JP2000202673A5 - - Google Patents

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Publication number
JP2000202673A5
JP2000202673A5 JP2000033611A JP2000033611A JP2000202673A5 JP 2000202673 A5 JP2000202673 A5 JP 2000202673A5 JP 2000033611 A JP2000033611 A JP 2000033611A JP 2000033611 A JP2000033611 A JP 2000033611A JP 2000202673 A5 JP2000202673 A5 JP 2000202673A5
Authority
JP
Japan
Prior art keywords
cylindrical lenses
laser
cylindrical
laser beam
irradiating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000033611A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000202673A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000033611A priority Critical patent/JP2000202673A/ja
Priority claimed from JP2000033611A external-priority patent/JP2000202673A/ja
Publication of JP2000202673A publication Critical patent/JP2000202673A/ja
Publication of JP2000202673A5 publication Critical patent/JP2000202673A5/ja
Withdrawn legal-status Critical Current

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JP2000033611A 2000-01-01 2000-02-10 レ―ザ―照射装置 Withdrawn JP2000202673A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000033611A JP2000202673A (ja) 2000-01-01 2000-02-10 レ―ザ―照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000033611A JP2000202673A (ja) 2000-01-01 2000-02-10 レ―ザ―照射装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9065531A Division JPH10244392A (ja) 1997-03-04 1997-03-04 レーザー照射装置

Publications (2)

Publication Number Publication Date
JP2000202673A JP2000202673A (ja) 2000-07-25
JP2000202673A5 true JP2000202673A5 (enExample) 2005-02-10

Family

ID=18558070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000033611A Withdrawn JP2000202673A (ja) 2000-01-01 2000-02-10 レ―ザ―照射装置

Country Status (1)

Country Link
JP (1) JP2000202673A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW528879B (en) * 2001-02-22 2003-04-21 Ishikawajima Harima Heavy Ind Illumination optical system and laser processor having the same
JP4614565B2 (ja) * 2001-03-28 2011-01-19 株式会社トプコン レーザ光線照射装置
US8723073B2 (en) * 2008-02-07 2014-05-13 Cymer, Llc Illumination apparatus and method for controlling energy of a laser source
KR101067658B1 (ko) * 2008-06-19 2011-09-27 한국과학기술원 레이저 박리를 이용한 미세 레이저 통합 가공장치 및 가공방법

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