JP2001208616A5 - - Google Patents
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- Publication number
- JP2001208616A5 JP2001208616A5 JP2000020977A JP2000020977A JP2001208616A5 JP 2001208616 A5 JP2001208616 A5 JP 2001208616A5 JP 2000020977 A JP2000020977 A JP 2000020977A JP 2000020977 A JP2000020977 A JP 2000020977A JP 2001208616 A5 JP2001208616 A5 JP 2001208616A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000020977A JP2001208616A (ja) | 2000-01-28 | 2000-01-28 | 温度検出素子 |
| TW090101301A TW486564B (en) | 2000-01-28 | 2001-01-19 | Temperature-detecting element |
| US09/769,919 US20010022803A1 (en) | 2000-01-28 | 2001-01-25 | Temperature-detecting element |
| KR10-2001-0003707A KR100413646B1 (ko) | 2000-01-28 | 2001-01-26 | 온도검출소자 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000020977A JP2001208616A (ja) | 2000-01-28 | 2000-01-28 | 温度検出素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001208616A JP2001208616A (ja) | 2001-08-03 |
| JP2001208616A5 true JP2001208616A5 (ja) | 2007-02-22 |
Family
ID=18547446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000020977A Pending JP2001208616A (ja) | 2000-01-28 | 2000-01-28 | 温度検出素子 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20010022803A1 (ja) |
| JP (1) | JP2001208616A (ja) |
| KR (1) | KR100413646B1 (ja) |
| TW (1) | TW486564B (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030231698A1 (en) * | 2002-03-29 | 2003-12-18 | Takatomo Yamaguchi | Apparatus and method for fabricating a semiconductor device and a heat treatment apparatus |
| JP2014211922A (ja) * | 2011-08-29 | 2014-11-13 | 三洋電機株式会社 | 光ピックアップ装置および温度検出装置 |
| JP5644007B2 (ja) | 2012-02-10 | 2014-12-24 | 東京エレクトロン株式会社 | 温度センサ及び熱処理装置 |
| JP5451793B2 (ja) * | 2012-02-10 | 2014-03-26 | 東京エレクトロン株式会社 | 温度センサ及び熱処理装置 |
| CN104568196B (zh) * | 2015-01-04 | 2019-06-11 | 安徽蓝德仪表有限公司 | 一种铂铑热电偶 |
| DE102018102600A1 (de) * | 2018-02-06 | 2019-08-08 | Tdk Electronics Ag | Temperatursensor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2605297B2 (ja) * | 1987-09-04 | 1997-04-30 | 株式会社村田製作所 | 白金温度センサおよびその製造方法 |
| JPH0563054A (ja) * | 1991-08-29 | 1993-03-12 | Nippon Steel Corp | ウエハ温度測定方法及び装置 |
| JPH07273057A (ja) * | 1994-03-30 | 1995-10-20 | Kokusai Electric Co Ltd | 半導体製造装置 |
| JPH08285699A (ja) * | 1995-04-14 | 1996-11-01 | Matsushita Electric Ind Co Ltd | 加熱容器内温度センサ |
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2000
- 2000-01-28 JP JP2000020977A patent/JP2001208616A/ja active Pending
-
2001
- 2001-01-19 TW TW090101301A patent/TW486564B/zh not_active IP Right Cessation
- 2001-01-25 US US09/769,919 patent/US20010022803A1/en not_active Abandoned
- 2001-01-26 KR KR10-2001-0003707A patent/KR100413646B1/ko active IP Right Grant