JP2000267285A5 - - Google Patents
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- Publication number
- JP2000267285A5 JP2000267285A5 JP1999075880A JP7588099A JP2000267285A5 JP 2000267285 A5 JP2000267285 A5 JP 2000267285A5 JP 1999075880 A JP1999075880 A JP 1999075880A JP 7588099 A JP7588099 A JP 7588099A JP 2000267285 A5 JP2000267285 A5 JP 2000267285A5
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- group
- composition according
- compound
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 229920000642 polymer Polymers 0.000 description 19
- 150000001875 compounds Chemical class 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 125000004432 carbon atom Chemical group C* 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical group C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 125000000217 alkyl group Chemical group 0.000 description 4
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 4
- 125000004464 hydroxyphenyl group Chemical group 0.000 description 4
- 235000011007 phosphoric acid Nutrition 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 125000004663 dialkyl amino group Chemical group 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- -1 phosphoric acid compound Chemical class 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 1
- 125000004448 alkyl carbonyl group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000003009 phosphonic acids Chemical class 0.000 description 1
- 150000003014 phosphoric acid esters Chemical class 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7588099A JP2000267285A (ja) | 1999-03-19 | 1999-03-19 | 感光性組成物及びパターンの形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7588099A JP2000267285A (ja) | 1999-03-19 | 1999-03-19 | 感光性組成物及びパターンの形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000267285A JP2000267285A (ja) | 2000-09-29 |
| JP2000267285A5 true JP2000267285A5 (enExample) | 2006-04-27 |
Family
ID=13589051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7588099A Pending JP2000267285A (ja) | 1999-03-19 | 1999-03-19 | 感光性組成物及びパターンの形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000267285A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002202599A (ja) * | 2000-12-28 | 2002-07-19 | Taiyo Ink Mfg Ltd | 複合パターン層およびその製造方法 |
| JP3890052B2 (ja) | 2001-09-11 | 2007-03-07 | 関西ペイント株式会社 | 活性エネルギー線性組成物及びパターン形成方法 |
| JP4481551B2 (ja) * | 2002-03-28 | 2010-06-16 | 関西ペイント株式会社 | ポジ型フォトレジスト組成物、及びパターン形成方法 |
| JP4322097B2 (ja) * | 2003-11-14 | 2009-08-26 | 東京応化工業株式会社 | Ｅｌ表示素子の隔壁、およびｅｌ表示素子 |
| JP4840017B2 (ja) * | 2006-04-13 | 2011-12-21 | 日立化成工業株式会社 | 感光性樹脂組成物及び感光性エレメント |
| JP6205285B2 (ja) * | 2014-02-12 | 2017-09-27 | サンアプロ株式会社 | 光酸発生剤及びフォトリソグラフィー用樹脂組成物 |
-
1999
- 1999-03-19 JP JP7588099A patent/JP2000267285A/ja active Pending
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