JP2000301086A5 - - Google Patents

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Publication number
JP2000301086A5
JP2000301086A5 JP1999064214A JP6421499A JP2000301086A5 JP 2000301086 A5 JP2000301086 A5 JP 2000301086A5 JP 1999064214 A JP1999064214 A JP 1999064214A JP 6421499 A JP6421499 A JP 6421499A JP 2000301086 A5 JP2000301086 A5 JP 2000301086A5
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JP
Japan
Prior art keywords
optical member
cleaning
drying
pure water
detergent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999064214A
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English (en)
Japanese (ja)
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JP2000301086A (ja
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Publication date
Application filed filed Critical
Priority to JP11064214A priority Critical patent/JP2000301086A/ja
Priority claimed from JP11064214A external-priority patent/JP2000301086A/ja
Publication of JP2000301086A publication Critical patent/JP2000301086A/ja
Publication of JP2000301086A5 publication Critical patent/JP2000301086A5/ja
Pending legal-status Critical Current

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JP11064214A 1999-02-19 1999-03-11 光学部材の洗浄方法及びその装置 Pending JP2000301086A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11064214A JP2000301086A (ja) 1999-02-19 1999-03-11 光学部材の洗浄方法及びその装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-41171 1999-02-19
JP4117199 1999-02-19
JP11064214A JP2000301086A (ja) 1999-02-19 1999-03-11 光学部材の洗浄方法及びその装置

Publications (2)

Publication Number Publication Date
JP2000301086A JP2000301086A (ja) 2000-10-31
JP2000301086A5 true JP2000301086A5 (es) 2005-11-10

Family

ID=26380733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11064214A Pending JP2000301086A (ja) 1999-02-19 1999-03-11 光学部材の洗浄方法及びその装置

Country Status (1)

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JP (1) JP2000301086A (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5197118B2 (ja) * 2008-04-10 2013-05-15 オリンパス株式会社 洗浄装置
CN103721971A (zh) * 2012-10-15 2014-04-16 江西盛泰光学有限公司 一种自动清洗摄像模的方法
CN102989715A (zh) * 2012-12-06 2013-03-27 中国科学院长春光学精密机械与物理研究所 一种深紫外光学薄膜基底的处理方法
JP6325460B2 (ja) * 2013-01-10 2018-05-16 Hoya株式会社 光学素子の製造方法
JP6510821B2 (ja) * 2015-01-22 2019-05-08 オリンパス株式会社 洗浄装置および洗浄方法
CN110665927B (zh) * 2019-09-16 2021-09-21 湖北久之洋红外系统股份有限公司 一种激光系统用光学玻璃的无损清洗工艺
CN112857136A (zh) * 2020-11-30 2021-05-28 邯郸钢铁集团有限责任公司 一种板式换热器超声波清洗装置及清洗方法

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