JP2001185833A - Method and device for manufacturing multilayered printed wiring board - Google Patents

Method and device for manufacturing multilayered printed wiring board

Info

Publication number
JP2001185833A
JP2001185833A JP37025699A JP37025699A JP2001185833A JP 2001185833 A JP2001185833 A JP 2001185833A JP 37025699 A JP37025699 A JP 37025699A JP 37025699 A JP37025699 A JP 37025699A JP 2001185833 A JP2001185833 A JP 2001185833A
Authority
JP
Japan
Prior art keywords
substrate
light
insulating resin
printed wiring
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP37025699A
Other languages
Japanese (ja)
Inventor
Makoto Kurachi
真琴 倉地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP37025699A priority Critical patent/JP2001185833A/en
Publication of JP2001185833A publication Critical patent/JP2001185833A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device by which a warp-free multilayered printed wiring board can be manufactured surely and efficiently. SOLUTION: In the method of manufacturing a multilayered printed wiring board which is constituted by forming photo-setting insulating resin layers 3 on both surfaces of a board 2 carrying conductor circuits, the photo-setting insulating resin layers 3 are formed on both surfaces of the board 2, and the resin layers 3 are photo-set by simultaneously irradiating both surfaces of the board 2 with light rays.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【技術分野】本発明は,光硬化性を有する絶縁樹脂層を
形成してなる多層プリント配線板の製造方法及び製造装
置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a multilayer printed wiring board having a photocurable insulating resin layer formed thereon.

【0002】[0002]

【従来技術】従来,多層プリント配線板の製造方法にお
いて,光硬化性を有する絶縁樹脂層を光硬化させるに当
っては,以下のようにして光照射を行っていた。即ち,
図3に示す製造装置9を用いて,基板2の両面に形成し
た絶縁樹脂層3に対して片面ずつ光照射を行う。上記製
造装置9は,上記基板2上の絶縁樹脂層3に光照射する
ための光源92と,該光源92の下方に上記基板2を搬
送するための水平搬送のローラーコンベア93とからな
る。
2. Description of the Related Art Conventionally, in a method of manufacturing a multilayer printed wiring board, when photo-curing an insulating resin layer having photo-curability, light irradiation is performed as follows. That is,
Light is applied to the insulating resin layers 3 formed on both surfaces of the substrate 2 one by one using the manufacturing apparatus 9 shown in FIG. The manufacturing apparatus 9 includes a light source 92 for irradiating the insulating resin layer 3 on the substrate 2 with light, and a roller conveyor 93 for horizontally transporting the substrate 2 below the light source 92.

【0003】まず,両面に上記絶縁樹脂層3を形成した
基板2を,表側面21を上にして上記ローラーコンベア
93に載置する。そして,該ローラーコンベア93によ
って上記基板2を搬送し,上記光源92の下方を通過さ
せる。このとき,上記光源92の下方において,上記基
板2の表側面21における絶縁樹脂層3に光が照射され
る。これによって,上記基板2の表側面21の絶縁樹脂
層3を光硬化させる。次いで,上記基板2を反転させて
裏側面22を上にし,上記と同様に上記光源92の下方
を通過させる。これにより,上記基板2の裏側面22の
絶縁樹脂層3を光硬化させる。
[0003] First, the substrate 2 on which the insulating resin layer 3 is formed on both sides is placed on the roller conveyor 93 with the front side 21 up. Then, the substrate 2 is transported by the roller conveyor 93 and passes below the light source 92. At this time, the light is applied to the insulating resin layer 3 on the front side surface 21 of the substrate 2 below the light source 92. Thus, the insulating resin layer 3 on the front surface 21 of the substrate 2 is light-cured. Next, the substrate 2 is turned upside down so that the back side surface 22 is turned upward, and passes under the light source 92 in the same manner as described above. Thus, the insulating resin layer 3 on the back side surface 22 of the substrate 2 is light-cured.

【0004】以上により,上記基板2の両面に形成した
絶縁樹脂層3を光硬化させる。また,多数の基板2を上
記製造装置9に順次投入することにより,その両面に形
成した絶縁樹脂層3を硬化させ,多数の多層プリント配
線板を順次製造する(図3)。なお,表側面21,裏側
面22とは,上記基板2の一方の面と他方の面を表す便
宜的な名称である。
As described above, the insulating resin layers 3 formed on both surfaces of the substrate 2 are light-cured. Also, by sequentially loading a large number of substrates 2 into the manufacturing apparatus 9, the insulating resin layers 3 formed on both surfaces thereof are cured, and a large number of multilayer printed wiring boards are sequentially manufactured (FIG. 3). Note that the front side surface 21 and the back side surface 22 are convenient names representing one surface and the other surface of the substrate 2.

【0005】[0005]

【解決しようとする課題】しかしながら,上記従来の多
層プリント配線板の製造方法においては,上述のごと
く,基板2の両面に形成した絶縁樹脂層3に対して片面
ずつ光照射を行う。これにより,例えば表側面21に先
に光照射を行うと,裏側面22の絶縁樹脂層3が硬化し
ないうちに表側面21の絶縁樹脂層3だけが先に硬化す
る(図4(A))。そのため,図4(B)に示すごと
く,上記基板2の表側面21に応力(矢印B)が集中し
て,該基板2に反りが発生するおそれがある。また,こ
れにより,基板2に形成した絶縁樹脂層3にクラックや
剥離が生ずるおそれもある。
However, in the above-mentioned conventional method for manufacturing a multilayer printed wiring board, as described above, the insulating resin layers 3 formed on both sides of the substrate 2 are irradiated with light one by one. Thus, for example, if the front side 21 is irradiated with light first, only the insulating resin layer 3 on the front side 21 is cured before the insulating resin layer 3 on the back side 22 is cured (FIG. 4A). . Therefore, as shown in FIG. 4B, stress (arrow B) concentrates on the front side surface 21 of the substrate 2 and the substrate 2 may be warped. In addition, this may cause cracking or peeling of the insulating resin layer 3 formed on the substrate 2.

【0006】また,上記製造方法においては,片面の絶
縁樹脂層3へ光を照射し終わった基板2を反転させて,
反対側の面の絶縁樹脂層3に光を照射する必要がある。
そのため,反転を行わず片面が未処理のままの基板2を
次工程へ払い出したり,あるいは同一面を必要以上に光
照射したりするといった作業ミスが生ずるおそれがあ
る。また,作業効率の点からも不利である。
In the above manufacturing method, the substrate 2 which has been irradiated with light on the insulating resin layer 3 on one side is turned over,
It is necessary to irradiate light to the insulating resin layer 3 on the opposite side.
Therefore, there is a possibility that an operation error may occur such that the substrate 2 whose one surface is not processed without being inverted is paid out to the next process, or the same surface is irradiated with light more than necessary. It is also disadvantageous in terms of work efficiency.

【0007】本発明は,かかる従来の問題点に鑑みてな
されたもので,基板の反りのない多層プリント配線板
を,確実かつ効率的に得ることのできる多層プリント配
線板の製造方法及び製造装置を提供しようとするもので
ある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and a method and an apparatus for manufacturing a multilayer printed wiring board capable of reliably and efficiently obtaining a multilayer printed wiring board without warpage of a substrate. It is intended to provide.

【0008】[0008]

【課題の解決手段】請求項1に記載の発明は,光硬化性
を有する絶縁樹脂層を形成してなる多層プリント配線板
を製造する方法において,導体回路を施した基板の両面
に,光硬化性を有する上記絶縁樹脂層を形成した後,上
記基板の両面より同時に光を照射して上記絶縁樹脂層を
光硬化させることを特徴とする多層プリント配線板の製
造方法にある。
According to a first aspect of the present invention, there is provided a method of manufacturing a multilayer printed wiring board having a photocurable insulating resin layer formed thereon, wherein both surfaces of a substrate provided with a conductive circuit are photocured. The method for manufacturing a multilayer printed wiring board is characterized in that after the insulating resin layer having the property is formed, the insulating resin layer is photo-cured by simultaneously irradiating light from both sides of the substrate.

【0009】本発明において最も注目すべきことは,基
板の両面より同時に光を照射して絶縁樹脂層を硬化させ
ることである。上記絶縁樹脂層としては,例えばバイア
ホールを有する層間絶縁層や,はんだパッドを有するソ
ルダーレジスト層等がある。
What is most notable in the present invention is that the insulating resin layer is cured by simultaneously irradiating light from both sides of the substrate. Examples of the insulating resin layer include an interlayer insulating layer having via holes and a solder resist layer having solder pads.

【0010】次に,本発明の作用効果につき説明する。
上記多層プリント配線板の製造方法においては,上記基
板の両面より同時に光を照射するため,上記基板の両面
における絶縁樹脂層を同時に光硬化させることができ
る。それ故,絶縁樹脂層の硬化に伴う応力が上記基板の
一方の面に集中することがなく,該基板に反りが発生す
るおそれがない。また,これにより,基板に形成した絶
縁樹脂層にクラックや剥離が生ずるおそれもない。
Next, the operation and effect of the present invention will be described.
In the method for manufacturing a multilayer printed wiring board, since the light is simultaneously irradiated from both surfaces of the substrate, the insulating resin layers on both surfaces of the substrate can be simultaneously photo-cured. Therefore, stress due to curing of the insulating resin layer does not concentrate on one surface of the substrate, and there is no possibility that the substrate is warped. Further, as a result, there is no possibility that cracks or peeling may occur in the insulating resin layer formed on the substrate.

【0011】また,上記製造方法においては,基板の両
面の絶縁樹脂層を同時に光照射するため,基板を反転さ
せて再度光照射する必要がない。そのため,片面が未処
理のままの基板を次工程へ払い出したり,あるいは同一
面を必要以上に光照射したりするといった作業ミスが生
ずるおそれがない。また,作業効率も向上する。
Further, in the above manufacturing method, since the insulating resin layers on both surfaces of the substrate are irradiated with light at the same time, it is not necessary to turn over the substrate and irradiate light again. Therefore, there is no possibility that an operation error such as paying out a substrate having one surface left unprocessed to the next process or irradiating the same surface with light more than necessary occurs. Also, work efficiency is improved.

【0012】以上のごとく,本発明によれば,基板の反
りのない多層プリント配線板を,確実かつ効率的に得る
ことのできる多層プリント配線板の製造方法を提供する
ことができる。
As described above, according to the present invention, it is possible to provide a method for manufacturing a multilayer printed wiring board capable of reliably and efficiently obtaining a multilayer printed wiring board without warpage of a substrate.

【0013】次に,請求項2に記載の発明のように,上
記基板を略垂直状態に保持して上記絶縁樹脂層を光硬化
させることが好ましい。これにより,基板の表側面ある
いは裏側面における絶縁樹脂層形成部分を製造装置等に
接触させることがない(図1,図2参照)。それ故,上
記基板の両面に形成した絶縁樹脂層に傷がついたり,異
物が付着したりするおそれがない。上記基板を略垂直状
態に保持する手段としては,例えば,上記基板の端部を
把持して上方から吊り下げる手段がある(図1参照)。
Next, as in the second aspect of the present invention, it is preferable that the insulating resin layer is light-cured while the substrate is held substantially vertically. Thus, the portion where the insulating resin layer is formed on the front surface or the rear surface of the substrate is not brought into contact with the manufacturing apparatus or the like (see FIGS. 1 and 2). Therefore, there is no possibility that the insulating resin layers formed on both surfaces of the substrate are damaged or foreign matter is attached. As a means for holding the substrate in a substantially vertical state, for example, there is a means for gripping an end of the substrate and suspending the substrate from above (see FIG. 1).

【0014】次に,請求項3に記載の発明のように,上
記基板を略垂直状態で搬送しながら該基板の両面に光を
照射することが好ましい。これにより,多数の上記基板
への光照射を一層効率よく行うことができる。そのた
め,上記プリント配線板の生産効率が向上する。また,
上記基板を略垂直状態で搬送するため,基板の両面にお
ける絶縁樹脂層に傷が付いたり,異物が付着するおそれ
もない。
Next, it is preferable that both sides of the substrate be irradiated with light while the substrate is transported in a substantially vertical state. This makes it possible to irradiate a large number of the substrates with light more efficiently. Therefore, the production efficiency of the printed wiring board is improved. Also,
Since the substrate is transported in a substantially vertical state, there is no possibility that the insulating resin layers on both sides of the substrate are damaged or foreign matter adheres.

【0015】次に,請求項4に記載の発明のように,上
記基板への光照射は,該基板との最短距離が100〜5
00mmの位置に配置した光源から行うことが好まし
い。これにより,上記基板の全面に略均等に,充分に光
を照射することができる。そのため,上記基板の全面に
おける絶縁樹脂層を均一に光硬化させることができ,ま
た,基板の反りや絶縁樹脂層におけるクラックや剥離を
一層確実に防ぐことができる。
Next, as in the fourth aspect of the present invention, the light irradiation on the substrate is performed when the shortest distance from the substrate is 100 to 5 mm.
It is preferable to use a light source arranged at a position of 00 mm. This makes it possible to irradiate the entire surface of the substrate with light substantially uniformly and sufficiently. Therefore, the insulating resin layer on the entire surface of the substrate can be uniformly photo-cured, and furthermore, warpage of the substrate and cracking and peeling of the insulating resin layer can be more reliably prevented.

【0016】上記基板からの最短距離が100mm未満
の光源から光照射を行うと,上記基板の両面に形成した
絶縁樹脂層が,基板上の位置によって光硬化の度合いに
バラツキが生じ,基板の反りや,絶縁樹脂層のクラッ
ク,剥離が発生するおそれがある。一方,上記基板から
の最短距離が500mmを超える光源から光照射を行う
と,上記基板の両面に形成した絶縁樹脂層を充分に光硬
化させることが困難となる。
When light irradiation is performed from a light source whose shortest distance from the substrate is less than 100 mm, the degree of photo-curing of the insulating resin layers formed on both surfaces of the substrate varies depending on the position on the substrate, and the substrate warps. Also, cracking and peeling of the insulating resin layer may occur. On the other hand, when light irradiation is performed from a light source having a minimum distance of more than 500 mm from the substrate, it becomes difficult to sufficiently cure the insulating resin layers formed on both surfaces of the substrate.

【0017】また,上記基板から光源までの最短距離
は,300〜400mmであることが更に好ましい。こ
の場合には,上記基板の全面に一層均等かつ充分に光を
照射することができる。
The shortest distance from the substrate to the light source is more preferably 300 to 400 mm. In this case, the entire surface of the substrate can be evenly and sufficiently irradiated with light.

【0018】次に,請求項5に記載の発明のように,光
硬化性を有する絶縁樹脂層を形成してなる多層プリント
配線板の製造装置において,該製造装置は,基板を略垂
直状態に保持する保持手段と,上記基板の表側面と裏側
面とにそれぞれ光照射できるように配置された一対の光
源とを有し,上記保持手段によって保持した基板の両面
における上記絶縁樹脂層に対して,上記一対の光源によ
って同時に光を照射するよう構成してあることを特徴と
する多層プリント配線板の製造装置がある。
Next, according to a fifth aspect of the present invention, in a manufacturing apparatus for a multilayer printed wiring board having a photo-curable insulating resin layer formed thereon, the manufacturing apparatus is configured to set the substrate in a substantially vertical state. A holding means for holding, and a pair of light sources arranged so as to be able to irradiate light to the front side and the back side of the substrate, respectively, with respect to the insulating resin layers on both sides of the substrate held by the holding means; There is an apparatus for manufacturing a multilayer printed wiring board characterized in that light is irradiated simultaneously by the pair of light sources.

【0019】これにより,上記基板を略垂直状態に保持
しつつ両面を同時に光照射することができる。そのた
め,請求項1の発明の説明で述べたごとく,基板の反
り,傷の発生,異物の付着を防ぐことができると共に,
生産効率を向上させ,また作業ミスを防止することもで
きる。即ち,本製造装置によれば,基板の反り,傷の発
生,異物の付着のない多層プリント配線板を,確実かつ
効率的に得ることができる。
Thus, both sides can be irradiated simultaneously with light while holding the substrate in a substantially vertical state. Therefore, as described in the description of the first aspect of the present invention, it is possible to prevent the substrate from being warped, scratched, and adhered with foreign substances.
It can improve production efficiency and prevent work errors. That is, according to the present manufacturing apparatus, it is possible to reliably and efficiently obtain a multilayer printed wiring board free from substrate warpage, scratching, and adhesion of foreign matter.

【0020】次に,請求項6に記載の発明のように,上
記保持手段は,搬送手段に取り付けられており,上記基
板を上記搬送手段によって搬送しながら上記基板の両面
に光を照射するよう構成してあることが好ましい。これ
により,多数の上記基板への光照射を一層効率よく行う
ことができる。そのため,上記プリント配線板の生産効
率が向上する。
Next, as in the invention according to claim 6, the holding means is attached to the transport means, and irradiates both surfaces of the substrate with light while transporting the substrate by the transport means. It is preferred that it is comprised. This makes it possible to irradiate a large number of the substrates with light more efficiently. Therefore, the production efficiency of the printed wiring board is improved.

【0021】次に,請求項7に記載の発明のように,上
記光源と上記基板との最短距離は100〜500mmで
あることが好ましい。これにより,上記請求項3の発明
の説明で述べたごとく,上記基板の全面における絶縁樹
脂層を均一に光硬化させることができ,また,基板の反
りや絶縁樹脂層におけるクラックや剥離を一層確実に防
ぐことができる。また,上記光源と基板との最短距離に
関する数値限定の臨界意議は,上記請求項3の発明の場
合と同様である。
Next, it is preferable that the shortest distance between the light source and the substrate is 100 to 500 mm. Thus, as described in the description of the third aspect of the present invention, the insulating resin layer on the entire surface of the substrate can be uniformly photo-cured, and the warpage of the substrate and cracks and peeling in the insulating resin layer can be further ensured. Can be prevented. The criticality of limiting the numerical value regarding the shortest distance between the light source and the substrate is the same as in the case of the third aspect of the present invention.

【0022】また,上記光源と基板との最短距離は,3
00〜400mmであることが更に好ましい。この場合
には,上記基板の全面に一層均等かつ充分に光を照射す
ることができる。
The shortest distance between the light source and the substrate is 3
More preferably, the thickness is from 00 to 400 mm. In this case, the entire surface of the substrate can be evenly and sufficiently irradiated with light.

【0023】[0023]

【発明の実施の形態】実施形態例1 本発明の実施形態例にかかる多層プリント配線板の製造
方法につき,図1を用いて説明する。本例の製造方法
は,光硬化性を有する絶縁樹脂層3を設けてなる多層プ
リント配線板を製造する方法であって,以下に示す製造
装置1を用いる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 A method for manufacturing a multilayer printed wiring board according to an embodiment of the present invention will be described with reference to FIG. The manufacturing method of this example is a method of manufacturing a multilayer printed wiring board provided with an insulating resin layer 3 having photocurability, and uses a manufacturing apparatus 1 described below.

【0024】即ち,図1に示すごとく,上記多層プリン
ト配線板の製造装置1は,基板2を略垂直状態に保持す
る保持手段11と,上記基板2の表側面21と裏側面2
2とにそれぞれ光照射できるように配置された一対の光
源12とを有する。そして,上記製造装置1は,上記保
持手段11によって保持した基板2の両面における絶縁
樹脂層3に対して,上記一対の光源12によって同時に
光を照射するよう構成してある。
That is, as shown in FIG. 1, the manufacturing apparatus 1 for a multilayer printed wiring board includes a holding means 11 for holding the substrate 2 in a substantially vertical state, and a front surface 21 and a rear surface 2 of the substrate 2.
2 and a pair of light sources 12 arranged so as to be able to irradiate light. The manufacturing apparatus 1 is configured to simultaneously irradiate the insulating resin layers 3 on both surfaces of the substrate 2 held by the holding means 11 with the pair of light sources 12.

【0025】そして,上記保持手段11は,搬送手段1
3に取り付けられている。また,上記光源12と上記基
板2との最短距離Dは375mmである。また,図1に
示すごとく,上記光源12の後方には,光を上記基板2
側へ反射する反射板121を配設してある。
The holding means 11 is provided with the transport means 1.
3 is attached. The shortest distance D between the light source 12 and the substrate 2 is 375 mm. Also, as shown in FIG.
A reflection plate 121 that reflects light to the side is provided.

【0026】本例の多層プリント配線板の製造方法は,
基板2の両面に形成した絶縁樹脂層3を光硬化させるに
当り,上記のごとく構成した製造装置1を用い,上記基
板2を略垂直状態に保持し,その両面における絶縁樹脂
層3に対して基板2の両面より同時に光を照射する。
The method of manufacturing the multilayer printed wiring board of this embodiment is as follows.
When photo-curing the insulating resin layers 3 formed on both surfaces of the substrate 2, the manufacturing apparatus 1 configured as described above is used to hold the substrate 2 in a substantially vertical state. Light is irradiated simultaneously from both sides of the substrate 2.

【0027】即ち,図1に示すごとく,上記製造装置1
における保持手段11によって,上記基板2の端部25
を把持して上方から吊り下げることにより,上記基板2
を略垂直状態に保持する。上記端部25には,絶縁樹脂
層3は形成されていない。また,図1の矢印Aに示すご
とく,上記搬送手段13によって上記基板2を略垂直状
態で搬送しながら該基板2の両面に光を照射する。ま
た,上記絶縁樹脂層3は,アクリル系の光硬化性樹脂を
混在させたエポキシ樹脂によって形成する。
That is, as shown in FIG.
Of the substrate 2 by the holding means 11
By holding and suspending from above, the substrate 2
Is held substantially vertically. The insulating resin layer 3 is not formed on the end 25. Further, as shown by an arrow A in FIG. 1, light is applied to both surfaces of the substrate 2 while the substrate 2 is transported in a substantially vertical state by the transport means 13. The insulating resin layer 3 is formed of an epoxy resin mixed with an acrylic photocurable resin.

【0028】次に,本例の多層プリント配線板の製造方
法につき具体的に示す。即ち,まず,両面に導体回路を
形成した基板2の両面に絶縁樹脂層3を塗布し,乾燥さ
せる。次いで,上記絶縁樹脂層3に対し,露光,現像を
行うことによりバイアホールを形成する。次いで,上記
基板2を,上述のごとく,保持手段11によって略垂直
状態に保持しつつ,搬送手段13によって搬送する(図
1)。
Next, a method for manufacturing the multilayer printed wiring board of this embodiment will be specifically described. That is, first, the insulating resin layer 3 is applied to both sides of the substrate 2 having the conductor circuits formed on both sides, and dried. Next, exposure and development are performed on the insulating resin layer 3 to form a via hole. Next, as described above, the substrate 2 is transported by the transport unit 13 while being held in a substantially vertical state by the holding unit 11 (FIG. 1).

【0029】そして,上記基板2を上記一対の光源12
の間に送入すると共に,これを搬送しながら,上記光源
12によって,約1分間,上記基板2の表側面21及び
裏側面22に同時に光を照射する。上記基板2の搬送速
度は,2cm/秒であり,このとき照射する光の積算光
量は,片面につき約6000mJである。これにより,
上記基板2の表側面21及び裏側面22における絶縁樹
脂層3を同時に光硬化させる。
Then, the substrate 2 is connected to the pair of light sources 12.
The light source 12 simultaneously irradiates the front side surface 21 and the back side surface 22 of the substrate 2 with light for about one minute while transporting the same. The transfer speed of the substrate 2 is 2 cm / sec. At this time, the integrated light amount of the irradiated light is about 6000 mJ per side. This gives
The insulating resin layers 3 on the front side surface 21 and the back side surface 22 of the substrate 2 are simultaneously light-cured.

【0030】更に,上記基板2を熱処理炉に投入し,上
記のごとく光硬化させた上記絶縁樹脂層3を熱により更
に硬化させる。次いで,上記絶縁樹脂層3の表面に粗化
処理を施すことにより層間絶縁層とし,更にその上に導
体回路を施す。この層間絶縁層と導体回路の形成を繰り
返し,最外層には,はんだパッドを有するソルダーレジ
ストを施すことにより,多層のプリント配線板を製造す
る。
Further, the substrate 2 is put into a heat treatment furnace, and the photo-cured insulating resin layer 3 is further cured by heat. Next, the surface of the insulating resin layer 3 is subjected to a roughening treatment to form an interlayer insulating layer, and a conductive circuit is further provided thereon. The formation of the interlayer insulating layer and the conductor circuit is repeated, and a solder resist having solder pads is applied to the outermost layer to manufacture a multilayer printed wiring board.

【0031】次に,本例の作用効果につき説明する。上
記多層プリント配線板の製造方法においては,上記基板
2の両面に形成した絶縁樹脂層3を同時に光照射するた
め,上記絶縁樹脂層3を同時に光硬化させることができ
る。それ故,絶縁樹脂層3の硬化に伴う応力が上記基板
2の一方の面に集中することがなく,該基板2に反り
(図4(B)参照)が発生するおそれがない。また,こ
れにより,基板2に形成した絶縁樹脂層にクラックや剥
離が生ずるおそれもない。
Next, the operation and effect of this embodiment will be described. In the method for manufacturing a multilayer printed wiring board, since the insulating resin layers 3 formed on both surfaces of the substrate 2 are simultaneously irradiated with light, the insulating resin layers 3 can be light-cured simultaneously. Therefore, the stress due to the hardening of the insulating resin layer 3 does not concentrate on one surface of the substrate 2, and there is no possibility that the substrate 2 is warped (see FIG. 4B). Thus, there is no possibility that cracks or peeling may occur in the insulating resin layer formed on the substrate 2.

【0032】また,上記製造方法においては,基板2を
略垂直状態に保持して光照射を行うため,基板2の表側
面21あるいは裏側面22を製造装置1等に接触させる
ことがない。それ故,上記基板2の両面に形成した絶縁
樹脂層3に傷がついたり,異物が付着したりするおそれ
がない。
In the above manufacturing method, since the substrate 2 is held in a substantially vertical state and light is irradiated, the front surface 21 or the rear surface 22 of the substrate 2 does not come into contact with the manufacturing apparatus 1 or the like. Therefore, there is no possibility that the insulating resin layers 3 formed on both surfaces of the substrate 2 are damaged or foreign substances are attached.

【0033】また,上記製造方法においては,基板2の
両面の絶縁樹脂層3を同時に光照射するため,基板2を
反転させて再度光照射する必要がない。そのため,片面
が未処理のままの基板2を次工程へ払い出したり,ある
いは同一面を必要以上に光照射したりするといった作業
ミスが生ずるおそれがない。また,作業効率も向上す
る。
In the above manufacturing method, since the insulating resin layers 3 on both surfaces of the substrate 2 are irradiated with light at the same time, it is not necessary to turn over the substrate 2 and irradiate light again. Therefore, there is no possibility that an operation error such as paying out the substrate 2 having one surface left unprocessed to the next process or irradiating the same surface with light more than necessary occurs. Also, work efficiency is improved.

【0034】また,上記基板2を略垂直状態で搬送しな
がら該基板2の両面に光を照射するため,多数の基板2
への光照射を一層効率よく行うことができ,上記プリン
ト配線板の生産効率が向上する。上記基板3と光源12
との最短距離が375mmであるため,上記基板3の全
面に略均等に,充分に光を照射することができる。その
ため,上記基板2の全面における絶縁樹脂層3を均一に
光硬化させることができ,また,基板2の反りや絶縁樹
脂層3のクラックや剥離を一層確実に防ぐことができ
る。
In order to irradiate both sides of the substrate 2 while transporting the substrate 2 in a substantially vertical state, a large number of substrates 2
Light can be more efficiently applied to the printed wiring board, and the production efficiency of the printed wiring board is improved. The substrate 3 and the light source 12
Since the shortest distance from the substrate 3 is 375 mm, the entire surface of the substrate 3 can be sufficiently and substantially uniformly irradiated with light. Therefore, the insulating resin layer 3 on the entire surface of the substrate 2 can be uniformly photo-cured, and the warpage of the substrate 2 and cracking and peeling of the insulating resin layer 3 can be more reliably prevented.

【0035】実施形態例2 本例は,図2に示すごとく,基板2の保持手段として,
基板2の対向する2つの端部25を両面から挟持するロ
ーラー101を用いた製造装置10の例である。即ち,
2個一組のローラー101が,上記製造装置10におけ
る上部と下部にそれぞれ多数配列してある。各ローラー
101は,それぞれ同じ速度で回転しており(矢印
R),基板2の搬送手段を兼ねている。そして,上記一
組のローラー101の間に上記基板2の端部25を挟持
することにより,上記基板2を略垂直状態に保持して搬
送する。その他は,実施形態例1と同様である。
Embodiment 2 In this embodiment, as shown in FIG.
1 is an example of a manufacturing apparatus 10 using a roller 101 that sandwiches two opposite ends 25 of a substrate 2 from both sides. That is,
A large number of two pairs of rollers 101 are arranged at the upper part and the lower part of the manufacturing apparatus 10, respectively. Each roller 101 rotates at the same speed (arrow R), and also serves as a transport unit for the substrate 2. Then, the substrate 2 is held and transported in a substantially vertical state by sandwiching the end portion 25 of the substrate 2 between the pair of rollers 101. Other configurations are the same as those of the first embodiment.

【0036】本例の場合には,上記基板2を一層正確に
所定の位置に保持し搬送することができる。その他,実
施形態例1と同様の作用効果を有する。
In the case of this embodiment, the substrate 2 can be held and transported at a predetermined position more accurately. In addition, the third embodiment has the same functions and effects as the first embodiment.

【0037】なお,本発明は,熱硬化性樹脂と熱可塑性
樹脂の複合体からなる層間絶縁層形成用樹脂に,アクリ
ル系の光硬化性樹脂を混在させてアクリル化させたもの
を,上記基板に施す絶縁樹脂層として用いる場合に,一
層効果を発揮する。上記熱硬化性樹脂としては,エポキ
シ樹脂,フェノール樹脂,トリアジン樹脂,ポリオレフ
ィン樹脂,ポリフェニルエーテル樹脂,ポリイミド樹脂
等がある。
The present invention relates to a method of forming an interlayer insulating layer composed of a composite of a thermosetting resin and a thermoplastic resin and mixing an acrylic photocurable resin into an acrylic resin to form an acrylic resin. It is more effective when used as an insulating resin layer applied to a substrate. Examples of the thermosetting resin include an epoxy resin, a phenol resin, a triazine resin, a polyolefin resin, a polyphenyl ether resin, and a polyimide resin.

【0038】[0038]

【発明の効果】上述のごとく,本発明によれば,基板の
反りのない多層プリント配線板を,確実かつ効率的に得
ることのできる多層プリント配線板の製造方法及び製造
装置を提供することができる。
As described above, according to the present invention, it is possible to provide a method and an apparatus for manufacturing a multilayer printed wiring board capable of reliably and efficiently obtaining a multilayer printed wiring board without warpage of a substrate. it can.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施形態例1における,プリント配線板の製造
方法及び製造装置の説明図。
FIG. 1 is a diagram illustrating a method and an apparatus for manufacturing a printed wiring board according to a first embodiment.

【図2】実施形態例2における,プリント配線板の製造
方法及び製造装置の説明図。
FIG. 2 is a diagram illustrating a method and an apparatus for manufacturing a printed wiring board according to a second embodiment.

【図3】従来例における,プリント配線板の製造方法及
び製造装置の説明図。
FIG. 3 is an explanatory view of a method and an apparatus for manufacturing a printed wiring board in a conventional example.

【図4】従来例における,基板の反りの説明図。FIG. 4 is an explanatory view of warpage of a substrate in a conventional example.

【符号の説明】[Explanation of symbols]

1...製造装置, 11...保持手段, 12...光源, 13...搬送手段, 2...基板, 3...絶縁樹脂層, 1. . . Manufacturing equipment, 11. . . Holding means, 12. . . Light source, 13. . . 1. transport means; . . Substrate, 3. . . Insulating resin layer,

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 光硬化性を有する絶縁樹脂層を形成して
なる多層プリント配線板を製造する方法において,導体
回路を施した基板の両面に,光硬化性を有する上記絶縁
樹脂層を形成した後,上記基板の両面より同時に光を照
射して上記絶縁樹脂層を光硬化させることを特徴とする
多層プリント配線板の製造方法。
1. A method for manufacturing a multilayer printed wiring board comprising a photocurable insulating resin layer formed on a substrate provided with a conductive circuit, wherein the photocurable insulating resin layer is formed on both surfaces of the substrate. A method of manufacturing a multilayer printed wiring board, comprising: irradiating light from both sides of the substrate at the same time to light cure the insulating resin layer.
【請求項2】 請求項1において,上記基板を略垂直状
態に保持して上記絶縁樹脂層を光硬化させることを特徴
とする多層プリント配線板の製造方法。
2. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein said substrate is held substantially vertically and said insulating resin layer is photo-cured.
【請求項3】 請求項1又は2において,上記基板を略
垂直状態で搬送しながら該基板の両面に光を照射するこ
とを特徴とする多層プリント配線板の製造方法。
3. The method according to claim 1, wherein both sides of the substrate are irradiated with light while the substrate is transported in a substantially vertical state.
【請求項4】 請求項1〜3のいずれか一項において,
上記基板への光照射は,該基板との最短距離が100〜
500mmの位置に配置した光源から行うことを特徴と
する多層プリント配線板の製造方法。
4. The method according to claim 1, wherein:
The light irradiation on the substrate is performed when the shortest distance from the substrate is 100 to
A method for producing a multilayer printed wiring board, wherein the method is performed from a light source arranged at a position of 500 mm.
【請求項5】 光硬化性を有する絶縁樹脂層を形成して
なる多層プリント配線板の製造装置において,該製造装
置は,基板を略垂直状態に保持する保持手段と,上記基
板の表側面と裏側面とにそれぞれ光照射できるように配
置された一対の光源とを有し,上記保持手段によって保
持した基板の両面における上記絶縁樹脂層に対して,上
記一対の光源によって同時に光を照射するよう構成して
あることを特徴とする多層プリント配線板の製造装置。
5. A multilayer printed wiring board manufacturing apparatus having a photocurable insulating resin layer formed thereon, the manufacturing apparatus comprising: holding means for holding a substrate in a substantially vertical state; A pair of light sources disposed so as to be able to irradiate light to the rear side surface, and the insulating resin layers on both surfaces of the substrate held by the holding means are simultaneously irradiated with light by the pair of light sources. An apparatus for manufacturing a multilayer printed wiring board, comprising:
【請求項6】 請求項5において,上記保持手段は,搬
送手段に取り付けられており,上記基板を上記搬送手段
によって搬送しながら上記基板の両面に光を照射するよ
う構成してあることを特徴とする多層プリント配線板の
製造装置。
6. The apparatus according to claim 5, wherein the holding means is attached to the transfer means, and irradiates both surfaces of the substrate with light while transferring the substrate by the transfer means. For manufacturing a multilayer printed wiring board.
【請求項7】 請求項5又は6において,上記光源と上
記基板との最短距離は100〜500mmであることを
特徴とする多層プリント配線板の製造装置。
7. The manufacturing apparatus according to claim 5, wherein a shortest distance between the light source and the substrate is 100 to 500 mm.
JP37025699A 1999-12-27 1999-12-27 Method and device for manufacturing multilayered printed wiring board Pending JP2001185833A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP37025699A JP2001185833A (en) 1999-12-27 1999-12-27 Method and device for manufacturing multilayered printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP37025699A JP2001185833A (en) 1999-12-27 1999-12-27 Method and device for manufacturing multilayered printed wiring board

Publications (1)

Publication Number Publication Date
JP2001185833A true JP2001185833A (en) 2001-07-06

Family

ID=18496450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP37025699A Pending JP2001185833A (en) 1999-12-27 1999-12-27 Method and device for manufacturing multilayered printed wiring board

Country Status (1)

Country Link
JP (1) JP2001185833A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013015157A1 (en) * 2011-07-27 2013-01-31 住友重機械工業株式会社 Device and method for producing substrate

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211994A (en) * 1984-04-06 1985-10-24 田中貴金属工業株式会社 Method of producing printed circuit substrate
JPS615595A (en) * 1984-06-15 1986-01-11 富士通株式会社 Method of producing multilayer printed board
JPH1013034A (en) * 1996-06-27 1998-01-16 Nec Toyama Ltd Method for wiring multilayer printed wiring board
JPH10107450A (en) * 1996-09-27 1998-04-24 Ibiden Co Ltd Method for manufacturing multi-layer printed wiring board, and development processing jig
JPH10154876A (en) * 1996-09-27 1998-06-09 Ibiden Co Ltd Manufacture of multilayered printed wiring board

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211994A (en) * 1984-04-06 1985-10-24 田中貴金属工業株式会社 Method of producing printed circuit substrate
JPS615595A (en) * 1984-06-15 1986-01-11 富士通株式会社 Method of producing multilayer printed board
JPH1013034A (en) * 1996-06-27 1998-01-16 Nec Toyama Ltd Method for wiring multilayer printed wiring board
JPH10107450A (en) * 1996-09-27 1998-04-24 Ibiden Co Ltd Method for manufacturing multi-layer printed wiring board, and development processing jig
JPH10154876A (en) * 1996-09-27 1998-06-09 Ibiden Co Ltd Manufacture of multilayered printed wiring board

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013015157A1 (en) * 2011-07-27 2013-01-31 住友重機械工業株式会社 Device and method for producing substrate
CN103718661A (en) * 2011-07-27 2014-04-09 住友重机械工业株式会社 Device and method for producing substrate
JPWO2013015157A1 (en) * 2011-07-27 2015-02-23 住友重機械工業株式会社 Substrate manufacturing apparatus and substrate manufacturing method

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