JP2001062726A - スラリー再生装置及びこれを用いた研磨システム - Google Patents

スラリー再生装置及びこれを用いた研磨システム

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Publication number
JP2001062726A
JP2001062726A JP23930699A JP23930699A JP2001062726A JP 2001062726 A JP2001062726 A JP 2001062726A JP 23930699 A JP23930699 A JP 23930699A JP 23930699 A JP23930699 A JP 23930699A JP 2001062726 A JP2001062726 A JP 2001062726A
Authority
JP
Japan
Prior art keywords
slurry
polishing
filter
regenerating
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23930699A
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English (en)
Japanese (ja)
Other versions
JP2001062726A5 (https=
Inventor
Motoyuki Obara
基之 小原
Yasushi Imai
靖 今井
Yuzo Kozai
雄三 香西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP23930699A priority Critical patent/JP2001062726A/ja
Publication of JP2001062726A publication Critical patent/JP2001062726A/ja
Publication of JP2001062726A5 publication Critical patent/JP2001062726A5/ja
Pending legal-status Critical Current

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  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP23930699A 1999-08-26 1999-08-26 スラリー再生装置及びこれを用いた研磨システム Pending JP2001062726A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23930699A JP2001062726A (ja) 1999-08-26 1999-08-26 スラリー再生装置及びこれを用いた研磨システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23930699A JP2001062726A (ja) 1999-08-26 1999-08-26 スラリー再生装置及びこれを用いた研磨システム

Publications (2)

Publication Number Publication Date
JP2001062726A true JP2001062726A (ja) 2001-03-13
JP2001062726A5 JP2001062726A5 (https=) 2005-11-04

Family

ID=17042766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23930699A Pending JP2001062726A (ja) 1999-08-26 1999-08-26 スラリー再生装置及びこれを用いた研磨システム

Country Status (1)

Country Link
JP (1) JP2001062726A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017132035A (ja) * 2013-10-23 2017-08-03 株式会社荏原製作所 研磨方法および研磨装置
KR102344778B1 (ko) * 2021-06-09 2021-12-28 김도경 안경렌즈 연마수 여과처리장치
KR20230001382A (ko) * 2021-06-28 2023-01-04 주식회사 디에스테크놀러지 연마 슬러리액 필터링 장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017132035A (ja) * 2013-10-23 2017-08-03 株式会社荏原製作所 研磨方法および研磨装置
KR102344778B1 (ko) * 2021-06-09 2021-12-28 김도경 안경렌즈 연마수 여과처리장치
KR20230001382A (ko) * 2021-06-28 2023-01-04 주식회사 디에스테크놀러지 연마 슬러리액 필터링 장치
KR102627451B1 (ko) 2021-06-28 2024-01-19 주식회사 디에스테크놀러지 연마 슬러리액 필터링 장치

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