JP2001152098A - Method for sticking fine on substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for sticking a film on substrates in which substrates are continuously conveyed while treating an interval between substrates under a condition of temporarily stopping the feed of the film, a continuous sticking of the substrate to the film is carried out and the number of processed substrates per unit time is increased. SOLUTION: This method for sticking a film is to pass a plurality of sheets of substrates which are conveyed on a conveying route which maintaining a desired interval and the film which is fed from a wound roll and is applied by the treatment of an interval between substrates on parts corresponding to the interval between substrates between pressure rollers installed on the middle of the conveying route to stick the adhesive face of the film on each of the substrates. While continuously conveying a plurality of substrates on the conveying route, the feed of the film is intermittently and temporarily stopped and the treatment of an interval between substrates is performed, and after that the quantity fed of the film is stored by the rotation of a suction roller which leads to the relative displacement of suction zoned. The stored film and a plurality of substrates are continuously fed between the pressure rollers to continuously stick the film on the substrates.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of attaching a film to a substrate, and more particularly, to a method of attaching a film to a plurality of substrates conveyed on a conveyance path while maintaining a desired interval and feeding the film from a roll wound around the substrate. The present invention relates to a film attaching method in which an adhesive surface of a film is attached to each substrate through a pressure roller provided in the middle of a transport path, with a film having a corresponding portion subjected to inter-substrate processing.

[0002]

2. Description of the Related Art As a method of affixing a film to a substrate, a film is fed from a roll wound around a plurality of substrates conveyed on a conveyance path while maintaining a desired interval, a cover film is peeled off, and the dimensions of the substrate are reduced. In the single-wafer bonding method, in which the film is cut in the width direction and the cut front or rear end is aligned with the front or rear end of the substrate and pressure-bonded, an apparatus for implementing this method is complicated. There is a problem that wrinkles and bubbles are easily generated at the leading and trailing ends of the film.

On the other hand, a continuous film sticking method has been proposed in which the unwound film is peeled off the cover film, but is not cut before sticking, but is cut after sticking.

In this continuous film sticking method, the adhesive surface of the film is stuck on the entire length of the substrate (transfer direction), or the portion of the film between the substrates comes into contact with the pressure roller so that the pressure roller is pressed. There is a problem of getting dirty. Therefore, an inter-substrate process must be performed to make the portion of the film corresponding to between the substrates a non-adhesive surface. During this process, the feeding of the film is stopped and the transport of the substrate is also stopped.

[0005]

In the above-described conventional continuous film sticking method, the number of substrates processed per unit time is reduced because the substrate is intermittently transported.

Accordingly, an object of the present invention is to provide a method for attaching a film to a substrate which enables continuous attachment of the substrate and the film while continuously transporting the substrate, and increases the number of substrates processed per unit time. To provide.

[0007]

SUMMARY OF THE INVENTION A feature of the present invention that achieves the above object is that a plurality of substrates conveyed on a conveyance path while maintaining a desired interval and an interval between each substrate unwound from a wound roll are provided. In a method of attaching a film to a substrate, a film having been subjected to inter-substrate processing at a portion to be applied, and applying an adhesive surface of the film to each substrate through a pressure roller provided in the middle of the transport path, a plurality of substrates are transported on the transport path. While the film is continuously conveyed, the feeding of the film is intermittently temporarily stopped to perform the inter-substrate processing, and after the inter-substrate processing, the film feeding amount is stored by the rotation of the suction roller in which the suction area relatively moves. Another object of the present invention is to continuously supply the stored film and a plurality of substrates between the pressure rollers to continuously bond the substrate and the film.

According to the present invention, the feeding of the film is temporarily stopped, the substrate is continuously transported while performing the inter-substrate processing, and the substrate and the film are continuously attached to each other.
It is possible to provide a film sticking method in which the number of substrates processed per unit time is large.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a method for attaching a film according to the present invention will be described based on an embodiment shown in the drawings.

FIG. 1 shows a film sticking apparatus for explaining an embodiment of the present invention.

In FIG. 1, reference numeral 1 denotes a film roll on which a film 2 is wound. The film 2 has a three-layer structure of a base film, an adhesive resist film, and a cover film. The base film is wound so that the outer peripheral side is on the outer peripheral side and the cover film is on the inner peripheral side. The cover film is peeled off via the peeling roller 3 and collected by the cover film winding roller 4.

Reference numeral 5 denotes an inter-substrate processing means.
a, a pair of film clampers 5b and a pair of perforated cutters 5c. The interval 1 between the perforated cutters 5c is set to be larger than the transport interval d of the substrate 11 described later. Each perforated cutter 5c is a roulette or thin gear-shaped cutter used for so-called sewing, which has a disk shape and has notches at regular intervals on peripheral teeth (blades).

In order to form perforations, the film 2
Is temporarily stopped intermittently, and the fixed base 5a
And the film 2 sandwiched between the pair of film clampers 5b,
Each perforated cutter 5c is moved in the width direction of the film 2 (the direction perpendicular to the paper surface) while being pressed against the film 2. As a result, the perforated cutters 5c rotate and the peripheral teeth (blades) cut off by the notches bite into the film 2 at regular intervals to form perforations in the width direction of the film 2.

A protective tape is stuck by a tape sticking mechanism (not shown) in the width direction of the resist film on the film 2 at the interval l where the perforations are formed. So that it does not stick to each of the front and rear ends of each substrate 11 to be formed. Thus, the inter-substrate processing is performed.

6A and 6B are suction rollers. The suction rollers 6A and 6B have a structure shown in FIGS. 2 and 3, the suction roller 6 will be described.

The suction roller 6 has a hollow stationary shaft 6a having a right end fixed in a cantilever shape, a rotating cylinder 6c coaxially supported at both ends of the stationary shaft 6a via bearings 6b, and A drive shaft 6d fixed to the left end of the rotary cylinder 6c is provided. The stationary shaft 6a is directly fixed to the gantry H of the apparatus by a support member 6e, and the drive shaft 6d is fixed to the gantry H by a support member 6g via a bearing 6f. The center of the drive shaft 6d is located on the extension of the center of the stationary shaft 6a.

Accordingly, when the drive shaft 6d is rotated, the rotary cylinder 6c rotates with the stationary shaft 6a as a fixed shaft as shown in FIG. On the outer periphery of the stationary shaft 6a near both bearings 6b, two radial projecting portions 6h extending to near the inner periphery of the rotary cylinder 6c and a fan-like flange portion 6i provided therebetween.
There are two spaces Sa and Sb defined by the stationary shaft 6a, the drive shaft 6d, the protrusion 6h, and the flange 6i.
A plurality of openings 6j are formed in the stationary shaft 6a between the fan-shaped flange portions 6i so as to communicate the space Sa and the hollow portion of the stationary shaft 6a.
Is pierced. The rotary cylinder 6c is provided with a large number of openings 6k all around the portion corresponding to the portion between the fan-shaped flange portions 6i of the stationary shaft 6a. The hollow portion of the stationary shaft 6a is connected to a pipe 7 connected to a vacuum source (not shown) at the right end and is sucked.
k, a space Sa, an opening 6j of the stationary shaft 6a, an air flow through the hollow portion and the pipe 7 are formed. on the other hand,
The space Sb is only at atmospheric pressure through a number of openings 6k.

The outer peripheral surface of the rotary cylinder 6c where the air flows moves relatively in the circumferential direction as the rotary cylinder 6c rotates. Therefore, when the film 2 comes into contact with the outer peripheral surface of the rotary cylinder 6c where air flows, the film 2 is attracted and moves with rotation. However, the film 2 is not attracted and reaches the part where the atmospheric pressure is reached. Be released from.

The range of adsorption of the film 2 to the outer peripheral surface of the rotary cylinder 6c can be set by the radiation angle of the two projections 6h, that is, the length of the space Sa in the circumferential direction.

Returning to FIG. 1, reference numeral 8 indicates a right-and-left movement as indicated by a dashed line, and
This is a length adjusting means for adjusting the length of the film 2 between 10B to an integral multiple of the length of the substrate 11. 9 is film 2
Are guide rollers that allow smooth delivery between the pressure rollers 10A and 10B. The substrate 11 is transported from left to right in the transport path formed by the rollers 12 in the figure, and the pressure rollers 10A and 10B extend in the width direction above and below the transport path. Although the axis of the pressure roller 10A is slightly moved up and down as the substrate 11 is transported as shown in the figure,
The axis of the pressure roller 10B does not move. Reference numerals 13 and 14 denote a pinch roller and a nip roller, respectively. Film 2
Is peeled off at the nip roller 14 and collected by the base film winding roller 15.

The film roll 1, the inter-substrate processing means 5, the suction roller 6, the pressure roller 10 and the like are each driven by an electric motor. The overall control of the film sticking apparatus including these drives is, for example, as follows. A control means (not shown) constituted by a microcomputer executes a predetermined control program on the basis of data given in advance, board edge detection information of a board detection sensor (not shown), and the like. Will be

Next, a method for attaching the film will be described. Each substrate 11 is continuously transported rightward in the figure on the transport path while maintaining a desired interval d. The pressure roller 10A moves up and down at the distance d between the substrates 11 as shown by the dotted line. That is, it rises at the rear end of the preceding substrate 11 and falls at the front end of the subsequent substrate 11. The operation is performed based on the board edge detection information of the board detection sensor.

The film 2 is sucked by the rotation of the rotary cylinder 6c of the suction roller 6A, pulled to the left and fed out from the film roll 1, the cover film is peeled off by the peeling roller 3, and the resist film is exposed. When the length of the film pressure bonding length L with respect to the substrate 11 is extended, the extension is stopped once, the perforation is formed by the inter-substrate processing means 5 and the protective tape is attached as described above, and the resist film is transferred to the substrate 11. So that it does not stick to each of the front and rear ends.

While the inter-substrate processing is performed on the resist film of the film 2, the rotating cylinder 6 on the suction roller 6A is used.
The rotation of c is stopped. While the suction roller 6A is stopped, the suction roller 6B is rotated, and the peripheral speed of the rotary cylinder 6c in the suction roller 6B is changed to the speed of the substrate 1 being continuously conveyed.
1, the supply of the film 2 to each substrate 11 is continued, and the pressure rollers 10A, 10B.
The attachment of the film 2 to the substrate 11 by B is performed continuously. The feeding and supply of the film 2 by the rotation of the rotary cylinder 6c by the suction rollers 6A and 6B are performed by sucking the base film and are not in contact with the surface of the resist film, so that the resist film is not stained.

When the inter-substrate processing on the resist film of the film 2 is completed, the rotating cylinder 6 in the suction roller 6A
The rotation of c is restarted, and the rotation speed is made faster than the rotation speed of the suction roller 6B. Therefore, the suction rollers 6A and 6A
As shown by the dotted line between B, during the high-speed rotation of the suction roll 6A, the film 2 stores the film feeding amount to prepare for stopping the suction roller 6A.

The collection of the cover film by the cover film take-up roller 4 is also synchronized with the high-speed feeding and stopping of the film 2. The film feeding amount is stored by the suction and release of the film 2 accompanying the rotation of the suction rollers 6A and 6B, and the attaching device becomes simple.

Even if the film feeding is intermittently temporarily stopped and the inter-substrate processing is performed, the substrates can be transported continuously. Therefore, the number of substrates processed per unit time is large because the substrate transport is not stopped. It will be.

The inter-substrate processing means 5 is not limited to the method of forming perforations and attaching a protective tape. For example, a cut is made in the width direction with respect to only the resist film with an interval l, and only the resist film in between is cut off, a tape having a width of l is pasted on the resist film in the width direction of the film 2, Non-adhesive paint may be sprayed on or a means such as one that irradiates ultraviolet rays to deteriorate the resist film may be used.

The length adjusting means 8 can be omitted as long as the film feeding and storing amount is sufficient by setting the rotation speed of the suction roller 6A.

The suction roller 6A is supported by a double-supported beam structure.
The suction roller 6B may be provided on the outer periphery of the suction roller 6A. In this case, the bearing 6f can be omitted, and the rotational runout of the suction rollers 6A and 6B can be reduced. To lower the height of the attaching device, the suction roller 6
The distance between A and 6B may be set wide.

In the embodiment shown in FIG. 1, the base film is continuously peeled and collected after pressure bonding. However, since the substrate 11 is not necessarily immediately subjected to the next process, the substrate 11 is not peeled off and the portion between the substrates is not separated. To cut the film 2 in the width direction,
The base film may be peeled off when the next processing is performed on the substrate 11.

Further, the film roll 1 and the inter-substrate processing means 5
Or, the suction rollers 6A and 6B may be arranged below the transport path of the substrate 11 formed by the rollers 12, and a resist film may be stuck on the upper surface of the substrate 11.

[0033]

As described above, according to the present invention, a large number of substrates are continuously transferred per unit time while the unwinding of the film is temporarily stopped and the processing between the substrates is performed, and the film is continuously transferred to those substrates. Can be pasted.

[Brief description of the drawings]

FIG. 1 is a schematic view of a film sticking apparatus for explaining an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view of a suction roller used in the film sticking apparatus shown in FIG.

FIG. 3 is a cross-sectional view of the suction roller shown in FIG. 2, taken along the line III-III.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Film roll, 2 ... Film, 5 ... Processing means between substrates, 6A, 6B ... Suction roller, 10A, 10B ... Crimping roller, 11 ... Substrate

Claims (3)

[Claims] 1. A transport path comprising: a plurality of substrates transported on a transport path while maintaining a desired interval; and a film unwound from a wound roll and subjected to inter-substrate processing at a portion corresponding to the interval between the substrates. In the method of attaching a film to a substrate, the adhesive surface of the film is attached to each substrate through a pressure roller provided in the middle of the method, intermittently feeding out the film while a plurality of substrates are continuously transported on a transport path. After the inter-substrate processing, the film feeding amount is stored by the rotation of the attraction roller in which the attraction area relatively moves, and the stored film and the plurality of substrates are moved between the pressure roller. A method for attaching a film to a substrate, comprising continuously supplying the film to the substrate and continuously attaching the film to the substrate. 2. The method according to claim 1, wherein said suction roller has a hollow stationary shaft and a rotating cylinder rotatably supported outside said stationary stationary shaft. Is divided into two by two protrusions extending from the stationary shaft toward the rotary cylinder, and one of the divided spaces is communicated with an opening formed in the stationary shaft, and Has a plurality of holes perforated over the entire circumference, the hollow portion of the stationary shaft is connected to a vacuum source, and the film is vacuum-adsorbed on the outer periphery of the rotary cylinder by rotating the rotary cylinder. Wherein the film is unwound from the vacuum at a location corresponding to the other of the divided spaces. 3. The method of attaching a film to a substrate according to claim 1, wherein the processing between the substrates is performed by forming perforations in a width direction of the film by using a perforation cutter. How to attach film to