JP2000208584A - Wafer processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wafer processing device capable of easily transferring a buffer cassette and setting/resetting the buffer cassette. SOLUTION: A second buffer section 9B is partitioned by a unit frame 21 and a wall plate 22 fixed to the unit frame 21. In the second buffer section 9B, through the openings of an upper door 23 and a lower door 24 fixed to the unit frame 21, a cassette carriage MCV for mass production, on which the buffer cassette MBC for mass production is mounted can be set or a cassette carriage for sampling on which a buffer cassette for sampling is mounted, can be set.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a semiconductor wafer,
The present invention relates to a substrate processing apparatus for processing various substrates to be processed such as a glass substrate for a liquid crystal display device and a glass substrate for a PDP (plasma display panel).

[0002]

2. Description of the Related Art For example, in a manufacturing process of a liquid crystal display device, a substrate processing apparatus for sequentially performing a plurality of processing steps on a glass substrate is used. Such a substrate processing apparatus has a plurality of processing units, and the substrates to be processed are taken out one by one from an indexer cassette capable of storing a predetermined number (for example, 35) of substrates, and the processing units are separated. , And receive a series of processing.

Further, such a substrate processing apparatus has a buffer unit capable of temporarily holding a substrate subjected to a predetermined processing step before performing the remaining processing steps. A cassette mounting table is fixedly arranged on the buffer unit, and a buffer cassette capable of storing the same number of substrates as the indexer cassette is mounted on the cassette mounting table. Thus, all substrates contained in one indexer cassette can be kept in a standby state in the buffer unit in a state where the substrates have been subjected to a predetermined processing step (a processing step before the buffer unit). Therefore, when a processing failure occurs in the processing steps after the buffer unit, it is not necessary to immediately stop the processing steps before the buffer unit, so that a decrease in processing efficiency can be minimized.

[0004] The buffer unit can be further used as a loader for loading a substrate into or out of a substrate processing apparatus. For example, when it is desired to perform only the processing steps after the buffer unit on the substrate, the processing unit that installs the buffer cassette containing the substrate to be processed in the buffer unit and executes the processing steps after the buffer unit from the buffer cassette The buffer unit can be used as a loader by sending the substrate toward. Also, when only the processing steps before the buffer unit are to be performed on the substrates, the substrates subjected to the processing steps before the buffer unit are accommodated in the buffer cassette, and when the processing on all the substrates is completed, By removing the buffer cassette from the device,
The buffer unit can be used as an unloader.

[0005]

However, in recent years, the size of the buffer cassette has been increasing in accordance with the increase in the size of the substrate to be processed, and the movement of the buffer cassette in a clean room and the transfer of the buffer cassette to the cassette mounting table have become difficult. It is becoming difficult to handle such as setting (mounting) and resetting (removing). In addition, due to the increase in the size of the substrate and the buffer cassette, the total weight of the buffer cassette in a state in which the substrate is accommodated increases, and it becomes difficult to handle the buffer cassette in terms of weight.

In order to solve this problem, a transfer carriage with a robot arm (for example, see Japanese Patent Application Laid-Open No. 6-140546) is caused to travel in a passage facing the buffer unit, and the transfer carriage moves, sets and resets the buffer cassette. It is possible to do. However,
To set and reset the buffer cassette, increase the width of the passage facing the buffer unit,
It is necessary to secure enough space for turning the robot arm. For this purpose, the distance between adjacent substrate processing apparatuses must be increased, and the number of substrate processing apparatuses that can be installed in a clean room decreases.

An object of the present invention is to solve the above-mentioned technical problems and to provide a substrate processing apparatus capable of easily moving a buffer cassette and setting and resetting the buffer cassette with respect to a buffer section. is there.

[0008]

According to the first aspect of the present invention, there is provided a first processing unit and a second processing unit for processing a substrate, the first processing unit and the second processing unit. A buffer unit provided between the first processing unit and the second processing unit for temporarily storing a substrate transferred between the first processing unit and the second processing unit; And a cassette carriage detachable from the buffer section and capable of running when detached from the buffer section, and a buffer cassette attached to the cassette carriage and capable of accommodating a substrate therein. Is a substrate processing apparatus.

According to the present invention, the buffer cassette comprises:
It can be set in the buffer section while being attached to the cassette cart. Therefore, unlike the conventional configuration in which the cassette mounting table is fixedly arranged in the buffer unit,
Lower the buffer cassette from the cassette mounting table,
There is no need to lift the buffer cassette on the cassette mounting table, and the setting and resetting of the buffer cassette with respect to the buffer section can be easily performed.

[0010] Further, since the cassette carriage can run while being detached from the buffer section, the buffer cassette can be easily moved, for example, in a clean room. It is preferable that the cassette cart includes a free caster rotatably mounted on a vertical axis. In this case, the moving direction of the cassette carriage can be changed in a relatively narrow space for maintenance provided between adjacent substrate processing apparatuses in a conventional clean room.

Preferably, the buffer section is configured to be able to receive a plurality of types of buffer cassettes. Further, the plurality of types of buffer cassettes include a mass production buffer cassette used for temporarily suspending a substrate unloaded from the first processing unit or the second processing unit, and a first processing unit or the second processing unit. It may include a sampling buffer cassette used when it is desired to perform processing by the unit on a substrate on a trial basis.

[0012] The invention according to claim 2 further includes positioning means for positioning the buffer cassette with respect to the buffer section so that the buffer cassette is set at a predetermined set position in the buffer section. The substrate processing apparatus according to claim 1, wherein: According to the present invention, the buffer cassette can be positioned at the predetermined set position in the buffer section by the positioning means.

The positioning means may include a carriage positioning means for positioning the cassette carriage with respect to the buffer section. It is preferable that the apparatus further includes fixing means for fixing the cassette carriage to the buffer section in a state where the buffer cassette is positioned by the positioning means. With this fixing means, the position of the cassette carriage does not shift during the processing by the substrate processing apparatus. For example, when the transfer robot moves the substrate into and out of the buffer cassette, the substrate can be moved in and out favorably. It can be carried out.

According to a fourth aspect of the present invention, the carriage positioning means is attached to the cassette carriage so as to position the cassette carriage in a horizontal direction orthogonal to a mounting / removing direction with respect to the buffer section. 4. The substrate processing apparatus according to claim 3, further comprising a guide roller that can roll while being in contact with the inner surface. According to the present invention, since the guide roller is attached to the cassette carriage, the cassette carriage can be positioned in the horizontal direction perpendicular to the mounting / dismounting direction with respect to the buffer unit. It can be positioned in the horizontal direction perpendicular to the direction.

According to a fifth aspect of the present invention, the carriage positioning means comprises: a contact portion attached to the cassette carriage;
5. The substrate processing apparatus according to claim 3, further comprising a contact portion provided in said buffer portion, said contact portion contacting said contact portion in a state where said buffer cassette is set at said predetermined set position. Device. According to the invention,
The cassette carriage can be positioned in the mounting / removing direction with respect to the buffer section by contacting the abutting section mounted on the cassette carriage with the abutting section of the buffer section. Can be positioned in any direction.

The carriage positioning means includes a contact portion provided on the buffer portion, and a contact portion provided on the cassette truck, wherein the contact portion is provided when the buffer cassette is set at the predetermined set position. May also include a contacted part with which the contact is made. Further, the contact portion is a contact pin extending in a mounting / removing direction with respect to the buffer portion,
It is preferable that the contacted part is a contact groove with which the tip of the contact pin contacts.

According to a sixth aspect of the present invention, the carriage positioning means is provided on a positioning roller attached to the cassette carriage and the buffer section, and the cassette carriage is attached to and detached from the buffer section and in a height direction. The substrate processing apparatus according to any one of claims 3 to 5, further comprising a guide rail for guiding the positioning roller to perform positioning.

According to the present invention, since the positioning rollers attached to the cassette carriage are guided by the guide rails of the buffer section, the cassette carriage can be moved relative to the buffer section independently of the position from the floor of the clean room. As a result, the buffer cassette can be positioned in the mounting / removing direction and the height direction with respect to the buffer unit.

According to a seventh aspect of the present invention, the positioning means includes a mounting frame for mounting the buffer cassette provided on the cassette carriage, and an elevating means for raising and lowering the mounting frame. A substrate processing apparatus according to any one of claims 2 to 6, wherein: According to this invention, the position of the buffer cassette attached to the mounting frame in the height direction can be adjusted by moving the mounting frame up and down by the elevating means.

[0020]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a plan view showing a layout of a substrate processing apparatus according to one embodiment of the present invention. This substrate processing apparatus is an apparatus for performing a photolithography process, and has a long overall shape in plan view. In FIG. 1, this long entire shape is cut in the middle and divided into two upper and lower stages.

This long substrate processing apparatus has an indexer unit (IND) 1 at one end and an exposure machine (EX) at the other end.
P) 10. The substrate S to be processed travels from the indexer unit 1 to the exposure device 10, and the exposure device 10
The substrate is transported again along the substantially U-shaped substrate transport path returning to the indexer 1 and undergoes various processes in the process.

On the outward path from the indexer unit 1 to the exposure device 10, an ultraviolet irradiation unit (UV) 2, a roll brush cleaning unit 3, a dehydration bake unit (D
B) 4, a spin coater unit (SC) 5, an edge cleaning unit (ER) 6, a pre-bake unit (PB) 7, an edge exposure unit (EdgEx) 8, and a buffer unit (BF) 9 are arranged in this order. ing.

On the return path from the exposure machine 10 to the indexer unit 1, there is provided a post-exposure bake unit (PEB).
The processing units 11, a developing unit 12, an air cooling unit 13, and a post-bake unit (PostB) 14 are arranged in this order. However, the dehide bake unit 4, the prebake unit 7, and the postbake unit 14 are arranged three-dimensionally above the other processing units, and are arranged so as to straddle the outward and return paths of the substrate transport path. . That is, the substrate processing apparatus has a two-story structure, and heat treatment units such as the dehydration bake unit 4, the pre-bake unit 7, and the post-bake unit 14 are arranged on the second floor.

The buffer unit 9 is also arranged over the forward and backward paths of the substrate transport path. As described above, by adopting a layout in which a part of the processing units are arranged over the outward path and the return path of the substrate transfer path, the space of the substrate processing apparatus can be saved.

The indexer unit 1 includes a plurality of substrates S
A cassette mounting table 1A capable of arranging and mounting a plurality of cassettes C that can hold
The processing unit includes an indexer robot 1B that linearly reciprocates along the cassette mounting table 1A and performs a substrate loading / unloading operation with respect to an arbitrary cassette C. The indexer robot 1B unloads the unprocessed substrate S from one of the cassettes C and puts the unprocessed substrate S into the ultraviolet irradiation unit 2, and receives the processed substrate S that has undergone a series of processes from the post-bake unit 14, Carry in one of the cassettes C.

The ultraviolet irradiation unit 2 has a function of decomposing organic substances on the surface of the substrate S by irradiating the substrate S with ultraviolet rays. Roll brush cleaning unit 3
The substrate S that has been processed in the ultraviolet irradiation unit 2 is carried in by a suitable transport mechanism (not shown). This roll cleaning unit is a processing unit that brushes upper and lower surfaces with a roll brush while transporting the substrate S in a substantially horizontal posture by a roller transport mechanism. The brush-cleaned substrate S is moved by the posture conversion unit PC1 to 9
Horizontally rotated 0 degrees.

The dehydration bake unit 4 includes a pair of heat treatment units 4A and 4B each having a plurality of heat treatment units stacked in multiple stages in the vertical direction, and a transfer robot 4C disposed therebetween. I have. Heat treatment group 4A, 4B
Includes a hot plate for heating the substrate S to evaporate moisture and a cool plate for cooling the heated substrate S to room temperature. The transfer robot 4C receives the substrate S from the posture conversion unit PC1, loads the substrate S into one of the heat treatment units, moves the substrate S between different heat treatment units, takes out the substrate S from the heat treatment unit, and changes the posture. Department PC
Or hand over to 2.

The spin coater unit 5 rotates the substrate S in a horizontal posture and drops the resist liquid on the center of rotation, thereby applying the resist liquid uniformly on the surface of the substrate S using centrifugal force. Processing unit.
The spin coater unit 5 includes a processing chamber 5A for performing a resist coating process, a loading robot 5B for loading the substrate S before resist coating into the processing chamber 5A, and an unloading robot for unloading the substrate S after resist coating from the processing chamber 5A. 5C. The posture conversion unit PC2 arranged between the loading robot 5B and the dehydration bake unit 4 transfers the substrate S to 9
This is for horizontal rotation of 0 degrees. Loading robot 5
B receives the substrate S rotated by 90 degrees by the posture conversion unit 5D and carries it into the processing chamber 5A.

The substrate S carried out of the processing chamber 5A by the carry-out robot 5C is carried into the edge cleaning unit 6 through the leveling zone 5F. Edge cleaning unit 6
A processing unit 6A for cleaning and removing the resist near the edge of the substrate S; a loading robot 6B for receiving the substrate S from the leveling zone 5F and loading the processing unit 6A;
It has an unloading robot 6C that unloads the processed substrate S from the processing unit 6A.

The substrate S unloaded by the unloading robot 6C is horizontally rotated by 90 degrees in the posture conversion unit PC3. The pre-bake unit 7 includes a pair of heat treatment units 7A and 7B each having a plurality of heat treatment units stacked in multiple stages in the vertical direction, and a transfer robot 7 disposed therebetween.
C. The heat treatment units 7A and 7B are for heating the substrate S to evaporate the solvent in the resist solution, baking and solidifying the resist film, and then cooling the substrate S to room temperature. Therefore, each of the heat treatment units 7A and 7B is provided with a hot plate for evaporating moisture and a cool plate for cooling the heated substrate S to room temperature. The transfer robot 7C includes a posture conversion unit PC3.
From one of the heat treatment units, or transfer the substrate S between different heat treatment units,
The substrate S is taken out from the heat treatment part and the substrate transfer table SD1
Or hand it over.

The edge exposure unit 8 is a processing unit for performing an exposure process for removing unnecessary resist adhering to the edge of the substrate S. In connection with the edge exposure unit 8, a robot TR capable of receiving the substrate S from the substrate transfer table SD1 and carrying the substrate S into the edge exposure unit 8 is provided. This robot TR
The substrate S after the edge exposure processing is taken out from the edge exposure unit 8, and the edge exposure unit 8 and the buffer unit 9 are taken out.
Is transferred to the substrate transfer table SD2 arranged between the two.

The buffer unit 9 temporarily stores the substrate S subjected to the processing by the edge exposure unit 8 in a first buffer section 9A, and temporarily stores the substrate S to be processed in the post-exposure bake unit 11 and thereafter. It has a second buffer section 9B for waiting, and a transfer robot 9C arranged between them. First buffer unit 9A
In the second buffer unit 9B, a mass production buffer cassette MBC capable of accommodating, for example, 35 substrates S is set. The transfer robot 9C receives the substrate S from the substrate transfer table SD2 and loads the substrate S into the first buffer unit 9A, takes out the substrate S from the first buffer unit 9A and loads the substrate S into the exposure device 10, or performs exposure after exposure from the exposure device 10. The substrate S is taken out and carried into the second buffer unit 9B, or the substrate S is taken out from the second buffer unit 9B and delivered to the substrate transfer stand SD2.

The substrate S transferred to the substrate transfer table SD2 is subjected to the post-exposure bake unit 11 by the robot TR.
It is carried in. The post-exposure bake unit 11 has a heat treatment unit group including a plurality of heat treatment units stacked in multiple stages in the vertical direction. The post-exposure bake unit 11 is for post-exposure bake processing when a so-called chemically amplified resist is used. That is, the heat treatment group includes a hot plate used for thinning the line width by baking the resist, and a cool plate for cooling the substrate S after the heat treatment by the hot plate to room temperature. Is provided.

Substrate S from post-exposure bake unit 11
Undergoes processing by the developing unit 12. The developing unit 12, for example, supplies the developing solution to the surface of the substrate S while roller-transporting the substrate S in a horizontal posture by a roller transport mechanism, then rinses the developing solution with pure water, and further cleans the substrate S. It is configured to dry.
The air cooling unit 13 is a processing unit that includes a roller transport mechanism that transports the substrate S, and cools the substrate S by air.

Between the air cooling unit 13 and the post-bake unit 14, there is provided a posture conversion unit PC4 for horizontally rotating the substrate S by 90 degrees. Post bake unit 1
Reference numeral 4 includes a pair of heat treatment units 14A and 14B each having a plurality of heat treatment units stacked in multiple stages in the vertical direction, and a transfer robot 14C disposed therebetween. The heat treatment units 14A and 14B include a hot plate for heating the substrate S and baking the developed resist.
A cooling plate for cooling the heated substrate S to room temperature. The transfer robot 14C receives the substrate S from the posture conversion unit PC4, loads the substrate S into one of the heat treatment units, or transfers the substrate S between different heat treatment units.
Or the substrate S is taken out of the heat treatment unit and delivered to the posture conversion unit PC5.

The posture converting section PC5 is for horizontally rotating the substrate S by 90 degrees. The rotated substrate S is received by the indexer robot 1B and stored in one of the cassettes C. FIG. 2 shows the second buffer unit 9.
FIG. 4 is a cross-sectional view of the state in which the mass production buffer cassette MBC is set in B, as viewed from the exposure device 10 side. Since the first buffer unit 9A and the second buffer unit 9B have substantially the same configuration, the second buffer unit 9B will be described below.

The second buffer section 9B is defined by a unit frame 21 and a wall plate 22 attached to the unit frame 21. Second buffer unit 9B
Is open on one side (the right side in FIG. 2),
In relation to this open surface, an upper door 23 and a lower door 24 are provided to be openable and closable. In the second buffer section 9B, the upper door 23 and the lower door 24 are opened to set a mass production cassette cart MCV on which the mass production buffer cassette MBC is placed, or a sampling buffer cassette is placed. A sampling trolley (to be described later) can be set.

The mass production buffer cassette MBC is a cassette for temporarily holding the substrate S carried out from the exposure machine 10. On the inner surface of the mass production buffer cassette MBC, for example, 35 storage shelves SL are vertically stacked at equal intervals, and each of the storage shelves SL can store one substrate S. It has become. The mass production buffer cassette MBC is provided with an opening CF for taking in and out the substrate S on a surface facing the transfer robot 9C while being set in the second buffer unit 9B. Thus, the transfer robot 9C can move the substrate S in and out of the mass production buffer cassette MBC.

FIG. 3 is a perspective view showing the structure of the mass production cassette cart MCV. This mass production cassette cart MCV
Has a mounting frame 30 for mounting the mass production buffer cassette MBC, and legs 40A, 40B, 40C, and 40D for supporting the mounting frame 30. The mounting frame 30 includes a base frame 31 formed in a square frame shape, and six column members 32A, 32B, 32C, 32D, 32E, 32 standing upright on the upper surface of the base frame 31.
F and a mounting frame 33 fixed to connect the upper ends of the six pillar members 32A to 32F. A plurality of (in this embodiment, nine) bolt holes 34 are formed in the mounting frame 33, and the buffer cassette M for mass production is formed.
The BC is placed on the mounting frame 33 and is fixed to the mounting frame 33 with bolts inserted into the bolt holes 34 from below the mounting frame 33. An adjusting bolt hole 35 is formed in association with each bolt hole 34, and by adjusting the tightening state of the adjusting bolt inserted into the adjusting bolt hole 35, the mass production buffer with respect to the mounting frame 33 is adjusted. Height of cassette MBC and mass production buffer cassette M
The horizontality of the substrate S in the BC can be finely adjusted.

The legs 40A, 40B, 40C, and 40D (hereinafter referred to as "legs 40" when collectively referred to) are rod-shaped members formed in a substantially L-shaped cross section.
It is provided hanging from the four corners. The lower end of the leg 40A and the lower end of the leg 40B, the lower end of the leg 40B and the lower end of the leg 40C, and the lower end of the leg 40C and the lower end of the leg 40D are connected by connecting members 41, 42, and 43, respectively. I have. Further, between the legs 40A and 40B and between the legs 40C and 40D adjacent to the mounting direction 100, a plurality of reinforcing members 44 and 45 are respectively bridged so as to give the legs 40 sufficient rigidity.

At the lower end of each of the legs 40A to 40D, a cross section substantially L
A caster 52A is attached via a letter-shaped attachment 51. A handlebar HD extending along the side 31A is attached to one side 31A of the base frame 31.
00, this mass production cassette cart MC
V can be moved in the mounting direction 100. Also,
The two casters 52A on the front side (the side to which the handlebar HD is attached) with respect to the mounting direction 100 are formed of swivel casters that are rotatably mounted around a vertical axis. The moving direction of the mass production cassette cart MCV can be freely changed.

Further, an auxiliary caster 52B is attached to the distal end of the attachment 51 on the far side with respect to the mounting direction 100. This auxiliary caster 52B rolls on the slope 25 arranged on the floor of the clean room, and smoothly guides the cassette cart MCV for mass production from the floor of the clean room to the floor of the second buffer unit 9B. It is.

Two guide rollers 53A, 53B are attached to the connecting members 41, 43, respectively, in a state of extending horizontally. These guide rollers 53A, 5
3B stores the mass production cassette cart MCV in the second buffer unit 9.
When the cassette carriage MC is mounted on the unit frame B, it is for positioning the mass production cassette cart MCV in a horizontal direction orthogonal to the mounting direction 100 while guiding, and rolls while contacting the unit frame 21.

A contact pin 54 extending toward the mounting direction 100 is penetrated and attached to each of the two mounting tools 51 on the back side with respect to the mounting direction 100. The contact pin 54 is for positioning the mass production cassette cart MCV in the mounting direction 100 when the mass production cassette cart MCV is attached to the second buffer section 9B. The unit frame 21 is provided with a contact V-groove 26 with which the tip of the contact pin 54 contacts.

When setting the mass production buffer cassette MBC in the second buffer section 9B, the upper door 23 and the lower door 24 of the second buffer section 9B are opened, and the mass production buffer cassette MBC is mounted. Cassette cart MC
V until the contact pin 54 contacts the contact V groove 26.
Push it into the buffer section 9B. At this time, the cassette carriage MCV for mass production is guided by the guide rollers 53A and 53B on both sides with respect to the mounting
Are positioned in the horizontal direction perpendicular to the horizontal axis. When the contact pin 54 comes into contact with the contact V-groove 26, the movement of the mass production cassette cart MCV in the mounting direction 100 is regulated.
It is also positioned at zero. As a result, the mass production buffer cassette MBC is set at a predetermined set position (the position shown in FIG. 2) in the second buffer unit 9B.

The leg 40 of the mass production cassette cart MCV
A is provided with a first knock pin 55 projecting toward the mounting direction 100 above the contact pin 54.
On the other hand, the unit frame 21 is provided with a first identification switch 27A and a second identification switch 27B for identifying the type of the cassette carriage (buffer cassette) set at a predetermined set position. The first identification switch 27A and the second identification switch 27B are attached to the unit frame 21 at different heights, and the first identification switch 27A is provided at a position corresponding to the first knock pin 55. Thus, when the mass production buffer cassette MBC is set at a predetermined set position, the first knock pin 55 contacts the cassette identification switch 27A, and the actuator of the cassette identification switch 27A is pushed. At this time, since the actuator of the second identification switch 27B is not displaced, the control unit (not shown) provided in the substrate processing apparatus operates the first identification switch 27A and the second identification switch 27B.
Based on the output signal of the identification switch 27B, the mass production buffer cassette MB is set at the set position in the second buffer section 9B.
It can be identified that C has been set.

FIG. 4 is a cross-sectional view of the second buffer section 9B viewed in the mounting direction 100 for explaining the fixing structure of the mass-production cassette cart MCV. The mass production buffer cassette MBC can be fixed at a predetermined set position so that the transfer robot 9C can favorably put the substrate S in and out of the mass production buffer cassette MBC.

More specifically, a fixed block 61 is attached to the legs 40B and 40C of the mass production cassette cart MCV.
It is mounted in a state that it protrudes in a horizontal direction orthogonal to the mounting direction 100. On the other hand, in the unit frame 21, the mass production buffer cassette MBC is set at a predetermined set position, and the fixed block 61 and the mounting direction 1 are set.
The receiving block 28 for fixing the fixed block 61 is provided so as to face the fixed block 61. In the fixed block 61 and the receiving block 28, through holes 61A and 28A are formed at positions where the cassette truck MCV for mass production is set at a predetermined set position and overlap each other.

When fixing the mass production buffer cassette MBC at a predetermined set position, the mass production cassette cart MCV
Is set in the second buffer portion 9B, and a fixing hexagonal hole bolt is screwed into the through hole 61A of the fixed block 61 and the through hole 28A of the receiving block 28 from the near side of the fixed block 61. As a result, the cassette cart MC for mass production
Since V can be fixed to the unit frame 21, the mass production buffer cassette MBC can be fixed at a predetermined set position.

FIG. 5 shows a state in which the sampling buffer cassette is set in the second buffer section 9B.
It is sectional drawing seen from the side. FIG. 6 is a cross-sectional view of the second buffer unit 9B as viewed in the mounting direction 100. The sampling buffer cassette SBC is used, for example, to test only the processing steps before the exposure processing by the exposure machine 10 on the substrate S, or to test only the processing steps after the heat treatment by the post-exposure bake unit 11. This is a cassette used to carry out / in the substrate S from the second buffer unit 9B when performing the application.

Sampling buffer cassette SBC
Is fixed on the sampling cassette carriage SCV, is carried into the second buffer unit 9B, and is set at a predetermined set position (the position shown in FIG. 5). The sampling buffer cassette SBC and the sampling cassette carriage SCV are each a mass production buffer cassette MB.
5 and FIG. 6, parts corresponding to those shown in FIG. 2 and FIG. 4 are denoted by the same reference numerals. In the following, the sampling buffer cassette SBC and the sampling cassette cart SCV will be described focusing on differences from the mass production buffer cassette MBC and the mass production cassette cart MCV, respectively.

On the inner surface of the sampling buffer cassette SBC, for example, five stages of storage shelves SL are formed by being vertically stacked at equal intervals.
Can be accommodated one by one. That is, the sampling buffer cassette SBC has a smaller number of substrates S that can be accommodated than the mass production buffer cassette MBC, and the second buffer unit 9B and the other substrate processing apparatus are attached to the sampling cassette carriage SCV in a state where they are mounted. It is sized and weighted so that it can be easily moved between.

The sampling cassette carriage SCV can also be used to carry the sampling buffer cassette SBC into another substrate processing apparatus. The sampling cassette trolley SCV does not include the contact pins 54 provided for positioning the mass production cassette trolley MCV in the mounting direction 100. Instead, the sampling cassette trolley SCV is connected to the mounting direction 100 and the height. Positioning roller 71A for positioning in the direction
71B are provided. This positioning roller 71A,
71B is a sampling cassette cart SCV for each.
The rotation shaft 72 is attached to the reinforcing members 44 and 45 and projects in the horizontal direction substantially orthogonal to the mounting direction 100.
It is held rotatably around it.

On the other hand, the unit frame 21 is provided with a guide rail 29 for guiding the sampling buffer cassette SBC (sampling cassette carriage SCV) to a predetermined set position (the position shown in FIG. 5).
The end of the guide rail 29 on the near side in the mounting direction 100 is provided with an inclined surface 29 for gradually lifting the positioning rollers 71A and 71B of the sampling cassette carriage SCV.
A is formed. On the upper surface of the guide rail 29, with the sampling buffer cassette SBC set at a predetermined set position, the positioning rollers 71A,
A recess 29B is formed at a position where 71B fits.

When setting the sampling buffer cassette SBC in the second buffer section 9B, first, the upper door 23 and the lower door 24 of the second buffer section 9B were opened, and the mass production buffer cassette MBC was attached. The mass production cassette cart MCV is pulled out from the second buffer unit 9B. Next, the sampling cassette carriage SCV to which the sampling buffer cassette SBC is attached is pushed into the second buffer unit 9B. At this time, the sampling cassette carriage SCV is guided by the guide rollers 53A and 53B on both sides in the mounting direction 100,
Positioning is performed in a horizontal direction orthogonal to the mounting direction 100. Further, the positioning rollers 71A and 71B are lifted up by being guided by the inclined surface 29A of the guide rail 29. When the positioning rollers 71A and 71B face the recess 29B of the guide rail 29, the recess 29B
, Whereby the sampling cassette cart SCV is positioned in the mounting direction 100 and the height direction. As a result, the sampling buffer cassette S
BC is lifted from the floor of the substrate processing apparatus,
It is set at a predetermined set position (the position shown in FIG. 5) in the second buffer unit 9B.

With the sampling buffer cassette SBC set at a predetermined set position, a fixed block 61 provided on the sampling cassette carriage SCV is provided.
Is the receiving block 2 provided on the unit frame 21
8 and the mounting direction 100. Therefore, after setting the sampling cassette carriage SCV in the second buffer section 9B, from the near side of the fixed block 61, a hexagonal bolt for fixing is inserted into the through hole 61A of the fixed block 61 and the through hole 28A of the receiving block 28. By screwing in, the sampling cassette cart SCV can be fixed to the unit frame 21. This allows
The sampling buffer cassette SBC can be fixed at a predetermined set position.
Substrate S for sampling buffer cassette SBC
Can be taken in and out satisfactorily.

A sampling cassette cart SCV
A second knock pin 73 projecting toward the mounting direction 100 is attached to the leg 40A above the first knock pin 55. The second knock pin 73 is attached at a position where it comes into contact with the second identification switch 27B provided on the unit frame 21 with the sampling cassette cart SCV set in the second buffer unit 9B.
Therefore, when the sampling buffer cassette SBC is set in the second buffer section 9B, the first knock pin 55 comes into contact with the cassette identification switch 27A, and the second knock pin 73 comes into contact with the second identification switch 27B. Is displaced, the control unit provided in the substrate processing apparatus operates the first identification switch 27.
Based on A and the output signal of the second identification switch 27B, it can be identified that the sampling buffer cassette SBC has been set at the set position in the second buffer section 9B.

As described above, according to the present embodiment, the mass production buffer cassette MBC and the sampling buffer cassette SBC are each composed of the mass production cassette cart MC.
In the state where the V and the sampling cassette cart SCV are attached, the cartridge can be set at a predetermined set position in the second buffer unit 9B. Therefore, unlike the conventional configuration in which the cassette mounting table is fixedly arranged on the buffer unit, there is no need to lower the buffer cassette from the cassette mounting table or lift the buffer cassette onto the cassette mounting table. MB
It is possible to easily set and reset C and the sampling buffer cassette SBC.

The mass production cassette cart MCV and the sampling cassette cart SCV have four casters 5.
Since the vehicle can freely travel by 2A, the mass production buffer cassette MBC and the sampling buffer cassette SBC can be easily moved. In particular, the sampling cassette cart SCV to which the sampling buffer cassette SBC is attached is a mass production cassette cart MC to which the mass production buffer cassette MBC is attached.
Since it is smaller and lighter than V, it can be easily moved between this substrate processing apparatus and another substrate processing apparatus.

Further, since the two casters 52A on the front side with respect to the mounting direction 100 are composed of free casters rotatably mounted around a vertical axis, the mass production cassette cart MCV is provided in a relatively narrow space. In addition, the moving direction of the sampling cassette carriage SCV can be freely changed. Therefore, the moving direction of the mass production cassette cart MCV and the sampling cassette cart SCV can be changed in the maintenance space conventionally provided between the adjacent substrate processing apparatuses in the clean room, and can be installed in the clean room. There is no need to reduce the number of substrate processing apparatuses.

Further, a sampling cassette cart SC
V is guided by the guide rail 29 and is positioned with respect to the unit frame 21.
If the mounting position of 9 is appropriately adjusted, the sampling buffer cassette SBC can be set at a predetermined set position regardless of the size of the sampling cassette carriage SCV.

Further, a sampling cassette cart SC
When used between a plurality of substrate processing apparatuses, V is positioned at the mounting position of the guide rail 29 on the apparatus side without depending on the position from the floor of the clean room, so that it can be shared. . In this embodiment, whether the mass production buffer cassette MBC or the sampling buffer cassette SBC is set in the second buffer unit 9B based on the output signals of the first identification switch 27A and the second identification switch 27B. Can be identified. Thus, for example, in a state where the sampling buffer cassette SBC is set, normal substrate processing (a series of processing performed in a process of going from the indexer unit 1 to the exposure device 10 and returning from the exposure device 10 to the indexer 1 again) Can be prevented from being performed.

FIG. 7 shows a sampling cassette cart SC.
It is a side view which shows other structures of V. In this FIG.
Parts corresponding to the respective parts shown in FIG. 5 are denoted by the same reference numerals, and detailed description thereof will be omitted. The sampling cassette carriage SCV shown in FIG.
A and 71B are guided in the guide rail 29, so that they are positioned in the height direction. On the other hand, the sampling cassette cart S shown in FIG.
The height of the sampling buffer cassette SBC can be adjusted by raising and lowering the mounting frame 30 for mounting the sampling buffer cassette SBC.

The mounting frame 30 is configured to be able to move up and down with respect to the legs 40. Four pulleys 81 (two pulleys 8 in FIG. 7) rotatable about a horizontal axis
Only one is shown. ) Is attached, and a wire 82 having one end fixed to the lower end of the attachment frame 30 is routed to each pulley 81. Each wire 8
The other end of the motor 83 is fixed to a connecting member 41 connecting the lower end of the leg 40A and the lower end of the leg 40B, for example.
It is wound around the rotating shaft.

With this configuration, the motor 83 is driven to rotate forward from the state shown in FIG.
When the winding frame 3 is wound around the rotating shaft 3, the mounting frame 30 is pulled by the wire 82, and the mounting frame 30 is raised as shown in FIG. 7 (b). Further, when the motor 83 is driven to rotate in the reverse direction from the state shown in FIG. 7B and the wire 82 is sent out from the rotation shaft of the motor 83, the mounting frame 30 is lowered by its own weight. In this manner, since the mounting frame 30 can be raised and lowered,
The height of the sampling buffer cassette SBC attached to the attachment frame 30 can be adjusted.

FIG. 8 is a view for explaining a modification of the fixing structure of the mass production cassette cart MCV. In FIG. 8, portions corresponding to the respective portions shown in FIG. 4 are denoted by the same reference numerals. A fixing plate 91 is attached to the reinforcing members 44 and 45 of the mass production cassette cart MCV so as to project in a direction perpendicular to the mounting direction 100 along a horizontal plane. On the other hand, the unit frame 21 is provided with a receiving side plate 92 for fixing the fixing plate 91 so as to face the fixing plate 91 from below in a state where the mass production cassette cart MCV is set at a predetermined set position. ing. The fixing plate 91 and the receiving plate 92 are respectively provided with through holes 91A and 92A in positions where the mass production cassette cart MCV is set to a predetermined set position and overlap each other.
Are formed.

When fixing the mass production buffer cassette MBC at a predetermined set position, the mass production cassette cart MCV
Is set in the second buffer section 9B, and from above the fixed plate 91, the through-hole 91A of the fixed plate 91 and the receiving plate 92
A fixing pin is inserted through the through hole 92A. This allows
The mass production cassette cart MCV can be fixed to the unit frame 21, and the mass production buffer cassette MB
C can be fixed at a predetermined set position. Therefore, according to this configuration, unlike the configuration illustrated in FIG. 4 in which the fixing block 61 and the receiving block 28 are fastened with the fixing hexagonal bolts, a tool for screwing the fixing hexagonal bolts is not required. Thus, the mass production cassette cart MCV can be fixed to the unit frame 21 relatively easily.

Note that this fixed structure is constructed by a sampling buffer cassette SBC (sampling cassette carriage S
CV) can also be applied. The embodiment of the present invention has been described above, but the present invention is not limited to the above-described embodiment. For example, in the above-described embodiment, in order to position the cassette cart in the mounting direction with respect to the buffer section, the cassette cart is provided with a contact pin, and the unit frame of the buffer section is provided with a contact groove. However, for example, the cassette carrier may be provided with a contact groove, and the unit frame may be provided with a contact pin.

In the above embodiment, the case where the present invention is applied to a buffer unit has been described as an example. However, the present invention can also be applied to an indexer unit. In this case, the indexer cassette can be easily moved, set and reset. Further, in the above-described embodiment, a substrate processing apparatus for performing a photolithography process is described. However, the present invention can be applied to a substrate processing apparatus that performs a processing process other than the photolithography process.

In addition, various design changes can be made within the technical scope described in the claims.

[Brief description of the drawings]

FIG. 1 is a plan view showing a layout of a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a state where a mass production buffer cassette MBC is set in a buffer unit.

FIG. 3 is a perspective view illustrating a configuration of a cassette carriage for mass production.

FIG. 4 is a cross-sectional view for explaining a fixing structure of a mass production cassette cart.

FIG. 5 is a cross-sectional view of a state in which a sampling buffer cassette is set in a buffer unit, as viewed from the exposure apparatus side.

FIG. 6 is a cross-sectional view of a state in which a sampling buffer cassette is set in the buffer unit, as viewed in a mounting direction.

FIG. 7 is a diagram for explaining another configuration of the sampling cassette cart.

FIG. 8 is a cross-sectional view for explaining another fixing structure of the cassette carriage for mass production.

[Explanation of symbols]

Reference Signs List 8 edge exposure unit (first processing unit) 9 buffer unit 9A, 9B buffer unit 10 exposure machine (first processing unit, second processing unit) 11 post-exposure bake unit (second processing unit) 26 contact V-groove (contact groove) 28 receiving block (fixing means) 29 guide rail 30 mounting frame 52A casters 53A, 53B guide roller 54 contact pin 61 fixing block (fixing means) 71A, 71B positioning roller 81 pulley (elevating means) 82 Wire (elevating means) 83 Motor (elevating means) 91 Fixed plate (fixing means) 92 Receiving plate (fixing means) 100 Mounting direction MBC Mass production buffer cassette MCV Mass production cassette cart SBC Sampling buffer cassette SCV Sampling cassette cart S substrate

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Satoshi Yamamoto 4-chome, Horikawa-dori Teranouchi, Kamigyo-ku, Kyoto-shi, Kyoto 1 Dai-Nippon Screen Manufacturing Co., Ltd. (72) Inventor Makoto Uebayashi 4-chome, Horikawa-dori Teranouchi, Kamigyo-ku, Kyoto, Kyoto 1F, Tenjin Kitamachi 1 Dainippon Screen Manufacturing Co., Ltd. F term (reference) 5F031 CA02 CA05 DA01 DA17 FA01 FA11 GA44 GA58 MA24 MA27 MA30

Claims (7)

[Claims] A first processing unit for processing a substrate, a second processing unit for processing a substrate, and a first processing unit provided between the first processing unit and the second processing unit. A buffer unit for temporarily storing substrates transferred between the unit and the second processing unit; and a cassette detachable from the buffer unit and capable of running when detached from the buffer unit. A substrate processing apparatus, comprising: a cart; and a buffer cassette attached to the cassette cart and capable of storing substrates therein. 2. The apparatus according to claim 1, further comprising positioning means for positioning said buffer cassette with respect to said buffer section so that said buffer cassette is set at a predetermined set position in said buffer section. 1
The substrate processing apparatus according to any one of the preceding claims. 3. The substrate processing apparatus according to claim 2, wherein said positioning means includes a carriage positioning means for positioning said cassette carriage with respect to said buffer section. 4. The truck positioning means is attached to the cassette truck for positioning the cassette truck in a horizontal direction perpendicular to the mounting / removing direction with respect to the buffer unit, while contacting an inner surface of the buffer unit. 4. The substrate processing apparatus according to claim 3, further comprising a rollable guide roller. 5. The carriage positioning means includes: a contact portion attached to the cassette truck; and a contact portion provided on the buffer portion, wherein the buffer cassette is set at the predetermined set position. The substrate processing apparatus according to claim 3, further comprising: a contacted portion with which the substrate contacts. 6. The carriage positioning means is provided on the buffer unit and a positioning roller attached to the cassette carriage. The carriage positioning unit is configured to position the cassette carriage in the mounting / removing direction and the height direction with respect to the buffer unit. The substrate processing apparatus according to claim 3, further comprising: a guide rail that guides a positioning roller. 7. The positioning device according to claim 2, wherein said positioning means includes a mounting frame for mounting said buffer cassette on said cassette carriage, and elevating means for raising and lowering said mounting frame. 7. The substrate processing apparatus according to any one of items 6 to 6.