JP2000331964A - Method and device for dividing substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for dividing a substrate with which the productivity of a substrate can be improved by simultaneously dividing a plurality of substrates into pieces. SOLUTION: In a method for dividing a substrate, strip-like substrates 11 having dividing grooves 12 on at least one surfaces are placed on the upper surfaces of a plurality of stages 13 and positioned by means of a stopper 14, so that the grooves 12 respectively form straight lines. Then the substrates 11 are divided into pieces by continuously jetting beads upon the grooves 12 from nozzles 16, which are fixed to a nozzle fixing plate 15 provided above the stages 13 and jet the beads for dividing the substrates 11 into pieces. Therefore, the substrates 11 placed on the stages 13 can be divided simultaneously into pieces.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for dividing a substrate having a dividing groove into individual pieces.

[0002]

2. Description of the Related Art As a conventional substrate dividing method and substrate dividing device, one described in Japanese Patent Application Laid-Open No. 6-120367 is known.

FIG. 5 is an explanatory view showing a conventional substrate dividing apparatus.

In FIG. 5, reference numeral 1 denotes a strip-shaped ceramic substrate to be divided. Reference numeral 2 denotes a transport belt that is driven and driven by the drive pulley 3 and the plurality of first driven pulleys 4 and transports the strip-shaped ceramic substrate 1. Reference numeral 5 denotes a first rotatable metal dividing roller provided so as to be in pressure contact with the conveyor belt 2. 6
Reference numeral denotes a holding belt supported by the second driven pulley 7 and driven by the conveyance belt 2. Reference numeral 8 denotes a second metal dividing roller that is provided so as to be in pressure contact with the pressing belt 6 and that is freely rotatable. A pressing cylinder 9 presses the second dividing roller 8 downward by air pressure.

The operation of the conventional substrate dividing apparatus configured as described above will be described below.

When the strip-shaped ceramic substrate 1 is placed on the upper surface of the transport belt 2 and the drive pulley 3 is rotated by a motor (not shown), the transport belt 2 is driven by the drive pulley 3, and the first driven belt is driven. The pulley 4 and the first dividing roller 5 rotate in the direction of the arrow. Along with this, the conveyor belt 2
The second pulley 7 and the second dividing roller 8 rotate further. As a result, the strip-shaped ceramic substrate 1 is divided into the first and second strips.
Is transported between the dividing rollers 5 and 8. Since the second dividing roller 8 is connected to the pressing cylinder 9, when the second dividing roller 8 is pressed downward by the pressing cylinder 9, the pressing belt 6 is moved to the conveying belt 2.
Is pressed into contact with the strip-shaped ceramic substrate 1 on the upper surface, bending stress is generated in the strip-shaped ceramic substrate 1 passing between the first and second dividing rollers 5 and 8, and the strip-shaped ceramic substrate 1 is divided. , Into individual pieces 1a.

[0007]

However, in the above-mentioned conventional structure, the strip-shaped ceramic substrate 1 is divided into individual pieces 1.
In order to obtain a, the strip-shaped ceramic substrates 1 are transported one by one on the transporting belt 2 and the first,
Since it is divided into individual pieces 1a sandwiched between the second dividing rollers 5 and 8, there is a problem that productivity is low.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a substrate dividing method capable of simultaneously dividing a plurality of substrates into individual pieces and improving productivity. .

[0009]

In order to achieve the above object, a method of dividing a substrate according to the present invention comprises placing a plurality of substrates having a dividing groove on at least one surface on an upper surface of a stage, and attaching at least one end of the substrate to the substrate. Abutting a stopper, positioning the adjacent dividing grooves of the substrate so as to be linear, installing a nozzle fixing plate having a nozzle above the stage to face the substrate, and dividing the dividing groove of the substrate. In this method, beads are continuously ejected from the nozzle to divide the substrate. According to this dividing method, a plurality of substrates can be simultaneously divided into individual pieces, and as a result, the productivity can be increased. Can be done.

[0010]

According to the first aspect of the present invention, a plurality of substrates each having a dividing groove on at least one surface are placed on the upper surface of a stage, and at least one end of the substrate is brought into contact with a stopper. Position the dividing grooves of the adjacent substrates so as to be linear, install a nozzle fixing plate having a nozzle above the stage to face the substrate, and continuously connect the dividing grooves of the substrate from the nozzles to the dividing grooves of the substrate. According to this dividing method, a plurality of substrates are mounted and positioned so that the dividing grooves of adjacent substrates are in a straight line. Therefore, a plurality of substrates can be divided into individual pieces at the same time.

According to a second aspect of the present invention, in the first aspect of the present invention, the positioning member is positioned so that the dividing grooves of the plurality of substrates are linear, and then the pressing member is placed on the upper surface of the substrate. According to this dividing method, since the upper surface of the plurality of substrates is pressed by the pressing member, the position is not shifted when the plurality of substrates are divided. In addition, it is possible to more accurately determine the position, and to collect the pieces that have been divided into pieces without dropping from the stage.

According to a third aspect of the present invention, in the first or second aspect, the beads are made of at least one of ceramic, glass, diamond, and metal, and have a spherical shape having a diameter of 45 μm or more and 90 μm or less. According to this dividing method, the beads have a hardness equal to or higher than that of the substrate to be divided and have a diameter smaller than the width of the dividing groove of the substrate. Has the effect of causing cracks.

According to a fourth aspect of the present invention, there is provided a stage having at least one end having a stopper for fixing a substrate, a pressing member for pressing the substrate mounted on an upper surface of the stage, and a stage provided above the stage. The nozzle is provided with a nozzle for continuously ejecting beads, and a nozzle fixing plate for fixing the nozzle. According to this dividing apparatus, a plurality of substrates are placed, and the dividing grooves of adjacent substrates are linear. Since the positioning is performed so that the following conditions are satisfied, a plurality of substrates can be simultaneously divided into individual pieces.

Hereinafter, a method and an apparatus for dividing a substrate according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a main part of a substrate dividing apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view showing a state in which a holding member is placed in the dividing apparatus, and FIG. FIG. 4 is a perspective view showing a main part including a holding member of the device.

In FIGS. 1 to 3, reference numeral 11 denotes a strip-shaped substrate having a dividing groove 12 for dividing into individual pieces on at least one surface. Reference numeral 13 denotes a stage on which a plurality of substrates 11 to be divided are placed in parallel on the upper surface. Reference numeral 14 denotes a stopper provided at at least one end of the stage 13 for positioning and fixing the substrate 11 mounted on the upper surface of the stage 13 so that the dividing grooves 12 are aligned. Reference numeral 15 denotes a position opposite to the stage 13 and the stage 1
3 is a nozzle fixing plate provided above. Reference numeral 16 denotes a nozzle which is fixed so as to be fitted into the nozzle fixing plate, and which sprays beads (not shown) for dividing the substrate 11. Reference numeral 17 denotes a pressing member that presses and holds the substrate 11 on the stage 13 from above, and has a surface made of urethane rubber or the like.

A method of dividing a substrate using the above-configured dividing device will be described below.

First, from the side of the stage 13 where the stopper 14 is not provided, a strip-shaped substrate 11 having a dividing groove 12 is fed by a conveyor belt (not shown), and a plurality of strip-shaped substrates 11 are separated. It is placed on the upper surface of the stage 13 in parallel. At this time, the leading end of the substrate 11 is brought into contact with the stopper 14 so as to be positioned and fixed so that the dividing grooves 12 provided in the plurality of strip-shaped substrates 11 are linear.

Next, the grid-like pressing member 17 is lowered from above the plurality of substrates 11 placed on the stage 13, and the substrate 11 is pressed and held from above. When the substrate 11 is divided while being held by the holding member 17 in this manner, the position of the substrate 11 is not shifted when the substrate 11 is divided, and the substrate 11 can be positioned more accurately. It can be collected efficiently without dropping it from 13.

Next, the nozzle fixing plate 15 is lowered from above the stage 13, and the nozzle 16 is aligned so that the tip of the nozzle 16 is located directly above the dividing groove 12 provided on the substrate 11.

Next, from the tip of the nozzle 16 fixed to the nozzle fixing plate 15, ceramic, glass, diamond,
Made of at least one metal and having a diameter of 45 μm or more and 90
Beads (not shown) having a spherical shape of less than μm
Inject at a speed of seconds. The beads have a hardness equal to or higher than that of the strip-shaped substrate 11 to be divided, and have a diameter smaller than the width of the division groove 12 of the substrate 11. Since a crack is generated in the dividing groove 12 of the substrate 11 by the impact force, the substrate can be divided. When the diameter of the beads exceeds 90 μm, the beads protrude greatly from the dividing grooves 12 and may be cracked on the outside of the dividing grooves 12. It is suitable that the thickness is 45 μm or more and 90 μm or less.

Finally, after dividing the substrate 11, the stage 13
The beads remaining on the upper side are removed by blowing air obliquely from above and are collected below the stage 13. Further, the nozzle fixing plate 15 and the holding member 17 are moved above the individual substrates 11, and the divided individual members are conveyed by a belt conveyor or the like.

As described above, when the substrate 11 is divided by applying the beads, the edge portions of the surface divided by the division grooves 12 are simultaneously cut, so that the substrate 11 is not burred by the division. As a result, when the substrate 11 is divided into individual pieces, the surface of the corner portion becomes smooth, so that when this individual piece is mounted on a mounting board or the like, the solderability is improved and the mountability is improved. The effect is obtained. In addition, even if the beads are not perfectly spherical, if the shape has no corners on the surface, since the edge portion of the divided surface can be easily shaved, the same effect as the above can be obtained. Things.

The nozzle for injecting beads is a cylinder 1 fixed to a cylinder fixing plate 18 as shown in FIG.
It may be nine.

According to the method for dividing a substrate according to the embodiment of the present invention described above, for example, when a strip-shaped substrate to be divided into 15 pieces is placed on a stage at a time and divided into 10 pieces, Has a production efficiency of about 3000 pieces / minute,
The productivity can be increased 6 times or more as compared with about 450 pieces / minute by the conventional dividing method.

[0026]

As described above, according to the present invention, a nozzle fixing plate having a nozzle is provided above a stage so as to face a substrate, and beads are continuously jetted from a nozzle into a dividing groove of the substrate. Which splits
Since a plurality of substrates mounted on the stage can be divided into individual pieces at the same time, there is an effect that productivity can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a main part of a substrate dividing apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a state where a holding member is placed in the dividing device.

FIG. 3 is a perspective view showing a main part including a pressing member of the dividing device.

FIG. 4 is a perspective view showing another example of a main part of the dividing device.

FIG. 5 is an explanatory view showing a conventional substrate dividing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Substrate 12 Division groove 13 Stage 14 Stopper 15 Nozzle fixing plate 16 Nozzle 17 Holding member

Claims (4)

[Claims] 1. A substrate having a plurality of division grooves on at least one surface is placed on an upper surface of a stage, and at least one end of the substrate is brought into contact with a stopper so that division grooves of adjacent substrates are linear. Positioning, placing a nozzle fixing plate having a nozzle above the stage, facing the substrate, and dividing the substrate by continuously injecting beads from the nozzle into the dividing grooves of the substrate to divide the substrate Method. 2. The method according to claim 1, further comprising: positioning the dividing grooves of the plurality of substrates so as to be in a straight line, and then placing the pressing member on the upper surface of the substrate and dividing while pressing and holding the substrate. Method of dividing the substrate. 3. The beads are made of at least one of ceramic, glass, diamond, and metal and have a diameter of 45.
3. A spherical shape of not less than μm and not more than 90 μm.
A method for dividing a substrate as described above. 4. A stage having at least one end having a stopper for fixing a substrate, a pressing member for pressing the substrate mounted on an upper surface of the stage, and continuously ejecting beads provided above the stage. And a nozzle fixing plate for fixing the nozzle.