JP2000500696A - ツーステージケミカル混合システム - Google Patents

ツーステージケミカル混合システム

Info

Publication number
JP2000500696A
JP2000500696A JP9518309A JP51830997A JP2000500696A JP 2000500696 A JP2000500696 A JP 2000500696A JP 9518309 A JP9518309 A JP 9518309A JP 51830997 A JP51830997 A JP 51830997A JP 2000500696 A JP2000500696 A JP 2000500696A
Authority
JP
Japan
Prior art keywords
mixing
chemical
level
drum
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP9518309A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000500696A5 (enExample
Inventor
エドワード ティー．ジュニア フェリ
ジェイ．トビン ギーツ
ランダル エル． グリーン
Original Assignee
アプライド ケミカル ソルーションズ インコーポレーティッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アプライド ケミカル ソルーションズ インコーポレーティッド filed Critical アプライド ケミカル ソルーションズ インコーポレーティッド
Publication of JP2000500696A publication Critical patent/JP2000500696A/ja
Publication of JP2000500696A5 publication Critical patent/JP2000500696A5/ja
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/133—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components with discontinuous action

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Accessories For Mixers (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
JP9518309A 1995-11-07 1996-11-07 ツーステージケミカル混合システム Ceased JP2000500696A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/554,787 1995-11-07
US08/554,787 US5632960A (en) 1995-11-07 1995-11-07 Two-stage chemical mixing system
PCT/US1996/017820 WO1997017640A1 (en) 1995-11-07 1996-11-07 Two-stage chemical mixing system

Publications (2)

Publication Number Publication Date
JP2000500696A true JP2000500696A (ja) 2000-01-25
JP2000500696A5 JP2000500696A5 (enExample) 2004-10-21

Family

ID=24214718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9518309A Ceased JP2000500696A (ja) 1995-11-07 1996-11-07 ツーステージケミカル混合システム

Country Status (7)

Country Link
US (2) US5632960A (enExample)
EP (1) EP0864123B1 (enExample)
JP (1) JP2000500696A (enExample)
KR (1) KR100394181B1 (enExample)
AT (1) ATE241818T1 (enExample)
DE (1) DE69628445T2 (enExample)
WO (1) WO1997017640A1 (enExample)

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US20070119816A1 (en) * 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
WO1999056189A1 (en) * 1998-04-30 1999-11-04 The Boc Group, Inc. Conductivity feedback control system for slurry blending
TW479841U (en) * 1998-06-17 2002-03-11 United Microelectronics Corp Polishing slurry supply apparatus
US6224252B1 (en) * 1998-07-07 2001-05-01 Air Products And Chemicals, Inc. Chemical generator with controlled mixing and concentration feedback and adjustment
JP3728945B2 (ja) * 1998-10-30 2005-12-21 オルガノ株式会社 フォトレジスト現像廃液からの現像液の回収再利用方法及び装置
US6247838B1 (en) * 1998-11-24 2001-06-19 The Boc Group, Inc. Method for producing a liquid mixture having a predetermined concentration of a specified component
US6527018B2 (en) * 2000-06-07 2003-03-04 Fuji Photo Film Co., Ltd. Method and system for optimizing batch process of preparing solution
TWI298826B (en) * 2001-02-06 2008-07-11 Hirama Lab Co Ltd Purified developer producing equipment and method
JP3869730B2 (ja) * 2002-01-16 2007-01-17 株式会社平間理化研究所 処理液調製供給方法及び装置
US20040151062A1 (en) * 2003-01-30 2004-08-05 Taiwan Semiconductor Manufacturing Co., Ltd. Automatic chemical mixing system
KR100500475B1 (ko) * 2003-11-10 2005-07-12 삼성전자주식회사 케미컬 혼합장치
US20050146982A1 (en) * 2003-12-31 2005-07-07 Carlson Stephen J. Quick blend module
KR20070041556A (ko) * 2004-07-08 2007-04-18 트레스-아크, 인크 화학물 혼합용 장치와 시스템 및 방법
US20060080041A1 (en) * 2004-07-08 2006-04-13 Anderson Gary R Chemical mixing apparatus, system and method
US7281840B2 (en) * 2004-07-09 2007-10-16 Tres-Ark, Inc. Chemical mixing apparatus
US20060196541A1 (en) * 2005-03-04 2006-09-07 David Gerken Control of fluid conditions in bulk fluid distribution systems
US7810516B2 (en) * 2005-03-04 2010-10-12 Air Liquide Electronics U.S. Lp Control of fluid conditions in bulk fluid distribution systems
US20090092001A1 (en) 2005-07-27 2009-04-09 Clay Hildreth Solution making system and method
DE102005059177B3 (de) * 2005-11-10 2007-06-28 Vortex-Nanofluid Gmbh Vorrichtung und Verfahren zum Herstellen von Nano-Dispersionen
US7743783B2 (en) * 2006-04-04 2010-06-29 Air Liquide Electronics U.S. Lp Method and apparatus for recycling process fluids
US20070251585A1 (en) * 2006-04-28 2007-11-01 David Paul Edwards Fluid distribution system
US8235580B2 (en) 2006-10-12 2012-08-07 Air Liquide Electronics U.S. Lp Reclaim function for semiconductor processing systems
WO2008139417A2 (en) * 2007-05-14 2008-11-20 L'air Liquide-Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Systems and methods for mixing fluids
RU2366496C1 (ru) * 2008-05-19 2009-09-10 Открытое акционерное общество "Магнитогорский металлургический комбинат" Способ управления усреднением сыпучих компонентов
WO2012128603A1 (fr) * 2011-03-22 2012-09-27 Aouad Salah Mohammed Dispositif automatique et procede de preparation de solutions
US10544340B2 (en) 2011-10-20 2020-01-28 Henderson Products, Inc. Brine generation system
US10766010B2 (en) 2011-10-20 2020-09-08 Henderson Products, Inc. High throughput brine generating system
US9097388B2 (en) * 2012-07-13 2015-08-04 Intermolecular, Inc. Effluent management, waste dilution, effluent pre-dilution, acid waste handling
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender
CA3041841A1 (en) * 2016-11-01 2018-05-11 Cms Technology, Inc. Systems and methods for improved blending of agents in chemical applications
US11724236B2 (en) * 2018-12-20 2023-08-15 Xia Tai Xin Semiconductor (Qing Dao) Ltd. System and method for fluid preparation
US11761582B2 (en) * 2019-09-05 2023-09-19 Dhf America, Llc Pressure regulation system and method for a fluidic product having particles
EP4603226A3 (en) 2019-11-27 2025-10-22 Diversified Fluid Solutions, LLC On-demand in-line-blending and supply of chemicals
KR102612978B1 (ko) * 2022-08-02 2023-12-13 나가세 엔지니어링 서비스 코리아(주) 혼합 시스템

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US3877682A (en) * 1974-03-08 1975-04-15 Mosstype Corp Automatic chemical measuring and mixing machine
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US4242841A (en) * 1979-07-30 1981-01-06 Ushakov Vladimir F Apparatus for preparing and feeding an abrasive-containing suspension into the zone of action of work tools of polishing and finishing lathes
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DE3037898A1 (de) * 1980-10-07 1982-05-06 Bruker Analytische Meßtechnik GmbH, 7512 Rheinstetten Mischkammer
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FR2551360B1 (fr) * 1983-09-05 1986-05-16 Martineau Sarl Expl Ets Procede pour produire des solutions a concentrations souhaitees a partir de produits liquides et de diluant et un appareil mettant en oeuvre ce procede
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US4863277A (en) * 1988-12-22 1989-09-05 Vigoro Industries, Inc. Automated batch blending system for liquid fertilizer
US5108655A (en) * 1989-05-30 1992-04-28 Electro-System, Incorporated Foam monitoring control system
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US5417346A (en) * 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
KR930008856B1 (ko) * 1991-05-15 1993-09-16 금성일렉트론 주식회사 혼합용액의 일정비율 혼합장치
US5340210A (en) * 1992-02-25 1994-08-23 Nalco Chemical Company Apparatus for blending chemicals with a reversible multi-speed pump
JP3141919B2 (ja) * 1994-10-13 2001-03-07 三菱瓦斯化学株式会社 薬液調合装置および方法

Also Published As

Publication number Publication date
US5874049A (en) 1999-02-23
US5632960A (en) 1997-05-27
ATE241818T1 (de) 2003-06-15
EP0864123B1 (en) 2003-05-28
EP0864123A1 (en) 1998-09-16
DE69628445D1 (de) 2003-07-03
DE69628445T2 (de) 2004-01-15
KR100394181B1 (ko) 2003-12-18
EP0864123A4 (en) 1999-01-20
WO1997017640A1 (en) 1997-05-15
KR19990067393A (ko) 1999-08-16

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