JP2000260698A5 - - Google Patents

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Publication number
JP2000260698A5
JP2000260698A5 JP1999062003A JP6200399A JP2000260698A5 JP 2000260698 A5 JP2000260698 A5 JP 2000260698A5 JP 1999062003 A JP1999062003 A JP 1999062003A JP 6200399 A JP6200399 A JP 6200399A JP 2000260698 A5 JP2000260698 A5 JP 2000260698A5
Authority
JP
Japan
Prior art keywords
light source
distribution
effective light
optical system
projection optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999062003A
Other languages
English (en)
Japanese (ja)
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JP2000260698A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11062003A priority Critical patent/JP2000260698A/ja
Priority claimed from JP11062003A external-priority patent/JP2000260698A/ja
Publication of JP2000260698A publication Critical patent/JP2000260698A/ja
Publication of JP2000260698A5 publication Critical patent/JP2000260698A5/ja
Pending legal-status Critical Current

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JP11062003A 1999-03-09 1999-03-09 投影露光装置およびそれを用いた半導体デバイスの製造方法 Pending JP2000260698A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11062003A JP2000260698A (ja) 1999-03-09 1999-03-09 投影露光装置およびそれを用いた半導体デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11062003A JP2000260698A (ja) 1999-03-09 1999-03-09 投影露光装置およびそれを用いた半導体デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2000260698A JP2000260698A (ja) 2000-09-22
JP2000260698A5 true JP2000260698A5 (enrdf_load_html_response) 2006-04-20

Family

ID=13187555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11062003A Pending JP2000260698A (ja) 1999-03-09 1999-03-09 投影露光装置およびそれを用いた半導体デバイスの製造方法

Country Status (1)

Country Link
JP (1) JP2000260698A (enrdf_load_html_response)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4541571B2 (ja) * 2001-01-23 2010-09-08 キヤノン株式会社 半導体製造装置
JP4585697B2 (ja) * 2001-01-26 2010-11-24 キヤノン株式会社 露光装置及び光源の位置調整方法
JP2002267937A (ja) * 2001-03-08 2002-09-18 Olympus Optical Co Ltd 測定光学系補正装置及び分光測光装置
US6868223B2 (en) 2001-05-11 2005-03-15 Canon Kabushiki Kaisha Illumination apparatus, exposure apparatus using the same and device fabrication method
JP3826047B2 (ja) 2002-02-13 2006-09-27 キヤノン株式会社 露光装置、露光方法、及びそれを用いたデバイス製造方法
JP4497949B2 (ja) * 2004-02-12 2010-07-07 キヤノン株式会社 露光装置
JP4697426B2 (ja) * 2005-11-18 2011-06-08 株式会社ニコン 光強度分布の評価方法、照明光学装置およびその調整方法、露光装置、および露光方法
JP2011242563A (ja) * 2010-05-18 2011-12-01 Hitachi High-Technologies Corp 露光装置、露光装置のランプ位置調整方法、及び表示用パネル基板の製造方法

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