JP2000301086A5 - - Google Patents
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- Publication number
- JP2000301086A5 JP2000301086A5 JP1999064214A JP6421499A JP2000301086A5 JP 2000301086 A5 JP2000301086 A5 JP 2000301086A5 JP 1999064214 A JP1999064214 A JP 1999064214A JP 6421499 A JP6421499 A JP 6421499A JP 2000301086 A5 JP2000301086 A5 JP 2000301086A5
- Authority
- JP
- Japan
- Prior art keywords
- optical member
- cleaning
- drying
- pure water
- detergent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical Effects 0.000 description 44
- 238000004140 cleaning Methods 0.000 description 42
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 30
- 238000001035 drying Methods 0.000 description 28
- 238000004506 ultrasonic cleaning Methods 0.000 description 10
- 239000003599 detergent Substances 0.000 description 8
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11064214A JP2000301086A (ja) | 1999-02-19 | 1999-03-11 | 光学部材の洗浄方法及びその装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11-41171 | 1999-02-19 | ||
JP4117199 | 1999-02-19 | ||
JP11064214A JP2000301086A (ja) | 1999-02-19 | 1999-03-11 | 光学部材の洗浄方法及びその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000301086A JP2000301086A (ja) | 2000-10-31 |
JP2000301086A5 true JP2000301086A5 (es) | 2005-11-10 |
Family
ID=26380733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11064214A Pending JP2000301086A (ja) | 1999-02-19 | 1999-03-11 | 光学部材の洗浄方法及びその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000301086A (es) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5197118B2 (ja) * | 2008-04-10 | 2013-05-15 | オリンパス株式会社 | 洗浄装置 |
CN103721971A (zh) * | 2012-10-15 | 2014-04-16 | 江西盛泰光学有限公司 | 一种自动清洗摄像模的方法 |
CN102989715A (zh) * | 2012-12-06 | 2013-03-27 | 中国科学院长春光学精密机械与物理研究所 | 一种深紫外光学薄膜基底的处理方法 |
JP6325460B2 (ja) * | 2013-01-10 | 2018-05-16 | Hoya株式会社 | 光学素子の製造方法 |
JP6510821B2 (ja) * | 2015-01-22 | 2019-05-08 | オリンパス株式会社 | 洗浄装置および洗浄方法 |
CN110665927B (zh) * | 2019-09-16 | 2021-09-21 | 湖北久之洋红外系统股份有限公司 | 一种激光系统用光学玻璃的无损清洗工艺 |
CN112857136A (zh) * | 2020-11-30 | 2021-05-28 | 邯郸钢铁集团有限责任公司 | 一种板式换热器超声波清洗装置及清洗方法 |
-
1999
- 1999-03-11 JP JP11064214A patent/JP2000301086A/ja active Pending
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