JP2000200853A - Tape-type chip size package and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tape-type CSP(chip size package) which is simplified in manufacturing process, lessened in fraction defective, and reduced in cost, by a method wherein solder balls can be firmly bonded to pads, and Ni/Au plating can be carried out through an electroless plating method. SOLUTION: A tape-type CSP is equipped with a bonding pad 10 provided to the surface of a copper foil 3 and solder ball pads 11 provided to the rear of the copper foil 3 and manufactured through a method where the rear of the copper foil 3 is plated with Sn 5 or the like before a step where a photoresist film is formed after the copper foil 3 is cleaned, and the rear of a resin tape 1 is lined with a masking material. When the surface of the copper foil 3 is also plated with Sn 5 or the like, a process where an Sn plating is removed is provided, and an Ni/Au plating 9 is carried out through an electroless plating method, and then the lining masking material provided to the rear of the resin tape 1 is separated off.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a tape-type CSP and a tape-type CSP using the same, and mainly relates to a chip-size package using a TAB tape.
e, hereinafter referred to as CSP), in which the bonding pad portion and the solder ball pad portion are formed of dissimilar metals.

[0002]

2. Description of the Related Art In recent years, semiconductor packages have become increasingly denser and smaller, and the mounting of semiconductor chips has been reduced to the same size as the semiconductor chips. ing. Therefore, tape type BGA
Like (Ball Grid Array), the demand for the tape-type CSP according to the present invention is increasing more and more in the future.

The above-mentioned tape type CSP has a two-layer structure characterized in that the front and back surfaces of a copper foil on the surface of the tape can be used. Pad portions for wire bonding and flip chip bonding are provided on the copper foil surface. Further, pad portions for solder balls are formed on the back surface.

In a conventional tape-type CSP, for example, as shown in FIG. 25, Ni / Au plating (Ni plating) by electrolytic plating is applied to the bonding pad portion on the copper foil surface and the solder ball pad portion on the back surface. Au on
Plated) or Ni / Au / Au plating by electroless plating (meaning Au plated on Ni and then Au plated thereon), or Ni / Pd / Au Plating (referred to Pd plating on Ni plating and further Au plating thereon) is performed.

[0005] Wire bonding or flip chip bonding with a semiconductor chip is performed later on the bonding pad portion, while solder balls for bonding to a motherboard or the like are bonded to the solder ball pad portion ( See FIG. 25 above).

[0006] The manufacturing process of the conventional tape-type CSP is as follows.
Usually this is: First, a copper foil is laminated by punching or punching a hole on a polyimide resin tape with an adhesive on the front surface using a press or a drill, or a hole is previously formed on the resin tape with a copper foil from the back surface by laser.
Next, the copper foil of the resin tape is cleaned by a chemical treatment. Next, after a photoresist ink is applied to the copper foil surface, a pattern for forming a bonding pad portion and a lead portion is exposed and developed. Next, the back surface of the resin tape is masked and masked with a masking material, and the copper foil surface is etched to form a pattern such as a bonding pad portion and a lead portion. Next, the photoresist on the surface of the copper foil and the backing masking material on the back surface are peeled off to expose the bonding pad portion and the lead portion pattern on the front surface and the solder ball pad portion on the back surface.
Next, Ni / Au plating, Ni / Au / Au plating by electrolysis, or Ni by electroless plating on the front and back surfaces of the copper foil.
/ Pd / Au plating is performed to form a bonding pad portion and a lead portion on the front surface, and a solder ball pad portion on the rear surface.

Thereafter, wire bonding and flip chip bonding with a semiconductor chip are performed on the bonding pad portion as described above, and solder balls are bonded on the solder ball pad portion so as to be connectable to a mother board or the like.

[0008] In the above, Ni /
When Au plating, Ni / Au / Au plating, or Ni / Pd / Au plating by electroless is applied, Au plating is necessary as a pad portion, but Ni plating is interposed between the copper foil and Au plating. Thereby, the role of a barrier to prevent Au in the Au plating from diffusing into Cu of the copper foil and the strength of the bonding pad portion by Ni plating to prevent sinking of the pad portion. is there.

[0009]

However, in the conventional CSP manufacturing, Ni / Au plating or Ni / Au / Au plating is not performed electrolessly for the following reasons. It does not exist.

[0010] That is, 1) In the conventional tape-type CSP, Ni / Au plating and Ni / Au / A are also applied to the solder ball pad portion on the back surface, similarly to the bonding pad portion on the front surface.
u or Ni / Pd / Au plating. However, the Ni-plated Ni on the solder ball pad
And Sn or Sn alloy (= solder) of the solder ball have essentially no strong bonding strength. In particular, since impurities such as P (phosphorus) and B (boron) contained in Ni of the electroless plating precipitate on the surface, the bonding strength of the solder ball to the pad portion is further reduced, and a sufficient share is obtained. The strength cannot be obtained. Further, since Au-plated Au is easily diffused into the Sn or Sn alloy of the solder ball, there is also a surface in which the strength of the solder ball is weakened.

2) In the case of Ni / Pd / Au plating, a considerably advanced plating technique is required for the adhesion between the Ni plating and the Pd plating.
, The manufacturing cost is nearly six times that of the case of Ni / Au plating. In addition, it is very difficult or almost impossible to improve the incidence of defective products and reduce costs with the current technology.

The present invention relates to a tape type C in which a bonding pad or a solder ball pad portion is made of a dissimilar metal.
The present invention relates to a method of manufacturing an SP and a tape-type CSP using the SP, and has been created to solve the above-mentioned problems of the related art. That is, an object of the present invention is to provide a tape-type CSP in which a bonding pad portion and a solder ball pad portion are made of different metals so that a solder ball can be strongly bonded to the pad portion, and Ni / Au plating, Ni An object of the present invention is to perform plating of / Au / Au or Ni / Pd / Au in an electroless manner, simplify a manufacturing process, reduce occurrence of defective products, and reduce costs.

[0013]

In the method of manufacturing a tape-type CSP according to the present invention, a copper foil 3 is laminated on a surface of a resin tape 1 and a hole 2 for solder ball engagement is formed from the back surface of the resin tape 1. After the chemical treatment, the copper foil 3
After cleaning, a photoresist film 7 is formed on the surface of the copper foil 3, a pattern such as a pad portion is exposed and developed, a back surface is backed with a masking material 6, and a pattern 8 is formed by etching. After removing the photoresist film 7, Ni
A method of manufacturing a tape type CSP having a process of forming a pad portion 10 for a bong on the surface of a copper foil 3 by applying plating 9 such as Au, and forming a pad portion 11 for a solder ball on the back surface of the copper foil 3. At a stage after the copper foil 3 is washed and before the photoresist film 7 is formed, at least the back surface of the copper foil 3 is plated with Sn or the like 5 and then the back surface of the resin tape 1 is covered with a masking material 6. In addition to the above, when the plating 5 such as Sn is applied to the surface of the copper foil 3 as described above, a step of removing the plating 5 is performed.
The plating 9 such as Ni / Au is performed in an electroless manner, and then the backing masking material 6 on the back surface of the resin tape 1 is peeled off.

II In the CSP according to the present invention, a bonding pad portion 10 plated with electroless Ni / Au or the like is formed on the surface of the copper foil 4 on the resin tape 1 and a solder ball member. On the back surface of the copper foil 4 exposed through the joint hole 2, a solder ball pad portion 11 plated with Sn or the like 9 is formed.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the above configuration of the present invention, Ni /
Au plating 9 means Ni / Au plating, Ni /
It refers to Au / Au or Ni / Pd / Au plating, and the plating 5 such as Sn refers to Sn plating or Sn alloy (= solder) plating.

It is desirable to use a resin tape 1 made of a polyimide resin. In the above, the copper foil 4 is laminated on the surface of the resin tape 1 and the hole 2 for solder ball engagement is formed from the back surface of the resin tape 1 to the polyimide resin tape 1 with the adhesive 3 on the surface. A three-layer structure in which a copper foil 4 is laminated by punching with a press or a drill may be used (see, for example, FIG. 1), or a resin tape 1 on which the copper foil 4 has been laminated is laser-punched from the back surface. A two-layer structure (for example, FIG. 1
3).

Before the photoresist film 7 is formed after washing the copper foil 4, at least the back surface is plated with Sn or the like 5. This plating may be performed only on the back surface of the copper foil 4. They may be applied simultaneously (for example, see FIGS. 3 and 14).

When the plating 5 such as Sn is applied only to the back surface of the copper foil 4, the surface of the copper foil 4 may be masked and plated, although not shown. Further, when plating is performed on the surface at the same time, before forming the photoresist film 7, the plating 5 such as Sn adhered to the surface is removed. The thickness of the plating 5 such as Sn is usually desirably about 5 to 6 μm.

The back surface of the resin tape 1 is backed with the masking material 6 to protect the plating 5 such as Sn on the back surface when the plating 5 such as Sn adhered to the surface or the photoresist film 7 is removed. And the bonding pad 1
0, Ni / A is applied to the Sn plating 5 on the back surface.
It has the meaning of preventing plating such as u from adhering.

The masking material 6 may be a masking tape or a dry film, but it is preferable to apply a mechanically peelable solder resist ink for the convenience of later peeling. .

Forming the photoresist film 7, exposing and developing the pattern, and then etching is the same as in the conventional process. After the photoresist film 7 is peeled off, the electrolytic or electroless process is performed as described above. Plating such as Ni / Au.

By plating with Ni / Au or the like as described above, a portion to become the bonding pad portion 10 on the surface of the copper foil 4 is
A plating containing Ni is applied. However, the back of the copper foil 4
Since the masking material 6 is adhered or applied as described above, the plating 5 such as Sn is maintained as it is.

Before the plating 9 such as Ni / Au, it is desirable to form a solder resist film 12 on the copper foil 4 where the semiconductor chip 13 is to be mounted for insulation. However, this step may be performed later by an assembly maker similarly to the bonding of the semiconductor chip 13, the bonding of the solder balls 14, the resin molding, and the like.

In the above-described method of manufacturing the tape-type CSP, the step of plating the back surface of the copper foil 4 with Sn or the like is performed before the pattern is formed on the copper foil 4. At this stage, S
By performing plating 5 such as n, unlike performing plating such as Sn after forming a pattern having a fine lead portion,
Since there is no need to mask the lead portion when performing plating 5 such as Sn, the manufacturing process is greatly simplified.

Further, by performing the plating 5 such as Sn at the above-mentioned stage, the plating 5 such as Sn does not adhere to the lead portion and the bonding pad portion 10. Therefore, the plating 9 such as Ni / Au is electrolessly applied as it is. It can be performed by plating. Therefore, the manufacturing process of the tape-type CSP in which the bonding pad portion 10 and the solder ball pad portion 11 are made of different metals is easy and can be manufactured at low cost.

Further, in the above-mentioned tape type CSP, the copper foil 4
Solder ball 1 to solder ball pad 11 on the back side
The bonding of No. 5 is not the bonding between Ni of Ni plating and the Sn alloy of plating 5 such as Sn as in the related art, but the bonding of Sn or Sn alloys. Therefore, solder ball 1
The bonding strength of No. 4 is improved, and it is not always necessary to use a flux when bonding the solder balls 14.

The Sn plating 5 of the solder ball pad portion 11 is melted by the heat at the time of joining the solder balls 14, so that the solder balls 14 are joined by the conventional Ni plating.
In contrast to the method using the solder ball, the bonding between the Sn or Sn alloy and the copper foil 4 is performed (see FIG. 24).

Further, since the solder ball pad portion 11 does not have the precipitation of impurities such as P and B contained in Ni of the electroless plating as in the prior art, the bonding force is also improved on this surface, and the soldering force is improved. The ball 14 has a sufficient shear strength, and the Au in the Au plating is
There is no diffusion into the inside, and the strength of the solder ball 14 does not decrease.

In addition, since a tape, a dry film or a mechanically peelable solder resist film is used for the masking material 6 on the back surface of the resin tape 1 as described above,
Unlike the conventional case of printing a masking ink, for example, the accuracy of the boundary of the masking material 6 is improved. Further, since they can be peeled off mechanically, unlike the case where the ink is peeled off with, for example, a caustic soda solution, Au plating of the bonding pad portion 10 on the surface of the copper foil 4 and Sn plating of the solder ball pad portion 11 on the back surface are performed. The equal plating 5 is not contaminated with the stripping solution.

Since the bonding pad portion 10 on the surface of the copper foil 4 of the tape type CSP is plated with Ni / Au or the like 9 as in the conventional method, the pad portion 10 sinks during bonding. There is no intrusion and has sufficient strength. In the figure, reference numeral 15 denotes a bonding wire.

[0031]

1 to 24 show the sequence of steps in a method of manufacturing a tape-type CSP according to the present invention and an example of a tape-type CSP manufactured by the method. The thickness is exaggerated. It is.

FIGS. 1 to 12 and 24 relate to a three-layer structure in which a copper foil 4 is laminated on a polyimide resin tape 1 having an adhesive on its surface.
Reference numeral 3 relates to a two-layer structure using a resin tape 1 on which a copper foil is laminated in advance.

FIG. 1 shows a state in which a solder ball engaging hole 2 is formed by punching a polyimide resin tape 1 having a surface coated with an adhesive 3. The polyimide resin tape 1 has a thickness of 55 μm, and the adhesive 3 has a thickness of about 12 μm.

Next, as shown in FIG. 2, a copper foil 4 is laminated on the adhesive 3 on the surface of the polyimide resin tape 1 shown in FIG. FIG. 13 shows a resin tape 1 on which a copper foil is preliminarily laminated, in which a solder ball engaging hole 2 is formed by laser. Here, the thickness of the copper foil 4 is about 18 μm (or 25 μm).

Next, as shown in FIGS. 3 and 14, the copper foil 4 shown in FIGS. 2 and 13 is subjected to Sn alloy plating (= solder plating) 5 as Sn plating. Here, the Sn alloy plating 5 is applied to both the front and back surfaces of the copper foil 4, and the thickness of the Sn alloy plating 5 is about 5 to 6 μm. , A solder ball pad portion 11 is formed.
The Sn alloy plating 5 may be applied only to the back surface of the copper foil 4, and in this case, the surface of the copper foil 4 may be masked and plated. Further, Sn plating may be used instead of Sn alloy plating 5.

Next, as shown in FIG. 4 and FIG. 15, a mechanically peelable solder resist film 6 is applied as a masking material to the back surface of those shown in FIG. 3 and FIG. For this, a tape or a dry film may be used instead of the solder resist film. The solder resist film 6 covers the solder ball engaging hole 2 and shields the back surface of the copper foil 4.

Next, as shown in FIGS. 5 and 16, the Sn alloy plating 5 on the surface of the copper foil 4 shown in FIGS. 4 and 15 is peeled off. Thus, the entire surface of the copper foil 4 is exposed, but the back surface is still shielded by the solder resist film 6 as described above. The removal of the Sn alloy plating 5 may be performed in the same manner as in the conventional method. Although illustration is omitted, if the Sn alloy plating 5 is first applied only to the back surface of the copper foil 4, the masking on the surface formed at the time of the plating may be removed.

Next, as shown in FIGS. 6 and 17, a photoresist film 7 is formed on the surface of the copper foil 4 shown in FIGS.
Is formed, and the pattern of the lead portion and the pad portion is exposed,
develop. The photoresist film 7 may be a negative type or a positive type, but here, a positive type which is considered to have high accuracy is used. At the time of the development processing, the solder resist film 6 as a masking material attached to the back surface of the resin tape 1 protects the plating of the copper foil 4 such as Sn from the developing solution to prevent contamination.

Next, as shown in FIGS. 7 and 18, the one shown in FIGS. 6 and 17 is etched. As a result, on the surface of the copper foil 4, patterns 8 such as bonding pad portions (here, wire bonding pad portions) and leads 8 are formed.
Is formed. This etching treatment may be performed using a solution of ferric chloride as a stripping solution as in the conventional method. During this etching process, a solder resist film 6 as a masking material adhered to the back surface of the resin tape 1 protects the back surface of the copper foil 4 from an etching solution and prevents erosion.

Next, as shown in FIGS. 8 and 19, the photoresist film 7 shown in FIGS. 7 and 18 is peeled off.
In this case, the photoresist film 7 is also stripped by using a thin caustic soda solution of 1 to 2% as a stripping solution as in the conventional method. As a result, the copper foil 4 of the bonding pad portion and the lead portion is exposed, but the back surface of the resin tape 1 is covered with the solder resist film 6 as the masking material.
And the back surface of the copper foil 4 is protected from the peeling liquid to prevent contamination.

Next, as shown in FIGS. 9 and 20, a solder resist ink 12 is applied to the portion of the surface of the copper foil 4 on which the semiconductor chip 13 is to be mounted as shown in FIGS. I do. The application of the solder resist ink 12 is not necessarily performed here, but may be performed later by an assembler who mounts, bonds, and molds a semiconductor chip.

Next, as shown in FIG. 10 and FIG.
In FIG. 20, Ni / Au / Au plating 9 is applied by electroless plating as Ni / Au plating to form a bonding pad 10 exposed on the surface of the copper foil 4. The Ni / Au / Au plating 9 is obtained by plating Au on Ni plating as described above, and further plating Au on the Ni plating. Here, the thickness is set to 0.35 μm or more.

During the electroless plating process, the back surface of the copper foil 4 is still shielded by the solder resist ink 6 as a masking material adhered to the back surface of the resin tape 1. Ni / Au / Au plating 9
Is prevented from being attached, so that electroless plating can be performed without any problem. The above electroless Ni / Au / Au
Instead of plating, electroless Ni / Au plating may be used, but not limited thereto. Electroless Ni / Au plating may be used, or electroless Ni / Pd / Au if the cost is high.
It may be plated.

Next, as shown in FIG. 11 and FIG.
The solder resist ink 6 as the masking material 6 on the back surface of the resin tape 1 shown in FIG. Thus, the solder ball pad portion 11 on the back surface of the copper foil 4 is formed.
Is exposed from the solder ball engaging hole 2 and the tape CS
P is formed.

Thereafter, as shown in FIG. 12, FIG. 23 and FIG. 24, the tape type CSP shown in FIG.
On the front surface, a semiconductor chip 13 is mounted, and a bonding wire 15 is bonded between the semiconductor chip 13 and the bonding pad portion 10. The solder ball pad portion 11 on the back surface passes through the solder ball hole 2 and the solder ball. 14 are engaged and melted and joined.

The method of manufacturing the tape-type CSP according to the above-described embodiment and the operation of the tape-type CSP according to the method are the same as those described in the section of the above-described embodiment of the present invention, and a description thereof will be omitted.

[0047]

As is apparent from the above, the method of manufacturing the tape-type CSP according to the present invention and the tape-type CSP by using the method
Then, you can strongly join the solder ball to the pad part,
Ni / Au plating of bonding pad, Ni / A
u / Au or Ni / Pd / Au plating can be performed in an electroless manner, and a bonding pad portion and a solder ball pad portion made of different metals can be manufactured by a simple manufacturing process. Non-defective products can be reduced, and costs can be reduced.

That is, in the method of manufacturing the tape-type CSP according to the present invention, and the tape-type CSP according to the method, the solder ball pad exposed on the back surface of the copper foil on the resin tape through the hole for solder ball engagement. Is formed, a step of performing Sn (or Sn alloy plating) on the solder ball pad portion is performed at a stage before a pattern such as a bonding pad portion or a lead portion is formed on the surface of the copper foil.

Therefore, a) Unlike the case of forming a pattern having a lead portion with a copper foil and then plating the solder ball pad portion with Sn (Sn alloy), there is no need to mask the fine lead portion. The manufacture of the tape-type CSP can be performed very easily.

B) Similarly, by performing the step of plating Sn or the like on the pad portion for the solder ball at the above stage, the plating such as Sn does not adhere to the lead portion or the bonding pad portion on the surface. The plating of Ni / Au or the like can be performed in an electroless manner, and the manufacturing process can be simplified in this aspect as well.

C) According to the present invention, the solder ball is bonded to the solder ball pad on the back surface of the copper foil, instead of the solder ball bonded to the Ni plating as in the prior art, and the pad is plated with Sn or the like. The solder balls are joined between Sn alloys. As a result, the joining strength of the solder ball is greatly improved, and it is not necessary to use the flux when joining the solder ball.

D) Further, since the plating of Sn or the like on the solder ball pad portion is performed by melting the solder balls by the heat at the time of joining, the joining of the solder balls here becomes the joining of copper foil and Sn or the like. Unlike the conventional one through the Ni plating, the bonding strength of the solder ball can be greatly improved also in this respect.

E) In addition, the electroless plating of Ni / Au or the like on the bonding pad portion or the like is performed in a state where the solder ball pad portion is covered with the backing, so that the surface of the solder ball pad portion is coated with Ni. Of impurities such as P and B contained in the Au plating, and A
Also, it is possible to prevent u from diffusing into the solder ball. Thus, the bonding strength of the solder ball is improved from this aspect as well, and the shear strength is maintained, and the strength of the solder ball is not weakened.

F) In addition, since a tape, a dry film, or a mechanically peelable solder resist film is used for the masking material on the back surface of the resin tape 1 as described above, the conventional masking ink is printed. Unlike this, since the accuracy of the boundary of the masking material is improved and they can be mechanically peeled off, unlike the case where the ink is peeled off with, for example, caustic soda solution, Au plating of the bonding pad portion on the copper foil surface or Also, it is possible to prevent the plating of Sn or the like of the solder ball pad portion on the back surface from being contaminated with the stripping solution.

G) The bonding pad on the copper foil surface of the tape-type CSP is plated with Ni, such as Ni / Au, similarly to the conventional method. It can be of sufficient strength without sinking during bonding.

[Brief description of the drawings]

FIG. 1 is an enlarged sectional view of a resin tape used for manufacturing a tape-type chip size package according to the present invention.

FIG. 2 is an enlarged cross-sectional view showing a state in which a copper foil is laminated on the surface of the resin tape shown in FIG.

FIG. 3 is an enlarged sectional view of the state shown in FIG. 2 in which a copper foil is plated with Sn or the like;

FIG. 4 is an enlarged sectional view of a state shown in FIG. 3 in which a masking material is provided on the back surface.

FIG. 5 is an enlarged cross-sectional view of the state shown in FIG. 4 in a state where plating such as Sn on the surface is peeled off.

FIG. 6 is an enlarged cross-sectional view of a state where a photoresist film is formed on a copper foil on the surface of FIG. 5 and exposed and developed.

FIG. 7 is an enlarged cross-sectional view showing a state where the one shown in FIG. 6 is etched.

FIG. 8 is an enlarged cross-sectional view of the state shown in FIG. 7 with the photoresist film removed.

FIG. 9 is an enlarged cross-sectional view of a state shown in FIG. 8 in which solder resist ink is applied to a part of a pad on the surface.

FIG. 10 shows a Ni / Ni pad on the surface of the pad shown in FIG.
It is an expanded sectional view in the state where Au etc. plating was given.

FIG. 11 is an enlarged cross-sectional view showing a state where the masking material on the back surface of the one shown in FIG. 10 is peeled off.

FIG. 12 is an enlarged sectional view of a tape-type chip size package according to the present invention.

FIG. 13 is an enlarged sectional view of a resin tape with a copper foil used in manufacturing a tape-type chip size package according to the present invention.

FIG. 14 is an enlarged cross-sectional view of a state shown in FIG. 13 in which plating such as Sn is performed.

FIG. 15 is an enlarged sectional view showing a state in which a masking material is attached to the back surface of the one shown in FIG.

FIG. 16 is an enlarged cross-sectional view of a state shown in FIG. 15 in which plating such as Sn on a copper foil surface is peeled off.

FIG. 17 is an enlarged sectional view of a state where a photoresist film is formed on the surface of the copper foil shown in FIG. 16 and exposed and developed.

FIG. 18 is an enlarged cross-sectional view of the state shown in FIG. 17 after an etching process.

FIG. 19 is an enlarged cross-sectional view showing a state where the masking material on the back surface of the device shown in FIG. 18 is peeled off.

20 is an enlarged cross-sectional view of a state shown in FIG. 19 in which a solder resist ink is applied to a part of a pad on the surface.

FIG. 21 shows a case where Ni shown in FIG.
It is an expanded sectional view in the state where plating such as / Au was given.

FIG. 22 is an enlarged cross-sectional view showing a state where the masking material on the back surface of the device shown in FIG. 21 has been peeled off.

FIG. 23 is an enlarged sectional view of the tape-type CSP according to the present invention.

FIG. 24 is an enlarged cross-sectional view showing a state in which a semiconductor chip is mounted, wire-bonded, and solder balls are bonded in the tape-type CSP according to the present invention.

FIG. 25 is an enlarged cross-sectional view of a conventional tape-type CSP in which a semiconductor chip is mounted, wire-bonded, and solder balls are bonded.

[Explanation of symbols]

 Reference Signs List 1-Resin tape 2-Solder ball hole 3-Adhesive 4-Copper foil 5-Plating such as Sn 6-Masking material 7-Photoresist film 8-Pattern 9-Plating such as Ni / Au 10-Pad portion for bonding 11 -Solder ball pad portion 12-solder resist film 13-semiconductor chip 14-solder ball 15-bonding wire

────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] March 2, 1999 (1999.3.2)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction contents]

[0008] In the above, that by the electrolytic copper foil N i / A
u plated or have facilities the Ni / Pd / Au plating with Ni / Au / Au plating or electroless, by electroless
You. This is required for the pad portion to be Au plating, but by interposing Ni plating between the copper foil and the Au plating, a barrier for preventing Au in the Au plating from diffusing into Cu of the copper foil. And to make the bonding pad portion have strength by Ni plating to prevent sinking of the pad portion.

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0013

[Correction method] Change

[Correction contents]

[0013]

In the method of manufacturing a tape-type CSP according to the present invention, a copper foil 4 is laminated on the surface of a resin tape 1 and a hole 2 for solder ball engagement is formed from the back surface of the resin tape 1. After the chemical treatment, the copper foil 4
After cleaning, a photoresist film 7 is formed on the surface of the copper foil 4 , a pattern such as a pad portion is exposed and developed , a back surface is backed with a masking material 6, and a pattern 8 is formed by etching. After removing the photoresist film 7, Ni
A method of manufacturing a tape-type CSP having a process of forming a pad portion 10 for a bong on the surface of a copper foil 4 by applying a plating 9 such as Au, and forming a pad portion 11 for a solder ball on the back surface of the copper foil 4 . After the copper foil 4 has been washed and before the photoresist film 7 is formed, at least the back surface of the copper foil 4 is plated with Sn or the like 5 and then the back surface of the resin tape 1 is covered with a masking material 6. In addition to the above, when the plating 5 such as Sn is applied to the surface of the copper foil 4 as described above, a step of removing the plating 5 is provided.
The plating 9 such as Ni / Au is performed in an electroless manner, and then the backing masking material 6 on the back surface of the resin tape 1 is peeled off.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction contents]

II In the CSP according to the present invention, a bonding pad portion 10 plated with electroless Ni / Au or the like is formed on the surface of the copper foil 4 on the resin tape 1 and a solder ball member. On the back surface of the copper foil 4 exposed through the joint hole 2, a solder ball pad portion 11 plated with Sn or the like 5 is formed.

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0040

[Correction method] Change

[Correction contents]

Next, as shown in FIGS. 8 and 19, the photoresist film 7 shown in FIGS. 7 and 18 is peeled off.
The stripping of the photoresist film 7 is also here is performed by using a thin sodium hydroxide solution of 1-2% in the stripping solution in the same way as the conventional method. As a result, the copper foil 4 of the bonding pad portion and the lead portion is exposed, but the back surface of the resin tape 1 is covered with the solder resist film 6 as the masking material.
And the back surface of the copper foil 4 is protected from the peeling liquid to prevent contamination.

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] FIG.

[Correction method] Change

[Correction contents]

FIG. 19 is an enlarged cross-sectional view of the state shown in FIG. 18 in which the photoresist film has been removed.

[Procedure amendment 7]

[Document name to be amended] Drawing

[Correction target item name] Fig. 25

[Correction method] Change

[Correction contents]

FIG. 25

Claims (2)

[Claims] 1. A method in which a copper foil 3 is laminated on the surface of a resin tape 1 and a hole 2 for solder ball engagement is punched from the back surface of the resin tape 1 and the copper foil 3 is cleaned by a chemical treatment. A photoresist film 7 is formed on the surface of the copper foil 3, a pattern such as a pad portion is exposed and developed, and the back surface is covered with a masking material 6.
A pattern 8 is formed by etching, and after the photoresist film 7 is peeled off, plating 9 such as Ni / Au is applied to the surface of the copper foil 3 to form a pad 10 for a bong.
And the like, and a step of forming a solder ball pad portion 11 on the back surface of the copper foil 3, wherein the copper foil 3 is washed and before the photoresist film 7 is formed. Then, at least the back surface of the copper foil 3 was plated with Sn or the like 5, and then the back surface of the resin tape 1 was backed with a masking material 6, and the surface of the copper foil 3 was also plated with Sn or the like 5. In this case, a step of peeling it off is included, and the plating 9 such as Ni / Au is electrolessly performed, and thereafter, the backing masking material 6 on the back surface of the resin tape 1 is peeled off. Manufacturing method of a tape type chip size package. 2. A bonding pad portion 10 plated with electroless Ni / Au or the like is formed on the surface of the copper foil 4 on the resin tape 1 through a solder ball engaging hole 2. A tape-type chip size package, characterized in that a solder ball pad portion 11 plated with Sn or the like 9 is formed on the exposed back surface of the copper foil 4.