JP2000339654A - Production of thin film magnetic head slider - Google Patents

Abstract

PROBLEM TO BE SOLVED: To align the air bearing forming faces of plural slider bars on one plane independently of unevenness in thickness in the working of the slider bars with thin film magnetic head elements and to provide a liquid photoresist coated surface free from difference in level. SOLUTION: The air bearing forming faces 4 of slider bars 1 are vacuum- attracted to a surface regulating jig 5 with a smooth plane having high precision planeness and the rear faces of the slider bars opposite to the air bearing forming faces 4 are fixed on a slider bar fixing jig 7 with an adhesive while keeping the vacuum-attracted state. The vacuum-attracted faces are then released. The air bearing forming faces 4 are aligned along the plane of the surface regulating jig 5 and a liquid photoresist coated surface free from difference in level is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a method of manufacturing a thin film magnetic head slider mounted on a magnetic recording device such as a hard disk drive (HDD).

[0002]

2. Description of the Related Art In recent years, magnetic recording devices, such as a hard disk drive (HDD), are required to have a high recording density, and this trend is expected to increase in the future.

In addition, a thin-film magnetic head which is a key device in a hard disk drive requires a high-performance thin-film magnetic head synchronized with the trend on the drive side. Is required.

In such a background, a thin film magnetic head serving as a key device is required to have a sufficiently low flying height of about several tens nm in addition to a sufficient recording / reproducing performance for a recording medium. It is required that the flying height of the thin-film magnetic head be stable with respect to the recording medium consisting of a disk-shaped disk at any position on the disk without being affected by changes in peripheral speed. In recent years, it has become indispensable to establish an air bearing shape design and fabrication technique for stabilization.

However, according to the conventional air bearing shape forming technique, the slider bar cut from the wafer into a rectangular parallelepiped has a problem that the slider bar may be clogged or worn due to the problem of the grinding wheel at the time of cutting.
In the photolithography in which not only the thickness variation of the order is generated but also the warpage caused by the change in the condition of the grinding wheel is not negligible, and the surface becomes the surface to be processed, the above-mentioned causes are not satisfied. Variations in the individual slider bars that become apparent become steps on the surface to be processed, which is a problem in manufacturing when a plurality of slider bars are arranged and processed at once.

Hereinafter, a method of manufacturing a conventional thin film magnetic head slider will be described with reference to the drawings.

FIG. 4 is a schematic diagram illustrating the steps of a conventional method for forming a liquid photoresist coated surface of a thin film magnetic head slider bar.

As shown in FIG. 4A, a slider bar 41, which is a processing unit in the conventional example, has a rectangular parallelepiped shape in which a plurality of thin-film magnetic head elements 42 are formed in a longitudinal direction of a side surface of a main substrate 43 mainly made of an AlTiC material. The surface orthogonal to the recording / reproducing portion (not shown) of the thin-film magnetic head element 42 is an air bearing forming surface 44. First, the air bearing forming surfaces 44 of the plurality of slider bars 41 to be processed simultaneously are aligned in the same direction.

As shown in FIG. 4B, an adhesive 48 for fixing the slider bar 41 is applied to the upper surface of the slider bar fixing jig 47 at a predetermined thickness.

Next, as shown in FIG.
The slider bar fixing jig 47 coated with the slider bar 41 is brought into contact with the slider bar back surface 49 side facing the air bearing forming surface 44 of the slider bar 41, and the adhesive 48 is cured under predetermined conditions. 41
And the slider bar fixing jig 47 are fixed.

Thereafter, although not shown in the drawing, the air bearing forming surface 4 of the plurality of slider bars 41 is formed by a known technique.
4 is coated with a predetermined liquid photoresist with a predetermined thickness by a spin coater or the like and cured, thereby completing the formation of the liquid photoresist film for forming the air bearing, and forming the shape of the air bearing through a process such as dry etching.

[0012]

However, according to the conventional manufacturing method described above, in a recent magnetic recording apparatus requiring a low flying height with high accuracy, a fine and geometric air created by a photolithography technique is used. Considering that the bearing shape is formed, the static stability of the workpiece at the stage of forming the air bearing shape, especially in the photoresist film forming technology whose surface is the main processing object, Surface accuracy has a large effect directly on machining accuracy.

In view of the above, the processing surface (air bearing forming surface) step between a plurality of workpieces (slider bars) generated in the above-described conventional example is caused by the rotation during spin coating of the liquid photoresist. The liquid photoresist scattered from the dropping portion to the outer peripheral portion by the centrifugal force becomes an obstacle when flowing, and the liquid photoresist remaining at the step portion has an in-plane thickness error. Thereafter, photomask exposure, resist pattern
Thus, an air bearing having a predetermined shape is formed through processes such as development and ion milling. In such a slider bar manufacturing method, the film forming accuracy in the liquid photoresist film forming step is an important factor in processing, and the step on the surface to be processed (the surface on which the air bearing is formed) is reduced in final shape processing accuracy. Also had the problem of having a significant impact.

An object of the present invention is to solve the above-mentioned problems and to provide a method of manufacturing a thin film magnetic head slider capable of obtaining a liquid photoresist coated surface which is an air bearing forming surface without a step between slider bars. It is.

[0015]

In order to achieve this object, a method of manufacturing a thin film magnetic head slider according to the present invention is directed to a method for manufacturing a thin film magnetic head slider having a plurality of suction holes of a predetermined size, which is smooth and has high precision flatness. A first step of adsorbing the air bearing forming surfaces of the plurality of slider bars to the regulating jig, a back side of the slider bar, which is a suction facing surface, and a slider bar fixing jig to which a predetermined adhesive has been applied in advance. The method includes a second step of curing by contacting with an adhesive, and a third step of releasing the vacuum suction surface of the surface regulating jig to form a liquid photoresist coated surface.

According to this method, the surface of the slider bar on which the air bearing is formed is vacuum-adsorbed by a surface regulating jig having a high degree of flatness and having a smooth surface to adhere the slider bar to the slider bar fixing jig. The air bearing forming surfaces of the plurality of slider bars adhered to the slider bar fixing jig are formed on one plane following the plane of the surface regulating jig having high precision flatness, and a step between the plurality of slider bars is formed. A liquid photoresist-coated surface free from defects can be obtained.

Further, the method of manufacturing a thin film magnetic head slider according to the present invention is a method of manufacturing a thin film magnetic head slider, comprising: A second step is provided in which a slider bar fixing jig to which a photoresist has been applied in advance is brought into contact with a liquid photoresist through a liquid photoresist to be cured.

According to this method, the air bearing forming surfaces of the plurality of slider bars adhered to the slider bar fixing jig are formed on one plane following the plane of the surface regulating jig having high precision flatness. It is possible to obtain a liquid photoresist coated surface without a step between a plurality of slider bars. In addition, since the slider bar and the slider bar fixing jig are bonded using the liquid photoresist for forming an air bearing as an adhesive, even if the adhesive is attached to the side surface of the slider bar at the time of bonding, the air bearing forming surface of the slider bar is also used. By applying the liquid photoresist to the adhesive, the adhesive adhered to the side surface of the slider bar or the like can be assimilated without any inconvenience because the adhesive is the same liquid photoresist.

Further, the method of manufacturing a thin-film magnetic head slider according to the present invention is characterized in that the slider bar is vacuum-adsorbed to the surface regulating jig, and the vacuum adsorbing surface of the surface regulating jig is coated with a predetermined adhesive. There is provided a second step of holding the bar fixing jig at a predetermined interval, curing the adhesive under predetermined conditions, and bonding and fixing the slider bar and the slider bar fixing jig.

According to this method, the air bearing forming surfaces of the plurality of slider bars adhered to the slider bar fixing jig are formed on one plane following the plane of the surface regulating jig having high flatness. It is possible to obtain a liquid photoresist coated surface without a step between a plurality of slider bars. Further, since the slider bar is adhered to the easily deformable slider bar without applying a large pressure at the time of adhesion, the slider bar is not deformed and a liquid photoresist coated surface having a highly accurate flat surface can be formed.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION
In a manufacturing method of forming a liquid photoresist film of a predetermined thickness on a rectangular parallelepiped slider bar having a plurality of thin film magnetic head elements in a longitudinal direction of a main substrate and processed into a predetermined shape, and forming an air bearing shape by a photolithography technique. A method in which a plurality of slider bars are arranged to form an air bearing shape so that an air bearing forming surface, which is a liquid photoresist coating surface, is on one plane, and has a high degree of flatness and is smooth and predetermined. A first step of adsorbing the air bearing forming surfaces of a plurality of slider bars to a surface regulating jig having a plurality of suction holes of a size; A second step of bringing the slider bar fixing jig into contact with an adhesive via an adhesive to cure the jig, and vacuum suction of the surface regulating jig. And a third step of forming a liquid photoresist coated surface by releasing the surface of the slider bar. The air bearing forming surface of the multiple slider bars bonded to the slider bar fixing jig is a surface with high precision flatness because the air bearing forming surface is vacuum-adsorbed and the slider bar is bonded to the slider bar fixing jig. It is formed on one plane following the plane of the regulating jig, and has an effect that a liquid photoresist coated surface without a step between a plurality of slider bars can be obtained.

[0022] The invention described in claim 2 of the present invention provides:
In the second step of claim 1, the liquid photoresist of the same kind as the liquid photoresist for forming the air bearing shape of the slider bar by photolithography in advance and the back side which is the suction facing surface of the slider bar was applied. A second step of bringing the slider bar fixing jig into contact with the liquid photoresist through a liquid photoresist and curing the liquid, and having a flat surface with high precision and a smooth surface. In order to adhere the slider bar to the slider bar fixing jig by vacuum-adsorbing the slider bar air bearing forming surface with the regulating jig, the air bearing forming surface of the multiple slider bars bonded to the slider bar fixing jig is high. It is formed on one plane following the plane of the surface regulating jig with the flatness of accuracy, and the step between the slider bars It is possible to obtain a liquid photoresist coated surface. In addition, since the slider bar and the slider bar fixing jig are bonded using the liquid photoresist for forming the air bearing shape as an adhesive, even if the adhesive adheres to the side surface of the slider bar at the time of bonding, the air bearing of the slider bar is formed. By applying the liquid photoresist on the surface, since the adhesive adhered to the side surface of the slider bar and the like is the same liquid photoresist, there is an effect that the adhesive can be assimilated without any inconvenience.

[0023] The invention according to claim 3 of the present invention provides:
In the second step of claim 1, a liquid photoresist having different properties such as viscosity from a liquid photoresist for forming an air bearing shape of the slider bar by a photolithography technique, and a back side which is a suction facing surface of the slider bar. With the slider bar fixing jig applied in advance,
Contact through liquid photoresist of different properties,
It is characterized by having a second step of curing, and the surface of the air bearing forming surface of the slider bar is vacuum-adsorbed with a surface regulating jig having a high degree of flatness and a smooth surface, thereby holding the slider bar. In order to adhere to the slider bar fixing jig, the air bearing forming surface of the multiple slider bars adhered to the slider bar fixing jig is on one plane following the plane of the surface regulation jig with high precision flatness It has the effect of being able to obtain a liquid photoresist coated surface that is formed and has no steps between the plurality of slider bars.

Further, the invention according to claim 4 of the present invention provides:
In the second step of claim 1, in a state where the slider bar is vacuum-sucked to the surface regulating jig, the vacuum suction surface of the surface regulating jig and the slider bar fixing jig to which a predetermined adhesive has been applied in advance, It has a second step of holding and holding at a fixed interval, curing the adhesive under predetermined conditions, and bonding and fixing the slider bar and the slider bar fixing jig, and has a high precision flat surface. In order to adhere the slider bar to the slider bar fixing jig by vacuum-adsorbing the slider bar air bearing forming surface with a surface regulating jig having a smooth and smooth surface, a plurality of The surface of the slider bar where the air bearing is formed is formed on one plane following the plane of the surface regulation jig with high precision flatness, and there is no step between the slider bars. A surface that can be obtained and further adheres to a slider bar that is easily deformed without applying a large pressure at the time of adhesion, so that there is no deformation of the slider bar and a liquid photoresist coated surface having a highly accurate flat surface is formed. It has the effect that it can be done.

Further, the invention according to claim 5 of the present invention provides:
In the second step of claim 1, in a state where the slider bar is vacuum-sucked to the surface regulating jig, a vacuum suction surface of the surface regulating jig and a liquid photoresist for photolithography for forming the air bearing shape are provided. A slider bar fixing jig pre-coated with the same type of liquid photoresist,
It is characterized by having a second step of holding and holding at a fixed interval, curing the liquid photoresist under predetermined conditions, and bonding and fixing the slider bar and the slider bar fixing jig, In order to adhere the slider bar to the slider bar fixing jig by vacuum-sucking the air bearing forming surface of the slider bar with a surface regulating jig having flatness and a smooth surface, a plurality of The air bearing surface of the slider bar is
A slider that is formed on one plane following the plane of a surface regulation jig with high precision flatness, can obtain a liquid photoresist coated surface with no steps between a plurality of slider bars, and is easily deformed The adhesive is applied to the bar without applying large pressure, so there is no deformation of the slider bar, it is possible to form a liquid photoresist coated surface with a high-precision flat surface, and the air photoresist forming liquid photoresist is used as an adhesive. In order to bond the slider bar and the slider bar fixing jig, even if the adhesive adheres to the side surface of the slider bar at the time of bonding, applying the liquid photoresist to the air bearing forming surface of the slider bar, Adhesive attached to the side of the surface is the same liquid photoresist, so assimilation without any inconvenience It has the effect that it is possible to.

The invention according to claim 6 of the present invention provides:
In the second step of claim 1, in a state where the slider bar is vacuum-sucked to the surface regulating jig, a vacuum suction surface of the surface regulating jig and a liquid photoresist for photolithography for forming an air bearing shape. Slider bar pre-coated with liquid photoresist with different properties such as viscosity
The fixing jig is held at a constant interval, and liquid photoresists having different properties are cured under predetermined conditions, and the slider bar and the slider bar fixing jig are bonded and fixed.
The surface of the slider bar air bearing formation surface is vacuum-adsorbed with a surface regulating jig that has a flat surface with high precision and a smooth surface, and fixes the slider bar to the slider bar. In order to adhere to the fixture, the air bearing forming surfaces of the plurality of slider bars adhered to the slider bar fixing jig are formed on one plane following the plane of the surface regulation jig having high precision flatness, It is possible to obtain a liquid photoresist coated surface with no step between the slider bars, and furthermore, to adhere to the easily deformable slider bar without applying large pressure at the time of adhesion,
There is an effect that a liquid photoresist coated surface having a highly accurate flat surface can be formed without deformation of the slider bar.

[0027] The invention according to claim 7 of the present invention provides:
A surface regulating jig having a flat surface with high precision and a smooth surface, which is manufactured by the method for manufacturing a thin film magnetic head slider according to any one of claims 1 to 6. In order to attach the slider bar to the slider bar fixing jig by vacuum-sucking the slider bar air bearing forming surface with the slider bar, the air bearing forming surface of multiple slider bars bonded to the slider bar fixing jig is
Formed on one plane following the plane of the surface regulation jig with high precision flatness, it is possible to obtain a liquid photoresist coated surface with no steps between a plurality of slider bars, and a flat upper surface with no steps The liquid photoresist for forming the shape of the air bearing is applied to the surface, the applied photoresist film has a uniform thickness, and the accuracy of the shape of the air bearing formed through processes such as dry etching is excellent. Thus, the thin-film magnetic head slider having good floating characteristics can be obtained.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1) FIG. 1 is a schematic diagram illustrating the steps of a method for forming a liquid photoresist coated surface of a plurality of slider bars according to Embodiment 1 of the present invention.

In FIG. 1A, a slider bar 1 serving as a processing unit is a rectangular parallelepiped in which a plurality of thin film magnetic head elements 2 are formed in a longitudinal direction of a side surface of a main substrate 3 mainly made of an AlTiC material. The surface orthogonal to the recording / reproducing portion (not shown) of the thin-film magnetic head element 2 is the air bearing forming surface 4.

As shown in FIG. 1-1, the air bearing forming surfaces 4 of the plurality of slider bars 1 are aligned so as to be in the same direction.

Next, as shown in a perspective view in FIG. 1-2 and a side view in FIG. 1-3, as a first step, the air bearing forming surfaces 4 of the plurality of slider bars 1 are flattened with high precision. And a surface regulating jig 5 having a plurality of suction holes 6 of a predetermined size having a smooth surface. The slider bars are vacuum-adsorbed so as to be pressed tightly together without any gap. Here, a plurality of suction holes 6 of a predetermined size are opened and sucked in the surface regulating jig 5 in correspondence with one slider bar 1 (here, as shown in FIG. An example having a hole is shown).

Next, as shown in FIG. 1-4, as a second step, a surface regulating jig 5 which vacuum-adsorbs the air bearing forming surface 4 of the slider bar 1 and an adhesive layer on both surfaces in a tape shape. Although not particularly limited, such as an adhesive tape having a liquid temperature-setting adhesive or a solid hot-melt adhesive, a slider bar fixing jig 7 on which an eight-layer adhesive having a predetermined thickness is fixed is opposed to at least one of them. By moving one of the jigs, the jig 7 was slightly moved until the slider bar fixing jig 7 and the slider bar fixing jig 7 facing the air bearing forming surface 4 were in contact with each other via the adhesive 8. The adhesive 8 is cured under the curing conditions specified by the adhesive layer type.

Next, as shown in FIG. 1-5, as a third step, the vacuum suction surface of the surface regulating jig 5 is opened to be adhered to the slider bar fixing jig 7 with the adhesive 8. A liquid photoresist coating surface 11 having a flat surface following the surface of the surface regulating jig without any step between the air bearing forming surfaces 4 of the plurality of slider bars 1 is obtained.

Thereafter, a liquid photoresist of a predetermined thickness is applied and cured by a known technique using a spin coater or the like to complete the formation of the liquid photoresist film for forming the air bearing. (Not shown) As described above, according to the method of the present embodiment, the air bearing forming surface of the slider bar is vacuum-adsorbed by the surface regulating jig having a high-precision flatness and a smooth surface. In order to bond the bars to the slider bar fixing jig, the air bearing forming surface of the multiple slider bars bonded to the slider bar fixing jig is one plane following the plane of the surface regulating jig with high precision flatness It is possible to obtain a liquid photoresist coated surface formed on the upper surface and having no step between the air bearing forming surfaces of the plurality of slider bars.

It is to be noted that, as the adhesive 8 in the present embodiment, a liquid photoresist of the same type as the liquid photoresist applied to the air bearing forming surface of the slider bar or a different type of liquid photoresist having different properties such as viscosity may be used. Needless to say, it is good. In the method of fixing the slider bar using a liquid photoresist as an adhesive, in a process of performing a vacuum process such as ion milling or applying a protective film on an air-bearing surface in a later process, depending on the type of the adhesive used, Outflow of obstacle gas and scattering of foreign matter can be prevented, film quality can be stabilized, and workability can be greatly improved because cleaning after treatment is easy. Also, when the same type of liquid photoresist is used as the adhesive, the back side, which is the suction surface of the slider bar, and the slider bar fixing jig coated with the liquid photoresist are brought into contact with each other via the liquid photoresist and adhered. Even if the adhesive adheres to the side surface of the slider bar, the liquid photoresist applied to the air bearing forming surface of the slider bar is the same as the liquid photoresist used as the adhesive. The photoresist dissolves into the liquid photoresist applied to the air bearing forming surface, and the effect is obtained that the adhesion of the adhesive has no adverse effect on the formation of the air bearing shape.

(Embodiment 2) FIG. 2 is a side sectional view illustrating a method of forming a liquid photoresist applied surface of a plurality of slider bars according to Embodiment 2 of the present invention. FIG.
FIG. 2 is a perspective view showing a liquid photoresist applied surface formed on one plane.

In the second step of the first embodiment, the surface regulating jig 25 on which the slider bar 21 is sucked and the slider bar fixing jig 27 on which the adhesive 28 is fixed are opposed to each other. The jig is moved, and as shown in FIG. 2, the slider bar fixing jig 27 and the most protruding portion of the slider bar back surface 29 facing the air bearing forming surface are slightly moved to a position where a fixed gap 20 is maintained. Is held, the adhesive 28 is cured under predetermined conditions.

Here, the adhesive 28 is applied in a sufficient amount to fill the gap 22 between the slider bar fixing jig and the back surface facing the air-bearing forming surface of the slider bar having the smallest thickness. I do.

The other steps are the same as in the first embodiment.

As shown in FIG. 3, also in the second embodiment, the liquid photoresist coating surface 31 in which there is no step between the air bearing forming surfaces 34 of the plurality of slider bars 21 as in the first embodiment. Get.

Thereafter, as in the first embodiment, a predetermined liquid photoresist is applied with a predetermined thickness using a spin coater or the like and cured, thereby completing the formation of the liquid photoresist film for forming the air bearing. (Not shown) As the adhesive 28 in the present embodiment, a liquid photoresist of the same type as the liquid photoresist applied to the air bearing forming surface of the slider bar or a different liquid photoresist having different properties such as viscosity is used. Needless to say, this is acceptable.

As described above, according to the present embodiment, the same effects as in the first embodiment can be obtained. Furthermore, since the most protruding part on the back surface of the slider bar and the slider bar fixing jig are adhered while maintaining a fixed interval, it is possible to adhere to the easily deformable slider bar without applying large pressure when attaching, and the deformation of the slider bar is reduced. In addition, there is an effect that a liquid photoresist coated surface having a highly accurate flat surface can be formed.

[0044]

As described above, according to the present invention, a large number of slider bars are vacuum-adsorbed and adhered to a surface regulating jig having a flat surface with high precision and flatness at a time, so that the thickness of the slider bars varies. Or, even if the thickness of the adhesive layer varies, the air bearing forming surfaces of the slider bars after bonding are arranged so as to be on the same plane, and a liquid photoresist coated surface without a step between the slider bars can be formed. An excellent effect is obtained.

The present invention also relates to a method of fixing a slider bar using a liquid photoresist as an adhesive, which is used in a subsequent step of processing in a vacuum apparatus such as ion milling and application of a protective film on an air bearing surface. Depending on the type of adhesive used, outflow of gas and scattering of foreign substances can be prevented, the film quality can be stabilized, and the workability of the liquid photoresist is greatly improved because it is easy to clean after processing. The effect that it can improve is obtained.

Further, according to the present invention, since the most protruding portion on the back surface of the slider bar and the slider bar fixing jig are adhered while maintaining a predetermined interval, the slider bar which is easily deformed can be adhered without applying a large pressure. The effect of suppressing deformation of the slider bar and forming a liquid photoresist coated surface having a highly accurate flat surface can be obtained.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a process outline in Embodiment 1 of the present invention.

FIG. 2 is a side sectional view according to a second embodiment of the present invention.

FIG. 3 is a perspective view showing a liquid photoresist coated surface according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram of a process outline showing a conventional method of forming a liquid photoresist coated surface.

[Explanation of symbols]

 1, 21, 41 Slider bar 2, 42 Thin-film magnetic head element 3, 43 AlTiC main substrate 4, 34, 44 Air bearing forming surface 5, 25, Surface regulating jig 6 Suction hole 7, 27, 47 Slider bar fixing jig 8, 28, 48 Adhesive 9, 29, 49 Slider bar back surface 11, 31 Liquid photoresist coated surface

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Keiji Yoshiji, Inventor 1006, Oazadoma, Kadoma, Osaka Matsushita Electric Industrial Co., Ltd. F term (reference) 5D042 NA02 PA09 RA02 RA04 RA10

Claims (7)

[Claims] A liquid photoresist film having a predetermined thickness is formed on a rectangular parallelepiped slider bar having a plurality of thin film magnetic head elements in a longitudinal direction of a main substrate and processed into a predetermined shape, and an air bearing shape is formed by a photolithography technique. In the manufacturing method, a plurality of slider bars are arranged so that an air bearing forming surface for forming the air bearing shape is coated with a liquid photoresist coating surface on one plane. A first step of adsorbing the air bearing forming surfaces of the plurality of slider bars to a surface regulating jig having a plurality of suction holes of a flat and smooth and predetermined size; A certain back side and a slider bar fixing jig to which a predetermined adhesive has been applied in advance are brought into contact with each other via the adhesive to cure the slider. And a third step of releasing the vacuum suction surface of the surface regulating jig to form the liquid photoresist coated surface. . 2. The method according to claim 1, wherein a back side of the slider bar, which is an attraction surface of the slider bar, and a liquid photoresist for forming the air bearing shape of the slider bar by a photolithography technique. 2. The thin-film magnetic head slider according to claim 1, further comprising a second step of bringing the slider bar fixing jig, to which the liquid photoresist has been applied in advance, into contact with the slider bar via the liquid photoresist to cure the slider. Manufacturing method. 3. The method according to claim 1, wherein the liquid photoresist for forming the air bearing shape of the slider bar by a photolithography technique and a viscosity of the liquid photoresist are used to form the air bearing shape of the slider bar. 2. The method according to claim 1, further comprising a second step of bringing a slider bar fixing jig, to which liquid photoresists having different properties are applied in advance, into contact with each other via the liquid photoresists having the different properties to cure the same. 3. The method for manufacturing a thin film magnetic head slider according to item 1. 4. The method according to claim 1, wherein the slider bar is vacuum-adsorbed to the surface regulating jig.
A vacuum suction surface of the surface regulating jig and a slider bar fixing jig to which a predetermined adhesive has been previously applied are held at a predetermined interval, and the adhesive is cured under predetermined conditions, and the slider bar is fixed. 2. The method for manufacturing a thin film magnetic head slider according to claim 1, further comprising a second step of bonding and fixing the slider bar fixing jig to the slider. 5. The method according to claim 1, wherein the slider bar is vacuum-adsorbed to the surface regulating jig.
The vacuum suction surface of the surface regulating jig and a slider bar fixing jig previously coated with the same type of liquid photoresist as the liquid photoresist for photolithography for forming the air bearing shape are maintained at a constant interval. 2. The thin-film magnetic head according to claim 1, further comprising a second step of fixing the slider bar and the slider bar fixing jig by hardening the liquid photoresist under predetermined conditions. Manufacturing method of slider. 6. The method according to claim 1, wherein the slider bar is vacuum-adsorbed to the surface regulating jig.
A vacuum suction surface of the surface regulating jig, and a slider bar fixing jig previously coated with a liquid photoresist having different properties such as viscosity and a photolithographic liquid photoresist for forming the air bearing shape, and 2. The method according to claim 1, further comprising a second step of holding and maintaining the gap, curing the liquid photoresists having different properties under predetermined conditions, and bonding and fixing the slider bar and the slider bar fixing jig. 3. The method for manufacturing a thin film magnetic head slider according to item 1. 7. A thin-film magnetic head slider manufactured by the method for manufacturing a thin-film magnetic head slider according to claim 1.