JP2002187617A - Substrate handling device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate the necessity of much man power at the time of supplying a substrate to a substrate working line or fetching it from the substrate working line. SOLUTION: This substrate handling device is furnished with a loader 1 to supply the substrate 3 loaded on a carriage 2 set on the inlet side to the substrate working line by fetching it and an unloader 5 to deliver the substrate 3 fetched from the substrate working line to the carriage 2 set on the outlet side.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate handling apparatus.

[0002]

2. Description of the Related Art A substrate such as a glass plate needs to be subjected to various types of processing depending on the type of business. For this purpose, it is necessary to supply the substrate to a substrate processing line. For this reason, in the past, on the entrance side of the substrate processing line, the worker supplied the substrates loaded on the trolley one by one to the substrate processing line, and on the exit side of the substrate processing line, the worker processed the substrates one by one. Is taken out from the substrate processing line and mounted on a trolley.

[0003] However, in the case of such a work mode, workers are required on the entrance side and the exit side of the substrate, respectively, so that labor saving and labor saving cannot be achieved.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and does not require a large amount of manpower when a substrate is supplied to or taken out of a substrate processing line. It is intended to provide a substrate handling apparatus.

[0005]

According to a first aspect of the present invention, a substrate handling apparatus is arranged in parallel with a carriage 2 set on an entrance side and is arranged so that a board width direction is orthogonal to a board taking-in direction D1. Loader 1 for taking in substrate 3 and supplying it to substrate processing line 4 via transfer device 62 in a horizontal state
And the substrate 3 taken out in a horizontal state from the substrate processing line 4 via the transfer device 130 is placed side by side on the carriage 2 set on the output side in a direction in which the width direction of the substrate 3 is orthogonal to the substrate sending direction D4. And an unloader 5 for feeding out.

The substrate handling apparatus according to a second aspect of the present invention takes in and transports the substrates 3 arranged in parallel with the carriage 2 set on the entrance side and arranged so that the width direction of the substrates is orthogonal to the substrate loading direction D1. Substrate processing line 4 via device 62
And a loader 1 for supplying the substrate 3 in a horizontal state from the substrate processing line 4 via a transfer device 130 to a carriage 2 set on the output side. An unloader 5 for sending out in a parallel state in a direction orthogonal to the loader 1;
A traveling frame 11 that reciprocates between a carriage 2 set on the entry side of the loader 1 and a transfer device 130 provided on the substrate processing line 4 side, and is arranged to be able to undulate on the traveling frame 11 and mounted on the carriage 2 Counting means 27 for counting the number of the substrates 3 and substrate guiding means 4 for guiding the surface of the substrate 3
A revolving frame 17 for supporting the substrates 1 and 45 and feeding the substrate 3 from the vertical state to the horizontal state to the transfer device 62, and a reciprocating motion between the rotating frame 17 and the truck 2 set on the loader 1 entrance side. A substrate suction unit 22 for taking the substrates 3 mounted on the carriage 2 side by side into the rotating frame 17 one by one in a vertical direction, and a lower end of the substrate 3 supported by the rotating frame 17 Substrate guiding means 3 for guiding edges and surfaces
Substrate 3 having 7, 38 and arranged in parallel from the trolley 2
The lifting frame 31 provided with the detecting means 63 for detecting the lower edge of the substrate 3 when taking in one of the substrates 3 and the rotating frame 17 are provided at the opposite end of the rotating frame 17 so as to be pivotable. A revolving frame 50 provided with substrate guide means 51 for guiding the upper edge, and the unloader 5 includes a transport device 130 provided on the substrate processing line 4 side and a cart 2 set on the exit side of the unloader 5.
And a guide frame 113 disposed on the travel frame 76 so as to be able to undulate and guide the board 2 set on the exit side of the unloader 5 and board guide means 113 and 117 for guiding the surface of the board 3. Guide means detecting means 1 for detecting means 61
And a rotation frame 82 for supporting the substrate 3 sent out from the substrate processing line 4 to the transfer device 130 in a horizontal state in a vertical direction in which the plate thickness intersects the substrate sending direction D4. Substrate delivery for reciprocating between the carriage 2 supported on the frame 82 and set on the unloader 5 side and the rotating frame 82 side, and sending the substrate 3 supported on the rotating frame 82 to the exit side of the unloader 5. Unit 87 and rotating frame 17
And substrate guide means 99 and 100 for guiding the lower edge and surface of the substrate 3 while supporting the rotary frame 8.
Lifting frame 93 provided with detecting means 131 for detecting the lower edge of substrate 3 when substrate 3 is sent out from 2 to cart 2
, Is provided rotatably at the non-rotation side end of the rotation frame 82,
And a turning frame 122 provided with a substrate guiding means 124 for guiding the outer peripheral edge of the upper end of the substrate 3.

In the substrate handling apparatus according to a third aspect of the present invention, the carriage fixing means 54 for setting the carriage 2 for supplying the substrate 3 to the loader 1 and the substrate 3 at the entrance side of the loader 1.
A substrate end surface aligning means 57 for aligning the downstream end of the substrate taking direction D1.

In the substrate handling apparatus according to a fourth aspect of the present invention, the unloader 5 is provided with the substrate 3 on the exit side of the unloader 5.
Trolley fixing means 12 for setting trolley 2 which receives
7 is provided.

In the present invention, the substrate 3 mounted on the carriage 2 set on the entry side of the loader 1 is taken into the unloader 1 by the substrate suction unit 22 and is supported by the lifting frame 31 and the rotating frame 17. The substrate 3 is sent from the transfer device 62 to the substrate processing line 4 by being transferred to the transfer device 62 side and the rotating frame 17 being turned to be horizontal.

[0010] Further, the transfer device 130 is provided from the substrate processing line 4.
The substrate 3 sent out to the transfer device 130 is
2 is changed from the horizontal state to the vertical state, so that the lifting frame 9
3. The wafer is conveyed to the trolley 2 while being supported by the rotating frame 82, and is mounted by the substrate delivery unit 87 on the trolley 2 set on the unloader 5 side in parallel.

According to the present invention, when supplying the substrate 3 to the substrate processing line 4 or removing the substrate 3 from the substrate processing line 4, a large amount of manpower is not required, so that labor and labor can be reduced. Can be.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 are overall views of a substrate handling apparatus according to the present invention.

In FIG. 1, reference numeral 1 denotes a plurality of glass plate substrates 3 mounted in parallel on a carriage 2 installed on the entry side, and sequentially takes in a substrate taking direction D1, and a substrate carrying direction orthogonal to the substrate taking direction D1. A loader for feeding the substrate processing line 4 after being sequentially fed to the substrate processing line D2 and then in a horizontal state, 5
Is the substrate 3 sent horizontally from the substrate processing line 4
And then unloads in the substrate unloading direction D3 opposite to the substrate unloading direction D2, and further transfers the substrate in the direction D1.
This is an unloader for sending in the substrate delivery direction D4, which is the same direction as the above, and transferring it in a parallel state to the waiting carriage 2 on the exit side.

FIGS. 5 to 7 show the overall appearance of the loader 1, and FIGS. 8 to 23 show details of each part. As shown in FIGS. 5 to 7, the loader 1 includes a fixed frame 6 and a gantry 7 fixed on the fixed frame 6 includes two linear guides extending parallel to the substrate loading direction D2. Rails 8 are laid.

A screw shaft 9 such as a ball screw extending in parallel with the linear guide rail 8 is rotatably arranged between the linear guide rails 8, 8. Drive 1 such as a reduced speed motor
0 (see FIG. 7) is connected. A running frame 11 that can reciprocate along the linear guide rail 8 is installed on the linear guide rail 8, and a nut (not shown) screwed to the screw shaft 9 is provided on the lower surface of the running frame 11. The screw shaft 9 is rotated by driving the driving device 10 so that the traveling frame 11 can reciprocate along the linear guide rail 8.

FIG. 7 shows a bearing 12 disposed on the traveling frame 11.
As shown in FIG. 1, a horizontal shaft 13 extending in a direction orthogonal to the screw shaft 9 in a plan view is rotatably disposed, and the horizontal shaft 13 is a driving device 14 such as a reduction motor mounted on the traveling frame 11. Can be driven to rotate.
Further, brackets 15 (FIGS. 6, 7, 10, 1 and 2) protruding toward the driving device 10 are provided at two positions in the longitudinal direction of the horizontal shaft 13.
1), and a base frame 16 is attached to the tip of the bracket 15 so as to extend in parallel with the board taking-in direction D1.

As shown in FIGS. 5, 11 and the like, a rotating frame 17 having a frame-like front shape is fixed to the base frame 16, and the rotating frame 17 is The frame 16 can rotate integrally with the frame 16 over a range of 90 degrees from a vertical state to a horizontal state with reference to the rotation center O1 (see FIGS. 6 and 10).

At both ends of the base frame 16 in a direction parallel to the substrate taking-in direction D1, horizontal pulleys 18 and 19 are rotatably arranged. An endless timing belt 21 that can be reciprocated by a drive device 20 such as an electric motor is stretched (see FIGS. 5, 8, and 11).

FIGS. 5, 8, and 11 show the timing belt 21.
The substrate suction unit 22 is attached as shown in FIG. 1, and details of the substrate suction unit 22 are shown in FIGS. That is, the frame 23 of the substrate suction unit 22 is connected to the timing belt 21, and the upstream end of the frame 23 in the substrate loading direction D <b> 1 is vertically spaced so that the frame 23 can be suctioned to the surface of the vertically oriented substrate 3. And a plurality of suction pads 24 are provided.

In the frame 23, two upper and lower detection dogs 25 are located between the upper and lower suction pads 24.
It is provided so as to be able to advance and retreat in the thickness direction of the substrate 3 to be sucked, and when the tip is protruded by being pressed by the substrate 3, the sensor 26 detects that the substrate 3 is sucked by the suction pad 24. It is possible to do.

At the upstream end of the base frame 16 in the substrate taking-in direction D1, a substrate number counting sensor unit 27 is provided as shown in FIGS. In other words, the sensor 28 can be moved toward and away from the leading edge of the substrate 3 by the fluid pressure cylinder 29 disposed horizontally, and can count the number of the substrates 3 in the close state. The reason why the sensor 28 can be moved in the horizontal direction in this way is that the detection distance of the substrate 3 is reduced so that the number of sheets can be accurately counted. This is for retreating from the substrate 3 side.

As shown in FIG. 12, a lifting frame 31 is disposed below the rotating frame 17 via a lifting guide 30 so as to be able to move up and down. As shown in FIG. A screw shaft 35 such as a ball screw that can be driven to rotate by a lifting drive device 34 such as a reduction motor is fitted to bearings 32 and 33 provided on the lower surface of the frame 17. or,
A nut 36 fixed to the lifting frame 31 is screwed to the screw shaft 35, and the lifting frame 31 can be raised and lowered by driving the lifting drive device 34.

5, 8, 9, 13, and 19 are provided in the lifting frame 31.
As shown in the figure, a plurality of substrate guide rollers 37 and 38 are arranged at predetermined intervals in a direction parallel to the substrate taking-in direction D1. The substrate guide roller 37 is a rotatable horizontal roller provided with a flange and can guide the lower edge of the substrate 3. The substrate guide roller 38 is a rotatable vertical roller. 13 can be guided in the thickness direction and can be moved in the direction of arrow A with respect to the surface of the substrate 3 by moving means such as a cylinder (not shown) (FIG. 13). , 19).

As shown in FIG. 14, a horizontal frame 39 is mounted on the upper edge of the base frame 16 so as to project horizontally toward the rear of the substrate loading direction D2.
A plurality of fluid pressure cylinders 4 provided horizontally at predetermined intervals
0 is connected to a roller support frame 42 having a substrate guide roller 41 for guiding the surface of the intermediate portion of the substrate 3. The substrate guide roller 41 is a rotatable horizontal roller that can guide the surface of the substrate 3 from the thickness direction, and the fluid pressure cylinder 40 moves the surface of the substrate 3 in the direction of arrow B (FIG. 14) can be moved.

As shown in FIG. 15, a plurality of hydraulic cylinders 43 are provided at predetermined intervals in the substrate taking-in direction D1 on the lower surface of the ceiling of the rotating frame 17, and the hydraulic cylinders 43
Horizontal frame 4 horizontally projecting backward in substrate loading direction D2
4 is attached, and the horizontal frame 44
A plurality of substrate guide rollers 45 are attached at predetermined intervals. The substrate guide roller 45 is a rotatable vertical roller which can guide the surface of the substrate 3 in the thickness direction and uses the fluid pressure cylinder 43 to rotate the substrate 3.
15 can be moved in the direction of arrow C (see FIGS. 15 and 20).

As shown in FIGS. 15 and 21, a vertical fluid pressure cylinder 46 for switching the size is used to move up and down a guide 47 at the front and rear portions of the rotating frame 17 in the substrate taking-in direction D1. A frame 48 is attached.
A swivel frame 50 is pivotally supported via a horizontal pin 49 like a lift frame 48 is connected between the upper ends of the two lift frames 48, and the lower end of the swivel frame 50 is supported by the lift frame 48. The rotated fluid pressure cylinder 65 can rotate from a vertical state to a horizontal state.

As shown in FIG. 15, a plurality of substrate guide rollers 51 are rotatably provided on the revolving frame 50 at predetermined intervals in the substrate take-in direction D1. The substrate guide roller 51 is a horizontal roll with a flange capable of guiding the upper edge of the substrate 3 as shown in FIG.
The turning frame 50 for supplying the substrate 3 to the substrate processing line 4
When is rotated from the vertical state to the horizontal state, the substrate guide roller 51 escapes from the upper edge of the substrate 3 and is oriented vertically as shown in FIG.

The substrate guide rollers 38, 41, 45 are moved in the horizontal direction by the fluid pressure cylinders 40, 43 and the like so as to approach and separate from the surface of the substrate 3, which is taken into the loader 1 from the carriage 2. And the substrate guide rollers 37 and 5
This is to ensure that the substrate guide rollers 38, 41, and 45 can press down the surface of the substrate 3, which is guided by the lower edge 1 and the upper edge, by the substrate guide rollers 38, 41, and 45.

As shown in FIG. 23, on the lower side of the fixed frame 6, a fixed arm 52 for opening and closing in the horizontal direction and fixing the carriage 2 at the time of taking in the substrate is pivotally mounted on the left and right with respect to the substrate taking-in direction D1. The fixed arm 52 is supported and can be opened and closed by a hydraulic cylinder 53. Thus, the bogie fixing means 54 is formed by the left and right fixing arms 52 and the fluid pressure cylinder 53.

As shown in FIG. 23, two hydraulic cylinders 55 are disposed below the stationary frame 6 so as to be located between the left and right stationary arms 52. The piston rod 55a of the hydraulic cylinder 55 In order to align the downstream end of the substrate 3 mounted on the carriage 2 with the downstream end of the substrate loading direction D1, the substrate 3 extends in the direction perpendicular to the substrate loading direction D1 in plan view. Board end face alignment jig 5
6 is attached. Thus, the fluid pressure cylinder 55
And a substrate edge aligning means 57 by means of a substrate edge aligning jig 56.
Are formed.

The left and right brackets 66 projecting from the lower side of the fixed frame 6 toward the upstream side of the substrate taking-in direction D1 have vertical rollers 59 for guiding the carriage 2 when the carriage 2 is set on the loader 1. Is pivoted.

Next, the details of the carriage 2 will be described with reference to FIGS.
6 will be described. That is, the carriage 2 includes a carriage main body 58 whose front is open so that the substrate 3 can be loaded and unloaded, and a caster 64 is attached to the carriage main body 58 so that an operator can move it. A plurality of horizontal shafts 6 extending in the left-right direction are provided on the upper and lower portions of the carriage body 58.
A number of guide wheels 61 having V-grooves which can be independently rotated are attached to each horizontal shaft 60, while a plurality of guide wheels 61 are attached to the horizontal shaft 60 at predetermined intervals. Thus,
The upper and lower edges of the substrate 3 mounted on the carriage 2 are fitted into and guided by the V-grooves of the guide wheels 61.

FIGS. 27 to 29 show the overall appearance of the unloader 5.
The details of each part are shown in FIGS. 27. The unloader 5 is installed symmetrically with respect to the loader 1 and has various common components.
29, two linear guide rails 73 extending in parallel with the substrate unloading direction D3 are laid on a gantry 72 provided with a fixed frame 71 and fixed on the fixed frame 71.

A screw shaft 74 such as a ball screw extending parallel to the linear guide rail 73 is rotatably disposed between the linear guide rails 73.
Is connected to a drive device 75 (see FIG. 29) such as a reduction motor arranged on the gantry 72. A running frame 76 that can reciprocate along the linear guide rail 73 is installed on the linear guide rail 73, and a nut (not shown) screwed to the screw shaft 74 is provided on the lower surface of the running frame 76. The screw shaft 74 is rotated by driving the driving device 75, so that the traveling frame 76 can reciprocate along the linear guide rail 73.

As shown in FIG.
As shown in FIG. 9, a horizontal shaft 78 extending in a direction orthogonal to the screw shaft 74 in a plan view is rotatably arranged,
The horizontal shaft 78 can be driven to rotate by a driving device 79 such as a reduction motor mounted on a traveling frame 76. The driving device 7 is provided at two positions in the longitudinal direction of the horizontal shaft 78.
The bracket 80 projecting toward the fifth side (FIGS. 28 and 29,
34), and a base frame 81 extending parallel to the board sending direction D4 is attached to the tip of the bracket 80.

As shown in FIGS. 27 and 34, a rotating frame 82 having a frame shape in a front view is fixed to the base frame 81, and the rotating frame 82 is driven by a driving device 79. It can rotate integrally from the vertical state to the horizontal state over a range of 90 degrees with respect to the rotation center O2 (see FIG. 28).

At both ends of the base frame 81 in a direction parallel to the substrate delivery direction D4, horizontal pulleys 83 and 84 are rotatably arranged. The horizontal pulleys 83 and 84 are mounted on the base frame 81. An endless timing belt 86 that can be reciprocated by a drive device 85 such as a reduction motor is stretched (see FIGS. 30 and 34). The timing belt 86 is provided with a board sending unit 87 for sending the vertically arranged board 3 to the carriage 2 in the board sending direction D4.

That is, the substrate delivery unit 87 is the same as that shown in FIG.
2, 34, a frame 88 attached to the timing belt 86, a shock absorber 89 horizontally arranged on the frame 88, and a pusher 90 connected to the tip of the shock absorber 89 are provided. 3
From the unloader 5 to the carriage 2. When the pusher 90 receives an impact, the pusher 90 moves along the guide 91 so that the impact can be absorbed by the shock absorber 89.

As shown in FIG. 34, an elevating frame 93 is disposed below the rotating frame 82 so as to be able to move up and down via an elevating guide 92, and is provided on the back surface of the base frame 81 and the lower surface of the rotating frame 82. The bearings 94 and 95 include a lifting drive 9 such as a reduction motor.
6, a screw shaft 97 such as a ball screw which can be driven to rotate is fitted. A nut 98 fixed to the lifting frame 93 is screwed to the screw shaft 97, and the lifting frame 93 can be raised and lowered by driving the lifting driving device 96 (FIG. 35). reference).

27, 30, 31, 3
As shown at 5 and 40, a plurality of substrate guide rollers 99 and 100 are arranged at predetermined intervals in a direction parallel to the substrate delivery direction D4. The substrate guide roller 99 is a rotatable horizontal roller provided with a flange and can guide the lower edge of the substrate 3.
Is a rotatable vertical roller capable of guiding the surface of the substrate 3 in the thickness direction and moving in a direction indicated by an arrow (see FIGS. 35 and 40) with respect to the surface of the substrate 3 by moving means such as a cylinder (not shown). See)).

As shown in FIG. 34, a guide wheel sensing device 101 for sensing the groove of the guide wheel 61 of the carriage 2 is attached to the downstream end of the lifting frame 93 in the board sending direction D4. The details of the guide wheel sensing device 101 are shown in FIG.
6 and 37, a bracket 103 is provided at the end of the fluid pressure cylinder 102 attached to the lifting frame 93 so as to be able to reciprocate in the horizontal direction. Is provided.

A vertical pin 106 is rotatably provided at the downstream end of the bracket 105 in the board sending direction D4, and an intermediate portion of an elongated sensing rod 107 extending in the board sending direction D4 is attached to the vertical pin 106. Have been.

Also, the board sending direction D of the bracket 105
4 At the upstream end, two sensors 108 are provided on the left and right with the sensing rod 107 as the center, and two left and right sensors 108 are provided at the upstream end of the sensing rod 107 in the substrate sending direction D4. When the sensor 108 is turned on, it can be determined that the center of the predetermined guide wheel 61 is out. 34, 36 and 37, 11
Reference numeral 0 denotes a tension spring for holding the sensing rod 107 in a predetermined state.

As shown in FIG. 38, a horizontal frame 111 is mounted on the upper edge of the base frame 81 so as to project horizontally forward in the substrate unloading direction D3. A roller support frame 114 having a substrate guide roller 113 for guiding the surface of the intermediate portion of the substrate 3 is connected to a plurality of fluid pressure cylinders 112 provided horizontally at intervals of. The substrate guide roller 113 is a rotatable horizontal roller capable of guiding the surface of the substrate 3 from the thickness direction, and the fluid pressure cylinder 112 moves the substrate 3 in the direction of arrow E with respect to the surface of the substrate 3. Aim and move.

As shown in FIG. 39, a plurality of hydraulic cylinders 115 are provided at predetermined intervals in the substrate delivery direction D4 on the lower surface of the ceiling portion of the rotating frame 82. D3 Horizontal frame 116 projecting forward
Is attached, and the horizontal frame 116 has a substrate sending direction D4.
A plurality of substrate guide rollers 117 are attached at predetermined intervals. The substrate guide roller 117 is a rotatable vertical roller that is capable of guiding the surface of the substrate 3 from the thickness direction. (See FIGS. 39 and 41).

As shown in FIGS. 39 and 42, a vertical fluid pressure cylinder 118 for switching the size can be used to move up and down the front and rear portions of the rotating frame 82 in the substrate delivery direction D4 via a guide 119. An elevating frame 120 is attached. The lifting frame 120 is located between the upper ends of the two lifting frames 120.
The pivot frame 122 is pivotally supported via a horizontal pin 121, and the pivot frame 122 is pivoted from a vertical state to a horizontal state by a fluid pressure cylinder 123 having a lower end supported by a lifting frame 120. It is possible to do.

A plurality of substrate guide rollers 124 are rotatably provided on the revolving frame 122 at predetermined intervals in the substrate delivery direction D4. Thus, the substrate guide roller 124 is arranged as shown in FIG.
3, when the substrate 3 is taken out of the substrate processing line 4, the revolving frame 122 is rotated from a vertical state to a horizontal state by a horizontal roll with a flange capable of guiding the upper edge of the substrate 3. If the substrate guide roller 12
Reference numeral 4 denotes a vertical direction as shown in FIG. 42 so that the substrate 3 can be taken out smoothly.

The substrate guide rollers 100, 113, 117 are moved horizontally by the fluid pressure cylinders 112, 115 so as to approach and separate from the surface of the substrate 3, and are carried out from the substrate processing line 4. This is to ensure that the surfaces of the substrate 3 guided by the substrate guide rollers 99, 124 at the lower edge and the upper edge are reliably pressed by the substrate guide rollers 100, 113, 117.

As shown in FIG. 44, on the lower side of the fixed frame 6, a fixed arm 125 for opening and closing horizontally and fixing the carriage 2 at the time of sending out the substrate, left and right with respect to the substrate sending direction D4. It is pivotally supported and the fixed arm 125 can be opened and closed by a hydraulic cylinder 126. Thus, the bogie fixing means 127 is formed by the left and right fixing arms 125 and the fluid pressure cylinder 126.

The left and right brackets 128 projecting from the lower side of the fixed frame 6 so as to face the substrate sending direction D4 downstream are provided with:
A vertical roller 129 that guides the carriage 2 when setting the carriage 2 on the unloader 5 is pivotally mounted.

In FIG. 2, reference numeral 62 denotes a transfer device such as a wheel conveyor installed on the substrate processing line 4 side of the loader 1, reference numeral 130 denotes a transfer device such as a wheel conveyor installed on the substrate processing line 4 side of the unloader 5, and FIG. 8 out of 63
Is a sensor provided on the lifting frame 31 of the loader 1 so as to be located at the upstream end in the substrate taking-in direction D1 to detect the lower end position of the substrate 3 taken into the loader 1 from the carriage 2. A sensor for detecting the lower end of the substrate 3 when sending the substrate 3 from the unloader 5 to the carriage 2 is also attached to the downstream end of the lifting frame 93 of the unloader 5 in the substrate sending direction D4. 1 to 44, the same parts are denoted by the same reference numerals.

Next, the operation of the illustrated example of the present invention will be described with reference to FIG.
(A), (B) and FIGS. 46 (A), (B), and (C).

I) When the substrate 3 mounted on the trolley 2 is taken into the loader 1 and carried into the substrate processing line 4 When the substrate 3 is taken into the loader 1 and carried into the substrate processing line 4, the operator needs The substrate 3 is mounted on the carriage 2 shown at 24 or the like, and is conveyed to the entry side of the loader 1 while being guided by the vertical rollers 59 in FIG. When the truck 2 is set in a predetermined state on the entrance side of the loader 1, the hydraulic cylinder 53 of the truck fixing means 54 shown in FIG. Locked. Therefore, the cart 2 is set in a fixed state. In addition, trolley 2
The substrate 3 mounted on the trolley 2 is vertically supported in a V-groove of a guide wheel 61 provided at the upper and lower portions of the carriage 2 in a vertical state, and the thickness direction of the substrate 3 is orthogonal to the substrate loading direction D1 in plan view. You are facing the direction you want.

When the carriage 2 is set on the loader 1, the fluid pressure cylinder 55 in the substrate end surface aligning means 57 shown in FIG. 23 is operated, and the end surface of the substrate 3 mounted on the carriage 2 by the substrate end surface alignment jig 56. Is pressed toward the upstream side in the substrate loading direction D1. For this reason, the substrate 3 is pushed, and the end face of the downstream end of the substrate 3 on the substrate taking-in direction D1 is aligned on the carriage 2.

When the substrates 3 on the carriage 2 are aligned,
Next, the driving device 10 shown in FIG.
To rotate. Therefore, the traveling frame 11 is moved in a direction perpendicular to the substrate loading direction D1, that is, in the substrate loading direction D2.
Reciprocates in a direction parallel to the optical switch type sensor 28
(See FIG. 11 and the like) counts the number of substrates 3 mounted on the carriage 2. This result is input to a computer. At the time of this counting, the fluid pressure cylinder 29
Is activated, and the sensor 28 is located at a position slightly separated from the end face of the substrate 3.

When the number of substrates 3 is counted, FIG.
The drive device 34 shown in FIG. 13 is driven to rotate the screw shaft 35. For this reason, the lifting frame 31 is moved from FIG.
The sensor 63 also moves up to 5 (b), and the sensor 63 detects the lower edge of the substrate 3. Then, the driving device 3
The upper end of the body guide roller 37 disposed on the lifting frame 31 with the stop of the body 4 coincides with the lower edge of the substrate 3 mounted on the carriage 2 as shown in FIG.

When the height of the top of the body of the board guide roller 37 coincides with the lower edge of the board 3 mounted on the carriage 2,
The driving device 20 shown in FIGS. 8 and 11 is driven to rotate the timing belt 21. For this reason, the substrate suction unit 22 stopped at the right end as shown in FIGS.
11, that is, the upstream side in the substrate taking-in direction D <b> 1 to a position indicated by a virtual line on the left side in FIG. 8.

When the substrate suction unit 22 moves to the position indicated by the imaginary line on the left side of FIG. 8, the driving device 1 of FIG.
0 is driven, the traveling frame 11 is slightly moved by a predetermined distance in a direction perpendicular to the substrate taking-in direction D1, and the suction pad 24 shown in FIG. I do. Then, the driving device 20 shown in FIGS. 8 and 11 is driven to rotate the timing belt 21 in the reverse direction, and the suction pad 24 returns to the solid line position at the right end in FIG.

For this reason, the substrate suction unit 22 moves the substrate 3 in the substrate taking-in direction D1, and is positioned horizontally from the carriage 2 to the substrate guide roller 37 provided on the lifting frame 31 and the upper turning frame 50. The substrate 3 is mounted on the loader 1 by being drawn between the substrate 3 and the substrate guide roller 51 (see FIGS. 19, 20, and 21). At this time, the substrate 3 is guided by the substrate guide rollers 38, 41, and 45 (see FIGS. 13, 14, 15, 19, and 20). Whether or not the substrate 3 has been pulled into the predetermined position of the loader 1 is determined by a signal from a linear scale (not shown).

When the substrate 3 is mounted at a predetermined position on the loader 1, the substrate guide rollers 38, 41 and 45 slightly move toward the substrate 3 and come into contact with the substrate 3. For this reason, it is possible to prevent the substrate 3 from rattling when the traveling frame 11 is moved to move the substrate 3 to the transfer device 62 side.

The substrate 3 is provided with substrate guide rollers 38, 41,
When pressed by 45, the driving device 10 of FIG. 7 is driven. For this reason, the traveling frame 11, the rotating frame 17 supported by the traveling frame 11 and mounting the substrate 3, and the elevating frame 31 move integrally to the vicinity of the transfer device 62 in the substrate loading direction D2. At this time, the thickness of the substrate 3 is oriented in the substrate loading direction D2.
Also, whether or not a predetermined distance has been moved is determined by a signal from a linear scale (not shown).

When the traveling frame 11 and the substrate 3 have moved to a predetermined position, the driving device 14 is driven. For this reason, the horizontal shaft 13, the bracket 15, and the rotating frame 15 shown in FIGS. 7 and 10 are rotated clockwise as shown in FIG. Is in a horizontal state, and the substrate 3 is placed on the transfer device 62.

When the posture of the rotating frame 17 and the substrate 3 is changed from a vertical state to a horizontal state, the fluid pressure cylinder 65 shown in FIG. The frame 50 rotates 90 degrees clockwise in FIG. 21 about the horizontal pin 49, and the substrate guide roller 51 is separated from the upper edge of the substrate 3. The reason why the substrate guide roller 51 is detached from the upper edge portion of the substrate 3 is to enable the substrate 3 mounted on the transport device 62 to be transported. The substrate 3 mounted on the transfer device 62 is
2 and carried into the substrate processing line 4.

Further, when the rotating frame 17 and the like and the substrate 3 are in the horizontal state, the substrate 3 is carried into the substrate processing line 4 by the transporting device 62 because the substrate 3 is supported by the transporting device 62, and predetermined processing is performed. The transfer device 1 of the unloader 5
It is carried out to 30.

When the substrate 3 is carried into the substrate processing line 4, the driving device 14 is driven in reverse, the rotating frame 17 and the like return from the horizontal state to the vertical state, and the turning frame 50 is moved to the original position by the fluid pressure cylinder 65. Then, the substrate guide roller 51 also returns to a position where the upper edge of the next substrate 3 can be supported.

The driving device 10 is also driven in the reverse direction to drive the traveling frame 1.
1. The rotating frame 17 and the like move upstream in the substrate loading direction D2,
Return to the side where the cart 2 is set. The position where the carriage 2 returns is a position where the second substrate 3 can be taken in. This position is confirmed by a linear scale not shown.

When the rotation frame 17 and the like reach a position where the second substrate 3 can be taken in, the following substrate 3 is taken into the loader 1 in the same manner as the first substrate 3 is taken in again. It is carried into the substrate processing line 4.

II) Unloader 5 from substrate processing line 4
When the substrate 3 carried out to the transfer device 130 is sent out to the carriage 2 set on the exit side of the unloader 5 by the unloader 5, the substrate 3 sent out from the substrate processing line is
When carrying out to the carriage 2 set on the exit side of the unloader 5, the worker leaves the carriage 2 shown in FIG.
While being guided by. When the carriage 2 is set in a predetermined state on the exit side of the unloader 5, the fluid pressure cylinder 126 of the carriage fixing means 127 shown in FIG. Locked. Therefore, the cart 2 is set in a fixed state.

When the carriage 2 is set at a predetermined position,
With the drive device 75 shown in FIG.
And the optical sensor type sensor (not shown) checks whether or not the board 3 is mounted on the carriage 2. When the unloader 5 goes to the substrate processing line 4 to pick up the substrate 3, the rotating frame 82 is in a vertical state as shown in FIG.
4 At the upstream end. The swivel frame 122 is rotated 90 degrees from the state shown in FIG. 39 so that the substrate 3 sent out from the substrate processing line 4 can be taken into the rotary frame 82, and the substrate guide roller 124 is shown by a virtual line in FIG. As such, it is in a vertical state.

When the driving device 75 of FIG. 29 is driven, the traveling frame 76 travels upstream of the substrate unloading direction D3 to the vicinity of the transfer device 130 of FIG. 2, and then drives the driving device 79 of FIG. Thereby, the rotating frame 82 rotates over a range of 90 degrees from the vertical state shown by the solid line in FIG. 28 to the horizontal state shown by the virtual line.

When the rotating frame 82 and the like are in the horizontal state, the substrate 3 from the substrate processing line 4
And the downstream end of the substrate 3 in the substrate unloading direction D3 abuts on the outer peripheral portion of the substrate guide roller 99 in the vertical state. Further, the substrate guide rollers 100, 113, and 117 are raised to support the lower surface of the substrate 3, and the revolving frame 122 is rotated so that the substrate guide roller 124 is moved in the substrate unloading direction D of the substrate 3.
3 Support the upstream end.

The downstream end of the substrate 3 in the substrate unloading direction D3 is controlled by the substrate guide roller 99, and the substrate unloading direction D3.
The upstream edge is supported by the substrate guide roller 124,
When the lower surface is supported by the substrate guide rollers 100, 113, and 117, the driving device 79 shown in FIG. 29 is driven in the opposite direction, and the rotating frame 82 rises from the horizontal state to the vertical state.
Therefore, the substrate 3 also rises from the horizontal state to a vertical state in which the thickness of the substrate 3 is perpendicular to the substrate sending direction D4 in plan view.

Next, when the driving device 75 shown in FIG. 29 is driven, the traveling frame 76 on which the rotating frame 82 on which the substrate 3 is mounted is moved downstream in the substrate unloading direction D3, 82 and the substrate 3 are stopped at a predetermined position in front of the carriage 2 set on the exit side of the unloader 5. Whether or not the vehicle has stopped at the predetermined position is determined by the linear sensor.

When the rotating frame 82 and the substrate 3 are stopped at a predetermined position in front of the truck 2 set on the exit side of the unloader 5, the hydraulic cylinder 102 shown in FIG. Side, and is located above the guide wheel 61 at the upstream end in the substrate delivery direction D4 (see FIG. 36). Next, the fluid pressure cylinder 104 shown in FIG. 36 installed on the lifting frame 93 operates to lower the sensing rod 107, and the tip of the sensing rod 107 contacts the outer periphery of the groove of the guide wheel 61.

At this time, if the sensing rod 107 does not contact the outer periphery of the groove of the guide wheel 61 in a predetermined state, only one of the two left and right sensors 108 is turned on and the other is turned off. I have. Therefore, in this case,
The position is corrected so that both the left and right two sensors 108 are turned on by slightly moving the rotating frame 82 by the driving device 75 in FIG.

When the position of the rotating frame 82 is corrected,
The elevator drive device 96 shown in FIGS. 31 and 35 is driven to lower the elevator frame 93. Then, the substrate 3 is in the state shown in FIG.
As shown in FIG. 46 (b), the lower end edge of the substrate 3 is lowered from a flat state as shown in (a), and its downstream end in the substrate sending direction D4 is supported by the outer periphery of the groove of the guide wheel 61. As described above, the state is such that the substrate is inclined upward in the substrate delivery direction D4. At this time, the optical sensor 131 provided in the lifting frame 93 is turned off from on.

When the sensor 131 is turned off, the lifting drive 96 is driven in reverse to raise the lifting frame 93. For this reason, the substrate 3 gradually becomes flat, and the sensor 131
Is turned on again, the lower edge of the substrate 3 whose lower edge is supported by the substrate guide roller 99 becomes flat (see FIG. 46C).

When the lower edge of the substrate 3 becomes flat,
The driving device 85 of FIG.
Is rotated. Then, the board sending unit 87 moves in the board sending direction D4, and the pusher 90 shown in FIGS. 32 and 33 pushes the upstream vertical edge of the base board sending direction D4, and the board 3 sends the board. It moves on the board guide roller 99 and the guide wheel 61 in the direction D4, and is mounted on the carriage 2.

When the first substrate 3 is mounted on the carriage 2, the timing belt 86 is rotated in the reverse direction, the substrate delivery unit 87 returns to the original position, and the traveling frame 76 is again used for the next substrate 3. In the same manner as in the case of the first substrate 3, the substrate is moved to the transfer device 130 side, and the substrate processing line 4 is processed in the same manner as described above.
The substrate 3 carried out to the transfer device 130 is taken out.

According to the illustrated example of the present invention, when supplying the substrate 3 to the substrate processing line 4 or removing the substrate 3 from the substrate processing line 4, a large amount of manpower is not required, and thus labor and labor of the operation can be reduced. Can be planned.

Incidentally, the substrate handling apparatus of the present invention is not limited to the above-described illustrated example, and it is needless to say that various changes can be made without departing from the gist of the present invention.

[0082]

As described above, the first aspect of the present invention is as described above.
According to the substrate handling apparatus described in any one of (1) to (4), when supplying the substrate 3 to the substrate processing line 4 or removing the substrate 3 from the substrate processing line 4, much labor is not required. An excellent effect that it can be achieved can be achieved.

[Brief description of the drawings]

FIG. 1 is a front view of an example of an embodiment of a substrate handling apparatus according to the present invention.

FIG. 2 is a view taken in the direction of arrows II-II in FIG.

FIG. 3 is a view taken in the direction of arrows III-III in FIG. 1;

FIG. 4 is a view taken in the direction of arrows IV-IV in FIG. 1;

FIG. 5 is a front view of a loader in the substrate handling apparatus of the present invention.

6 is a view in the direction of arrows VI-VI in FIG. 5;

FIG. 7 is a view taken in the direction of arrows VII-VII in FIG. 5;

FIG. 8 is a front view of the substrate suction unit of the loader and its vicinity.

FIG. 9 is a view taken in the direction of arrows IX-IX in FIG. 8;

FIG. 10 is an enlarged view of a traveling frame and a rotating frame supporting portion of the loader.

FIG. 11 is a perspective view of a portion of a rotation frame and a base frame of the loader.

FIG. 12 is a perspective view of a portion of a rotating frame and a lifting frame of the loader.

FIG. 13 is a front view of a device that raises and lowers a lifting frame of the loader.

FIG. 14 is a perspective view of a portion of a substrate guide roller attached to a base frame of the loader.

FIG. 15 is a perspective view of a portion of the substrate guide roller attached to the upper part of the pivot frame of the loader and a portion of the substrate guide roller attached to the pivot frame of the upper portion of the pivot frame.

FIG. 16 is a side view of the substrate suction unit of the loader.

17 is a view in the direction of arrows XVII-XVII in FIG. 16;

18 is a view in the direction of arrows XVIII-XVIII in FIG. 17;

FIG. 19 is a front view showing a cross section of a part of the substrate guide roller attached to the lifting frame of the loader.

FIG. 20 is a cross-sectional view of a substrate guide roller attached to a rotation frame of the loader.

FIG. 21 is an enlarged view of an XXI section in FIG. 6 and is a side view of an upper portion of a turning frame and a portion of a turning frame of the loader.

FIG. 22 is a cross-sectional view of a substrate guide roller attached to a revolving frame provided at an upper end of the revolving frame of the loader.

FIG. 23 is a plan view of a part of a truck fixing means and a substrate end face aligning means of the loader.

FIG. 24 is a side view of a truck used in the present invention.

FIG. 25 is a view taken in the direction of arrows XXV-XXV in FIG. 24;

FIG. 26 is an enlarged view of a part XXVI of FIG. 25;

FIG. 27 is a front view of an unloader in the substrate handling apparatus of the present invention.

28 is a view in the direction of arrows XXVIII-XXVIII in FIG. 27.

FIG. 29 is a view as viewed in the direction of the arrow XXIX-XXIX in FIG. 27;

FIG. 30 is a front view of a substrate delivery unit of the unloader and its vicinity.

31 is a view in the direction of the arrow XXXI-XXXI in FIG. 30.

FIG. 32 is a side view of the substrate delivery unit of the unloader.

FIG. 33 is a view in the direction of the arrows XXXIII-XXXIII in FIG. 32.

FIG. 34 is a perspective view of the vicinity of a rotating frame, a base frame, and a lifting frame of the unloader.

FIG. 35 is a front view of a device that raises and lowers a lifting frame of an unloader.

FIG. 36 is a side view of the guide wheel sensing device of the unloader.

37 is a view in the direction of the arrow XXXVII-XXXVII in FIG. 36.

FIG. 38 is a perspective view of a portion of the substrate guide roller attached to the base frame of the unloader.

FIG. 39 is a perspective view of a portion of the substrate guide roller attached to the upper portion of the rotating frame of the unloader and a portion of the substrate guide roller attached to the upper portion of the rotating frame.

FIG. 40 is a front view showing, in cross section, a part of a portion of the substrate guide roller attached to the lifting frame of the unloader.

FIG. 41 is a cross-sectional view of a substrate guide roller attached to a rotating frame of an unloader.

FIG. 42 is a side view of an upper portion of the turning frame and a portion of the turning frame of the unloader.

FIG. 43 is a cross-sectional view of a substrate guide roller attached to a turning frame provided at an upper end of the turning frame of the unloader.

FIG. 44 is a plan view of a part of the truck fixing means of the loader.

FIG. 45 is a side view for explaining the operation of the lifting frame of the loader. FIG. 45A is a side view showing a state in which the lifting frame is positioned below and the sensor does not detect the lower edge of the substrate. () Is a side view showing a state where the lifting frame is raised and a sensor detects the lower edge of the substrate.

46A and 46B are side views for explaining the operation of the lifting frame of the unloader. FIG. 46A is a side view showing a state in which the lifting frame is located above and the lower edge of the substrate is flat, and FIG. Is a side view showing a state in which the lifting frame is lowered while being supported by the guide wheels of the bogie, and the lower edge of the substrate is inclined,
(C) is a side view showing a state in which the lowering edge of the substrate is detected to be flat by the sensor by the lifting frame rising.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Loader 2 Cart 3 Substrate 4 Substrate processing line 5 Unloader 11 Running frame 17 Rotating frame 22 Substrate suction unit 27 Substrate count sensor unit (counting means) 31 Elevating frame 37 Substrate guide roller (substrate guide means) 38 Substrate guide roller ( Substrate guiding means) 41 Substrate guiding roller (substrate guiding means) 45 Substrate guiding roller (substrate guiding means) 50 Revolving frame 51 Substrate guiding roller (substrate guiding means) 54 Carriage fixing means 57 Substrate end surface alignment and alignment means 61 Guide wheel (guide means) ) 62 transfer device 63 sensor (detection means) 76 traveling frame 82 rotating frame 87 substrate delivery unit 93 elevating frame 99 substrate guide roller (substrate guide means) 100 substrate guide roller (substrate guide means) 101 guide wheel sensing device (guide) Means detecting means) 113 Substrate guide roller (Substrate guide means) 117 Substrate guide roller (substrate guide means) 122 Revolving frame 124 Substrate guide roller (substrate guide means) 127 Truck fixing means 130 Transport device 131 Sensor (detection means) D1 Substrate taking-in direction D4 Substrate sending-out direction

Claims (4)

[Claims] 1. A carrier (6) in which a board (3) arranged in parallel so that a board width direction is orthogonal to a board taking direction (D1) is taken into a carriage (2) set on an entrance side.
A loader (1) for supplying the substrate processing line (4) in a horizontal state through 2), and a substrate (3) taken out in a horizontal state from the substrate processing line (4) via a transfer device (130) are output. A board provided with an unloader (5) for feeding the cart (2) set on the side so that the board width direction is in a parallel state in a direction orthogonal to the board sending direction (D4). Handling equipment. 2. A transport device (6) in which a board (3) arranged in parallel so that a board width direction is orthogonal to a board loading direction (D1) is taken into a carriage (2) set on an entrance side.
A loader (1) for supplying the substrate processing line (4) in a horizontal state through 2), and a substrate (3) taken out in a horizontal state from the substrate processing line (4) via a transfer device (130) are output. An unloader (5) for feeding the cart (2) set on the side so that the board width direction is in a parallel state in a direction orthogonal to the board sending direction (D4), and the loader (1) includes: A traveling frame (11) reciprocating between a carriage (2) set on the entry side of the loader (1) and a transfer device (62) provided on the substrate processing line (4); Counting means (27) for counting the number of substrates (3) mounted on the trolley (2) so as to be able to undulate, and substrate guiding means (41) (45) for guiding the surface of the substrate (3). And transfer the substrate (3) to the transfer device (62) from the vertical state with water. A rotating frame (17), which is to be fed in a state, and a bogie (2) set on the loading side of the loader (1) and the rotating frame (17) reciprocate, and are parallel to the bogie (2). A substrate suction unit (22) for taking the substrates (3) mounted in a state one by one into the rotating frame (17) in a vertical orientation.
Board guide means (37) (3) supported by the rotating frame (17) and for guiding the lower edge and surface of the board (3).
8) and an elevating frame (31) provided with detecting means (63) for detecting the lower edge of the substrate (3) when taking in one of the substrates (3) arranged in parallel from the carriage (2). )
And provided at the opposite end of the rotation frame (17) to be rotatable.
Board guiding means (51) for guiding the upper edge of the board (3)
The unloader (5) includes a transport device (130) provided on the substrate processing line (4) side and a carriage (2) set on the exit side of the unloader (5). A traveling frame (76) reciprocating between the traveling frame (76), and substrate guide means (113) (11) arranged to be able to undulate on the traveling frame (76) and to guide the surface of the substrate (3).
7) and guide means detecting means (101) for detecting the guide means (61) of the carriage (2) set on the exit side of the unloader (5), and the transfer device (101) in a horizontal state from the substrate processing line (4). 130), the substrate (3) is supported by the rotating frame (82), which supports the substrate (3) in a vertical direction whose thickness crosses the substrate sending direction (D4). And the carriage (2) set on the unloader (5) side and the rotating frame (82) side reciprocate,
A substrate delivery unit (87) for sending the substrate (3) supported by the rotating frame (82) to the exit side of the unloader (5); and a substrate (3) supported by the rotating frame (17). ) For guiding the lower edge and the surface of the substrate.
0) and a detection frame (93) for detecting the lower edge of the substrate (3) when sending the substrate (3) from the rotating frame (82) to the carriage (2). ), And is rotatably provided at a non-rotation side end of the rotation frame (82).
Substrate guiding means (1) for guiding the outer peripheral edge of the upper end of the substrate (3)
The substrate handling apparatus according to claim 1, further comprising: a revolving frame (122) comprising: 3. An input side of the loader (1) is provided with a loader (1).
A trolley fixing means (54) for setting a trolley (2) for supplying the substrate (3) to the substrate, and a substrate end face aligning means (5) for aligning the downstream end of the substrate (3) in the substrate loading direction (D1).
The substrate handling apparatus according to claim 1 or 2, further comprising (7). 4. A truck fixing means (127) for setting a truck (2) for receiving a substrate (3) from the unloader (5) on an exit side of the unloader (5).
4. The substrate handling apparatus according to 2 or 3.