JPH11333929A - Method and apparatus for continuously supplying raw film in film tensioning apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the generation of exposure inferiority caused by the bonding of a connection line to the exposure region of a substrate when the rear end of a preceding film and the leading end of a succeeding film are connected by a self-adhesive tape to continuously supply the films. SOLUTION: When the rear end of a preceding film and the leading end of a succeeding film are bonded by a single surface self-adhesive tape 86 in a continuous supply apparatus, a connection line is formed so that the laminated film 12 bonded to a substrate 16 is cut by a full cutter between the half cut lines 49A, 49B by a half cutter and at a position shifted from the single surface self-adhesive tape 86 in the vicinity of the connection line.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate for a printed circuit board or a glass substrate for a liquid crystal display device or a plasma display device. It relates to a continuous feeding method and apparatus.

[0002]

2. Description of the Related Art In the process of manufacturing a printed wiring board used for an electronic device such as a computer, a light-transmitting support film (usually a light-transmitting film represented by polyester) is formed on a conductive layer on the surface of the printed wiring board substrate. A laminate film in which a photosensitive resin layer is formed directly on the resin film) or through an intervening layer and which is covered with a cover film is peeled off and pasted on the cover film. After that, a wiring pattern film is overlaid, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the translucent support film. Next, after the light-transmitting support film is peeled off, the exposed photosensitive resin layer is developed to form an etching mask pattern, and thereafter, unnecessary portions of the conductive layer are removed by etching. A printed wiring board having the above wiring pattern is formed.
Further, in the step of forming a display cell on a glass substrate of a liquid crystal display device or a plasma display device, a similar laminate film is stuck.

As a film sticking apparatus for sticking a laminate film as described above, a continuous film is unwound from a film roll, and the film is intermittently conveyed on a substrate conveying surface by a conveying means. Along the film-attached surface of a plurality of substrates, with the photosensitive resin layer on the film-attached surface side, the two are passed through a lamination roll in a stacked state, and the film is continuously applied to the plurality of substrates. There is a so-called continuous tension type in which a substrate is transported while being pressed.

The light-transmitting support film attached to the substrate must be peeled off before or after exposure and before the developing step while leaving the photosensitive resin layer on the substrate side. It must be separated between each substrate before or after stripping.

When the light-transmitting support film is pulled in the peeling direction, if the photosensitive resin layer on the back surface is continuous on the substrate from a portion protruding from the substrate, the light-transmitting support film may be left when peeling. There is a problem that the photosensitive resin layer on the substrate, which must be removed, is peeled off following the portion of the photosensitive resin layer which protrudes.

In order to solve these problems, conventionally, for example, in a film peeling device disclosed in Japanese Patent Application Laid-Open No. 7-157186, after a film is continuously attached to a substrate, the film is removed at a gap position between the substrates. Cut only the photosensitive resin layer in the film width direction along the edge of the substrate, and then
The light-transmitting support film is continuously peeled off, and at this time, a photosensitive resin layer in a portion between the respective substrates is attached to the peeled light-transmitting support film side.

In the film sticking apparatus disclosed in Japanese Patent Application Laid-Open No. 8-150694, a slit is formed in advance in the width direction of the film in a portion of the photosensitive resin layer corresponding to each substrate, and the slit is continuously formed on the substrate. After the application, the substrate is cut at a position between the substrates, and the translucent support film is peeled off from the cut edge.

Further, the film sticking device disclosed in Japanese Patent Application Laid-Open No. 7-110575 discloses a cover film and an inner portion of the cover film that are slightly wider than both ends of a portion corresponding to each substrate before the cover film is peeled off. Cut in the film width direction together with the photosensitive resin layer to form a half-cut line, and then peel off only the cover film of the part to be attached to the substrate with adhesive tape to expose the photosensitive resin layer, and in this state It is designed to be continuously attached to a substrate. Therefore, after the attachment, the cover film remains laminated on the translucent support film at the position between the substrates,
At this position, the light-transmitting support film and the photosensitive resin layer are cut by a cutter.

[0009] The above-mentioned laminated film is supplied by being unwound from a film supply roll, and the film supply roll has a finite winding length. The supply roll must be replaced. Also, when the remaining amount of the film becomes extremely small, or when it is necessary to change the type and brand of the film to be supplied to the main body of the film sticking apparatus according to the application, the film supply roll is replaced with a new one. Need to supply film.

In this case, the core around which the original film is wound is removed together with the remaining original film, and a new film supply roll is loaded.

Conventionally, in this exchange, when it is time to replace the preceding film supply roll, the film sticking device is stopped, the preceding film supply roll is removed, and the leading end of the film drawn from the new film supply roll is removed.
It was necessary to manually set the film from the film separating member and the tension roller through the rollers in the film supply path to the position of the lamination roll.

For this reason, conventionally, for example, it is necessary to replace the upper and lower film supply rolls after the rewinding in two hours.
It takes 0 minutes, and the ratio of the so-called setup time to the actual operation time is very large, which causes a problem that not only the operation rate of the film sticking device is reduced, but also the efficiency of the entire line is reduced.

On the other hand, the film supply roll can be replaced without stopping the operation of the apparatus, as disclosed in JP-A-8-258237.
In addition, a method and apparatus for continuously supplying a raw film in a film sticking apparatus capable of automatically connecting the trailing end of the preceding raw film and the leading end of the succeeding raw film have been proposed. I have.

[0014]

As described above, the connecting line between the rear end of the preceding web film and the front end of the following web film is formed in a state where these web films are stuck on the substrate.
When exposed on the exposed surface of the substrate, there is a problem that if the light is exposed as it is, the connection line of the photosensitive resin layer results in a defective product.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a substrate on which a film is adhered is determined to be defective due to a connection line between a rear end of a preceding raw film and a front end of a following raw film. It is an object of the present invention to provide a method and an apparatus for continuously supplying a raw film in a film sticking apparatus which is prevented from becoming unfixed.

[0016]

According to the present invention, there is provided a method comprising:
Like, a continuous film formed by laminating a photosensitive resin layer and a cover film on a support film is pulled out from a film supply roll, and the cover film and the photosensitive resin layer are at least in the thickness direction of the translucent support film. Cut a half cut line in the film width direction leaving a part, between the half cut line of the cover film, peeling the range to be attached to the substrate, and, leaving the other part, As the photosensitive resin layer side is located on the film attaching surface side of a plurality of substrates that are sequentially conveyed at a constant interval by the conveying means, while the film is pressed against the substrate by the laminating roll, the substrate is conveyed In the method for continuously supplying the raw film from the film supply roll in the film sticking apparatus, the film is wound from the film supply roll. A step of suction-holding the side of the cover film at the end of the output preceding original film at a fixed position by the first suction means, and a step of holding the non-adhesive side by suction by the second suction means. A step of adhering the side surface of the support film at the tip of the trailing raw film unwound from the trailing film supply roll to a part of the Pressing against the side of the support film at the end of the preceding original film held by suction, and adhering the end to the adhesive sheet, and attaching the preceding original film to the plurality of substrates. At a position between the end portions of the substrate when cut, the preceding raw film in a state of being sucked and held by the first suction means is cut in the width direction to make the length uniform and form the end. Do The continuous supply method of the raw fabric film in Irumu with applying apparatus, is to achieve the above object.

The width of the pressure-sensitive adhesive tape in the film feed direction is made smaller than the distance between the ends of the plurality of substrates, and the preceding source film and the succeeding source film are separated by a gap. The adhesive tape may be adhered to a connection portion between the preceding source film and the succeeding source film so as to be positioned in the gap when applied over the substrate.

Further, the film sticking device is configured to completely cut the film after being stuck on the substrate in a film width direction at a position between ends of each substrate, and The adhesive may be shifted from the entire cutting position.

According to a fourth aspect of the present invention, a photosensitive resin layer and a cover film are laminated on a support film, and the cover film and the photosensitive resin layer in the film pulled out from the film supply roll are formed. A half-cutter that cuts in the film width direction to form a half-cut line, and a cover-film peeling device that peels the cover film between the half-cut lines and in a range where the cover film is to be stuck to a substrate, leaving other portions remaining. And, having the photosensitive resin layer side positioned on the film sticking surface side of the substrate that is intermittently sequentially conveyed by the conveying means, while pressing the film to the substrate with a laminating roll, The raw film from the film supply roll is continuously supplied in a film sticking apparatus adapted to transport a substrate. A first suction means for sucking and holding the cover film side surface at the end of the preceding raw film unwound from the preceding film supply roll at the set position at a fixed position, and having substantially the same width as the raw film. , Which is capable of sucking and holding the non-adhesive side of the single-sided adhesive sheet.
And the supporting film side surface at the leading end of the succeeding raw film unwound from the following film supply roll is the length of the raw film on the adhesive surface of the single-sided adhesive sheet sucked and held by the second absorbing means. In a state of being adhered to a part of the direction, the second suction means is sent to the position of the first suction means, and the remaining adhesive surface of the single-sided adhesive sheet is
Conveying means for pressing the side of the support film at the end of the preceding original film held by the first suction means,
The first suction means is disposed movably in the film width direction at an intermediate position of the film suction surface in the film feeding direction opposite to the film suction surface of the first suction means, and is suction-held by the film suction surface. The preceding raw film in the state, at a position between the ends of the substrate when the preceding raw film is attached to the plurality of substrates, provided with an end cutter that cuts and trims in the width direction. The above object is achieved by a continuous supply device of a raw film in a film sticking device.

The remaining amount detecting means for detecting the remaining amount of the preceding original film in the preceding film supply roll, and calculating the end of the preceding original film based on the detection signal of the remaining amount detecting means, And a control device for adsorbing the preceding raw film by the first adsorbing means at the position.

In the present invention, the connecting line between the rear end of the preceding raw film and the front end of the succeeding raw film is positioned between the substrates when the laminated film is continuously attached to a plurality of substrates. As a result, exposure failure and the like due to the connection line can be prevented.

[0022]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 shows a film sticking apparatus 10 including a continuous film supply apparatus 1 according to the present invention.

The film sticking device 10 includes a substrate transport device 14 for sequentially transporting a plurality of substrates 16 at regular intervals along a substrate transport surface 14A, and a laminated film 1 as described above.
The accumulator 21, the half cutter 22, the cover film peeling device 24, the suction roll 26, and the free rotation are provided between the film supply roll 18 and the pair of laminating rolls 20A and 20B from the film supply roll 18 side. Guide roll 28A ~
28C, a film guide roll 52 is arranged in this order, and the cover film 12C and the photosensitive resin layer 12B (see FIG. 5) of the laminated film 12 unwound from the film supply roll 18 are placed at a predetermined position, and The cutter film 22 cuts the film in the width direction to form a half-cut line, and then the cover film peeling device 24 intermittently interposes only the portion of the cover film 12C between the half-cut lines to be stuck to the substrate 16. In a state where the photosensitive resin layer 12B is exposed, and is sent between the pair of laminating rolls 20A and 20B. Here, the photosensitive resin layer 12B is exposed to a corresponding portion of the substrate 16 conveyed by the substrate conveying device 14. So that the photosensitive resin layers 12B overlap each other, and by the pair of laminating rolls 20A and 20B. It is intended to crimp.

This pair of laminating rolls 20
A and 20B are provided by providing an elastic material such as silicone rubber or silicone rubber whose surface is coated with a non-adhesive coating such as fluororesin on the outer periphery of a metal roll,
In addition, a heater (not shown) is built in, and the surface is heated to 100 to 150 ° C. before the operation of the apparatus is started.
It is constantly rotating during operation.

The laminating rolls 20A, 20A
The first nip roll 30 and the full cutter 3
The second and second nip rolls 34 are arranged in this order from the laminating rolls 20A and 20B in the substrate transport direction.

A pair of upper and lower free rolls 36A and 36B are arranged near the exit side of the film supply roll 18.
The upper end of the upper free roll 36A and the upper end of the suction roll 26 are positioned substantially on the same horizontal plane.

The suction roll 26 has a large number of suction holes (not shown) formed on the surface thereof. The negative pressure applied to the suction roll 26 absorbs the laminated film 12 wound around the suction roll 26, and the free roll is formed. A predetermined tension can be applied to the laminated film 12 between the rolls 36A and 36B and between the laminating rolls 20A and 20B.

The laminate film 12 is unwound in a state in which a torque in the film winding direction is applied to the film supply roll 18 by a torque motor 18A, whereby a tensile force (a suction force to be described later) is applied to the laminate film 12. The tension between the roll 26 and the laminate film 12
When the width is 1000 mm, 2 to 10 kg, preferably 5
Kg is preferable).

Reference numeral 18B in FIG. 1 indicates a film remaining amount sensor of the film supply roll 18. This sensor 18B
Is a line sensor in which a plurality of optical sensors are arranged in the radial direction of the roll, and outputs a signal corresponding to the remaining amount of the film. The torque motor 18A
In response to the signal, the controller 40 (see FIG. 2) makes the film tension on the downstream side of the film flow substantially constant so that the torque in the film winding direction decreases as the remaining amount of the film decreases. Have been.

A rotary encoder 38 is connected to the free roll 36A, and outputs a pulse corresponding to the number of rotations of the free roll 36A to the control device 40 when the laminated film 12 is fed in the direction of the suction roll 26. It has been like that.

The half cutter 22 is shown in FIGS.
As shown in the figure, the laminate film 1 fed horizontally between the suction roll 26 and the free roll 36A
And a pair of disk cutters 44 that are reciprocally movable in the film width direction along the upper surface of the cutter table 42.
A, 44B.
While moving the disk cutters 44A, 44B in the feed direction at the same speed as the laminated film 12, the disk cutters 44A, 44B are moved in the film width direction, and the upper surface side of the laminated film 12 in FIG. The cover film 12C and the photosensitive resin layer 12B are cut while leaving the light-transmitting support film 12A.

The pair of disk cutters 44A, 44
B is provided at a distance in the feed direction of the laminated film 12, and the distance is, as shown in FIG. 5, the rear end of the preceding substrate 16 conveyed on the substrate conveying surface 14A and the succeeding substrate 16 Is slightly larger than the distance between the tips.

The reciprocating motion of the cutter table 42 and the disc cutters 44A and 44B in the laminated film feeding direction is performed by a rack and pinion mechanism 46, and the reciprocating motion of the disc cutters 44A and 44B in the film width direction is performed by a uniaxial robot 48. The rack and pinion mechanism 46 and the uniaxial robot 48 are controlled by the control device 40.

The rack and pinion mechanism 46 includes a rack 46A integrated with the cutter table 42,
A in the film feed direction, and a rail 46B that supports the reciprocally reciprocable horizontally, and meshes with the rack 46A,
A pinion 46C for driving this along the rail 46B
And is configured.

The cutter table 42 is disposed long in the film width direction, and the disk cutter 44
Bar-shaped cutter receivers 45A and 45B made of, for example, a synthetic resin and receiving the cutting edges of A and 44B are embedded in the film width direction.

The single-axis robot 48 is disposed on the rack 46A. The single-axis robot 48 has a ball screw mechanism (not shown).
A support table 45 for supporting 44B is driven in the film width direction.

The film supply rolls 18 are sequentially replaced by the continuous supply device 1 for the raw film, and the laminated film 12 is supplied to the film sticking device 10 without interruption.

The laminated film 12 unwound from the film supply roll 18 passes through the first suction device 54 and the accumulator 21, and after the cover film 12C is peeled off by the cover film peeling device 24, the laminating roll Between 20A and 20B, the photosensitive resin layer 12
B is continuously supplied with B at the bottom.

As shown in FIG. 6, the continuous supply device 1 includes the first suction device 54, the accumulator 21 (only shown in FIGS. 1 and 8), 6, a core collecting device 62, and an air cylinder 64 for driving a horizontal platform 60A, which is a part of the exchange roll transport platform 60, in the left-right direction in FIG.

The exchange roll transport table 60 is horizontally mounted on a pair of upper and lower bars 67 attached to the housing side wall 10A of the film sticking apparatus 10 via a pair of upper and lower rails 68 in a direction perpendicular to the plane of FIG. A frame 60B is movably supported. That is, it can be pulled out horizontally from the side wall 10A of the housing of the film sticking device 10 in the film feeding direction.

As shown in FIG. 7, the exchange roll transfer table 60 reciprocates in the left-right direction in FIG. 6 with respect to the frame 60B via the rail 69 on the inner side of the bottom of the frame 60B in FIG. The horizontal table 6 movably supported
0A. On the horizontal table 60A, a roll table 72 on which a replacement film supply roll 70 for replacement is placed,
Part of the collected core receiving portion 63 of the core collecting device 62
And a second suction device 76 and a third suction device 78 on the upper surface and the distal end thereof, and the air cylinder 64
6 reciprocates in the horizontal direction in FIG. The air cylinder 64 and the horizontal base 60A are connected to the rail 6
8 is slidably engaged with a horizontal locking piece 80 to allow the horizontal base 60A to slide along the rail 68.

Here, the film supply rolls 18, 7
0 is provided with a winding core 19 at the center thereof.
A cylindrical member 19A made of resin around which the laminated film 12 is wound, a medium-diameter cylindrical member 19B fitted to the cylindrical member 19A and penetrating and projecting from both ends of the cylindrical member 19A; A small-diameter bar 19C is fitted to both ends of the medium-diameter cylindrical member 19B and further projects.

The roll table 72 is provided with a spindle 82 (FIG. 7).
The film supply roll (hereinafter referred to as a preceding film supply roll) 1 rotatably supported at a set position by the reference
The trailing film supply roll 70 is placed in parallel with and horizontal to 8, and the height of the trailing film supply roll 70 can be adjusted by the air cylinder 72A. Note that the roll base 72 is connected to the following film supply roll
The small diameter bar 19C of the winding core 19 is supported.

The horizontal position of the roll base 72 is determined when the horizontal base 60A is pushed to the left in FIG.
The center of the subsequent film supply roll 70 is
Is located at the position of the central axis.

The spindle 82 has a pair of left and right sides, as shown in FIG.
As shown in FIG. 3, the air cylinder 82A is rotatably supported by a bearing 82B in a state of being able to advance and retreat in the axial direction.
9 are engaged with the end faces of the small-diameter bars 19C at both ends thereof, and are rotatably supported.

A rotary light-shielding plate 83A is attached to the base end of the spindle 82 on the left side of FIG. 7, and is detected by an optical sensor 83B to detect whether or not the spindle 82 is rotating. I have. The right spindle (not shown) is provided with the torque motor 18A (see FIG. 1) for performing a braking operation.

As shown in FIG. 6, the first suction device 54 includes a pair of guide rolls 84A for vertically guiding the laminated film 12 unwound from the preceding film supply roll 18 at the set position. , 84B, and upper and lower suction surfaces 54A, 54B arranged on the same vertical plane in parallel with and close to the running surface of the laminated film 12 between the guide rolls 84A, 84B. Numerous suction holes 54C to which a negative pressure is applied are formed in the suction surfaces 54A and 54B.

The second suction device 76 (see FIGS. 1, 6, and 7) includes a pair of support posts 60C which are provided on both left and right ends of the horizontal table 60A so as to be close to the frame 60B.
Is attached to the upper end of the cylinder via a cylinder device 77. Here, the second suction device 76 is provided with a suction surface 76A which is at the same height as the suction surface 54A of the first suction device 54 and is disposed at a position facing and parallel to the suction surface 54A. A large number of suction holes 76B to which a negative pressure is applied are formed on the suction surface 76A.

The third suction device 78 (see FIGS. 1, 6 and 7) is provided on the suction surface 7 of the second suction device 76.
At a lower position of 6A, a suction bar 78D is mounted on a support bar 60D stretched between the support posts 60C so that a suction surface 78A is vertically continuous with the suction surface 76A.
The suction surface 78A has a large number of suction holes 7 to which a negative pressure is applied.
8B are formed.

Further, the frame 60B includes the second
A tip cutter 90 is provided opposite to the suction surface 76A of the suction device 76 for cutting the film adsorbed on the suction surface 76A at a middle position in the height direction in the horizontal and width directions.

The tip cutter 90 is a disk cutter, and is rotatably supported in a housing 90A. The housing 90A extends horizontally between the left and right columns of the frame 60B and in parallel with the suction surface 76A. The film is slidably supported by the bar 90B, is manually reciprocated by the operation knob 90C, and cuts the film sucked on the suction surface 76A at this time.

Similarly, the film adsorbed by the suction surfaces 54A and 54B is cut horizontally and in the width direction at the boundary between the suction surfaces 54A and 54B of the first suction device 54. An end cutter 92 is provided. This end cutter 92 is a disk cutter, and is housed in a housing 92A as shown in FIGS. 6, 20, and 21. The housing 92A is connected to a sliding portion 93A of a rodless cylinder 93, and a cylinder 93C is provided. When the magnetic body 93B is moved by the air introduced into the inside, together with the sliding portion 93A, the suction surfaces 54A, 54A.
The film is moved in the film width direction along the boundary line B, whereby the terminal cutter 92 cuts the laminated film 12 sucked on the suction surfaces 54A and 54B.

When the sliding portion 93A and the terminal cutter 92 move along the cylinder 93C, the laminated film 12 is positioned before and after the terminal cutter 92.
Are provided with a pair of pressing rollers 95A and 95B for pressing.

The pressing rollers 95A and 95B are movably supported in a direction perpendicular to the laminated film 12 by a linear motion guide 95C, and are urged in a direction to press the laminated film 12 by a spring 95D. .

As shown in FIGS. 20 and 21, both ends of the cylinder 93C have linear motion guides 95E parallel to the direction in which the terminal cutter 92 advances and retreats with respect to the laminated film 12.
The sliding block 95F supports the sliding block 9F.
5F is driven by an air cylinder 95G.

The terminal cutter 92 is attached to the sliding portion 93A so as to cut the film sucked on the suction surfaces 54A and 54B when the slide block 95F is most protruded by the air cylinder 95G. . The fine adjustment of the film cutting amount by the terminal cutter 92 can also be performed by changing the axial position of the mounting portion of the terminal cutter 92.

The pressing rollers 95A and 95B press the laminated film 12 even when the terminal end cutter 92 is slightly separated from the adsorbing surfaces 54A and 54B and the laminated film 12 adsorbed on the adsorbing surfaces 54A and 54B. Have been able to.

The core collecting section 62 is provided with the horizontal table 60.
A collection core receiving portion 63 which is attached at a position lower than the upper surface of the horizontal base 60A at two positions in the width direction at the end on the opposite side of the rail 68 of FIG.
A pair of recovery levers 7 pivotally supported on the housing side wall 10B on the opposite side (left side) of the housing side wall 10A on the right side (left side) by a shaft 74A on the base end side so as to be swingable in a vertical plane.
4 is included.

The pair of collecting levers 74 are provided on the upper surface of the leading end with the preceding film supply roll 18 at the set position.
6 is provided with a concave portion 74B which can be engaged from below with small-diameter bars 19C at both ends of the winding core 19, and when the air cylinder 74C supported by the housing side wall 10B swings counterclockwise in FIG. The core 19 can be lifted and supported.

When the collection core receiving portion 63 swings the collection lever 74 supporting the winding core 19 clockwise in FIG. 6 below the collection core receiving portion 63,
The medium diameter cylindrical member 19B of the winding core 19 is received by the concave portion 63A.

The reference numeral 96 in FIG.
5 shows a rail for moving the film supply roll 18 in the axial direction to adjust its position.

As shown in FIG. 8, the accumulator 21 includes a fixed roll 21A disposed downstream of the guide roll 84B, a guide roll 84B and a fixed roll 2B.
1A, a tension roll 21C which is moved up and down by a lever 21B, and a guide roll 84.
A pinch plate 21D that circumscribes and can fix and hold the film therebetween and an actuator (cylinder) 21F that separates the pinch plate 21D from the guide roll 84B. Is urged upward by the lever 21B to lift the laminated film 12 above the film path so that a certain amount of film can be stored here. Lever 21B is weight 2
1E is urged clockwise. Note that the tension roll 21C is normally at the uppermost position.

The pinch plate 21D is attached to and supported by a distal end of a piston rod 21G of the actuator (cylinder) 21F via a block 21H.

At least two actuators (cylinders) 21F are arranged in parallel in the width direction of the laminated film 12, so that the pinch plate 21D long in the width direction of the laminated film can be driven synchronously. .

The pinch plate 21D is projected by the actuator 21F as described above, and
2 is pressed against the guide roll 84B, and a slight gap (about 5 mm) is drawn from the path of the laminated film 12.
, So as to take a position parallel to the path.

As shown in FIGS. 1 and 9, the cover film peeling device 24 is provided at a position between the half cutter 22 and the suction roll 26 so that the film passing surface 1 is removed.
3, receiving rolls 24A and 24B that come into contact with the lower side of the laminated film 12, a touch roll 24C that can be separated from and attached to the receiving roll 24B on the side close to the suction roll 26 from above, and an adhesive layer is formed on one surface. With the adhesive layer facing downward in FIGS.
An adhesive tape 24D wound around C and a winding device 24E that winds the tip of the adhesive tape 24D are provided.

Reference numeral 24F in FIGS. 1 and 9 denotes a position above the receiving roll 24A, which sandwiches the laminated film 12 by its own weight together with the receiving roll 24A, and when the cover film 12C is pulled upward, the laminated film 12
Nip rolls to prevent the
G is a tape roll 2 which is a supply source of the adhesive tape 24D.
A tape brake for applying tension to the adhesive tape 24D by applying a torque in the winding direction to 4H,
24I and 24J are the touch roll 24C and the winding device 2
4E, a motor for driving the nip roll 24J in the direction of winding the adhesive tape 24D at the same speed as the feed speed of the laminated film 12, and a reference numeral 24L in FIG. A motor for driving the take-up roll in the take-up device 24E.
Reference numeral 4B denotes a swinging lever that is detachably supported on the swinging lever, and reference numeral 24N denotes a touch cylinder for driving the swinging lever 24M.

The nip roll 24I is a roll whose surface is roughened (usually, the surface roughness Ra is about 10 μm). More specifically, the outer periphery is made of metal, and the metal surface is blasted. In addition, a release coating such as a fluororesin or a silicone resin is applied so that the photosensitive resin adhering to the adhesive layer of the adhesive tape 24D and the cover film 12C does not adhere.

The touch cylinder 24N is controlled by the control device 40, and the film feed direction (FIG. 9) of the portion of the cover film 12C cut by the half cutter 22 between the disk cutters 44A and 44B.
(In the direction indicated by the arrow in FIG. 3), the adhesive tape 24D is prevented from coming into contact with the front half portion, and the half-cut line 4 of the rear disk cutter 44A is moved from the substantially rear half in the film feed direction.
9A (right side in FIG. 9), the peeling of the cover film 12C is started from the half-cut line 49A, and the cover film 12C is brought into contact with the half-cut line 49B of the next disk cutter 44B. The touch roll 24C is driven via the swing lever 24M so as to adhere the adhesive tape 24D.

The adhesive tape 24D is made up of nip rolls 24I and 24J together with the cover film 12C adhered thereto.
The cover film 12C is peeled off from the photosensitive resin layer 12B by being taken up by the take-up device 24E after passing through.

Accordingly, as shown in FIG. 5, the cover film 12C having the same length as the transport pitch of the substrate 16 and the same length between the disk cutters 44A and 44B is left on the translucent support film 12A. Will be.

As shown in FIG. 10, the touch roll 24C presses the cover film 12C from the front in the traveling direction of the laminated film 12 at a position slightly shifted leftward in the figure from the top of the receiving roll 24B. It has been like that.

Reference numeral 24P in FIG. 9 denotes a lever for swingably supporting the nip roll 24I, and reference numeral 24Q denotes a lever 24P.
For biasing the nip roll 24I in the direction of pressing against the nip roll 24J, 24R is a guide roll,
24S (FIG. 9 only) is a peeling confirmation sensor for confirming whether or not the peeled cover film 12C is adhered to the adhesive tape 24D, and 24T is a support shaft for swingably supporting the swing lever 24. , 24U denote guide rolls rotatably supported by the support shaft 24T and wound around the non-adhesive surface side of the adhesive tape 24D unwound from the tape roll 24H.

The reference numeral 24X in FIG. 9 indicates that both ends are attached to an apparatus frame (not shown) and the receiving rolls 24A,
It shows a support bar arranged in parallel with 24B or the like. The support bar 24X supports the touch cylinder 24N and rotatably supports the guide roll 24R via a substantially U-shaped leaf spring 24Y.

The guide roll 24R prevents the adhesive tape 24D from sagging due to the elastic deformation of the leaf spring 24Y.

The pair of laminating rolls 20
A, 20B, the upper laminating roll 20
A is a “closed” position where the roll clamp cylinder 50 presses the lower laminating roll 20B,
And it is configured to be driven between an upwardly-spaced “open” position so as to be in non-contact with the substrate 16 and the laminated film 12 passing therebetween.

The first and second nip rolls 30, 34
Are separated from the upper transport roll 15A by a first clamp cylinder 30A and a second clamp cylinder 34A, respectively, and can be separated from the upper transport roll 15A. 1
6 can be conveyed rightward in FIG. 1 by rotation of the conveying rolls 15A.

Reference numeral 15B in FIG. 1 denotes a transport roll disposed before and after the laminating rolls 20A and 20B and rotated at a constant speed in synchronization with the transport roll 15A.

The full cutter 32 moves at a position between the first and second nip rolls 30 and 34 in synchronization with the substrate transferred by the substrate transfer device 14.
The laminated film 12 is cut in the width direction at a position between the substrates.

The full cutter 32 moves in synchronization with the substrate transport direction along the lower side of the substrate transport surface 14A,
Cutter table 32A reciprocated to return in the opposite direction
The substrate 1 reciprocates in the substrate transport direction together with the cutter table 32A and is transported along the substrate transport surface 14A.
While the cutter table 32A is running synchronously with respect to 6,
A cutter blade 32B that runs in the film width direction and cuts the laminated film 12 between itself and the cutter table 32A, a travel driving device 32C for moving the cutter blade 32B in the substrate width direction, and the cutter table 32A , A cutter and blade 32B and a rack and pinion mechanism (not shown) for traveling (forward movement) in synchronization with the substrate transport direction, and a traveling cylinder 32D for rapid return
And is provided.

At the time of return, a clutch (both not shown) between the pinion and the drive motor is disengaged.

The film guide roll 52 changes the film path of the laminated film 12 to a neutral position where the film path does not come into contact with both of the pair of laminating rolls 20A and 20B. 20B, it is swingably arranged so as not to be in contact with the laminated film 12 during the film sticking operation.

Below the substrate transport surface 14A, a subsequent substrate start sensor 98 also serving as a substrate rear end sensor is provided at a position near the entrance side of the laminating rolls 20A and 20B, and a substrate front end is provided at a position further upstream from the start sensor 98. A substrate standby sensor 100 also serving as a sensor, and a free roll 102 that constitutes a part of the substrate transfer surface 14A is disposed upstream of the subsequent substrate start sensor 98.

Reference numeral 104 in FIG. 1 denotes a conveyor roll driving servomotor for driving the conveyor roll 14C and the upstream transfer roll array 14B in the substrate transfer device 14, and 106 denotes a substrate motor between the conveyor roll 14C and the substrate. A nip roll 106A for sandwiching the substrate 16 and stabilizing the transfer of the substrate, 106A is a cylinder for opening and closing the nip roll 106, and reference numeral 108 in FIG. 11 indicates that the temperature of the substrate 16 being transferred on the substrate transfer surface 14A does not excessively decrease. Are shown, respectively.

As shown in FIG. 11, on the upstream side of the heat retention heater 108 along the substrate transfer surface 14A, as shown in FIG.
A substrate width shifting device 110 is disposed, and a substrate heater (not shown) is disposed further upstream.

The substrate width shifting device 110 lifts the transport roll row 110A and the substrate 16 transported on the transport roll row 110A, and then sends it horizontally below the heat retaining heater 108, and descends to lower the transport roll row 110A. A robot 110B that transfers the substrate 16 onto the transport roller row 110A and returns to the lower position of the transport roller row 110A, and presses the substrate 16 lifted above the transport roll row 110A by the robot 110B from the left and right, thereby pressing in the width direction. And a width adjusting roll row 110C for performing centering.

Reference numeral 110D in FIG.
Board position detecting sensor 110E disposed on the input side of OA
Denotes substrate position detection sensors arranged on the output side.

The robot 110B has a horizontal substrate mounting surface which is long in the substrate transport direction for mounting the substrate 16, and a negative pressure is applied to the substrate mounting surface, so that the substrate 16 is attracted. A plurality of suction holes (not shown) are provided to hold the substrate 16 horizontally, and a heater (not shown) is provided to suppress partial cooling of the substrate 16.

The substrate mounting surface is a metal surface, and if necessary, the metal surface may be covered with a non-adhesive film such as a fluororesin.

Here, the first and second nip rolls 3
The nip rolls 0 and 34 are formed by providing an elastic material such as silicone rubber or a silicone rubber whose surface is coated with a non-adhesive film such as a fluororesin on the outer periphery of a metal roll.

The nip roll 106 is controlled by the controller 40 via the cylinder 40 based on an output signal when the substrate standby sensor 100 detects the front end of the substrate.
The substrate 16 is lowered by A so that the substrate 16 can be sandwiched between the conveyor roll 14C.

The nip roll 34 is an air cylinder 34
By A, the conveyor belt 34C can be separated from and separated from the opposing transport roll 34B, and the conveyor belt 15C is wound between the transport roll 34B and the transport roll 15A adjacent upstream.

When the succeeding substrate start sensor 98 detects the leading end of the substrate fed onto the substrate transfer surface 14A, the servo motor 104 sets the speed to "zero" by the control device 40, temporarily stops the substrate, and In addition, the substrate 16 is rotated at a timing and speed synchronized with the laminated film 12.

The laminating roll 20
A, transport rolls 15A, 34B downstream of 20B
And the upstream conveyor roll 14C and the transport roll row 1
The rotation and stop of the transport roll 4B and the transport roll row 110A are controlled independently by the control device 40 independently of each other.

The negative pressure of the suction roll 26 is:
The force applied to the guide roll 28A is detected by the load cell 27, and the detected value, that is, the tension applied to the laminated film 12 is adjusted by the control device 40 to be constant.

Reference numeral 24V in FIG. 1 indicates a film winding amount sensor in the winding device 24E. This sensor 2
4V is a line sensor in which a plurality of optical sensors are arranged in the radial direction of the roll, and outputs a signal corresponding to the film winding amount.

The rotary encoder 38 outputs the count value to the control device 40 and is set to zero by the control device 40. When the winding diameter of the laminated film 12 on the preceding film supply roll 18 becomes equal to or less than a set value, the control device 40 cuts the film end according to a detection signal from the film remaining amount sensor 18B which detects this. Work has been made to start.

Further, the control device 104 controls the half cutter 1
6 is driven at a predetermined timing, and a signal for driving the full cutter 32 at a predetermined timing is output;
And the actuator 21F of the accumulator 21
, The pinch plate 21D is pressed against the guide roll 84B, and the film is driven so as to restrain the film therebetween, and each unit of the apparatus is controlled as described later.

The controller 40 controls the pinch plate 2
The timing of driving the 1D is determined by inputting an output signal from the film remaining amount sensor 18B when the film remaining amount in the film supply roll 18 becomes equal to or less than a predetermined value.
Also, the film length from the half-cut position by the half-cutter 22 to the film-end cutting position by the terminal cutter 62 including the film path length when the film accumulation amount in the accumulator 21 is the maximum, after the film is pressed. This is the time when the pitch becomes equal to the pitch P in the substrate transport direction at the film cutting portion between the substrates 16. The transport direction pitch P is determined from the length of the substrate 16 and the amount of protrusion of the pressed film from the front and rear ends of the substrate 16.

Next, the operation of the film sticking device 10 including the continuous film supply device 1 will be described.

First, during the operation of the film sticking apparatus 10, the continuous supply device 1 pulls out the exchange roll transport table 60 out of the line along the rail 68, and here, the subsequent film supply for exchange is performed. The roll 70 is placed on the roll base 72, and the leading end of the laminated film 12 unwound from the roll 70 is held by the suction surfaces 76 A, 78 of the second and third suction devices 76, 78.
A (see FIG. 12).

Next, as shown in FIG. 13, the tip cutter 90 is manually driven so that the tip of the laminated film 12 sucked by the suction face 76A is moved in the height direction of the suction face 76A. The tip 12E is formed by cutting in the width direction at the intermediate position.

Next, as shown in FIG. 14, the laminated film 12 is pulled from the front end 12E while the laminated film 12 is being adsorbed on the adsorbing surface 78A of the third adsorbing device 78 to form the second adsorbed film. It is separated from the suction surface 76A of the suction device 76.

Next, as shown in FIG. 15, a single-sided adhesive tape 86 is pulled out from an adhesive tape supply roll (not shown), and the non-adhesive surface 86A is attached to the second suction device 7A.
6 and the single-sided adhesive tape 86 is cut into a length equal to the width of the laminated film 12.

Next, as shown in FIG. 16, the leading end 12E of the separated laminated film 12 is adhered to the adhesive surface 86B of the single-sided adhesive tape 86 that has been attracted to the attracting surface 76A. . Therefore, the tip 12E is at the suction surface 7
At the middle position in the height direction of 6A, the single-sided adhesive tape 86 is adhered to the adhesive surface 86B.

When the exchange roll transport table 60 is pulled out, the core previously collected in the core recovery section 74 is taken out.
And is set in the state shown in FIG. Here, in the accumulator 26, the lever 26B is driven in advance in the clockwise direction in FIG. 8 so that the preceding original film 12 is fed in a state where the film path is the longest when moving.

When the remaining film amount sensor 18B detects that the remaining amount of the original film in the preceding film supply roll 18 has become equal to or less than a predetermined value, the control device 40 controls the half cutter 22 based on the output signal. Referring to the distance from the intermediate point between the disk cutters 44A and 44B to the first suction device 54 via the accumulator 21, the position where the half-cut line is formed next by the half cutter 22 is the first position. Suction device 54
When it reaches the upper side, the multilayer film 12 is suctioned by the first suction device 54, and at the same time, the pinch plate 21D
Is extruded by the actuator 21F, and the laminate film 12 is sandwiched and fixed between the guide film 84B and the guide roll 84B so that the laminate film 12 does not move on the first suction device 24. Further, the lever 21B of the accumulator 21 is driven in the counterclockwise direction in FIG. 8 to lower the tension roll 21C, and the accumulator 2 is moved without moving the laminated film 12 on the first suction device 54.
The film 12 stored in 1 is fed out toward the half-cut device 22.

With the laminated film 12 being sucked by the first suction device 54, the end cutter 92 is driven as shown in FIG. 17, and the end 12D of the laminated film 12 is moved as shown in FIG. When formed, this terminal 12
D is the disk cutter 44 in the half cutter 22
A, 44B, two half-cut lines 49A, 49B
It is a position between the scheduled locations. At this time, when the laminated film 12 is close to the unwinding end, the end 12D is strongly bent to the right in FIG. 18 due to the winding and tries to separate from the first suction device 54. Since 21D has a plate shape along the film path, the curvature is suppressed.

Next, as shown in FIG. 16, the recovery lever 74 is previously driven approximately 45 ° in the counterclockwise direction in the figure by the air cylinder 74C, so that the concave portion 74B of the winding core 19 of the preceding film supply roll 18 The spindle 82 is set at a position where it contacts the small diameter bar 19C from below.
Is pulled out from the preceding film supply roll 18, the core 19 and the remaining laminated film 1 wound therearound
2 is transferred onto the collection lever 74.

Therefore, the core 19 released from the spindle 82 does not fall and damage the remaining laminated film 12.

Therefore, when a large number of laminated films 12 are to be replaced while remaining on the preceding film supply roll 18, the remaining laminated films 12 can be used at other occasions.

At this time, when the negative pressure on only the suction surface 54B side is released, when the winding core 19 falls, the leading end of the laminated film 12 cut by the terminal cutter 92 on the film supply roll 18 side is the first suction device. It peels off from the suction surface 54B on the lower side of 54 (see FIG. 18).

Next, the recovery lever 74 is moved to the air cylinder 7.
4C, the recovery lever 7
When the leading end of 4 passes through the collecting core receiving portion 63, the core 19 is received by the concave portion 63A of the collecting core receiving portion 63 at the position of the medium-diameter cylindrical member 19B, and is transferred thereto. Subsequently, the horizontal table 6 is moved by the air cylinder 64.
As shown in FIG. 19, 0A is extruded leftward so that the center of the subsequent film supply roll 70 is the center position of the film supply roll at the set position.

At this time, the upper half of the adhesive surface 86B of the single-sided adhesive tape 86 that is being sucked by the second suction device 76 is
The first suction device 5 is pressed by the second suction device 76.
4 is adhered to the side surface of the translucent support laminated film 12A at the terminal end 12D of the preceding raw laminate film 12 in a state of being adsorbed to the film 4. Here, if the second suction device 76 is pressed against the first suction device 24 by the cylinder device 77, the adhesion becomes stronger.

Further, after the second suction device 76 has returned to the right in FIG. 19, the pressing rollers 95A and 95B are placed on the single-sided adhesive tape 86 by the rodless cylinder 93 with the terminal cutter 92 retracted. Rolling makes the adhesion even stronger.

Therefore, the terminal end 12D of the preceding original film and the leading end 12E of the succeeding original film are attached to the adhesive surface 86B of the single-sided adhesive tape 86 on the side surface of the translucent support laminated film 12A in the longitudinal direction. Will be continuously adhered to.

During this bonding step, the laminated film 12
Are sequentially and continuously attached to the film attaching surface (upper surface) of the substrate 16 that is sent to the laminating rolls 20A and 20B and intermittently conveyed. The film is replenished by the film fed by the lowering of the tension roll 21C.

During the connection of the leading end 12D of the preceding original film and the leading end 12E of the succeeding original film via the single-sided adhesive tape 86, the trailing film supply roll 70 is rotatable by the spindle 82 at the set position. Supported by

Next, the roll table 72 is lowered by the air cylinder 72A, and the horizontal table 60A is returned to the state shown in FIG. 16 by the air cylinder 64.
The exchange roll transport table 60 is pulled out to the side of the line to take out the collected core 19, and a new film supply roll is placed on the roll table 72. With the single-sided adhesive tape 86 adsorbed on the suction surface 76A adhering to the adhesive surface 86B of the single-sided adhesive tape 86, the exchange roll transport table 60 is again moved to the housing 1.
0A, and wait until the next film supply roll is replaced.

The end 12D of the preceding original film and the leading end 1 of the following original film connected by the single-sided adhesive tape 56
2E is sent to the left of the figure along the film path 13;
It approaches the half cutter 22.

The rotary encoder 38 on standby by the operation of the terminal cutter 92 connects the terminal 1 connected thereto.
When the 2D and the leading end 12E start moving, counting of the film feed amount is started.

The control device 40 informs the rotary encoder 3 that the connection line and the single-sided adhesive tape 86 have approached each other.
The disc cutters 44A and 44B are driven in the film width direction while the half cutter 22 is running in synchronization with the laminated film 12 to cut the cover film 12C.

At this time, the disk cutters 44A, 44
In order to completely cut the cover film 12C by B, it is preferable that the disk cutters 44A and 44B also cut the photosensitive resin layer 12B and further slightly bite into the translucent support film 12A.

The width and the sticking position of the single-sided adhesive tape 86 in the film feed direction are determined by the disc cutter 44A,
The half cut line forming position by 44B and the single-sided adhesive tape 86 are shifted from each other.

In particular, in order for the cutting line by the full cutter 32 to be displaced from the single-sided adhesive tape 86, FIG.
As shown in (A), the width of the single-sided adhesive tape 86 in the film feed direction is made smaller than the gap between the substrates 16, and the cutting line 12E of the full cutter 32 is set within the gap.
(See FIG. 5B).

The position of the half cut line of the cover film 12C by the half cutter 22 can be determined by the number of pulse signals output from the rotary encoder 38, and this pulse signal allows the disk cutter 44A on the right side in FIG. Half cut line 49 by
The timing when A reaches the position of the touch roll 24C in the cover film peeling device 24 can be understood.

Therefore, at this timing, the controller 40 controls the touch roll 24 via the touch cylinder 24N.
C, and the cover film 12C on the adhesive surface of the adhesive tape 24D wound around the touch roll 24C.
The disc cutter 4 is pressed from the center of the peeling portion of the cover film 12C in the film feeding direction.
The process is started up to a position immediately before the half cut line 49A by 4A (see FIG. 10).

The center axis of rotation of the receiving roll 24B is closer to the outer periphery of the receiving roll 24B than the center axis of the touch roll 24C, which is in contact with the outer periphery of the receiving roll 24B via the laminated film 12 and the adhesive tape 24D. Since the laminated film 12 is slightly shifted rearward, the laminated film 12 in contact with the receiving roll 24B has a convex curved surface on the cover film 12C side, and the half cut line 49A is opened.

Therefore, when the adhesive surface of the adhesive tape 24D comes into contact with the front side of the half cut line 49A, the cover film 12C is easily peeled from the position of the half cut line 49A by the disk cutter 44A. , Together with the adhesive tape 24D.

Here, the adhesive tape 24D is held by a nip roll 24J driven by a motor 24K.
Touch roll 24 at the same speed as laminated film 12C
Since the adhesive tape 24D is pulled in the same direction at the position C, the fluctuation of the tension applied to the laminated film 12 when the adhesive tape 24D comes into contact with the cover film 12C can be extremely reduced.

If the timing to start pressing the adhesive surface of the adhesive tape 24D against the cover film 12C is too early, the cover film 12C at the non-peeled portion will be peeled off, and if it is too late, it will not be peelable.

Next, the cover film 12C peeled off together with the adhesive tape 24D is attached to the nip roll 24I,
From the timing of being sandwiched by 24J, the half cut line 49B of the disc cutter 44B generated by the next cutting by the half cutter 22
Immediately before reaching the position C, the touch roll 24C is driven by the control device 40 in a direction away from the laminated film 12, and the cover film 12C adhered to the adhesive tape 24D is cut by the half-cut line by the disk cutter 44B. At a position away from the laminate film 12.

As a result, the disk cutters 44A,
Cover film 12 connected by a single-sided adhesive tape 86 at a portion between half-cut lines 49A and 49B by 4B
C is left on the translucent support film 12A and the photosensitive resin layer 12B without being peeled off.
The paper is sent in the direction of laminating rolls 20A and 20B through 6.

If the timing for separating the touch roll 24C from the laminated film 12 is too early, the cover film 1 adhered to the adhesive tape 24D may be removed.
2C is pulled by the laminate film 12 and the adhesive tape 2
It may peel off from 4D. Also, if it ’s too late,
The adhesive tape 24D is used to cover the next non-peeling portion of the cover film 12.
It may stick to C and peel it off.

Before the half-cut line 49A of the disk cutter 44A on the cover film 12C approaches the laminating rolls 20A and 20B, the half-cut line 49A passes through the substrate width adjusting device 110 and is transferred onto the transport roller row 14B below the heat retaining heater 108 and thereafter. The first substrate 16 to which the row laminated film 12 is to be attached is transported. When the front end of the substrate 16 is detected by the substrate standby sensor 100, the substrate 16
The nip roll 106 is lowered by the control device 40 at a timing corresponding to the leading end of the substrate 16 to sandwich the substrate 16 between the nip roll 106 and the conveyor roll 14C.

Transport Roll Row 14B and Conveyor Roll 1
4C, after the transport speed is set to “zero” by the servomotor 104, the lamination is performed at the timing and speed at which the half cut line 49A on the cover film 12C coincides with the position slightly behind the leading end of the leading substrate 16 in the feed direction. The substrate 16 is fed between the laminating rolls 20A and 20B by the substrate transfer device 14 in synchronization with the body film 12.

The timing at which the leading end of the leading substrate 16 reaches the laminating rolls 20A and 20B depends on the distance between the substrate standby sensor 100 and the laminating rolls 20A and 20B, and the transport by the servomotor 104. It is determined from the relationship with speed.

Also, the substrate 16 thus determined
The upper laminating roll 20A is lowered by the roll clamp cylinder 50 at the timing when the tip of the laminating roll reaches the laminating rolls 20A and 20B,
The leading end of the leading substrate 16 is sandwiched between the descending laminating roll 20A and the lower laminating roll 20B from the leading end of the subsequent laminated film 12, and the laminating rolls 20A and 20B rotate to perform thermocompression bonding. While being sent to the right in FIG.

The upper laminating roll 20A
At the timing when the film guide roll 5
2 is driven in a direction away from the laminated film 12 in FIG. Thereby, the laminated body film 12 is sandwiched by the laminating rolls 20A and 20B.

The connecting portion of the preceding and following laminated films 12 adhered to the substrate 16 is located downstream from the position of the second nip roll 34 along the substrate transport surface 14A while the cover film 12C and the single-sided adhesive tape 86 are adhered. And cut by the full cutter 32 at a position between the two substrates 16, 16.

Here, as shown in FIGS. 5A and 5B, the width and the sticking position (connection line position) of the single-sided adhesive tape 86 are changed by the cutting line 34E by the full cutter 32.
, The full cutter 32 does not cut the single-sided adhesive tape 86 because it is shifted upstream (or downstream) in the film feeding direction.

Therefore, the cutting edge is consumed due to the single-sided adhesive tape 86 being thicker than the cover film 12C and the translucent support film 12A, and the adhesive layer is
The decrease in sharpness due to the attachment to the cutting edge portion 2 can be suppressed.

[0144]

According to the present invention, the rear end of the preceding laminated film unwound from the preceding film supply roll and the trailing end of the subsequent laminated film unwound from the succeeding film supply roll are formed. When the tip is connected to and supplied with a single-sided adhesive tape, the single-sided tape is stuck to the exposure area of the substrate without causing exposure failure, and also reduces the tool life of the half cutter and the full cutter. It has an excellent effect that reduction can be suppressed.

[Brief description of the drawings]

FIG. 1 is a schematic side view including a partial block diagram showing a film sticking apparatus including a raw film supply apparatus according to the present invention.

FIG. 2 is a block diagram showing a control system in the film sticking apparatus.

FIG. 3 is an enlarged plan view showing a half cutter in the film sticking apparatus.

4 is a view taken along the line IV-IV in FIG.

FIG. 5 is an enlarged schematic side view showing a positional relationship between a cutting position by the half cutter and a substrate.

FIG. 6 is an enlarged cross-sectional view showing a continuous supply device of the raw film.

FIG. 7 is a front view of the same.

FIG. 8 is an enlarged schematic side view showing an accumulator in the continuous feeding device.

FIG. 9 is an enlarged schematic side view showing a cover film peeling device in the film supply device.

FIG. 10 is an enlarged side view showing a relationship between a touch roll and a laminate film in the cover film peeling device.

FIG. 11 is a schematic side view showing a substrate width shifting device and a heat retaining heater in the film sticking device.

FIG. 12 is a schematic cross-sectional view showing a process of forming the leading end of a succeeding source film in the continuous source film feeding apparatus.

FIG. 13 is a schematic cross-sectional view showing the leading end of the succeeding raw film formed as above.

FIG. 14 is a schematic cross-sectional view showing a state where the leading end of the following raw film has been peeled off.

FIG. 15 is a schematic cross-sectional view showing a state where a single-sided adhesive tape is sucked to a second suction surface.

FIG. 16 is a schematic sectional view showing a state immediately before film connection in the continuous feeding device.

FIG. 17 is a schematic cross-sectional view showing a process of forming an end of a preceding raw film in the continuous feeding apparatus.

FIG. 18 is a schematic cross-sectional view showing a state after the end of the preceding raw film has been formed in the continuous feeding device.

FIG. 19 is a schematic cross-sectional view showing a state in which the end of the preceding material roll and the tip of the succeeding material roll are connected by the continuous supply device.

FIG. 20 is a plan view showing a terminal cutter and its driving mechanism in the continuous feeding device.

FIG. 21 is a perspective view of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Continuous supply apparatus 10 ... Film sticking apparatus 12 ... Laminate film 12A ... Translucent support film 12B ... Photosensitive resin layer 12C ... Cover film 14 ... Substrate conveyance apparatus 14A ... Substrate conveyance surface 14C, 15A, 34B ... Conveyance roll 16 Substrate 18 Film supply roll 19 Core 20A, 20B Laminating roll 21 Accumulator 22 Half cutter 24 Cover film peeling device 24C Touch roll 24D Adhesive tape 26 Suction roll 30 First Nip roll 32 ... Full cutter 34 ... Second nip roll 38 ... Rotary encoder 40 ... Control device 44A, 44B ... Disc cutter 49A, 49B ... Half cut line

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code FI // B29L 9:00

Claims (5)

[Claims] 1. A continuous film in which a photosensitive resin layer and a cover film are laminated on a support film is pulled out from a film supply roll, and the cover film and the photosensitive resin layer are moved in the thickness direction of the translucent support film. Cut at least a part in the film width direction to form a half-cut line, and between the half-cut lines of the cover film, peel off the area to be stuck to the substrate, and leave other parts In such a manner that the photosensitive resin layer side is located on the film-attached surface side of a plurality of substrates sequentially conveyed at a constant interval by the conveying means, and the substrate is conveyed while the film is pressed against the substrate by the laminating roll. In the continuous supply method of the raw film from the film supply roll in the film sticking device is made, the film supply roll from the A step of suction-holding the side of the cover film at the end of the extracted original web film at a fixed position by the first suction means, and a step of adhering the single-sided adhesive sheet whose non-adhesive side is suction-held by the second suction means. Adhering, to a part of the surface, the side surface of the support film at the tip of the trailing raw film unwound from the trailing film supply roll; and attaching the remaining adhesive surface of the adhesive sheet to the first suction means. Pressing the side of the support film at the end of the preceding raw film that is suction-held to adhere the end to the adhesive sheet, wherein the preceding raw film is attached to the plurality of substrates. At the position between the ends of the substrate when being pasted, the preceding raw film in a state of being sucked and held by the first suction means is cut in the width direction to make the length uniform and form the end. Toss Continuous supply method of the raw fabric film in the film with applying apparatus. 2. The pressure-sensitive adhesive tape according to claim 1, wherein the width of the adhesive tape in the film feed direction is smaller than the distance between the ends of the plurality of substrates, and the preceding source film and the following source film are: When the adhesive tape is adhered to two adjacent substrates with a gap, the adhesive tape is adhered to a connection portion between the preceding raw film and the succeeding raw film so as to be located in the gap. A method for supplying a raw film in an attaching device. 3. The film sticking device according to claim 2, wherein the film sticking device cuts the film after being stuck to the substrate in a film width direction at a position between ends of each substrate. A method for supplying a raw film, wherein the adhesive tape is displaced from the position of the entire cutting and is adhered. 4. A half-cut line in which a photosensitive resin layer and a cover film are laminated on a support film, and the cover film and the photosensitive resin layer of the film drawn from a film supply roll are cut in a film width direction. And a cover film peeling device for peeling the cover film between the half-cut lines and in a range where the cover film is to be stuck to the substrate, leaving another portion, In such a manner that the photosensitive resin layer side is positioned on the film attaching surface side of the substrate which is intermittently sequentially transported, the film is transported while the film is pressed against the substrate by the laminating roll. In the device for continuously supplying the raw film from the film supply roll in the attaching device, in the set position First suction means for sucking and holding at a fixed position the side surface of the cover film at the end of the preceding original film unwound from the preceding film supply roll; and a non-adhesive single-sided adhesive sheet having substantially the same width as the original film and A second suction means capable of holding the surface side by suction, and a support film side surface at the leading end of the succeeding raw film unwound from the succeeding film supply roll is a single-sided adhesive suction-held by the second suction means. The second suction means is fed to the position of the first suction means while being adhered to a part of the adhesive film of the sheet in the longitudinal direction of the raw film, and is applied to the remaining adhesive surface of the single-sided adhesive sheet. Transport means for pressing the side of the support film at the end of the preceding original film held by suction by the first suction means, and facing the film suction surface of the first suction means. Previous At a middle position in the film feeding direction of the film suction surface, the film is movably arranged in the film width direction, and the preceding raw film in a state of being suction-held on the film suction surface is attached to the plurality of substrates. A continuous supply device for a raw film in a film sticking device, wherein an end cutter for cutting and trimming in a width direction is sometimes provided at a position between end portions of a substrate. 5. A remaining amount detecting means for detecting a remaining amount of the preceding original film in the preceding film supply roll, and an end of the preceding original film based on a detection signal of the remaining amount detecting means. And a control device for causing the first suction means to suck the preceding raw film at the calculated end position.