JP2001027805A5 - - Google Patents

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Publication number
JP2001027805A5
JP2001027805A5 JP1999199096A JP19909699A JP2001027805A5 JP 2001027805 A5 JP2001027805 A5 JP 2001027805A5 JP 1999199096 A JP1999199096 A JP 1999199096A JP 19909699 A JP19909699 A JP 19909699A JP 2001027805 A5 JP2001027805 A5 JP 2001027805A5
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JP
Japan
Prior art keywords
chemically amplified
resist
resist composition
amplified resist
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999199096A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001027805A (ja
JP4424631B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP19909699A priority Critical patent/JP4424631B2/ja
Priority claimed from JP19909699A external-priority patent/JP4424631B2/ja
Publication of JP2001027805A publication Critical patent/JP2001027805A/ja
Publication of JP2001027805A5 publication Critical patent/JP2001027805A5/ja
Application granted granted Critical
Publication of JP4424631B2 publication Critical patent/JP4424631B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP19909699A 1999-07-13 1999-07-13 化学増幅型レジスト組成物およびレジストパターン形成方法 Expired - Fee Related JP4424631B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19909699A JP4424631B2 (ja) 1999-07-13 1999-07-13 化学増幅型レジスト組成物およびレジストパターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19909699A JP4424631B2 (ja) 1999-07-13 1999-07-13 化学増幅型レジスト組成物およびレジストパターン形成方法

Publications (3)

Publication Number Publication Date
JP2001027805A JP2001027805A (ja) 2001-01-30
JP2001027805A5 true JP2001027805A5 (https=) 2006-08-31
JP4424631B2 JP4424631B2 (ja) 2010-03-03

Family

ID=16402064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19909699A Expired - Fee Related JP4424631B2 (ja) 1999-07-13 1999-07-13 化学増幅型レジスト組成物およびレジストパターン形成方法

Country Status (1)

Country Link
JP (1) JP4424631B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4524505B2 (ja) * 1999-09-10 2010-08-18 Ｄｉｃ株式会社 エネルギー線硬化性樹脂組成物

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