JP2001003157A5 - - Google Patents
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- Publication number
- JP2001003157A5 JP2001003157A5 JP1999176209A JP17620999A JP2001003157A5 JP 2001003157 A5 JP2001003157 A5 JP 2001003157A5 JP 1999176209 A JP1999176209 A JP 1999176209A JP 17620999 A JP17620999 A JP 17620999A JP 2001003157 A5 JP2001003157 A5 JP 2001003157A5
- Authority
- JP
- Japan
- Prior art keywords
- optical thin
- thin film
- niobium
- film
- mol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical Effects 0.000 claims 9
- 239000010409 thin film Substances 0.000 claims 9
- ZKATWMILCYLAPD-UHFFFAOYSA-N Niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims 8
- 239000000463 material Substances 0.000 claims 7
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 5
- 229910052758 niobium Inorganic materials 0.000 claims 5
- 239000010955 niobium Substances 0.000 claims 5
- 239000010408 film Substances 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 238000005755 formation reaction Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 125000004430 oxygen atoms Chemical group O* 0.000 claims 2
- 230000003635 deoxygenating Effects 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17620999A JP4298067B2 (ja) | 1999-06-23 | 1999-06-23 | 光学薄膜の成膜方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17620999A JP4298067B2 (ja) | 1999-06-23 | 1999-06-23 | 光学薄膜の成膜方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001003157A JP2001003157A (ja) | 2001-01-09 |
| JP2001003157A5 true JP2001003157A5 (fr) | 2005-10-20 |
| JP4298067B2 JP4298067B2 (ja) | 2009-07-15 |
Family
ID=16009540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17620999A Expired - Lifetime JP4298067B2 (ja) | 1999-06-23 | 1999-06-23 | 光学薄膜の成膜方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4298067B2 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7655214B2 (en) * | 2003-02-26 | 2010-02-02 | Cabot Corporation | Phase formation of oxygen reduced valve metal oxides and granulation methods |
| DE102004049996A1 (de) * | 2004-10-14 | 2006-04-20 | Merck Patent Gmbh | Aufdampfmaterial zur Herstellung hochbrechender Schichten |
| JP5284821B2 (ja) * | 2008-03-03 | 2013-09-11 | 東邦チタニウム株式会社 | 金属酸化物蒸着材、その製造方法、および金属酸化物蒸着膜の製造方法 |
-
1999
- 1999-06-23 JP JP17620999A patent/JP4298067B2/ja not_active Expired - Lifetime
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