JP2000315798A5 - - Google Patents

Download PDF

Info

Publication number
JP2000315798A5
JP2000315798A5 JP2000058493A JP2000058493A JP2000315798A5 JP 2000315798 A5 JP2000315798 A5 JP 2000315798A5 JP 2000058493 A JP2000058493 A JP 2000058493A JP 2000058493 A JP2000058493 A JP 2000058493A JP 2000315798 A5 JP2000315798 A5 JP 2000315798A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000058493A
Other versions
JP2000315798A (ja
JP4583540B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000058493A priority Critical patent/JP4583540B2/ja
Priority claimed from JP2000058493A external-priority patent/JP4583540B2/ja
Publication of JP2000315798A publication Critical patent/JP2000315798A/ja
Publication of JP2000315798A5 publication Critical patent/JP2000315798A5/ja
Application granted granted Critical
Publication of JP4583540B2 publication Critical patent/JP4583540B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000058493A 1999-03-04 2000-03-03 半導体装置およびその作製方法 Expired - Fee Related JP4583540B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000058493A JP4583540B2 (ja) 1999-03-04 2000-03-03 半導体装置およびその作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-57754 1999-03-04
JP5775499 1999-03-04
JP2000058493A JP4583540B2 (ja) 1999-03-04 2000-03-03 半導体装置およびその作製方法

Publications (3)

Publication Number Publication Date
JP2000315798A JP2000315798A (ja) 2000-11-14
JP2000315798A5 true JP2000315798A5 (ja) 2007-04-26
JP4583540B2 JP4583540B2 (ja) 2010-11-17

Family

ID=26398826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000058493A Expired - Fee Related JP4583540B2 (ja) 1999-03-04 2000-03-03 半導体装置およびその作製方法

Country Status (1)

Country Link
JP (1) JP4583540B2 (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7821065B2 (en) 1999-03-02 2010-10-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising a thin film transistor comprising a semiconductor thin film and method of manufacturing the same
JP2001175198A (ja) 1999-12-14 2001-06-29 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
US7525165B2 (en) 2000-04-17 2009-04-28 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and manufacturing method thereof
JP4739510B2 (ja) * 2000-12-15 2011-08-03 株式会社半導体エネルギー研究所 半導体装置およびその作製方法
JP4798907B2 (ja) * 2001-09-26 2011-10-19 株式会社半導体エネルギー研究所 半導体装置
JP2003209041A (ja) * 2002-01-15 2003-07-25 Seiko Epson Corp パターンの位置合わせ精度測定方法、パターンの形成方法、電気光学装置の製造方法、半導体装置の製造方法
JP2003298069A (ja) * 2002-01-30 2003-10-17 Sanyo Electric Co Ltd 半導体表示装置、その製造方法及びアクティブマトリクス型表示装置
TWI288443B (en) 2002-05-17 2007-10-11 Semiconductor Energy Lab SiN film, semiconductor device, and the manufacturing method thereof
TWI247180B (en) 2004-08-06 2006-01-11 Au Optronics Corp Thin film transistor structure for flat panel display and method for fabricating the same
CN100459157C (zh) * 2004-08-26 2009-02-04 友达光电股份有限公司 用于平面显示装置的薄膜晶体管结构及其制造方法
KR100647691B1 (ko) 2005-04-22 2006-11-23 삼성에스디아이 주식회사 평판 디스플레이 장치
JP2007188936A (ja) * 2006-01-11 2007-07-26 Epson Imaging Devices Corp 表示装置
KR102386147B1 (ko) 2009-07-31 2022-04-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 디바이스 및 그 형성 방법
KR101746198B1 (ko) 2009-09-04 2017-06-12 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시장치 및 전자기기
JP5153921B2 (ja) * 2011-06-27 2013-02-27 株式会社半導体エネルギー研究所 表示装置、及び携帯情報端末

Similar Documents

Publication Publication Date Title
BE2013C060I2 (ja)
BE2013C048I2 (ja)
BRPI0113420B8 (ja)
JP2001243243A5 (ja)
JP2003512125A5 (ja)
JP2002077778A5 (ja)
BE2014C025I2 (ja)
JP2003504631A5 (ja)
JP2000315798A5 (ja)
JP2003515771A5 (ja)
JP2002182244A5 (ja)
JP2003501960A5 (ja)
JP2001208970A5 (ja)
BR0112866A2 (ja)
JP2002095293A5 (ja)
BRPI0003419A (ja)
BY5768C1 (ja)
CN3141006S (ja)
CN3149245S (ja)
CN3143422S (ja)
CN3142149S (ja)
CN3142146S (ja)
CN3141400S (ja)
CN3141399S (ja)
CN3144671S (ja)