JP2000198065A - Polishing method of thin disc-shaped work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simultaneously polish both surfaces and an end surface by providing a part to be contacted with a work, of a resin ring-shaped work protecting part mounted on an inner peripheral surface of a hole part of a carrier holding the work, with a hollow part having the shape same as the end surface of the work after polished. SOLUTION: A carrier is rotated between both surface plates 1, 2 by a driving device. On this occasion, the polishing liquid is supplied to both surfaces plates 1, 2 from a polishing liquid passage formed in advance. An end surface of a work 4 held in a carrier hole, is pressed to a contact part having the shape of an end surface part 6 of the work after its mirror finish, of a resin ring 5 mounted on an inner peripheral surface of the carrier hole part, by the frictional force generated between the polishing cloths contacted with both surfaces of the work and the work 4, while autorotating by the rotation of the surface plates and the rotation of the carrier 2, whereby the work is mirror finished. That is, the both surfaces and the end surface of the work 4 contacted with the polishing cloth or resin can be simultaneously polished.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for polishing a thin disk-shaped work, and more particularly, to a method for simultaneously polishing both surfaces and end faces of a thin disk-shaped work.

[0002]

2. Description of the Related Art At present, for polishing both sides and end faces of a thin disk-shaped work, a method is employed in which both sides of a thin disk-shaped work are first polished, and after mirror polishing of both sides is completed, the end faces are mirror-polished. As a method of polishing both surfaces of a thin disk-shaped work, a carrier for holding a work and a work held by the carrier are inserted between parallel platens, a polishing liquid is flowed between the platens, and a pressure is applied. 2. Description of the Related Art There is known a method of manufacturing a work having mirror surfaces on both sides by rotating a surface plate while adding. Further, as a method of polishing the end surface of the thin disk-shaped work, a method of polishing the end surface of the work to a mirror surface by pressing and polishing the end surface of the work while flowing an abrasive to a high-speed rotating drum on which a polishing pad is stuck. It has been known. However, the currently employed method has a problem in that the polishing is expensive because the polishing of both surfaces and the polishing of the end surface are performed as independent processes using separate apparatuses.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of the high cost of the currently employed polishing process, and has as its object to simultaneously perform polishing of both surfaces and polishing of end surfaces. Reduces the number of processes,
An object of the present invention is to provide a polishing method capable of reducing the production cost, and a work holding carrier used in the polishing method.

[0004]

Means for Solving the Problems The present invention has been made in view of such circumstances, and as a result of various studies to solve the above-mentioned problems, it has been found that a resin mounted on an inner peripheral surface of a carrier hole portion for holding a work is provided. Using a work holding carrier in which the shape of the portion of the ring-shaped work protection part that contacts the work is provided with a recess having the same shape as the end face of the work after polishing is completed, the thin disk-shaped work is formed. The inventors have found that the above problem can be solved by polishing both surfaces and end surfaces simultaneously, and have completed the present invention. That is, according to the present invention, the shape of the portion of the resin ring-shaped work protection portion abutting on the work, which is mounted on the inner peripheral surface of the hole portion of the carrier holding the work, is the same as the end surface of the work after polishing is completed. The work holding carrier having a shape having a recess having the shape of the above, and the shape of a portion of the resin work protection portion attached to the carrier that holds the work that comes into contact with the work is an end surface of the work after polishing is finished. Provided is a method for simultaneously polishing both surfaces and an end surface of a thin disk-shaped work by using a work holding carrier having a shape provided with a recess having the same shape.

[0005]

More specifically, according to the present invention, a work is inserted into a hole of a work holding carrier between two upper and lower platens in parallel, and the held carrier is held, and a polishing liquid In the method of rotating both the platens while applying pressure to the work while flowing the liquid between the platens, a resin ring for protecting the work mounted on the inner peripheral portion of the work holding carrier hole used. By making the shape of the part in contact with the end face of the workpiece the shape of the end face of the workpiece after mirror polishing, the two sides of the workpiece and the end face are simultaneously polished by the reaction of the rotation of the workpiece and the frictional force coming from the polishing cloth. A method and a carrier for holding a workpiece used in the method are provided.

Hereinafter, a polishing method for simultaneously polishing both surfaces and an end surface of a thin disk-shaped work according to a first aspect of the present invention will be described in detail. A work holding carrier having a shape described in detail below and a work held in a hole portion of the carrier are simultaneously inserted between parallel surface plates to which a polishing pad is attached, and a polishing liquid is applied to both surface plates. Polishing while rotating both platens while applying pressure to the work while flowing in between. At the time of polishing, the work is first stored in a carrier hole having a diameter slightly larger than the outer diameter of the work provided in advance in the work holding carrier. On the inner peripheral wall surface of the carrier hole that abuts the end surface of the work, a resin work protection ring made by processing and shaping the shape of the part that abuts the work end surface to be the same as the shape of the work end surface after mirror polishing Is fitted. Also, the inner diameter of the resin ring, that is, the diameter of the side in contact with the work, is slightly larger than the diameter of the work, and there is a play in the range of +0.1 mm to +6 mm between the work and the inner peripheral surface of the resin ring. Is preferred. If there is no play, the work violently collides with the resin ring during polishing, and the work will be damaged. The conditions for the polishing operation are basically the same as the conditions for polishing the work on both sides.

A carrier for holding a work according to a second aspect of the present invention will be described. According to a second aspect of the present invention, a carrier for holding a work includes a carrier hole having a diameter slightly larger than an outer diameter of the work for storing the work, and a wall surface of an inner peripheral portion of the carrier hole abutting on an end surface of the work. A ring for protecting a work made of resin, which is provided with a portion abutting on a work end surface having the same shape as that of the work end surface after mirror polishing, and an inner peripheral surface thereof. Is slightly larger than the diameter of the workpiece,
The two are made of a resin ring having such a difference that a play in the range of +0.1 mm to +6 mm is possible. Normally, the material of the resin ring for protecting the work is
Glass fiber, in terms of rigidity and molding of the recess of the ring,
An epoxy resin in which carbon fibers, aramid fibers and the like are composited is preferable, and a nonwoven fabric impregnated with a polyurethane resin is preferable in terms of polishing efficiency.

As described above, the carrier holding the work in its hole is sandwiched between two parallel upper and lower platens to which the polishing pad is attached, and the groove provided on the outer periphery of the carrier and the polishing device Are rotated between both surface plates by driving devices provided on the inner and outer peripheral portions of the plate. At this time, the polishing liquid is supplied to both the platens from a polishing liquid passage provided in advance. The work held in the carrier hole rotates by the rotation of the platen and the carrier, and the frictional force generated between the abrasive cloth and the work that abuts on both sides causes the end face of the work to be in the inner peripheral surface of the carrier hole. The workpiece is pressed against a contact portion having the shape of the end face of the work after the mirror polishing of the resin ring attached to the resin ring, whereby the mirror polishing is performed. Thus, both surfaces and the end surface of the work which comes into contact with the polishing cloth or the resin are mirror-finished simultaneously by the intervening polishing liquid.

Hereinafter, the present invention will be further described with reference to examples. However, it is needless to say that the present invention is not limited by these examples.

[Embodiment] A carrier hole having a diameter slightly larger than the outer diameter of a workpiece for accommodating a workpiece according to a second aspect of the present invention, and a wall mounted on an inner peripheral wall of the carrier hole abutting on an end face of the workpiece. A ring for protecting a workpiece made of a resin, the ring having a portion abutting on a workpiece end face having a shape processed and formed to be the same as the shape of the workpiece end face after mirror polishing, and an inner peripheral surface of the ring. A workpiece holding carrier, which is a resin ring slightly larger than the diameter and having a play of about +0.1 mm between the two, is accommodated in the carrier hole of the carrier. The polishing apparatus was prepared by inserting between polishing plates. The work was polished while applying a pressure to the work and rotating both the work tables while flowing the polishing liquid between the work tables in the polishing apparatus thus prepared in a conventional manner. On the inner peripheral wall surface of the carrier hole that abuts the end surface of the work, a resin work protection ring made by processing and shaping the shape of the part that abuts the work end surface to be the same as the shape of the work end surface after mirror polishing Is fitted, so that both-side polishing of the work and polishing of the end face of the work are performed simultaneously. After the completion of the polishing, the polishing condition of the end face of the work and both surfaces of the work was inspected.

[0010]

As is clear from the above description, by polishing using the carrier configured as described above, both sides of the work and polishing of the end face can be simultaneously performed in a single step. Can be.

[Brief description of the drawings]

FIG. 1 is a schematic front view of a polishing apparatus used in the present invention.

FIG. 2 is a schematic view of a work holding carrier used in the present invention.

FIG. 3 is a schematic cross-sectional view of a portion of a work holding carrier that contacts a work.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Upper surface plate, 2 ... Work holding carrier, 3 ... Lower surface plate, 4 ... Work, 5 ... Resin ring, 6 ... Work end surface part.

Claims (2)

[Claims] 1. A shape of a portion of a resin ring-shaped work protection portion mounted on an inner peripheral surface of a hole portion of a carrier for holding a work, the portion being in contact with the work, having the same shape as an end surface of the work after polishing is completed. A work holding carrier having a shape provided with a concave portion. 2. A shape of a portion of a resin work protection portion, which is mounted on a carrier for holding the work, which comes into contact with the work, is provided with a recess having the same shape as the end surface of the work after polishing. A method of simultaneously polishing both surfaces and end surfaces of a thin disk-shaped work using a work holding carrier.