【特許請求の範囲】
【請求項１】
研削又は研磨後の光学部材を洗剤中で超音波洗浄する工程と、
水中又は純水中で超音波洗浄する濯ぎ工程と、
洗浄された光学部材を乾燥させる乾燥工程とを有する光学部材の洗浄方法において、
乾燥工程直前に光学部材に純水を噴射する純水噴射洗浄工程を設けたことを特微とする光学部材の洗浄方法。
【請求項２】
研削又は研磨後の光学部材を有機洗剤中で超音波洗浄する工程と、
水中又は純水中で超音波洗浄する濯ぎ工程と、
洗浄された光学部材を乾燥させる乾燥工程とを有する光学部材の洗浄方法において、
乾燥工程直前に光学部材に純水を墳射して光学部材の研磨面の付着物を除去する純水墳射洗浄工程を設けたことを特徴とする光学部材の洗浄方法。
【請求項３】
研削又は研磨後の光学部材を洗剤中で洗浄するための超音波洗浄手段と、
水中又は純水中で超音波洗浄するための濯ぎ洗浄手段と、
洗浄された光学部材を乾燥させるための乾燥手段とを有する光学部材の洗浄装置において、
乾燥手段による乾燥工程直前に光学部材に純水を噴射する純水噴射洗浄手段を設けたことを特徴とする光学部材の洗浄装置。
【請求項４】
研削又は研磨後の光学部材を洗剤中で洗浄するための超音波洗浄手段と、
水中又は純水中で超音波洗浄するための濯ぎ洗浄手段と、
洗浄された光学部材を乾燥させるための乾燥手段とを有する光学部材の洗浄装置において、
乾燥手段による乾燥工程直前に光学部材の研磨面の付着物を除去する純水噴射洗浄手段を設けたことを特徴とする光学部材の洗浄装置。
[Claims]
[Claim 1]
The process of ultrasonic cleaning of the optical member after grinding or polishing in detergent,
A rinsing process that ultrasonically cleans in water or pure water,
In a method for cleaning an optical member, which comprises a drying step of drying the cleaned optical member.
A method for cleaning an optical member, which comprises providing a pure water injection cleaning step for injecting pure water onto the optical member immediately before the drying process.
2.
The process of ultrasonic cleaning of the optical member after grinding or polishing in an organic detergent,
A rinsing process that ultrasonically cleans in water or pure water,
In a method for cleaning an optical member, which comprises a drying step of drying the cleaned optical member.
A method for cleaning an optical member, which comprises providing a pure water mound cleaning step of irrigating the optical member with pure water immediately before the drying step to remove deposits on the polished surface of the optical member.
3.
Ultrasonic cleaning means for cleaning the ground or polished optical members in detergent,
Rinsing cleaning means for ultrasonic cleaning in water or pure water,
In a cleaning device for an optical member having a drying means for drying the cleaned optical member.
A cleaning device for an optical member, characterized in that a pure water injection cleaning means for injecting pure water into the optical member is provided immediately before the drying step by the drying means.
4.
Ultrasonic cleaning means for cleaning the ground or polished optical members in detergent,
Rinsing cleaning means for ultrasonic cleaning in water or pure water,
In a cleaning device for an optical member having a drying means for drying the cleaned optical member.
A cleaning device for an optical member, which is provided with a pure water jet cleaning means for removing deposits on the polished surface of the optical member immediately before the drying step by the drying means.
【００１４】
【課題を解決するための手段】
請求項ｌに記載の光学部材の洗浄方法は、研削又は研磨後の光学部材を洗剤中で超音波洗浄する工程と、水中又は純水中で超音波洗浄する濯ぎ工程と、洗浄された光学部材を乾燥させる乾燥工程とを有する光学部材の洗浄方法において、乾燥工程直前に光学部材に純水を噴射する純水噴射洗浄工程を設けたことを特微とする。
0014.
[Means for solving problems]
The method for cleaning the optical member according to claim l includes a step of ultrasonically cleaning the ground or polished optical member in a detergent, a rinsing step of ultrasonically cleaning the optical member in water or pure water, and a cleaned optical member. In the method of cleaning an optical member having a drying step of drying the above, it is a special feature that a pure water injection cleaning step of injecting pure water onto the optical member is provided immediately before the drying step.
請求項２に記載の光学部材の洗浄方法は、研削又は研磨後の光学部材を洗剤中で超音波洗浄する工程と、水中又は純水中で超音波洗浄する濯ぎ工程と、洗浄された光学部材を乾燥させる乾燥工程とを有する光学部材の洗浄方法において、乾燥工程直前に光学部材に純水を墳射して光学部材の研磨面の付着物を除去する純水墳射洗浄工程を設けたことを特徴とする。
The method for cleaning an optical member according to claim 2 includes a step of ultrasonically cleaning the ground or polished optical member in a detergent, a rinsing step of ultrasonically cleaning the optical member in water or pure water, and a cleaned optical member. In the method of cleaning an optical member having a drying step of drying, a pure water mound cleaning step is provided immediately before the drying step to mound pure water on the optical member to remove deposits on the polished surface of the optical member. It is characterized by.
請求項３に記載の光学部材の洗浄装置は、研削又は研磨後の光学部材を洗剤中で洗浄するための超音波洗浄手段と、水中又は純水中で超音波洗浄するための濯ぎ洗浄手段と、洗浄された光学部材を乾燥させるための乾燥手段とを有する光学部材の洗浄装置において、乾燥手段による乾燥工程直前に光学部材に純水を噴射する純水噴射洗浄手段を設けたことを特徴とする。
The cleaning device for an optical member according to claim 3 includes an ultrasonic cleaning means for cleaning the optical member after grinding or polishing in a detergent, and a rinsing cleaning means for ultrasonic cleaning in water or pure water. In an optical member cleaning device having a drying means for drying the washed optical member, a pure water injection cleaning means for injecting pure water onto the optical member immediately before the drying step by the drying means is provided. To do.
請求項４に記載の光学部材の洗浄装置は、研削又は研磨後の光学部材を洗剤中で洗浄するための超音波洗浄手段と、水中又は純水中で超音波洗浄するための濯ぎ洗浄手段と、洗浄された光学部材を乾燥させるための乾燥手段とを有する光学部材の洗浄装置において、乾燥手段による乾燥工程直前に光学部材の研磨面の付着物を除去する純水噴射洗浄手段を設けたことを特徴とする。
The cleaning device for an optical member according to claim 4 includes an ultrasonic cleaning means for cleaning the optical member after grinding or polishing in a detergent, and a rinsing cleaning means for ultrasonic cleaning in water or pure water. In the cleaning device for an optical member having a drying means for drying the washed optical member, a pure water jet cleaning means for removing deposits on the polished surface of the optical member is provided immediately before the drying step by the drying means. It is characterized by.