JP2001091265A5 - - Google Patents

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Publication number
JP2001091265A5
JP2001091265A5 JP2000220922A JP2000220922A JP2001091265A5 JP 2001091265 A5 JP2001091265 A5 JP 2001091265A5 JP 2000220922 A JP2000220922 A JP 2000220922A JP 2000220922 A JP2000220922 A JP 2000220922A JP 2001091265 A5 JP2001091265 A5 JP 2001091265A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000220922A
Other languages
Japanese (ja)
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JP4427876B2 (ja
JP2001091265A (ja
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Publication date
Application filed filed Critical
Priority to JP2000220922A priority Critical patent/JP4427876B2/ja
Priority claimed from JP2000220922A external-priority patent/JP4427876B2/ja
Publication of JP2001091265A publication Critical patent/JP2001091265A/ja
Publication of JP2001091265A5 publication Critical patent/JP2001091265A5/ja
Application granted granted Critical
Publication of JP4427876B2 publication Critical patent/JP4427876B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000220922A 1999-07-22 2000-07-21 半導体角速度センサ Expired - Fee Related JP4427876B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000220922A JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-207715 1999-07-22
JP20771599 1999-07-22
JP2000220922A JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Publications (3)

Publication Number Publication Date
JP2001091265A JP2001091265A (ja) 2001-04-06
JP2001091265A5 true JP2001091265A5 (enrdf_load_stackoverflow) 2008-09-04
JP4427876B2 JP4427876B2 (ja) 2010-03-10

Family

ID=26516424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000220922A Expired - Fee Related JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Country Status (1)

Country Link
JP (1) JP4427876B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7302847B2 (en) * 2004-08-17 2007-12-04 Nippon Soken, Inc. Physical quantity sensor having movable portion
JP4528720B2 (ja) * 2005-12-28 2010-08-18 株式会社東芝 赤外線検出素子およびその製造方法と赤外線カメラ
JP2007218608A (ja) * 2006-02-14 2007-08-30 Denso Corp 半導体力学量センサ
JP5206709B2 (ja) 2009-03-18 2013-06-12 株式会社豊田中央研究所 可動体を備えている装置
JP4905574B2 (ja) 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
JP7135291B2 (ja) * 2017-10-24 2022-09-13 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体

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