JP2000308846A - Method for formation of antifouling layer - Google Patents
Method for formation of antifouling layerInfo
- Publication number
- JP2000308846A JP2000308846A JP11118824A JP11882499A JP2000308846A JP 2000308846 A JP2000308846 A JP 2000308846A JP 11118824 A JP11118824 A JP 11118824A JP 11882499 A JP11882499 A JP 11882499A JP 2000308846 A JP2000308846 A JP 2000308846A
- Authority
- JP
- Japan
- Prior art keywords
- antifouling layer
- antifouling
- forming
- optical
- optical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Surface Treatment Of Optical Elements (AREA)
- Prevention Of Fouling (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Materials Applied To Surfaces To Minimize Adherence Of Mist Or Water (AREA)
- Paints Or Removers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、防汚性を必要とする各
種の被処理基材の表面に、防汚層を形成する方法に関す
るものである。さらに詳しくは、各種の被処理基材上に
防汚層を速やかに定着させる方法である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming an antifouling layer on the surface of various kinds of substrates requiring antifouling properties. More specifically, it is a method of quickly fixing an antifouling layer on various kinds of substrates to be treated.
【0002】[0002]
【従来の技術】従来、光学レンズ、眼鏡レンズ、カメラ
や双眼鏡などのレンズには、光の反射を減らし、光の透
過性を高めるために、通常、その表面に反射防止処理が
施されている。これらの光学部材を人が使用することに
よって、指紋、皮脂、汗、化粧品などの汚れが付着する
場合が多い。2. Description of the Related Art Conventionally, optical lenses, spectacle lenses, and lenses such as cameras and binoculars are usually provided with an antireflection treatment on the surface thereof in order to reduce the reflection of light and increase the transmittance of light. . When these optical members are used by humans, stains such as fingerprints, sebum, sweat, and cosmetics often adhere.
【0003】一般に、反射防止膜の表面エネルギーは約
60J/m2 と大きいために、そのような汚れが付着し
やすく、かつ、微細な凹凸があるため除去することが容
易ではない。また、そのような汚れが付着した部分だけ
高反射となり、汚れが目立つため問題があった。In general, since the surface energy of the antireflection film is as large as about 60 J / m 2 , it is not easy to adhere such dirt and to remove it due to the presence of fine irregularities. In addition, there is a problem that high reflection occurs only in a portion where such dirt adheres, and the dirt is conspicuous.
【0004】そこで、これら汚れの問題を解決する手段
として、汚れが付着しにくく、付着しても拭き取りやす
い性能を持つ防汚層を設ける工夫が考案されている。[0004] Therefore, as means for solving these problems of dirt, there has been devised a method of providing an antifouling layer having a property that dirt hardly adheres and that can easily be wiped off even if it adheres.
【0005】例えば、特開昭64−86101号公報に
は、基材の表面に、主として二酸化珪素からなる反射防
止膜を設け、更にその表面に有機珪素置換基を含む化合
物で処理した耐汚染性、耐擦傷性の反射防止膜物品が提
案されている。[0005] For example, Japanese Patent Application Laid-Open No. 64-86101 discloses an anti-reflection film formed by providing an antireflection film mainly composed of silicon dioxide on the surface of a substrate and further treating the surface with a compound containing an organic silicon substituent. There have been proposed scratch-resistant antireflective coating articles.
【0006】特開平4−338901号公報には、同様
に基材表面に末端シラノール有機ポリシロキサンを被膜
した耐汚染性、耐擦傷性のCRTフィルターが提案され
ている。Japanese Unexamined Patent Publication (Kokai) No. 4-338901 proposes a stain-resistant and scratch-resistant CRT filter in which a surface of a substrate is coated with a silanol-organic polysiloxane.
【0007】また、特公平6−29332号公報には、
プラスチック表面にポリフルオロアルキル基を含むモノ
およびジシラン化合物およびハロゲン、アルキルまたは
アルコキシのシラン化合物とからなる反射防止膜を有す
る低反射率および防汚性のプラスチックが提案されてい
る。Further, Japanese Patent Publication No. 6-29332 discloses that
A low-reflection and antifouling plastic having an antireflection film on a plastic surface comprising a mono- or di-silane compound containing a polyfluoroalkyl group and a halogen, alkyl or alkoxy silane compound has been proposed.
【0008】更に、特開平7−16940号公報には、
パーフルオロアルキル(メタ)アクリレートとアルコキ
シシラン基を有する単量体との共重合体を二酸化珪素を
主とする光学薄膜上に形成した光学物品が提案されてい
る。Further, Japanese Patent Application Laid-Open No. 7-16940 discloses that
Optical articles have been proposed in which a copolymer of a perfluoroalkyl (meth) acrylate and a monomer having an alkoxysilane group is formed on an optical thin film mainly composed of silicon dioxide.
【0009】[0009]
【発明が解決しようとしている課題】しかしながら、従
来の防汚層の形成技術において、防汚層を成膜後、その
耐防汚性、耐摩耗性、耐溶剤性等を最大限にするまで数
時間、場合によっては数日という長時間を要し、その間
では汚れや傷が入りやすく、また、他の物品と接触する
と、防汚層の一部が転写し、防汚層が剥離してしまうと
いう問題があった。However, in the conventional technology for forming an antifouling layer, after forming the antifouling layer, several steps are taken until the antifouling resistance, abrasion resistance, solvent resistance and the like are maximized. It takes a long time, sometimes several days, in some cases, during which time dirt and scratches are likely to occur, and when it comes into contact with other articles, part of the antifouling layer is transferred and the antifouling layer peels off There was a problem.
【0010】本発明は、前述のような従来技術の課題を
解決しようとするものであり、本発明の目的は、各種光
学部材などの被処理基材の表面を前処理を行うことによ
って、耐防汚性、耐擦傷性、耐溶剤性等に優れた防汚層
を短時間に形成することができ防汚層の形成方法を提供
することである。An object of the present invention is to solve the problems of the prior art as described above, and an object of the present invention is to perform a pre-treatment on the surface of a substrate to be processed such as various optical members, thereby to improve the durability. An object of the present invention is to provide a method for forming an antifouling layer which can form an antifouling layer excellent in antifouling properties, scratch resistance, solvent resistance and the like in a short time.
【0011】[0011]
【課題を解決するための手段】前記課題を解決するため
請求項1の発明は、被処理基材上の少なくとも片面に、
防汚剤を用いて防汚層を形成する方法であって、前記防
汚層を形成する前に、前記被処理基材上の少なくとも片
面を前処理し、この前処理した表面に防汚層を成膜する
ことを特徴とする防汚層の形成方法である。In order to solve the above-mentioned problems, the invention according to claim 1 has at least one surface on a substrate to be processed,
A method for forming an antifouling layer by using an antifouling agent, wherein before forming the antifouling layer, at least one surface of the substrate to be treated is pretreated, and an antifouling layer is formed on the pretreated surface. Is a method for forming an antifouling layer.
【0012】請求項2の発明は、高周波放電プラズマ
法、電子ビーム法、イオンビーム法、蒸着法、スパッタ
リング法、アルカリ処理法、酸処理法、コロナ処理法、
大気圧グロー放電プラズマ法の何れかであることを特徴
とする、請求項1記載の防汚層の形成方法である。The invention of claim 2 includes a high-frequency discharge plasma method, an electron beam method, an ion beam method, a vapor deposition method, a sputtering method, an alkali treatment method, an acid treatment method, a corona treatment method,
2. The method for forming an antifouling layer according to claim 1, wherein the method is any one of an atmospheric pressure glow discharge plasma method.
【0013】請求項3の発明は、前記被処理基材が、光
学部材であることを特徴とする請求項1または2記載の
防汚層の形成方法である。[0013] The invention of claim 3 is the method of forming an antifouling layer according to claim 1 or 2, wherein the substrate to be treated is an optical member.
【0014】請求項4の発明は、光学部材が、光学レン
ズ、眼鏡レンズ、カメラや双眼鏡、または他の光学装置
のレンズ、ビーム・スプリッタ、プリズム、鏡、窓ガラ
ス、反射防止膜、光学フィルターのうち何れかであるこ
とを特徴とする請求項3記載の防汚層の形成方法であ
る。According to a fourth aspect of the present invention, the optical member is an optical lens, a spectacle lens, a lens of a camera or a binocular, or another optical device, a beam splitter, a prism, a mirror, a window glass, an antireflection film, an optical filter. 4. The method for forming an antifouling layer according to claim 3, wherein the method is any one of them.
【0015】請求項5の発明は、前記防汚層を成膜する
ための防汚剤としては、パーフルオロポリエーテル基を
含有する有機シラン化合物であることを特徴する請求項
1〜4何れか記載の防汚層の形成方法である。According to a fifth aspect of the present invention, the antifouling agent for forming the antifouling layer is an organic silane compound containing a perfluoropolyether group. It is a method of forming the antifouling layer described above.
【0016】請求項6の発明は、前記防汚剤が一般式
(1)で示される有機シラン化合物からなることを特徴
とする請求項1〜5何れか記載の防汚層の形成方法であ
る。 Rf ―(OC3 F6 )n ―O―(CF2 )m ―(CH2 )l ―O―(CH2 ) s ―Si(R)3 …(1) (但し、Rf は炭素数1〜16の直鎖状または分岐状パ
ーフルオロアルキル基、nは1〜50の整数、mは0〜
3の整数、lは0〜3の整数、sは0〜6の整数、但
し、6≧m+l>0、Rは加水分解基を示す。)The invention according to claim 6 is that the antifouling agent has a general formula
It is characterized by comprising an organosilane compound represented by (1).
The method for forming an antifouling layer according to claim 1.
You. Rf-(OCThree F6 )n-O- (CFTwo )m― (CHTwo )l-O- (CHTwo ) s -Si (R)Three ... (1) (However, RfIs a linear or branched chain having 1 to 16 carbon atoms.
-Fluoroalkyl group, n is an integer of 1 to 50, m is 0 to
An integer of 3, 1 is an integer of 0 to 3, s is an integer of 0 to 6,
And 6 ≧ m + 1> 0, R represents a hydrolyzable group. )
【0017】請求項7の発明は、前記防汚剤を真空中に
おいて、加熱し、蒸発させ、被処理基材上に成膜するこ
とを特徴とする請求項1〜6何れか記載の防汚層の形成
方法である。The invention according to claim 7 is characterized in that the antifouling agent is heated and evaporated in a vacuum to form a film on the substrate to be treated. This is a method for forming a layer.
【0018】請求項8の発明は、前記防汚剤を蒸発させ
る為の加熱方法としは、抵抗加熱法、電子線加熱法、光
加熱法、イオンビーム加熱法、高周波加熱法であること
を特徴とする請求項1〜7記載の防汚層の形成方法であ
る。The invention according to claim 8 is characterized in that the heating method for evaporating the antifouling agent is a resistance heating method, an electron beam heating method, a light heating method, an ion beam heating method, or a high frequency heating method. The method for forming an antifouling layer according to claim 1.
【0019】請求項9の発明は、請求項3〜8何れか記
載の方法により防汚層を形成する事を特徴とする防汚層
付き光学部材の製造方法である。A ninth aspect of the present invention is a method for manufacturing an optical member having an antifouling layer, wherein the antifouling layer is formed by the method according to any one of the third to eighth aspects.
【0020】請求項10の発明は、光学部材材上の少な
くとも片面が前処理した表面である事を特徴とする防汚
層付き光学部材である。According to a tenth aspect of the present invention, there is provided an optical member with an antifouling layer, wherein at least one surface of the optical member is a pretreated surface.
【0021】請求項11の発明は、光学部材が、光学レ
ンズ、眼鏡レンズ、カメラや双眼鏡、または他の光学装
置のレンズ、ビーム・スプリッタ、プリズム、鏡、窓ガ
ラス、反射防止膜、光学フィルターのうち何れかである
ことを特徴とする請求項10記載の防汚層付き光学部材
である。In the eleventh aspect, the optical member may be an optical lens, a spectacle lens, a lens of a camera or binoculars, or another optical device, a beam splitter, a prism, a mirror, a window glass, an antireflection film, or an optical filter. The optical member with an antifouling layer according to claim 10, which is any one of the optical members.
【0022】請求項12の発明は、前記防汚剤として
は、パーフルオロポリエーテル基を含有する有機シラン
化合物であることを特徴する請求項10〜11何れか記
載の防汚層付き光学部材である。According to a twelfth aspect of the present invention, there is provided the optical member with an antifouling layer according to any one of claims 10 to 11, wherein the antifouling agent is an organic silane compound containing a perfluoropolyether group. is there.
【0023】請求項13の発明は、前記防汚剤が一般式
(1)で示される有機シラン化合物からなることを特徴
とする請求項10〜12何れか記載の防汚層付き光学部
材である。 Rf ―(OC3 F6 )n ―O―(CF2 )m ―(CH2 )l ―O―(CH2 ) s ―Si(R)3 …(1) (但し、Rf は炭素数1〜16の直鎖状または分岐状パ
ーフルオロアルキル基、nは1〜50の整数、mは0〜
3の整数、lは0〜3の整数、sは0〜6の整数、但
し、6≧m+l>0、Rは加水分解基を示す。)According to a thirteenth aspect of the present invention, the antifouling agent has a general formula
It is characterized by comprising an organosilane compound represented by (1).
The optical part with an antifouling layer according to claim 10.
Material. Rf-(OCThree F6 )n-O- (CFTwo )m― (CHTwo )l-O- (CHTwo ) s -Si (R)Three ... (1) (However, RfIs a linear or branched chain having 1 to 16 carbon atoms.
-Fluoroalkyl group, n is an integer of 1 to 50, m is 0 to
An integer of 3, 1 is an integer of 0 to 3, s is an integer of 0 to 6,
And 6 ≧ m + 1> 0, R represents a hydrolyzable group. )
【0024】[0024]
【発明の実施の形態】本発明を詳細に説明する。DETAILED DESCRIPTION OF THE INVENTION The present invention will be described in detail.
【0025】防汚層を被処理基材上に成膜する場合、パ
ーフルオロポリエーテル基を含有する有機シラン化合物
からなる防汚剤が使用される。前記有機シラン化合物
は、下記一般式(1)で表される化合物またはその重合
体が好適である。 Rf −(OC3 F6 )n −O−(CF2 )m −(CH2 )l −O−(CH2 ) s −Si(R)3 …(1)When forming an antifouling layer on a substrate to be treated, an antifouling agent comprising an organic silane compound containing a perfluoropolyether group is used. The organic silane compound is preferably a compound represented by the following general formula (1) or a polymer thereof. R f - (OC 3 F 6 ) n -O- (CF 2) m - (CH 2) l -O- (CH 2) s -Si (R) 3 ... (1)
【0026】一般式(1)において、Rf は炭素数1〜
16の直鎖状または分岐状パーフルオロアルキル基であ
り、特に、CF3 ―、C2 F5 ―、C3 F7 ―が好まし
い。Rは加水分解基であり、―Cl、―Br、―I、―
OR1 、―OOCR1 、―OC(R1 )C=C(R2 )
2 、―ON=C(R1 )2 、―ON=CR3 、―N(R
2 )2 、―R2 NOCR1 等が好ましい。In the general formula (1), R f has 1 to 1 carbon atoms.
It is a 16 linear or branched perfluoroalkyl group, particularly preferably CF 3 —, C 2 F 5 —, or C 3 F 7 —. R is a hydrolyzable group, -Cl, -Br, -I,-
OR 1 , -OOCR 1 , -OC (R 1 ) C = C (R 2 )
2 , -ON = C (R 1 ) 2 , -ON = CR 3 , -N (R
2 ) 2 , —R 2 NOCR 1 and the like are preferable.
【0027】但し、R1 はアルキル基等の炭素数1〜1
0の脂肪族炭化水素基、またはフェニル基等の炭素数6
〜20の芳香族炭化水素基、R2 は水素原子またはアル
キル基等の炭素数1〜5の脂肪族炭化水素基、R3 はア
ルキリデン基等の炭素数3〜6の二価の脂肪族炭化水素
基である。However, R 1 is a group having 1 to 1 carbon atoms such as an alkyl group.
An aliphatic hydrocarbon group having 0 or a carbon number of 6 such as a phenyl group;
To 20 aromatic hydrocarbon groups, R 2 is a C 1-5 aliphatic hydrocarbon group such as a hydrogen atom or an alkyl group, and R 3 is a C 3-6 divalent aliphatic hydrocarbon such as an alkylidene group. It is a hydrogen group.
【0028】上記の有機シラン化合物中の加水分解基
は、1種類のみならず、2種類以上の混合系として用い
ることも可能である。特に、―OCH3 、―OC2 H
5 、―OOCCH3 、―NH2 が好ましい。また、nは
1〜50の整数、mは0〜3の整数、lは0〜3の整
数、sは0〜6の整数、但し、6≧m+l>0である。The hydrolyzable groups in the above-mentioned organosilane compounds can be used not only as one kind but also as a mixture of two or more kinds. In particular, —OCH 3 , —OC 2 H
5 , —OOCCH 3 and —NH 2 are preferred. Further, n is an integer of 1 to 50, m is an integer of 0 to 3, l is an integer of 0 to 3, s is an integer of 0 to 6, provided that 6 ≧ m + 1> 0.
【0029】作業環境や、膜厚の制御の点から、防汚層
形成時には希釈溶媒を用いないPVD法によることが好
ましく、特に真空蒸着法によることが好ましい。該方法
では、前記防汚剤を1Pa以下の圧力において加熱し、
蒸発させ、被処理基材上に形成する。From the viewpoint of the working environment and the control of the film thickness, it is preferable to use the PVD method without using a diluting solvent when forming the antifouling layer, and it is particularly preferable to use the vacuum evaporation method. In the method, the antifouling agent is heated at a pressure of 1 Pa or less,
Evaporate and form on the substrate to be treated.
【0030】加熱方法としては抵抗加熱法、電子線加熱
法、光加熱法、イオンビーム加熱法、高周波加熱法のよ
うな方法が有効である。PVD法によると、従来困難で
あった防汚層の膜厚をオングストロームオーダーで正確
に制御することができる。As a heating method, a method such as a resistance heating method, an electron beam heating method, a light heating method, an ion beam heating method or a high frequency heating method is effective. According to the PVD method, the thickness of the antifouling layer, which has conventionally been difficult, can be accurately controlled on the order of angstroms.
【0031】前記有機シラン化合物を含有する防汚剤
は、被処理基材表面のOH基と有機シラン化合物の加水
分解可能な基が反応して加水分解を起こし、化学結合を
形成すると考えられている。しかし、一般的に防汚層と
被処理基材表面との間の加水分解反応は遅く、防汚層が
完全に定着し、最大限の耐防汚性、耐擦傷性、耐溶剤性
等が生じるまでに数時間から数十日という時間を要す
る。It is considered that the antifouling agent containing the organic silane compound reacts with the OH group on the surface of the substrate to be treated and the hydrolyzable group of the organic silane compound to cause hydrolysis to form a chemical bond. I have. However, in general, the hydrolysis reaction between the antifouling layer and the surface of the substrate to be treated is slow, the antifouling layer is completely fixed, and the maximum antifouling resistance, abrasion resistance, solvent resistance, etc. It takes hours to tens of days to occur.
【0032】一方、本発明の前処理方法である高周波放
電プラズマ法、電子ビーム法、イオンビーム法、蒸着
法、スパッタリング法、アルカリ処理法、酸処理法、コ
ロナ処理法、大気圧グロー放電プラズマ法等は、被処理
基材表面をクリーニングするだけではなく、表面の分子
同士の結合を切り離し、活性な表面を作り出すことがで
きるため、有機シラン化合物を含有する防汚剤からなる
防汚層が容易に定着しやすい被処理基材表面を作り出す
ことができる。On the other hand, the high-frequency discharge plasma method, the electron beam method, the ion beam method, the vapor deposition method, the sputtering method, the alkali treatment method, the acid treatment method, the corona treatment method, and the atmospheric pressure glow discharge plasma method which are the pretreatment methods of the present invention. In addition to cleaning the surface of the substrate to be treated, it is possible to cut off the bonding between molecules on the surface and create an active surface, so that an antifouling layer made of an antifouling agent containing an organic silane compound can be easily formed. The surface of the substrate to be treated, which easily adheres to the surface, can be created.
【0033】被処理基材は、光学レンズ、眼鏡レンズ、
カメラや双眼鏡、または他の光学装置のレンズ、ビーム
・スプリッタ、プリズム、鏡、窓ガラス、反射防止膜、
光学フィルターなどの光学部材に対して特に有効であ
る。The substrate to be treated is an optical lens, a spectacle lens,
Lenses, beam splitters, prisms, mirrors, windowpanes, anti-reflective coatings for cameras and binoculars or other optical devices,
This is particularly effective for optical members such as optical filters.
【0034】[0034]
【実施例】以下、本発明の実施例を説明するが、これら
に限定されるものではない。EXAMPLES Examples of the present invention will be described below, but the present invention is not limited to these examples.
【0035】<実施例1>反射防止膜を平行平板型高周
波放電装置内に設置し、該装置内を1.0×10 -3Pa
にまで排気した。該装置内に水素ガスを10sccm/
min.の流量で導入して圧力を1.0×10-1Paに
調節した。該装置内に高周波(周波数=13.56MH
z)を印可し、発生された100Wのプラズマに該反射
防止膜を1分間さらすことにより該反射防止膜の表面の
前処理を行った。<Embodiment 1> The anti-reflection film is made of a parallel plate type high circumference.
Installed in a wave discharge device, and the inside of the device is 1.0 × 10 -3Pa
Exhausted. Hydrogen gas at 10 sccm /
min. At a flow rate of 1.0 × 10-1To Pa
Adjusted. High frequency (frequency = 13.56 MH)
z) was applied, and the reflected 100 W plasma was generated.
By exposing the anti-reflection film for 1 minute,
Pretreatment was performed.
【0036】次に、一般式(2)で表される有機シラン
化合物をモリブデンボート上に入れ、真空蒸着法(抵抗
加熱法)により、該反射防止膜上に防汚層を作製した。
真空蒸着機内を1.0×10-3Pa以下に排気した後、
ボートを400℃に加熱し、該有機シラン化合物を蒸発
させた。 CF3 −(OC3 F6 )24−O−(CF2 )2 −(CH2 )2 −O−CH2 − Si(OCH3 )3 …(2)Next, the organosilane compound represented by the general formula (2) was put on a molybdenum boat, and an antifouling layer was formed on the antireflection film by a vacuum deposition method (resistance heating method).
After evacuating the inside of the vacuum evaporation machine to 1.0 × 10 −3 Pa or less,
The boat was heated to 400 ° C. to evaporate the organosilane compound. CF 3 - (OC 3 F 6 ) 24 -O- (CF 2) 2 - (CH 2) 2 -O-CH 2 - Si (OCH 3) 3 ... (2)
【0037】<実施例2>反射防止膜の表面を大気圧中
で発生された50W/m2 ・min.のコロナ放電にさ
らすことにより前処理を行った。次に、実施例1と同様
にして前記反射防止膜上に防汚層を形成した。<Example 2> The surface of the antireflection film was heated at 50 W / m 2 · min. A pretreatment was performed by exposing to a corona discharge. Next, an antifouling layer was formed on the antireflection film in the same manner as in Example 1.
【0038】<比較例1>前記有機シラン化合物を用い
て実施例1と同様にして前処理を行っていない反射防止
膜上に防汚層を形成した。上記の実施例1及び2並びに
比較例において、各種物性評価方法と結果を(表1)を
以下に示す。<Comparative Example 1> An antifouling layer was formed on an antireflection film which had not been subjected to pretreatment in the same manner as in Example 1 using the above-mentioned organosilane compound. In the above Examples 1 and 2 and Comparative Example, various physical property evaluation methods and results (Table 1) are shown below.
【0039】(a)接触角測定: 接触角計[CA−X型:協和界面科学(株)製]を用い
て、乾燥状態(20℃−65%RH)で直径1.0mm
の液滴を針先に作り、これを基材(固体)の表面に接触
させて液滴を作った。接触角とは、固体液体が接する点
における液体表面に対する接線と固体表面がなす角で、
液体を含む方の角度で定義した。液体には蒸留水を使用
した。(A) Contact angle measurement: Using a contact angle meter [CA-X: manufactured by Kyowa Interface Science Co., Ltd.], a diameter of 1.0 mm in a dry state (20 ° C.-65% RH).
Was formed at the tip of a needle, and this was brought into contact with the surface of a substrate (solid) to form a droplet. The contact angle is the angle between the solid surface and the tangent to the liquid surface at the point where the solid liquid touches,
Defined by the angle containing the liquid. Distilled water was used as the liquid.
【0040】(b)耐摩耗性:基材表面をセルロース製
不織布[ベンコットM−3:旭化成(株)製]で荷重5
00gf/m2 で100回こすった後に前記物性評価を
行った。(B) Abrasion resistance: The substrate surface is made of a cellulose nonwoven fabric [Bencott M-3: manufactured by Asahi Kasei Corporation] and the load is 5
After rubbing 100 times at 00 gf / m 2 , the physical properties were evaluated.
【0041】[0041]
【表1】 [Table 1]
【0042】[0042]
【発明の効果】本発明の方法によれば、各種光学部材
(光学レンズ、眼鏡レンズ、カメラや双眼鏡、または他
の光学装置のレンズ、ビーム・スプリッタ、プリズム、
鏡、窓ガラス、反射防止膜、光学フィルターなど)の表
面に、各種光学特性を損なわせることがなく、指紋、皮
脂、汗、化粧品などの汚れが付着しにくく、付着しても
拭き取りやすい性能を持ち、また、定着性の高く、耐久
性のある防汚層を形成することが可能になる。According to the method of the present invention, various optical members (optical lenses, spectacle lenses, lenses of cameras and binoculars or other optical devices, beam splitters, prisms,
(Mirror, window glass, anti-reflection film, optical filter, etc.) without impairing various optical properties, and it is difficult for dirt such as fingerprints, sebum, sweat, cosmetics, etc. to adhere, and it is easy to wipe off even if it adheres In addition, it is possible to form a durable antifouling layer having high fixing properties and durability.
【図1】本発明の光学部材を示す断面図である。FIG. 1 is a sectional view showing an optical member of the present invention.
1 透明基材 2 防汚層 3 処理面 1 transparent substrate 2 antifouling layer 3 treated surface
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) C09D 183/00 C09D 183/00 C09K 3/00 112 C09K 3/00 112F 3/18 104 3/18 104 G02B 1/10 G02B 1/10 Z Fターム(参考) 2K009 BB01 CC42 DD03 DD08 EE05 3B117 AA08 4D075 BB21X BB47X BB49X BB81X BB85X CA34 DA06 DB13 DC24 EA05 EB42 EB52 4H020 BA36 4J038 DF041 GA02 GA15 NA04 NA05 NA11 PB08 PC03 PC08──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) C09D 183/00 C09D 183/00 C09K 3/00 112 C09K 3/00 112F 3/18 104 3/18 104 G02B 1/10 G02B 1/10 Z F term (reference) 2K009 BB01 CC42 DD03 DD08 EE05 3B117 AA08 4D075 BB21X BB47X BB49X BB81X BB85X CA34 DA06 DB13 DC24 EA05 EB42 EB52 4H020 BA36 4J038 DF041 GA03 GA08
Claims (13)
を用いて防汚層を形成する方法であって、前記防汚層を
形成する前に、前記被処理基材上の少なくとも片面を前
処理し、この前処理した表面に防汚層を成膜することを
特徴とする防汚層の形成方法。1. A method for forming an antifouling layer on at least one surface of a substrate to be treated using an antifouling agent, wherein at least one of the surfaces of the substrate to be processed is formed before the formation of the antifouling layer. A method for forming an antifouling layer, comprising pretreating one surface and forming an antifouling layer on the pretreated surface.
ーム法、イオンビーム法、蒸着法、スパッタリング法、
アルカリ処理法、酸処理法、コロナ処理法、大気圧グロ
ー放電プラズマ法の何れかであることを特徴とする請求
項1記載の防汚層の形成方法。2. The pretreatment includes a high-frequency discharge plasma method, an electron beam method, an ion beam method, a vapor deposition method, a sputtering method,
The method for forming an antifouling layer according to claim 1, wherein the method is any one of an alkali treatment method, an acid treatment method, a corona treatment method, and an atmospheric pressure glow discharge plasma method.
特徴とする請求項1または2記載の防汚層の形成方法。3. The method for forming an antifouling layer according to claim 1, wherein the substrate to be treated is an optical member.
メラや双眼鏡、または他の光学装置のレンズ、ビーム・
スプリッタ、プリズム、鏡、窓ガラス、反射防止膜、光
学フィルターのうち何れかであることを特徴とする請求
項3記載の防汚層の形成方法。4. An optical member comprising: an optical lens, a spectacle lens, a lens of a camera or binoculars, or a lens of another optical device;
The method for forming an antifouling layer according to claim 3, wherein the antifouling layer is any one of a splitter, a prism, a mirror, a window glass, an antireflection film, and an optical filter.
ーテル基を含有する有機シラン化合物であることを特徴
する請求項1〜4何れか記載の防汚層の形成方法。5. The method for forming an antifouling layer according to claim 1, wherein said antifouling agent is an organic silane compound containing a perfluoropolyether group.
シラン化合物からなることを特徴とする請求項1〜5何
れか記載の防汚層の形成方法。 Rf ―(OC3 F6 )n ―O―(CF2 )m ―(CH2 )l ―O―(CH2 ) s ―Si(R)3 …(1) (但し、Rf は炭素数1〜16の直鎖状または分岐状パ
ーフルオロアルキル基、nは1〜50の整数、mは0〜
3の整数、lは0〜3の整数、sは0〜6の整数、但
し、6≧m+l>0、Rは加水分解基を示す。)6. An organic compound represented by the general formula (1) wherein said antifouling agent is
6. The method according to claim 1, wherein the material is a silane compound.
A method for forming an antifouling layer according to the above. Rf-(OCThree F6 )n-O- (CFTwo )m― (CHTwo )l-O- (CHTwo ) s -Si (R)Three ... (1) (However, RfIs a linear or branched chain having 1 to 16 carbon atoms.
-Fluoroalkyl group, n is an integer of 1 to 50, m is 0 to
An integer of 3, 1 is an integer of 0 to 3, s is an integer of 0 to 6,
And 6 ≧ m + 1> 0, R represents a hydrolyzable group. )
加熱し、蒸発させ、被処理基材上に成膜することを特徴
とする請求項1〜6何れか記載の防汚層の形成方法。7. The method according to claim 7, wherein the antifouling agent is applied at a pressure of 1 Pa or less.
The method for forming an antifouling layer according to claim 1, wherein the method is performed by heating, evaporating, and forming a film on the substrate to be treated.
ては、抵抗加熱法、電子線加熱法、光加熱法、イオンビ
ーム加熱法、高周波加熱法であることを特徴とする請求
項1〜7何れか記載の防汚層の形成方法。8. A heating method for evaporating the antifouling agent includes a resistance heating method, an electron beam heating method, a light heating method, an ion beam heating method, and a high-frequency heating method. 8. The method for forming an antifouling layer according to any one of claims 7 to 7.
層を形成する事を特徴とする防汚層付き光学部材の製造
方法。9. A method for producing an optical member having an antifouling layer, comprising forming an antifouling layer by the method according to claim 3.
した表面である事を特徴とする防汚層付き光学部材。10. An optical member with an antifouling layer, wherein at least one surface of the optical member is a pretreated surface.
カメラや双眼鏡、または他の光学装置のレンズ、ビーム
・スプリッタ、プリズム、鏡、窓ガラス、反射防止膜、
光学フィルターのうち何れかであることを特徴とする請
求項10記載の防汚層付き光学部材。11. An optical member comprising: an optical lens, a spectacle lens,
Lenses, beam splitters, prisms, mirrors, windowpanes, anti-reflective coatings for cameras and binoculars or other optical devices,
The optical member with an antifouling layer according to claim 10, which is any one of optical filters.
エーテル基を含有する有機シラン化合物であることを特
徴する請求項10〜11何れか記載の防汚層付き光学部
材。12. The optical member with an antifouling layer according to claim 10, wherein the antifouling agent is an organic silane compound containing a perfluoropolyether group.
機シラン化合物からなることを特徴とする請求項10〜
12何れか記載の防汚層付き光学部材。 Rf ―(OC3 F6 )n ―O―(CF2 )m ―(CH2 )l ―O―(CH2 ) s ―Si(R)3 …(1) (但し、Rf は炭素数1〜16の直鎖状または分岐状パ
ーフルオロアルキル基、nは1〜50の整数、mは0〜
3の整数、lは0〜3の整数、sは0〜6の整数、但
し、6≧m+l>0、Rは加水分解基を示す。)13. An antifouling agent having the general formula (1):
11. A silane compound,
13. The optical member with an antifouling layer according to any one of 12. Rf-(OCThree F6 )n-O- (CFTwo )m― (CHTwo )l-O- (CHTwo ) s -Si (R)Three ... (1) (However, RfIs a linear or branched chain having 1 to 16 carbon atoms.
-Fluoroalkyl group, n is an integer of 1 to 50, m is 0 to
An integer of 3, 1 is an integer of 0 to 3, s is an integer of 0 to 6,
And 6 ≧ m + 1> 0, R represents a hydrolyzable group. )
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