JP2001094116A5 - - Google Patents
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- JP2001094116A5 JP2001094116A5 JP2000221427A JP2000221427A JP2001094116A5 JP 2001094116 A5 JP2001094116 A5 JP 2001094116A5 JP 2000221427 A JP2000221427 A JP 2000221427A JP 2000221427 A JP2000221427 A JP 2000221427A JP 2001094116 A5 JP2001094116 A5 JP 2001094116A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000221427A JP4869472B2 (ja) | 1999-07-22 | 2000-07-21 | 半導体装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1999206942 | 1999-07-22 | ||
JP20694299 | 1999-07-22 | ||
JP11-206942 | 1999-07-22 | ||
JP2000221427A JP4869472B2 (ja) | 1999-07-22 | 2000-07-21 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001094116A JP2001094116A (ja) | 2001-04-06 |
JP2001094116A5 true JP2001094116A5 (fr) | 2009-01-08 |
JP4869472B2 JP4869472B2 (ja) | 2012-02-08 |
Family
ID=26515972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000221427A Expired - Fee Related JP4869472B2 (ja) | 1999-07-22 | 2000-07-21 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4869472B2 (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW480576B (en) | 2000-05-12 | 2002-03-21 | Semiconductor Energy Lab | Semiconductor device and method for manufacturing same |
JP5046452B2 (ja) | 2000-10-26 | 2012-10-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4954366B2 (ja) | 2000-11-28 | 2012-06-13 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4869509B2 (ja) * | 2001-07-17 | 2012-02-08 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
CN102544027B (zh) | 2004-09-15 | 2016-02-17 | 株式会社半导体能源研究所 | 半导体器件 |
JP5352046B2 (ja) * | 2005-06-22 | 2013-11-27 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP6310816B2 (ja) * | 2014-08-26 | 2018-04-11 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP6824829B2 (ja) * | 2017-06-15 | 2021-02-03 | 株式会社サイオクス | 窒化物半導体積層物の製造方法、窒化物半導体自立基板の製造方法および半導体装置の製造方法 |
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2000
- 2000-07-21 JP JP2000221427A patent/JP4869472B2/ja not_active Expired - Fee Related