JP2000514896A - マイクロターボ機械 - Google Patents
マイクロターボ機械Info
- Publication number
- JP2000514896A JP2000514896A JP10506191A JP50619198A JP2000514896A JP 2000514896 A JP2000514896 A JP 2000514896A JP 10506191 A JP10506191 A JP 10506191A JP 50619198 A JP50619198 A JP 50619198A JP 2000514896 A JP2000514896 A JP 2000514896A
- Authority
- JP
- Japan
- Prior art keywords
- gas turbine
- engine
- compressor
- micro
- turbine engine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000002485 combustion reaction Methods 0.000 claims abstract description 179
- 238000000034 method Methods 0.000 claims abstract description 141
- 239000000463 material Substances 0.000 claims abstract description 95
- 238000005530 etching Methods 0.000 claims abstract description 71
- 239000010703 silicon Substances 0.000 claims abstract description 64
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 63
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 22
- 230000004323 axial length Effects 0.000 claims abstract description 16
- 239000012776 electronic material Substances 0.000 claims abstract 2
- 239000000446 fuel Substances 0.000 claims description 252
- 235000012431 wafers Nutrition 0.000 claims description 193
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 63
- 230000005284 excitation Effects 0.000 claims description 49
- 238000001816 cooling Methods 0.000 claims description 45
- 239000002828 fuel tank Substances 0.000 claims description 40
- 239000007788 liquid Substances 0.000 claims description 22
- 230000006698 induction Effects 0.000 claims description 19
- 239000007800 oxidant agent Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 14
- 230000003068 static effect Effects 0.000 claims description 14
- 238000010248 power generation Methods 0.000 claims description 13
- 230000001590 oxidative effect Effects 0.000 claims description 10
- 238000003860 storage Methods 0.000 claims description 7
- 238000000206 photolithography Methods 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 5
- 238000010304 firing Methods 0.000 claims description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 244000000626 Daucus carota Species 0.000 claims description 2
- 235000002767 Daucus carota Nutrition 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 230000002000 scavenging effect Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 248
- 239000003570 air Substances 0.000 description 216
- 239000010410 layer Substances 0.000 description 124
- 238000004519 manufacturing process Methods 0.000 description 93
- 238000013461 design Methods 0.000 description 57
- 230000006870 function Effects 0.000 description 51
- 229910052581 Si3N4 Inorganic materials 0.000 description 36
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 36
- 230000008569 process Effects 0.000 description 35
- 239000000203 mixture Substances 0.000 description 32
- 230000002829 reductive effect Effects 0.000 description 32
- 239000003380 propellant Substances 0.000 description 29
- 239000000126 substance Substances 0.000 description 28
- 238000012545 processing Methods 0.000 description 26
- 238000010586 diagram Methods 0.000 description 23
- 238000005516 engineering process Methods 0.000 description 23
- 239000011162 core material Substances 0.000 description 22
- 239000012530 fluid Substances 0.000 description 22
- 230000001965 increasing effect Effects 0.000 description 20
- 239000001257 hydrogen Substances 0.000 description 18
- 229910052739 hydrogen Inorganic materials 0.000 description 18
- 230000008901 benefit Effects 0.000 description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 16
- 230000002093 peripheral effect Effects 0.000 description 16
- 239000004020 conductor Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000003990 capacitor Substances 0.000 description 11
- 238000002347 injection Methods 0.000 description 11
- 239000007924 injection Substances 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 239000003795 chemical substances by application Substances 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- 238000012546 transfer Methods 0.000 description 9
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 8
- 238000007906 compression Methods 0.000 description 8
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 230000000873 masking effect Effects 0.000 description 8
- 238000002156 mixing Methods 0.000 description 8
- 238000001020 plasma etching Methods 0.000 description 8
- 230000006835 compression Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 7
- 229930195733 hydrocarbon Natural products 0.000 description 7
- 150000002430 hydrocarbons Chemical class 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 239000004215 Carbon black (E152) Substances 0.000 description 5
- 235000015842 Hesperis Nutrition 0.000 description 5
- 235000012633 Iberis amara Nutrition 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000001273 butane Substances 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 230000001976 improved effect Effects 0.000 description 5
- 238000003475 lamination Methods 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- 238000004377 microelectronic Methods 0.000 description 5
- 238000005459 micromachining Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 5
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 238000000429 assembly Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 4
- 230000004927 fusion Effects 0.000 description 4
- 230000002706 hydrostatic effect Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000007858 starting material Substances 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- -1 JP-4 Chemical compound 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- 238000007792 addition Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000003779 heat-resistant material Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N hydrofluoric acid Substances F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 238000001746 injection moulding Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 239000003350 kerosene Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000036961 partial effect Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 230000007261 regionalization Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000002457 bidirectional effect Effects 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 239000000567 combustion gas Substances 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 230000008571 general function Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 230000008093 supporting effect Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000002918 waste heat Substances 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- RZVHIXYEVGDQDX-UHFFFAOYSA-N 9,10-anthraquinone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C(=O)C2=C1 RZVHIXYEVGDQDX-UHFFFAOYSA-N 0.000 description 1
- 240000005020 Acaciella glauca Species 0.000 description 1
- 241000239290 Araneae Species 0.000 description 1
- 101100008048 Caenorhabditis elegans cut-4 gene Proteins 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 241000264877 Hippospongia communis Species 0.000 description 1
- 241000282412 Homo Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 241001455617 Sula Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 241000251539 Vertebrata <Metazoa> Species 0.000 description 1
- 241000271897 Viperidae Species 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 238000010344 co-firing Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- 238000011217 control strategy Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- IQDXNHZDRQHKEF-UHFFFAOYSA-N dialuminum;dicalcium;dioxido(oxo)silane Chemical compound [Al+3].[Al+3].[Ca+2].[Ca+2].[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O IQDXNHZDRQHKEF-UHFFFAOYSA-N 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical group Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 230000009189 diving Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000009422 external insulation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- AFAUWLCCQOEICZ-UHFFFAOYSA-N helium xenon Chemical compound [He].[Xe] AFAUWLCCQOEICZ-UHFFFAOYSA-N 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000004941 influx Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000000520 microinjection Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical group CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 235000003499 redwood Nutrition 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23R—GENERATING COMBUSTION PRODUCTS OF HIGH PRESSURE OR HIGH VELOCITY, e.g. GAS-TURBINE COMBUSTION CHAMBERS
- F23R3/00—Continuous combustion chambers using liquid or gaseous fuel
- F23R3/42—Continuous combustion chambers using liquid or gaseous fuel characterised by the arrangement or form of the flame tubes or combustion chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D15/00—Adaptations of machines or engines for special use; Combinations of engines with devices driven thereby
- F01D15/06—Adaptations for driving, or combinations with, hand-held tools or the like control thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D25/00—Component parts, details, or accessories, not provided for in, or of interest apart from, other groups
- F01D25/18—Lubricating arrangements
- F01D25/20—Lubricating arrangements using lubrication pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01K—STEAM ENGINE PLANTS; STEAM ACCUMULATORS; ENGINE PLANTS NOT OTHERWISE PROVIDED FOR; ENGINES USING SPECIAL WORKING FLUIDS OR CYCLES
- F01K13/00—General layout or general methods of operation of complete plants
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02C—GAS-TURBINE PLANTS; AIR INTAKES FOR JET-PROPULSION PLANTS; CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS
- F02C3/00—Gas-turbine plants characterised by the use of combustion products as the working fluid
- F02C3/04—Gas-turbine plants characterised by the use of combustion products as the working fluid having a turbine driving a compressor
- F02C3/045—Gas-turbine plants characterised by the use of combustion products as the working fluid having a turbine driving a compressor having compressor and turbine passages in a single rotor-module
- F02C3/05—Gas-turbine plants characterised by the use of combustion products as the working fluid having a turbine driving a compressor having compressor and turbine passages in a single rotor-module the compressor and the turbine being of the radial flow type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02K—JET-PROPULSION PLANTS
- F02K9/00—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof
- F02K9/42—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof using liquid or gaseous propellants
- F02K9/44—Feeding propellants
- F02K9/46—Feeding propellants using pumps
- F02K9/48—Feeding propellants using pumps driven by a gas turbine fed by propellant combustion gases or fed by vaporized propellants or other gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2220/00—Application
- F05D2220/50—Application for auxiliary power units (APU's)
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/10—Manufacture by removing material
- F05D2230/14—Micromachining
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2250/00—Geometry
- F05D2250/80—Size or power range of the machines
- F05D2250/82—Micromachines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2250/00—Geometry
- F05D2250/80—Size or power range of the machines
- F05D2250/84—Nanomachines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/20—Oxide or non-oxide ceramics
- F05D2300/22—Non-oxide ceramics
- F05D2300/226—Carbides
- F05D2300/2261—Carbides of silicon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/20—Oxide or non-oxide ceramics
- F05D2300/22—Non-oxide ceramics
- F05D2300/228—Nitrides
- F05D2300/2283—Nitrides of silicon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/607—Monocrystallinity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C2900/00—Special features of, or arrangements for combustion apparatus using fluid fuels or solid fuels suspended in air; Combustion processes therefor
- F23C2900/03001—Miniaturized combustion devices using fluid fuels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Materials Engineering (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2209896P | 1996-07-16 | 1996-07-16 | |
| US60/022,098 | 1996-07-16 | ||
| US08/749,454 | 1996-11-15 | ||
| US08/749,454 US5932940A (en) | 1996-07-16 | 1996-11-15 | Microturbomachinery |
| PCT/US1997/012137 WO1998002643A1 (en) | 1996-07-16 | 1997-07-14 | Microturbomachinery |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000514896A true JP2000514896A (ja) | 2000-11-07 |
| JP2000514896A5 JP2000514896A5 (cg-RX-API-DMAC7.html) | 2005-03-10 |
Family
ID=26695507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10506191A Ceased JP2000514896A (ja) | 1996-07-16 | 1997-07-14 | マイクロターボ機械 |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US5932940A (cg-RX-API-DMAC7.html) |
| EP (1) | EP0920575B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2000514896A (cg-RX-API-DMAC7.html) |
| KR (1) | KR100363356B1 (cg-RX-API-DMAC7.html) |
| AU (1) | AU4040197A (cg-RX-API-DMAC7.html) |
| CA (1) | CA2262854C (cg-RX-API-DMAC7.html) |
| DE (1) | DE69733561T2 (cg-RX-API-DMAC7.html) |
| NO (1) | NO990199L (cg-RX-API-DMAC7.html) |
| WO (1) | WO1998002643A1 (cg-RX-API-DMAC7.html) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004232635A (ja) * | 2003-01-30 | 2004-08-19 | Gat G Fuer Antriebstechnik Mbh | 高速に回転する工具の駆動のためのタービン羽根車 |
| JP2007132350A (ja) * | 2005-11-09 | 2007-05-31 | Onera (Office National D'etudes & De Recherches Aerospatiales) | 高効率熱エンジン |
| JP2008517215A (ja) * | 2004-10-19 | 2008-05-22 | コリア インスティテュート オブ サイエンス アンド テクノロジー | 超小型動力発生装置 |
| JP2015505927A (ja) * | 2011-12-01 | 2015-02-26 | ダイムラー・アクチェンゲゼルシャフトＤａｉｍｌｅｒ ＡＧ | 特に自動車の燃料電池のための給気装置 |
| JP2022530646A (ja) * | 2019-04-30 | 2022-06-30 | コーニンクレッカ フィリップス エヌ ヴェ | 加圧ガス給電磁気共鳴撮像アンテナ |
Families Citing this family (231)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6294842B1 (en) * | 1997-12-19 | 2001-09-25 | Alliedsignal Inc. | Fog cycle for microturbine power generating system |
| US6534842B2 (en) * | 1998-03-03 | 2003-03-18 | Matsushita Electric Industrial Co., Ltd. | Composite components and the method of manufacturing the same |
| US20020099476A1 (en) * | 1998-04-02 | 2002-07-25 | Hamrin Douglas A. | Method and apparatus for indirect catalytic combustor preheating |
| US8173431B1 (en) | 1998-11-13 | 2012-05-08 | Flir Systems, Inc. | Mail screening to detect mail contaminated with biological harmful substances |
| US20040175901A1 (en) * | 1999-02-10 | 2004-09-09 | Commissariat A L'energie Atomique | Method for forming an optical silicon layer on a support and use of said method in the production of optical components |
| US6951147B2 (en) * | 1999-03-10 | 2005-10-04 | Mesosystems Technology, Inc. | Optimizing rotary impact collectors |
| US6461752B1 (en) * | 1999-04-19 | 2002-10-08 | The United States Of America As Represented By The Secretary Of The Army | Portable electric generator with thermal electric co-generator |
| US6193501B1 (en) * | 1999-07-06 | 2001-02-27 | The Board Of Trustees Of The University Of Illinois | Microcombustor having submillimeter critical dimensions |
| GB9917404D0 (en) * | 1999-07-26 | 2000-08-23 | Secr Defence | Hydrogen peroxide based propulsion system |
| US6695575B1 (en) * | 1999-08-27 | 2004-02-24 | Siemens Aktiengesellschaft | Turbine method for discharging leakage fluid |
| US6374619B1 (en) | 1999-11-18 | 2002-04-23 | Raytheon Company | Adiabatic micro-cryostat system and method of making same |
| AUPQ446299A0 (en) * | 1999-12-02 | 2000-01-06 | Collins, Ralph | Micromachines |
| AU771685B2 (en) * | 1999-12-02 | 2004-04-01 | Micromachines Limited | Micromachines |
| US6446426B1 (en) | 2000-05-03 | 2002-09-10 | Philip Morris Incorporated | Miniature pulsed heat source |
| US6349728B1 (en) | 2000-05-03 | 2002-02-26 | Philip Morris Incorporated | Portable cigarette smoking apparatus |
| US6541875B1 (en) * | 2000-05-17 | 2003-04-01 | Caterpillar Inc | Free piston engine with electrical power output |
| US6405976B1 (en) * | 2000-06-20 | 2002-06-18 | Paul Jacoby | Counter-rotation disc lift device |
| JP3445566B2 (ja) | 2000-08-28 | 2003-09-08 | 彰 鳥山 | 小型ガスタービン |
| US6534887B1 (en) * | 2000-10-06 | 2003-03-18 | Honeywell International Inc. | Microwheel |
| CA2426823A1 (en) * | 2000-10-25 | 2002-10-24 | Washington State University Research Foundation | Piezoelectric micro-transducers, methods of use and manufacturing methods for same |
| US6459581B1 (en) | 2000-12-19 | 2002-10-01 | Harris Corporation | Electronic device using evaporative micro-cooling and associated methods |
| US6460493B2 (en) | 2000-12-28 | 2002-10-08 | The United States Of America As Represented By The Secretary Of The Air Force | Uniflow scavenging microengine |
| WO2003027045A2 (en) * | 2001-09-27 | 2003-04-03 | Vanderbilt University | Monopropellant/hypergolic powered proportional actuator |
| US6430917B1 (en) | 2001-02-09 | 2002-08-13 | The Regents Of The University Of California | Single rotor turbine engine |
| WO2002079703A2 (en) | 2001-02-13 | 2002-10-10 | Technology Applications, Inc. | Miniature reciprocating heat pumps and engines |
| US6717254B2 (en) | 2001-02-22 | 2004-04-06 | Tru-Si Technologies, Inc. | Devices having substrates with opening passing through the substrates and conductors in the openings, and methods of manufacture |
| CA2448736C (en) | 2001-06-05 | 2010-08-10 | Mikro Systems, Inc. | Methods for manufacturing three-dimensional devices and devices created thereby |
| US7141812B2 (en) * | 2002-06-05 | 2006-11-28 | Mikro Systems, Inc. | Devices, methods, and systems involving castings |
| US7785098B1 (en) | 2001-06-05 | 2010-08-31 | Mikro Systems, Inc. | Systems for large area micro mechanical systems |
| AT410467B (de) * | 2001-07-24 | 2003-05-26 | Jakadofsky Peter | Gasturbine |
| US6787916B2 (en) | 2001-09-13 | 2004-09-07 | Tru-Si Technologies, Inc. | Structures having a substrate with a cavity and having an integrated circuit bonded to a contact pad located in the cavity |
| GB2379957A (en) * | 2001-09-21 | 2003-03-26 | Qinetiq Ltd | Rankine cycle micropower unit |
| US20040026366A1 (en) * | 2001-11-28 | 2004-02-12 | Andre Sharon | Method of manufacturing ultra-precise, self-assembled micro systems |
| US7674361B2 (en) | 2003-09-24 | 2010-03-09 | Microfabrica Inc. | Micro-turbines, roller bearings, bushings, and design of hollow closed structures and fabrication methods for creating such structures |
| US20030161949A1 (en) * | 2002-02-28 | 2003-08-28 | The Regents Of The University Of California | Vapor deposition of dihalodialklysilanes |
| US7313916B2 (en) | 2002-03-22 | 2008-01-01 | Philip Morris Usa Inc. | Method and apparatus for generating power by combustion of vaporized fuel |
| AU2003228502A1 (en) * | 2002-04-10 | 2003-10-27 | Murray Friedman | Micro wind generator array |
| US20030193319A1 (en) * | 2002-04-12 | 2003-10-16 | Wood James Rick | Ion powered platform |
| US6591625B1 (en) | 2002-04-17 | 2003-07-15 | Agilent Technologies, Inc. | Cooling of substrate-supported heat-generating components |
| US6866478B2 (en) * | 2002-05-14 | 2005-03-15 | The Board Of Trustees Of The Leland Stanford Junior University | Miniature gas turbine engine with unitary rotor shaft for power generation |
| US7074016B1 (en) * | 2002-05-24 | 2006-07-11 | Massachusetts Institute Of Technology | Planar turbopump assembly |
| US7078825B2 (en) * | 2002-06-18 | 2006-07-18 | Ingersoll-Rand Energy Systems Corp. | Microturbine engine system having stand-alone and grid-parallel operating modes |
| KR100435255B1 (ko) * | 2002-08-13 | 2004-06-11 | 주식회사 파세코 | 열풍기의 압력측정구조 |
| US7404936B2 (en) * | 2002-10-22 | 2008-07-29 | Velocys | Catalysts, in microchannel apparatus, and reactions using same |
| US7506593B2 (en) * | 2002-10-23 | 2009-03-24 | Kinetics Systems, Inc. | Microfabrication tool pedestal and method of use |
| US6747338B1 (en) | 2002-11-27 | 2004-06-08 | Analog Devices, Inc. | Composite dielectric with improved etch selectivity for high voltage MEMS structures |
| US6932564B2 (en) * | 2002-12-19 | 2005-08-23 | Forced Physics Corporation | Heteroscopic turbine |
| DE10307374A1 (de) | 2003-02-21 | 2004-09-02 | Alstom Technology Ltd | Verfahren zum Betrieb eines teilgeschlossenen, aufgeladenen Gasturbinenkreislaufs sowie Gasturbinensystem zur Durchführung des Verfahrens |
| US7462948B2 (en) * | 2003-03-06 | 2008-12-09 | Thinktank Phoenix Co., Ltd. | Midget gas turbine |
| WO2004086600A1 (en) * | 2003-03-20 | 2004-10-07 | University Of South Florida | Mems microgenerator cell and microgenerator cell array |
| US6942451B1 (en) | 2003-06-03 | 2005-09-13 | Hamilton Sundstrand Corporation | Damping system for an expendable gas turbine engine |
| US7194866B1 (en) | 2003-06-20 | 2007-03-27 | Hamilton Sundstrand Corporation | Static structure for an expendable gas turbine engine |
| US7177535B2 (en) * | 2003-07-01 | 2007-02-13 | Philip Morris Usa Inc. | Apparatus for generating power and hybrid fuel vaporization system |
| US7044718B1 (en) | 2003-07-08 | 2006-05-16 | The Regents Of The University Of California | Radial-radial single rotor turbine |
| US8438858B1 (en) | 2003-08-20 | 2013-05-14 | Hamilton Sundstrand Corporation | Rotational system for an expendable gas turbine engine |
| US6978611B1 (en) | 2003-09-16 | 2005-12-27 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | MEMS closed chamber heat engine and electric generator |
| US20050058959A1 (en) * | 2003-09-17 | 2005-03-17 | General Electric Company | Gas flow control for gas burners utilizing a micro-electro-mechanical valve |
| KR100519970B1 (ko) * | 2003-10-07 | 2005-10-13 | 삼성전자주식회사 | 밸브리스 마이크로 공기공급장치 |
| US7487641B2 (en) * | 2003-11-14 | 2009-02-10 | The Trustees Of Columbia University In The City Of New York | Microfabricated rankine cycle steam turbine for power generation and methods of making the same |
| DE10357082B3 (de) * | 2003-12-06 | 2005-04-07 | Forschungszentrum Karlsruhe Gmbh | Spiral-Mikrowärmetauscher |
| US8502064B2 (en) * | 2003-12-11 | 2013-08-06 | Philip Morris Usa Inc. | Hybrid system for generating power |
| ITTO20031043A1 (it) * | 2003-12-24 | 2005-06-25 | Fiat Ricerche | Generatore elettrico a microcombustione. |
| TWI240704B (en) * | 2003-12-26 | 2005-10-01 | Asia Optical Co Inc | Molding die for molding glass |
| US7270296B2 (en) * | 2004-01-12 | 2007-09-18 | Locust Usa Inc. | Small-size high-speed transmission system for use in microturbine-powered aircraft |
| US20050153812A1 (en) * | 2004-01-12 | 2005-07-14 | Locust, Usa, Inc. | Small-size traction drive transmission system for use in microturbine-powered aircraft |
| US7323111B1 (en) * | 2004-01-30 | 2008-01-29 | Metadigm Llc | Angle control of multi-cavity molded components for MEMS and NEMS group assembly |
| US8062797B2 (en) * | 2004-05-07 | 2011-11-22 | Ardica Technologies, Inc. | Articles of clothing and personal gear with on-demand power supply for electrical devices |
| US7146814B2 (en) * | 2004-05-17 | 2006-12-12 | Micron Technology, Inc. | Micro-machine and a method of powering a micro-machine |
| US7154931B2 (en) * | 2004-06-22 | 2006-12-26 | Ksy Corporation | Laser with Brayton cycle outlet pump |
| US7109595B2 (en) * | 2004-07-07 | 2006-09-19 | Yu-Lin Chung | Small multi-functional butane gas-powered portable electric generator |
| US7934368B2 (en) | 2004-07-09 | 2011-05-03 | Board Of Trustees Of Michigan State University | Ultra-micro gas turbine |
| US7111462B2 (en) * | 2004-07-21 | 2006-09-26 | Steward-Davis International, Inc. | Onboard supplemental power system at varying high altitudes |
| US7089744B2 (en) * | 2004-07-21 | 2006-08-15 | Steward Davis International, Inc. | Onboard supplemental power system at varying high altitudes |
| US7501726B1 (en) | 2004-07-28 | 2009-03-10 | The United States Of America As Represented By The Secretary Of The Navy | Micro-electro-mechanical system (MEMS) and apparatus for generating power responsive to mechanical vibration |
| US6987329B1 (en) | 2004-08-03 | 2006-01-17 | Harris Corporation | Fuel flexible thermoelectric micro-generator with micro-turbine |
| WO2007008225A2 (en) * | 2004-08-14 | 2007-01-18 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Heat-activated heat-pump systems including integrated expander/compressor and regenerator |
| US7371052B2 (en) * | 2004-08-16 | 2008-05-13 | Harris Corporation | Embedded fluid mixing device using a homopolar motor |
| US20070009346A1 (en) * | 2004-08-30 | 2007-01-11 | Scott Davis | Single-molecule systems |
| FR2874807B1 (fr) * | 2004-09-03 | 2006-11-10 | Memscap Sa | Dispositif d'analyse des proprietes physico-chimiques de la peau |
| US7578661B2 (en) * | 2004-09-16 | 2009-08-25 | Harris Corporation | Embedded fluid pump using a homopolar motor |
| US7493766B2 (en) * | 2004-09-30 | 2009-02-24 | Gm Global Technology Operations, Inc. | Auxiliary electrical power generation |
| US7955504B1 (en) | 2004-10-06 | 2011-06-07 | State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Microfluidic devices, particularly filtration devices comprising polymeric membranes, and method for their manufacture and use |
| US20060082159A1 (en) * | 2004-10-18 | 2006-04-20 | Scharfspitz Jason S | Rentricity Flow-to-Wire and RenFlow information services |
| US8037777B2 (en) * | 2004-10-22 | 2011-10-18 | Rochester Institute Of Technology | Structurally compliant microbearing devices and methods thereof |
| US20060291997A1 (en) * | 2004-10-26 | 2006-12-28 | Wilson Erich A | Fluid Flow Chambers and Bridges in Bladeless Compressors, Turbines and Pumps |
| US20060216149A1 (en) * | 2004-10-26 | 2006-09-28 | Wilson Erich A | Fluid Flow Channels in Bladeless Compressors, Turbines and Pumps |
| EP1812688B1 (en) | 2004-11-12 | 2016-04-13 | Board of Trustees of Michigan State University | Composite turbomachine impeller and method of manufacture |
| US7555891B2 (en) * | 2004-11-12 | 2009-07-07 | Board Of Trustees Of Michigan State University | Wave rotor apparatus |
| US20070040382A1 (en) * | 2004-11-30 | 2007-02-22 | Towada Timothy D | Self-supporting power generation station |
| US20060174605A1 (en) * | 2005-02-07 | 2006-08-10 | Berry Benny L | Berry zero hydrocarbons engine |
| WO2006138211A2 (en) * | 2005-06-17 | 2006-12-28 | University Of Delaware | Catalytic microcombustors for compact power or heat generation |
| US8546680B2 (en) * | 2005-07-08 | 2013-10-01 | Ying Wen Hsu | Energy efficient micro combustion system for power generation and fuel processing |
| US20070029498A1 (en) * | 2005-08-04 | 2007-02-08 | Forced Physics Llc, A Limited Liability Company | Enhanced heteroscopic techniques |
| WO2007019149A2 (en) * | 2005-08-04 | 2007-02-15 | Forced Physics Llc | Enhanced heteroscopic techniques |
| US20070029952A1 (en) * | 2005-08-04 | 2007-02-08 | Scott Davis | Coherent emission of spontaneous asynchronous radiation |
| US8187758B2 (en) * | 2005-08-11 | 2012-05-29 | Ardica Technologies Inc. | Fuel cell apparatus with a split pump |
| US8795926B2 (en) | 2005-08-11 | 2014-08-05 | Intelligent Energy Limited | Pump assembly for a fuel cell system |
| US20070036711A1 (en) * | 2005-08-11 | 2007-02-15 | Ardica Technologies Inc. | Hydrogen generator |
| US7291934B2 (en) * | 2005-08-30 | 2007-11-06 | Caterpillar Inc. | Machine with an electrical system |
| US7732737B2 (en) | 2005-10-11 | 2010-06-08 | Kimberly-Clark Worldwide, Inc. | Micro powered warming container |
| US7774894B2 (en) * | 2005-10-11 | 2010-08-17 | Kimberly-Clark Worldwide, Inc. | Micro powered floor cleaning device |
| US7661562B2 (en) * | 2005-10-11 | 2010-02-16 | Kimberly-Clark Worldwide, Inc. | Micro powered dispensing device |
| US7665460B2 (en) * | 2005-10-11 | 2010-02-23 | Kimberly-Clark Worldwide, Inc. | Micro powered gas-forming device |
| US8679587B2 (en) * | 2005-11-29 | 2014-03-25 | State of Oregon acting by and through the State Board of Higher Education action on Behalf of Oregon State University | Solution deposition of inorganic materials and electronic devices made comprising the inorganic materials |
| US7575192B1 (en) * | 2005-12-16 | 2009-08-18 | Locust Usa, Inc. | Transmission system for use in microturbine-powered applications |
| US20070148293A1 (en) * | 2005-12-27 | 2007-06-28 | Kimberly-Clark Worldwide, Inc. | Packaged consumable products with user-selectable aromas |
| WO2007095044A2 (en) * | 2006-02-09 | 2007-08-23 | Waytronx, Inc. | Method and apparatus for leak-proof mounting of a liquid cooling device on an integrated circuit |
| JP5011787B2 (ja) * | 2006-03-31 | 2012-08-29 | 株式会社日立製作所 | 発電機 |
| US7336000B2 (en) * | 2006-04-20 | 2008-02-26 | Deere & Company | Electrical power regulation for a turbogenerator and generator associated with an internal combustion engine |
| US9156674B2 (en) * | 2006-06-02 | 2015-10-13 | MicroZeus, LLC | Micro transport machine and methods for using same |
| US8134276B2 (en) | 2006-06-02 | 2012-03-13 | MicroZeus, LLC | Methods and systems for positioning micro elements |
| US8915158B2 (en) * | 2006-06-02 | 2014-12-23 | MicroZeus, LLC | Methods and systems for micro transmissions |
| US8282284B2 (en) | 2006-06-02 | 2012-10-09 | MicroZeus, LLC | Methods and systems for micro bearings |
| US8159107B2 (en) * | 2006-06-02 | 2012-04-17 | Microzeus Llc | Micro rotary machine and methods for using same |
| WO2007143623A2 (en) | 2006-06-02 | 2007-12-13 | Stalford Harold L | Methods and systems for micro machines |
| US8884474B2 (en) * | 2006-06-02 | 2014-11-11 | MicroZeus, LLC | Method of fabricating a micro machine |
| US7655542B2 (en) * | 2006-06-23 | 2010-02-02 | Applied Materials, Inc. | Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device |
| US20080108122A1 (en) * | 2006-09-01 | 2008-05-08 | State of Oregon acting by and through the State Board of Higher Education on behalf of Oregon | Microchemical nanofactories |
| US7439630B2 (en) * | 2006-09-08 | 2008-10-21 | Helius Inc. | System and methodology for generating electricity using a chemical heat engine and piezoelectric material |
| WO2008045082A1 (en) * | 2006-10-12 | 2008-04-17 | United Technologies Corporation | Reduced take-off field length using variable nozzle |
| US7834777B2 (en) | 2006-12-01 | 2010-11-16 | Baker Hughes Incorporated | Downhole power source |
| US7966801B2 (en) * | 2006-12-07 | 2011-06-28 | General Electric Company | Apparatus and method for gas turbine active combustion control system |
| US8434292B2 (en) * | 2006-12-15 | 2013-05-07 | State Of Franklin Innovations, Llc | Ceramic-encased hot surface igniter system for jet engines |
| SE531940C2 (sv) * | 2007-01-10 | 2009-09-15 | Xerex Ab | Ejektoranordning |
| KR101031401B1 (ko) * | 2007-01-30 | 2011-04-26 | 즈항 즈홍 치앙 | 무배출식 배기 가스 처리 장치 |
| US7436081B2 (en) * | 2007-01-31 | 2008-10-14 | Caterpillar Inc. | System for controlling a hybrid energy system |
| DE102007052959B4 (de) * | 2007-03-15 | 2018-11-08 | Korea Institute Of Energy Research | Tragbare Stromerzeugungsvorrichtung, Vorrichtung zur Versorgung mit Kraftstoff und Luft für die tragbare Stromerzeugungsvorrichtung, Mikromotor mit Gleichstromspülung für die tragbare Stromerzeugungsvorrichtung |
| US7866937B2 (en) * | 2007-03-30 | 2011-01-11 | Innovative Energy, Inc. | Method of pumping gaseous matter via a supersonic centrifugal pump |
| WO2009023314A2 (en) * | 2007-05-09 | 2009-02-19 | Icx Technologies | Mail parcel screening using multiple detection technologies |
| FR2918414B1 (fr) * | 2007-07-06 | 2013-04-12 | Snecma | Dispositif d'alimentation en air de ventilation des aubes de turbine basse pression d'un moteur a turbine a gaz ; segment pour l'arret axial et la ventilation des aubes de turbine basse pression |
| RU2354836C1 (ru) * | 2007-09-24 | 2009-05-10 | Федеральное государственное унитарное предприятие "Центральный институт авиационного моторостроения имени П.И. Баранова" | Микроразмерный газотурбинный двигатель |
| US20090085427A1 (en) * | 2007-10-01 | 2009-04-02 | The Regents Of The University Of Michigan | Electrical power generation from fluid flow |
| US20090194041A1 (en) * | 2007-12-12 | 2009-08-06 | Lobsiger Kent A | Air flow arrangement for two diesel generator sets in shipping container |
| US20110097189A1 (en) * | 2007-12-31 | 2011-04-28 | Aaron Sandoval | Boundary layer effect turbine |
| EP2248213A1 (en) * | 2008-01-29 | 2010-11-10 | Ardica Technologies, Inc. | A system for purging non-fuel material from fuel cell anodes |
| US9034531B2 (en) | 2008-01-29 | 2015-05-19 | Ardica Technologies, Inc. | Controller for fuel cell operation |
| US8215919B2 (en) * | 2008-02-22 | 2012-07-10 | Hamilton Sundstrand Corporation | Curved tooth coupling for a miniature gas turbine engine |
| US20090211977A1 (en) * | 2008-02-27 | 2009-08-27 | Oregon State University | Through-plate microchannel transfer devices |
| ES2342520B1 (es) * | 2008-02-29 | 2012-11-30 | Instituto Nacional De Técnica Aeroespacial | Dispositivo propulsor de actuadores micrométricos de propulsante sólido. |
| US7775184B2 (en) * | 2008-04-11 | 2010-08-17 | Zak Robert C | Deformable chamber-based homogeneous charge combustion ignition (HCCI) engine and generator |
| US8122973B2 (en) | 2008-05-21 | 2012-02-28 | Stalford Harold L | Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system |
| US8534301B2 (en) | 2008-06-02 | 2013-09-17 | Innovation Direct Llc | Steam mop |
| RU2386828C1 (ru) * | 2008-08-15 | 2010-04-20 | Федеральное государственное унитарное предприятие "Центральный институт авиационного моторостроения имени П.И. Баранова" | Микроразмерный двухконтурный газотурбинный микродвигатель |
| US20100053852A1 (en) * | 2008-09-02 | 2010-03-04 | Cheng Uei Precision Industry Co., Ltd. | Display Device |
| US20100071345A1 (en) * | 2008-09-22 | 2010-03-25 | Guy Silver | Thrust Engine |
| DE102008048965B4 (de) * | 2008-09-25 | 2010-09-16 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Solarfeld |
| US9315663B2 (en) | 2008-09-26 | 2016-04-19 | Mikro Systems, Inc. | Systems, devices, and/or methods for manufacturing castings |
| US20100108806A1 (en) * | 2008-10-08 | 2010-05-06 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Hybrid propulsive engine including at least one independently rotatable propeller/fan |
| US20100126178A1 (en) * | 2008-10-08 | 2010-05-27 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Hybrid propulsive engine including at least one independently rotatable turbine stator |
| US8099944B2 (en) * | 2008-10-08 | 2012-01-24 | The Invention Science Fund I, Llc | Hybrid propulsive engine including at least one independently rotatable propeller/fan |
| US20100083632A1 (en) * | 2008-10-08 | 2010-04-08 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Hybrid propulsive engine including at least one independently rotatable compressor rotor |
| SE534248C2 (sv) * | 2008-10-23 | 2011-06-14 | Itt Mfg Enterprises Inc | Omröraraggregat med rotor innefattande sektioner av synkron och asynkron typ |
| US9052116B2 (en) * | 2008-10-30 | 2015-06-09 | Power Generation Technologies Development Fund, L.P. | Toroidal heat exchanger |
| WO2010051338A1 (en) * | 2008-10-30 | 2010-05-06 | Power Generation Technologies Development Fund L.P. | Toroidal boundary layer gas turbine |
| KR101351447B1 (ko) * | 2009-02-20 | 2014-01-14 | 도쿠리쓰교세이호징 가가쿠 기주쓰 신코 기코 | 일정 전기장에 의한 마이크로미터 크기 물체의 수송 및 역학적 일의 취출 |
| US8243274B2 (en) * | 2009-03-09 | 2012-08-14 | Flir Systems, Inc. | Portable diesel particulate monitor |
| US9316228B2 (en) | 2009-03-24 | 2016-04-19 | Concepts Nrec, Llc | High-flow-capacity centrifugal hydrogen gas compression systems, methods and components therefor |
| WO2010115142A2 (en) * | 2009-04-03 | 2010-10-07 | Mesosystems Technology Inc. | Method and apparatus for capturing viable biological particles over an extended period of time |
| US8004102B2 (en) * | 2009-04-03 | 2011-08-23 | Praxair Technology, Inc. | Refrigeration generation method and system |
| US8236599B2 (en) | 2009-04-09 | 2012-08-07 | State of Oregon acting by and through the State Board of Higher Education | Solution-based process for making inorganic materials |
| FR2945835B1 (fr) | 2009-05-25 | 2016-01-22 | Commissariat Energie Atomique | Microsystemes de transformation de pressions et de compression, capteur, roue, puce, micromoteur, pile incorporant ce microsysteme et procede de fabrication de ce microsysteme |
| US8801922B2 (en) * | 2009-06-24 | 2014-08-12 | State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Dialysis system |
| EP2445615B1 (en) * | 2009-06-24 | 2017-05-17 | Oregon State University | Microfluidic devices for dialysis |
| NL2003264C2 (en) * | 2009-07-23 | 2011-01-25 | Micro Turbine Technology B V | Method for manufacturing a micro gas turbine. |
| US20110020215A1 (en) * | 2009-07-23 | 2011-01-27 | Ryu Wonhyoung | Chemical hydride formulation and system design for controlled generation of hydrogen |
| US8808410B2 (en) | 2009-07-23 | 2014-08-19 | Intelligent Energy Limited | Hydrogen generator and product conditioning method |
| US8741004B2 (en) | 2009-07-23 | 2014-06-03 | Intelligent Energy Limited | Cartridge for controlled production of hydrogen |
| US20110053016A1 (en) * | 2009-08-25 | 2011-03-03 | Daniel Braithwaite | Method for Manufacturing and Distributing Hydrogen Storage Compositions |
| KR200447336Y1 (ko) * | 2009-09-09 | 2010-01-19 | 주식회사 이지가스터빈 | 소형 가스터빈엔진 시험장치 |
| CN101737779B (zh) * | 2009-11-26 | 2011-11-09 | 重庆大学 | 用于微型燃烧器的碳氢燃料重整燃烧方法及微型燃烧器 |
| US8753515B2 (en) | 2009-12-05 | 2014-06-17 | Home Dialysis Plus, Ltd. | Dialysis system with ultrafiltration control |
| US7818969B1 (en) * | 2009-12-18 | 2010-10-26 | Energyield, Llc | Enhanced efficiency turbine |
| WO2011106780A1 (en) * | 2010-02-26 | 2011-09-01 | Ventions, Llc | Small scale high speed turbomachinery |
| US8580161B2 (en) | 2010-05-04 | 2013-11-12 | State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Fluidic devices comprising photocontrollable units |
| US8501009B2 (en) | 2010-06-07 | 2013-08-06 | State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University | Fluid purification system |
| TWM398514U (en) * | 2010-09-07 | 2011-02-21 | Chun-Chieh Chen | A sort of transmission |
| US8940458B2 (en) | 2010-10-20 | 2015-01-27 | Intelligent Energy Limited | Fuel supply for a fuel cell |
| FR2967713B1 (fr) | 2010-11-22 | 2012-12-21 | Commissariat Energie Atomique | Microsystemes de compression ou de transformation d'une difference de pressions en deplacement |
| US20140130500A9 (en) * | 2011-02-18 | 2014-05-15 | Dynamo Micropower | Design and manufacturing of an advanced low cost micro-turbine system |
| US9217370B2 (en) | 2011-02-18 | 2015-12-22 | Dynamo Micropower Corporation | Fluid flow devices with vertically simple geometry and methods of making the same |
| WO2012116285A2 (en) | 2011-02-25 | 2012-08-30 | Board Of Trustees Of Michigan State University | Wave disc engine apparatus |
| US8909762B2 (en) * | 2011-03-17 | 2014-12-09 | Hewlett-Packard Development Company, L.P. | Network system management |
| US9839230B2 (en) | 2011-03-31 | 2017-12-12 | Raymond L. Neff | Device for defrosting, warming and cooking using a circulating fluid |
| WO2012174318A1 (en) * | 2011-06-17 | 2012-12-20 | Bae Systems Information And Electronic Systems Integration Inc | Airflow based microturbine power supply |
| DE102011051240A1 (de) * | 2011-06-21 | 2012-12-27 | Matuschek Meßtechnik GmbH | Mikro-Gasturbine |
| AU2012318561B2 (en) | 2011-10-07 | 2017-04-20 | Outset Medical, Inc. | Heat exchange fluid purification for dialysis system |
| US8956700B2 (en) | 2011-10-19 | 2015-02-17 | General Electric Company | Method for adhering a coating to a substrate structure |
| WO2013070704A2 (en) * | 2011-11-07 | 2013-05-16 | Inventherm, Llc | Ericsson cycle device improvements |
| DE102011086554A1 (de) | 2011-11-17 | 2013-05-23 | BSH Bosch und Siemens Hausgeräte GmbH | Haushaltskältegerät |
| US9169976B2 (en) | 2011-11-21 | 2015-10-27 | Ardica Technologies, Inc. | Method of manufacture of a metal hydride fuel supply |
| KR101141145B1 (ko) | 2011-11-24 | 2012-05-02 | 국방과학연구소 | 양면 발전형 초소형 터빈 발전기 |
| KR101141144B1 (ko) * | 2011-11-30 | 2012-05-04 | 국방과학연구소 | 발전기를 구비한 마이크로 터빈 엔진 |
| US8813824B2 (en) | 2011-12-06 | 2014-08-26 | Mikro Systems, Inc. | Systems, devices, and/or methods for producing holes |
| RU2493491C1 (ru) * | 2012-04-26 | 2013-09-20 | Федеральное государственное бюджетное учреждение науки Институт химической физики им. Н.Н. Семенова Российской академии наук (ИХФ РАН) | Способ сжигания топлива в камере сгорания газотурбинной установки и устройство для его реализации |
| CZ2012415A3 (cs) | 2012-06-20 | 2013-12-27 | FESA s.r.o. | Spalovací motor |
| US9145865B2 (en) * | 2012-06-29 | 2015-09-29 | General Electric Company | Electric fluid pump |
| US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
| WO2014134182A2 (en) | 2013-02-26 | 2014-09-04 | Electric Jet, Llc | Micro gas turbine engine for powering a generator |
| EP2964931B1 (en) * | 2013-03-07 | 2022-10-05 | Rolls-Royce Corporation | Vehicle recuperator |
| US9390894B2 (en) | 2013-09-24 | 2016-07-12 | The Board Of Trustees Of The University Of Illinois | Modular microplasma microchannel reactor devices, miniature reactor modules and ozone generation devices |
| KR102106903B1 (ko) * | 2014-03-12 | 2020-05-06 | 허친슨 | 전기 발생 장치를 구비한 유압 진동 방지 장치 및 이러한 진동 방지 장치를 위한 전기 발생 장치 |
| DE102014003845A1 (de) * | 2014-03-18 | 2015-09-24 | Danger Möricke | Verfahren mit Verfahrensaufbau, Verfahrensdurchführungsvorrichtungen und Verfahrensdurchführung zur Abstimmnung und Analyse der optimalen Eigenschaften der Mikrogasturbinen Rotations Prozessenergie |
| US10030580B2 (en) | 2014-04-11 | 2018-07-24 | Dynamo Micropower Corporation | Micro gas turbine systems and uses thereof |
| EP3838308A1 (en) | 2014-04-29 | 2021-06-23 | Outset Medical, Inc. | Dialysis system and methods |
| US20150315935A1 (en) * | 2014-04-30 | 2015-11-05 | General Electric Company | System and method for inductor cooling |
| US10801001B2 (en) | 2015-04-13 | 2020-10-13 | Claremont Biosolutions Llc | Compositions and methods for disaggregation of biological tissue samples |
| GB201509458D0 (en) | 2015-06-01 | 2015-07-15 | Samad Power Ltd | Micro-CHP gas fired boiler with gas turbine assembly |
| GB201512494D0 (en) * | 2015-07-17 | 2015-08-19 | Rolls Royce Plc And Rolls Royce Deutschland Ltd & Co Kg | Gas turbine engine |
| US20180010477A1 (en) * | 2016-07-08 | 2018-01-11 | James Leslie STEWART | Pipeline-transport compressor including cooler unit and air exhaust power generation unit |
| ES3037938T3 (en) | 2016-08-19 | 2025-10-08 | Outset Medical Inc | Peritoneal dialysis system and methods |
| JP2019019751A (ja) * | 2017-07-18 | 2019-02-07 | パナソニックＩｐマネジメント株式会社 | ガスタービンロータ及びガスタービン発電機 |
| US10774874B2 (en) | 2018-08-06 | 2020-09-15 | General Electric Company | Fluid bearing assembly |
| JP2021533881A (ja) | 2018-08-23 | 2021-12-09 | アウトセット・メディカル・インコーポレイテッドOutset Medical, Inc. | 透析システム及び方法 |
| US11248789B2 (en) * | 2018-12-07 | 2022-02-15 | Raytheon Technologies Corporation | Gas turbine engine with integral combustion liner and turbine nozzle |
| DE102018222890A1 (de) * | 2018-12-21 | 2020-06-25 | Rolls-Royce Deutschland Ltd & Co Kg | Triebwerksbaugruppe und Betriebsverfahren |
| CN109948231B (zh) * | 2019-03-14 | 2022-09-06 | 中国航发湖南动力机械研究所 | 发动机热力循环参数分析方法和装置 |
| JP7195542B2 (ja) * | 2019-04-05 | 2022-12-26 | 富士電機株式会社 | 冷却器、半導体モジュール |
| US11359635B2 (en) | 2019-04-14 | 2022-06-14 | Hamilton Sundstrand Corporation | Power modules with regenerative compressor wheels |
| US10731557B1 (en) | 2019-04-19 | 2020-08-04 | Hamilton Sundstrand Corporation | Cyclonic dirt separator for high efficiency brayton cycle based micro turbo alternator |
| BR112021021836A2 (pt) | 2019-04-30 | 2022-01-04 | Outset Medical Inc | Métodos para calcular a pressão arterial, para criar dialisato em um sistema de diálise, para medir a porcentagem de rejeição em um sistema de diálise, para coletar e analisar plasma sanguíneo, para remover gás de um circuito extracorpóreo de um sistema de diálise, para inferir uma pressão de linha em um circuito extracorpóreo de um sistema de diálise, para prover terapia de diálise extracorpórea e intracorpórea, para montar um conjunto de tubos de paciente no estilo cartucho em uma máquina de diálise e para preparar uma máquina de diálise para terapia de diálise, câmaras de fluxo e de remoção de ar, sistema de diálise, subsistema de dispensação de dialisato, filtro de micróbio/endotoxina de uso único, dialisador, dispositivo para medir pressão de um sistema de diálise, e, conjunto de tubos de sangue |
| FR3095831B1 (fr) * | 2019-05-10 | 2023-09-01 | Safran Aircraft Engines | dispositif de ventilation amélioré de module de turbomachine |
| WO2021199007A1 (en) | 2020-04-03 | 2021-10-07 | Technion Research & Development Foundation Ltd. | Additively manufactured gas turbine engine and ventilator |
| CN111810243B (zh) * | 2020-07-17 | 2022-09-27 | 南昌航空大学 | 一种压气机-涡轮一体化发动机 |
| US11917744B2 (en) * | 2021-07-22 | 2024-02-27 | Perkinelmer Scientific Canada Ulc | Heat management for inductively coupled plasma systems |
| US20250035068A1 (en) * | 2021-12-03 | 2025-01-30 | Epropelled Inc. | High-power hybrid-electric propulsion systems and methods |
| US12476136B2 (en) | 2021-12-08 | 2025-11-18 | International Business Machines Corporation | Liner-less via contact |
| CN114877376B (zh) * | 2022-06-02 | 2024-05-24 | 清航空天(北京)科技有限公司 | 一种双通道爆震燃烧室 |
| US12060148B2 (en) | 2022-08-16 | 2024-08-13 | Honeywell International Inc. | Ground resonance detection and warning system and method |
| CN116006273A (zh) * | 2023-01-10 | 2023-04-25 | 中国科学院工程热物理研究所 | 一种用于压缩空气储能的向心透平变频发电装置 |
| WO2025144657A1 (en) * | 2023-12-28 | 2025-07-03 | Beehive Industries, LLC | Two stream diffuser integrated as a single unit for use in a turbofan jet engine |
| CN121031220A (zh) * | 2025-10-28 | 2025-11-28 | 重庆大学 | 一种应用于胶粘剂生产的多轴差速搅拌结构优化方法 |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1304701A (fr) * | 1961-08-16 | 1962-09-28 | Machine génératrice de courant à turbomoteur | |
| GB1243630A (en) * | 1967-11-07 | 1971-08-25 | Charles David Hope-Gill | Power plant including a gas turbine |
| US3657875A (en) * | 1970-09-21 | 1972-04-25 | Gruen Ind Inc | Electro-mechanical drive mechanism for watches and related devices |
| US3717419A (en) * | 1971-07-09 | 1973-02-20 | Susquehanna Corp | Turbine blade |
| US4000609A (en) * | 1972-01-03 | 1977-01-04 | Eaton Corporation | Radial flow gas turbine engine with annular combustor liner |
| GB1367733A (en) * | 1972-04-04 | 1974-09-25 | Dental Mfg Eng Ltd | High speed turbines |
| DE2451948A1 (de) | 1974-10-31 | 1976-05-06 | Habsburg Lothringen Leopold Vo | Kleinstverbrennungsmotor |
| US4027997A (en) * | 1975-12-10 | 1977-06-07 | General Electric Company | Diffuser for a centrifugal compressor |
| US4041699A (en) * | 1975-12-29 | 1977-08-16 | The Garrett Corporation | High temperature gas turbine |
| US4237394A (en) * | 1977-05-23 | 1980-12-02 | Canon Kabushiki Kaisha | Frequency generator and miniature motor provided with the same |
| DE2727003A1 (de) * | 1977-06-15 | 1979-01-04 | Magnetfab Bonn Gmbh | Mehrpoliger rotor fuer generatoren und motoren, insbesondere fuer elektrische klein- und kleinstmotoren |
| US4123571A (en) * | 1977-09-08 | 1978-10-31 | International Business Machines Corporation | Method for forming smooth self limiting and pin hole free SiC films on Si |
| GB2017222A (en) * | 1978-03-20 | 1979-10-03 | Chair R S De | Gas Turbine Unit |
| JPS5891331A (ja) * | 1981-11-25 | 1983-05-31 | Toshiba Corp | 軸流回転装置 |
| US4509896A (en) * | 1982-03-01 | 1985-04-09 | Tech Development Inc. | Turbine rotor |
| US4738902A (en) * | 1983-01-18 | 1988-04-19 | United Technologies Corporation | Gas turbine engine and composite parts |
| JPH0627482B2 (ja) * | 1983-12-27 | 1994-04-13 | 日本碍子株式会社 | ラジアル型セラミックタービンローターの製法 |
| US4639194A (en) * | 1984-05-02 | 1987-01-27 | General Motors Corporation | Hybrid gas turbine rotor |
| NL8402113A (nl) * | 1984-07-03 | 1986-02-03 | Kinetron Bv | Stelsel voor elektrische voeding van draagbare miniatuur-energieverbruikers. |
| CA1235375A (en) * | 1984-10-18 | 1988-04-19 | Nobuo Tsuno | Turbine rotor units and method of producing the same |
| DE3789776T2 (de) * | 1986-02-05 | 1994-08-18 | Hitachi Ltd | Hitzebeständiger Stahl und daraus hergestellte Gasturbinenteile. |
| JPS6315164U (cg-RX-API-DMAC7.html) * | 1986-07-14 | 1988-02-01 | ||
| JPS6388204A (ja) * | 1986-10-01 | 1988-04-19 | Ngk Insulators Ltd | セラミックラジアルタービンローターおよびその設計方法 |
| KR930005345B1 (ko) * | 1986-10-23 | 1993-06-17 | 후지덴기 가부시기가이샤 | 소형모터의 고정자 하우징과 회전자 |
| US5021230A (en) * | 1987-04-22 | 1991-06-04 | Krstic Vladimir D | Method of making silicon carbide |
| JPH069579Y2 (ja) * | 1989-09-11 | 1994-03-09 | マブチモーター株式会社 | 周波数発電機付き小型モータ |
| US5083040A (en) * | 1990-06-07 | 1992-01-21 | General Electric Company | Integrated turbine generator |
| US5118961A (en) * | 1990-09-14 | 1992-06-02 | S & W Holding, Inc. | Turbine generator |
| US5202633A (en) * | 1990-11-01 | 1993-04-13 | Doty Scientific, Inc. | High temperature nmr sample spinner |
| US5207054A (en) * | 1991-04-24 | 1993-05-04 | Sundstrand Corporation | Small diameter gas turbine engine |
| US5325059A (en) * | 1992-03-26 | 1994-06-28 | Doty Scientific Inc. | DOR NMR sample spinner |
| US5289130A (en) * | 1992-07-31 | 1994-02-22 | Doty Scientific Inc. | NMR sample rotor cooling technique |
| DE4241045C1 (de) * | 1992-12-05 | 1994-05-26 | Bosch Gmbh Robert | Verfahren zum anisotropen Ätzen von Silicium |
| DE4316856A1 (de) * | 1993-05-19 | 1994-11-24 | Siemens Ag | Mikromechanisches Bauteil und Verfahren zu seiner Herstellung |
| DE4317623C2 (de) * | 1993-05-27 | 2003-08-21 | Bosch Gmbh Robert | Verfahren und Vorrichtung zum anisotropen Plasmaätzen von Substraten und dessen Verwendung |
| US6029337A (en) * | 1994-06-06 | 2000-02-29 | Case Western Reserve University | Methods of fabricating micromotors with utilitarian features |
| US5685062A (en) * | 1994-07-05 | 1997-11-11 | Ford Motor Company | Self-assembly fabrication method for planar micro-motor |
| US5874798A (en) * | 1996-06-20 | 1999-02-23 | Motorola, Inc. | Micro-turbo generator device |
-
1996
- 1996-11-15 US US08/749,454 patent/US5932940A/en not_active Expired - Lifetime
-
1997
- 1997-07-14 EP EP97937969A patent/EP0920575B1/en not_active Expired - Lifetime
- 1997-07-14 DE DE69733561T patent/DE69733561T2/de not_active Expired - Fee Related
- 1997-07-14 CA CA002262854A patent/CA2262854C/en not_active Expired - Fee Related
- 1997-07-14 JP JP10506191A patent/JP2000514896A/ja not_active Ceased
- 1997-07-14 AU AU40401/97A patent/AU4040197A/en not_active Abandoned
- 1997-07-14 KR KR1019997000307A patent/KR100363356B1/ko not_active Expired - Fee Related
- 1997-07-14 WO PCT/US1997/012137 patent/WO1998002643A1/en not_active Ceased
-
1999
- 1999-01-15 NO NO990199A patent/NO990199L/no not_active Application Discontinuation
- 1999-07-15 US US09/354,544 patent/US6392313B1/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004232635A (ja) * | 2003-01-30 | 2004-08-19 | Gat G Fuer Antriebstechnik Mbh | 高速に回転する工具の駆動のためのタービン羽根車 |
| JP2008517215A (ja) * | 2004-10-19 | 2008-05-22 | コリア インスティテュート オブ サイエンス アンド テクノロジー | 超小型動力発生装置 |
| JP2007132350A (ja) * | 2005-11-09 | 2007-05-31 | Onera (Office National D'etudes & De Recherches Aerospatiales) | 高効率熱エンジン |
| JP2015505927A (ja) * | 2011-12-01 | 2015-02-26 | ダイムラー・アクチェンゲゼルシャフトＤａｉｍｌｅｒ ＡＧ | 特に自動車の燃料電池のための給気装置 |
| JP2022530646A (ja) * | 2019-04-30 | 2022-06-30 | コーニンクレッカ フィリップス エヌ ヴェ | 加圧ガス給電磁気共鳴撮像アンテナ |
| JP7500609B2 (ja) | 2019-04-30 | 2024-06-17 | コーニンクレッカ フィリップス エヌ ヴェ | 加圧ガス給電磁気共鳴撮像アンテナ |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20000023820A (ko) | 2000-04-25 |
| KR100363356B1 (ko) | 2002-11-30 |
| US5932940A (en) | 1999-08-03 |
| CA2262854A1 (en) | 1998-01-22 |
| AU4040197A (en) | 1998-02-09 |
| DE69733561T2 (de) | 2006-05-11 |
| WO1998002643A1 (en) | 1998-01-22 |
| NO990199D0 (no) | 1999-01-15 |
| EP0920575B1 (en) | 2005-06-15 |
| DE69733561D1 (de) | 2005-07-21 |
| CA2262854C (en) | 2003-07-08 |
| US6392313B1 (en) | 2002-05-21 |
| EP0920575A1 (en) | 1999-06-09 |
| NO990199L (no) | 1999-02-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2000514896A (ja) | マイクロターボ機械 | |
| US7934368B2 (en) | Ultra-micro gas turbine | |
| Epstein | Millimeter-scale, MEMS gas turbine engines | |
| Epstein et al. | Shirtbutton-sized gas turbines: The engineering challenges of micro high speed rotating machinery | |
| KR101274127B1 (ko) | 고효율 열기관 | |
| US10428732B2 (en) | Rotor assembly for an open cycle engine, and an open cycle engine | |
| Walther et al. | Advances and challenges in the development of power-generation systems at small scales | |
| Yoshida et al. | High-energy density miniature thermoelectric generator using catalytic combustion | |
| Seo et al. | Development and experimental investigation of a 500-W class ultra-micro gas turbine power generator | |
| Chigier et al. | A review of micro propulsion technology | |
| CN110249113B (zh) | 高温陶瓷旋转涡轮机械 | |
| Peirs et al. | Micropower generation with microgasturbines: a challenge | |
| Isomura et al. | Development of microturbocharger and microcombustor for a three-dimensional gas turbine at microscale | |
| Schmidt | Portable MEMS power sources | |
| Menz | MEMS Research in Freiburg/Germany | |
| Dessornes et al. | Three technological bricks for a micro turbine concept for micro power generation | |
| Frechette | Microturbines | |
| Epstein | System Design Considerations and Device Overview |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040714 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040714 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20040714 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071016 |
|
| A313 | Final decision of rejection without a dissenting response from the applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A313 Effective date: 20080313 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080507 |