JP2000284176A5 - - Google Patents
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- JP2000284176A5 JP2000284176A5 JP1999090735A JP9073599A JP2000284176A5 JP 2000284176 A5 JP2000284176 A5 JP 2000284176A5 JP 1999090735 A JP1999090735 A JP 1999090735A JP 9073599 A JP9073599 A JP 9073599A JP 2000284176 A5 JP2000284176 A5 JP 2000284176A5
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- JP
- Japan
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- lens group
- focal length
- optical system
- length state
- refractive power
- Prior art date
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Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09073599A JP4337067B2 (ja) | 1999-03-31 | 1999-03-31 | ズーム光学系および該ズーム光学系を備えた露光装置および露光方法 |
| US09/540,874 US6563567B1 (en) | 1998-12-17 | 2000-03-31 | Method and apparatus for illuminating a surface using a projection imaging apparatus |
| US10/377,700 US20030160949A1 (en) | 1998-12-17 | 2003-03-04 | Method and apparatus for illuminating a surface using a projection imaging apparatus |
| US10/378,867 US20030156266A1 (en) | 1998-12-17 | 2003-03-05 | Method and apparatus for illuminating a surface using a projection imaging apparatus |
| US10/378,816 US20030156269A1 (en) | 1998-12-17 | 2003-03-05 | Method and apparatus for illuminating a surface using a projection imaging apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09073599A JP4337067B2 (ja) | 1999-03-31 | 1999-03-31 | ズーム光学系および該ズーム光学系を備えた露光装置および露光方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000284176A JP2000284176A (ja) | 2000-10-13 |
| JP2000284176A5 true JP2000284176A5 (cg-RX-API-DMAC7.html) | 2008-02-28 |
| JP4337067B2 JP4337067B2 (ja) | 2009-09-30 |
Family
ID=14006843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09073599A Expired - Fee Related JP4337067B2 (ja) | 1998-12-17 | 1999-03-31 | ズーム光学系および該ズーム光学系を備えた露光装置および露光方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4337067B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002207167A (ja) * | 2001-01-10 | 2002-07-26 | Nikon Corp | ズーム光学系および該ズーム光学系を備えた露光装置および露光方法 |
| DE10144246A1 (de) * | 2001-09-05 | 2003-03-20 | Zeiss Carl | Zoom-System für eine Beleuchtungseinrichtung |
| JP2005055496A (ja) * | 2003-08-05 | 2005-03-03 | Olympus Corp | 変倍光学系 |
| JP4615852B2 (ja) * | 2003-12-12 | 2011-01-19 | オリンパス株式会社 | 変倍光学系及びそれを用いた電子機器 |
| US7649693B2 (en) | 2005-03-11 | 2010-01-19 | Sony Corporation | Zoom lens and image pick-up apparatus |
| CN102736221B (zh) * | 2011-03-31 | 2015-02-11 | 上海微电子装备有限公司 | 一种投影光刻物镜 |
| DE102018205315B4 (de) * | 2018-04-09 | 2024-06-20 | Clay Paky S.R.L. | Optisches System mit Diffusoren und Wabenkondensoren |
| CN112882208B (zh) * | 2019-11-29 | 2022-08-02 | 上海微电子装备（集团）股份有限公司 | 大视场成像物镜 |
| CN110989138B (zh) * | 2019-12-23 | 2021-03-19 | 中国科学院长春光学精密机械与物理研究所 | 一种大视场宽光谱无焦光学系统 |
| CN111443471B (zh) * | 2020-05-09 | 2024-10-22 | 深圳市雷影光电科技有限公司 | 内合焦式成像镜头 |
| CN115903357A (zh) * | 2021-08-20 | 2023-04-04 | 巴可伟视(北京)电子有限公司 | 一种变焦偏振转换系统 |
| WO2023239204A1 (ko) * | 2022-06-09 | 2023-12-14 | 엘지이노텍 주식회사 | 광학계 및 카메라 모듈 |
| CN117250736B (zh) * | 2023-11-17 | 2024-01-26 | 南京信息工程大学 | 一种大像面高分辨率宽光谱星敏感器光学系统 |
| CN118363152B (zh) * | 2024-06-19 | 2024-09-17 | 长春智灵光电科技有限公司 | 一种紫外飞秒激光器的镜头 |
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1999
- 1999-03-31 JP JP09073599A patent/JP4337067B2/ja not_active Expired - Fee Related