JP2000327430A5 - - Google Patents

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Publication number
JP2000327430A5
JP2000327430A5 JP1999137449A JP13744999A JP2000327430A5 JP 2000327430 A5 JP2000327430 A5 JP 2000327430A5 JP 1999137449 A JP1999137449 A JP 1999137449A JP 13744999 A JP13744999 A JP 13744999A JP 2000327430 A5 JP2000327430 A5 JP 2000327430A5
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JP
Japan
Prior art keywords
aluminum nitride
sintered body
slurry
particle size
average particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999137449A
Other languages
English (en)
Japanese (ja)
Other versions
JP4859267B2 (ja
JP2000327430A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP13744999A priority Critical patent/JP4859267B2/ja
Priority claimed from JP13744999A external-priority patent/JP4859267B2/ja
Publication of JP2000327430A publication Critical patent/JP2000327430A/ja
Publication of JP2000327430A5 publication Critical patent/JP2000327430A5/ja
Application granted granted Critical
Publication of JP4859267B2 publication Critical patent/JP4859267B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP13744999A 1999-05-18 1999-05-18 窒化アルミニウム焼結体とその製造方法 Expired - Lifetime JP4859267B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13744999A JP4859267B2 (ja) 1999-05-18 1999-05-18 窒化アルミニウム焼結体とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13744999A JP4859267B2 (ja) 1999-05-18 1999-05-18 窒化アルミニウム焼結体とその製造方法

Publications (3)

Publication Number Publication Date
JP2000327430A JP2000327430A (ja) 2000-11-28
JP2000327430A5 true JP2000327430A5 (fr) 2005-11-04
JP4859267B2 JP4859267B2 (ja) 2012-01-25

Family

ID=15198881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13744999A Expired - Lifetime JP4859267B2 (ja) 1999-05-18 1999-05-18 窒化アルミニウム焼結体とその製造方法

Country Status (1)

Country Link
JP (1) JP4859267B2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4514379B2 (ja) * 2000-12-21 2010-07-28 日本碍子株式会社 窒化アルミニウム焼結体及び半導体製造装置用部材
JP2002241177A (ja) * 2001-02-13 2002-08-28 Nihon Ceratec Co Ltd 脱ガス特性に優れた窒化アルミニウム焼結体
KR100680084B1 (ko) 2002-09-20 2007-02-08 가부시끼가이샤 도꾸야마 질화알루미늄 소결체
WO2015147194A1 (fr) * 2014-03-26 2015-10-01 京セラ株式会社 Structure en nid-d'abeilles et dispositif de traitement de gaz en muni
KR101690753B1 (ko) * 2015-07-28 2017-01-10 강릉원주대학교산학협력단 반도체 초고온 박막공정을 위한 저열전도도 특성을 갖는 질화알루미늄 히터용 샤프트 및 이의 제조방법
KR102573024B1 (ko) * 2023-04-26 2023-08-31 주식회사 페코텍 와이어 본딩용 캐필러리 및 그 제조방법

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