JP2001076659A5 - - Google Patents

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Publication number
JP2001076659A5
JP2001076659A5 JP1999251294A JP25129499A JP2001076659A5 JP 2001076659 A5 JP2001076659 A5 JP 2001076659A5 JP 1999251294 A JP1999251294 A JP 1999251294A JP 25129499 A JP25129499 A JP 25129499A JP 2001076659 A5 JP2001076659 A5 JP 2001076659A5
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JP
Japan
Prior art keywords
optical system
charged particle
primary
multipole lens
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999251294A
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English (en)
Japanese (ja)
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JP2001076659A (ja
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Publication date
Application filed filed Critical
Priority to JP25129499A priority Critical patent/JP2001076659A/ja
Priority claimed from JP25129499A external-priority patent/JP2001076659A/ja
Publication of JP2001076659A publication Critical patent/JP2001076659A/ja
Publication of JP2001076659A5 publication Critical patent/JP2001076659A5/ja
Pending legal-status Critical Current

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JP25129499A 1999-09-06 1999-09-06 荷電粒子ビーム顕微鏡、欠陥検査装置及び半導体デバイスの製造方法 Pending JP2001076659A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25129499A JP2001076659A (ja) 1999-09-06 1999-09-06 荷電粒子ビーム顕微鏡、欠陥検査装置及び半導体デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25129499A JP2001076659A (ja) 1999-09-06 1999-09-06 荷電粒子ビーム顕微鏡、欠陥検査装置及び半導体デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2001076659A JP2001076659A (ja) 2001-03-23
JP2001076659A5 true JP2001076659A5 (enExample) 2006-08-03

Family

ID=17220677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25129499A Pending JP2001076659A (ja) 1999-09-06 1999-09-06 荷電粒子ビーム顕微鏡、欠陥検査装置及び半導体デバイスの製造方法

Country Status (1)

Country Link
JP (1) JP2001076659A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4041742B2 (ja) * 2001-05-01 2008-01-30 株式会社荏原製作所 電子線装置及び該電子線装置を用いたデバイス製造方法
DE10235456B4 (de) * 2002-08-02 2008-07-10 Leo Elektronenmikroskopie Gmbh Elektronenmikroskopiesystem
DE10237141A1 (de) 2002-08-13 2004-02-26 Leo Elektronenmikroskopie Gmbh Strahlführungssystem, Abbildungsverfahren und Elektronenmikroskopiesystem
WO2017132435A1 (en) * 2016-01-27 2017-08-03 Hermes Microvision Inc. Apparatus of plural charged-particle beams

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