JP2001049119A5 - - Google Patents

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Publication number
JP2001049119A5
JP2001049119A5 JP1999227814A JP22781499A JP2001049119A5 JP 2001049119 A5 JP2001049119 A5 JP 2001049119A5 JP 1999227814 A JP1999227814 A JP 1999227814A JP 22781499 A JP22781499 A JP 22781499A JP 2001049119 A5 JP2001049119 A5 JP 2001049119A5
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JP
Japan
Prior art keywords
heat
precursor
resistant resin
structural unit
general formula
Prior art date
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Application number
JP1999227814A
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English (en)
Japanese (ja)
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JP4419219B2 (ja
JP2001049119A (ja
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Publication date
Application filed filed Critical
Priority to JP22781499A priority Critical patent/JP4419219B2/ja
Priority claimed from JP22781499A external-priority patent/JP4419219B2/ja
Publication of JP2001049119A publication Critical patent/JP2001049119A/ja
Publication of JP2001049119A5 publication Critical patent/JP2001049119A5/ja
Application granted granted Critical
Publication of JP4419219B2 publication Critical patent/JP4419219B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP22781499A 1999-08-11 1999-08-11 耐熱性樹脂組成物 Expired - Lifetime JP4419219B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22781499A JP4419219B2 (ja) 1999-08-11 1999-08-11 耐熱性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22781499A JP4419219B2 (ja) 1999-08-11 1999-08-11 耐熱性樹脂組成物

Publications (3)

Publication Number Publication Date
JP2001049119A JP2001049119A (ja) 2001-02-20
JP2001049119A5 true JP2001049119A5 (enExample) 2006-09-07
JP4419219B2 JP4419219B2 (ja) 2010-02-24

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ID=16866806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22781499A Expired - Lifetime JP4419219B2 (ja) 1999-08-11 1999-08-11 耐熱性樹脂組成物

Country Status (1)

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JP (1) JP4419219B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10145471A1 (de) * 2001-09-14 2003-04-17 Infineon Technologies Ag Fotosensitive Formulierung für Pufferschichten und Verwendungen dazu
DE10145469B4 (de) * 2001-09-14 2006-07-06 Infineon Technologies Ag Poly-o-hydroxyamid und Verfahren zu seiner Weiterverarbeitung zu Polybenzoxazol
JP4337481B2 (ja) * 2002-09-17 2009-09-30 東レ株式会社 ネガ型感光性樹脂前駆体組成物およびそれを用いた電子部品ならびに表示装置
US7932012B2 (en) 2004-03-31 2011-04-26 Hitachi Chemical Dupont Microsystems Ltd. Heat-resistant photosensitive resin composition, method for forming pattern using the composition, and electronic part
US7524617B2 (en) * 2004-11-23 2009-04-28 E.I. Du Pont De Nemours And Company Low-temperature curable photosensitive compositions
TWI495404B (zh) * 2013-06-21 2015-08-01 Chi Mei Corp 軟性基板用組成物及軟性基板
JP6244871B2 (ja) * 2013-12-13 2017-12-13 日立化成デュポンマイクロシステムズ株式会社 ポリイミド前駆体樹脂組成物
TWI634135B (zh) 2015-12-25 2018-09-01 日商富士軟片股份有限公司 樹脂、組成物、硬化膜、硬化膜的製造方法及半導體元件

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