12-04 2022-02-22 Minnetronix, Inc. Systemes et procedes pour le conditionnement du liquide cephalorachidien
CN105671501B (zh) * 2016-04-11 2019-06-14 广州市尤特新材料有限公司 一种废旧旋转靶材回收、修复和再加工的方法
JP6263665B1 (ja) * 2017-01-24 2018-01-17 住友化学株式会社 擬似欠陥サンプルおよびその製造方法、超音波探傷測定条件の調整方法、ターゲット素材の検査方法、スパッタリングターゲットの製造方法
CN111337572A (zh) * 2020-03-20 2020-06-26 宁波江丰电子材料股份有限公司 一种钼靶坯的水浸式超声波探伤方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3677073A (en) * 1971-01-27 1972-07-18 Allegheny Ludlum Ind Inc Method and apparatus for evaluating metal cleanliness
US4011748A (en) * 1975-09-18 1977-03-15 The Board Of Trustees Of Leland Stanford Junior University Method and apparatus for acoustic and optical scanning of an object
JPS52155593A (en) * 1976-06-18 1977-12-24 Sumitomo Metal Ind Automatic gain controlling device used in setting sensitivity of nonndestructive inspecting instrument
JPS6070350A (ja) * 1983-09-28 1985-04-22 Hitachi Ltd 光学顕微鏡を併設した超音波顕微鏡
DE3335480A1 (de) * 1983-09-30 1985-04-18 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Verfahren und vorrichtung zur durchfuehrung mehrerer einander ergaenzender mikroskopischer untersuchungen
US5319977A (en) * 1991-06-20 1994-06-14 The Board Of Trustees Of The Leland Stanford Junior University Near field acoustic ultrasonic microscope system and method
US5406850A (en) * 1993-01-14 1995-04-18 Tosoh Smd, Inc. Method of non-destructively testing a sputtering target
FR2744805B1 (fr) * 1996-02-13 1998-03-20 Pechiney Aluminium Cibles de pulverisation cathodique selectionnees par controle ultrasons pour leur faible taux d'emissions de particules
FR2756572B1 (fr) * 1996-12-04 1999-01-08 Pechiney Aluminium Alliages d'aluminium a temperature de recristallisation elevee utilisee dans les cibles de pulverisation cathodiques
KR100625000B1 (ko) * 1998-06-09 2006-09-20 토소우 에스엠디, 인크 정량적 스퍼터 타겟 청정도 특성화 방법 및 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012102380A (ja) * 2010-11-11 2012-05-31 Ulvac Japan Ltd スパッタリング用ターゲット材料の検査方法及びスパッタリングターゲットの製造方法

Also Published As

Publication number Publication date
KR20010060194A (ko) 2001-07-06
FR2800467A1 (fr) 2001-05-04
KR100451673B1 (ko) 2004-10-08
TW463048B (en) 2001-11-11
US6269699B1 (en) 2001-08-07
GB0026323D0 (en) 2000-12-13
FR2800467B1 (fr) 2003-02-28
GB2358249A (en) 2001-07-18
GB2358249B (en) 2003-04-30

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