JP2001038611A - Holding tool for grinding workpiece, and grinding method using the holding tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a holding tool for a grinding workpiece and a grinding method using the tool for suppressing the damage to a workpiece or the holding tool itself of the grinding workpiece. SOLUTION: This holding tool for grinding workpiece is fixed with a template 1 provided with a recess hole 1a in an open manner to be fitted with a workpiece, and a packing material 3 composed of an elastic body for holding a workpiece with each other; and a recess 8 is provided on a place other than the end part of a recess hole peripheral edge.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a workpiece holder for polishing, such as glass for LCDs, color filters, ceramic substrates, reflectors, crystal oscillators, and semiconductor wafers, which requires precise planar polishing.

[0002]

2. Description of the Related Art Glass for LCDs, color filters, ceramic substrates, reflectors, crystal oscillators, semiconductor wafers and the like are polished by a polishing machine.

The polishing machine has an upper surface plate and a lower surface plate, each of which has a mechanism for rotating and rotating and revolving. A polishing pad is bonded to the lower surface plate, and a workpiece is held on the upper surface plate by a workpiece holder for polishing. Then press the workpiece against the polishing pad,
Processing is performed by supplying a polishing liquid containing abrasive grains between the two and sliding the workpiece and the polishing pad mutually.

As shown in FIGS. 7, 9 and 10, a conventional workpiece holder for polishing has a rectangular or circular template 21 provided with a recess hole 21a into which a workpiece is fitted. Have.

[0005] A backing material 23 is attached to the entire surface of the template 21 on the side attached to the upper surface plate via an adhesive 22. JP-A-63-9
As disclosed in FIG. 2 of Japanese Patent No. 3561, there is a case in which projecting holes are provided at four corners of the recess hole to assist in fitting and detaching of a workpiece.

As the backing material 23, a polymer elastic foam suitable for holding a workpiece fitted in the recess hole 21a of the template is used. The backing material 23 is fixed to the workpiece by being attracted to the workpiece by being strongly pressed through the liquid such as water. The backing material 23 is reinforced by a support material 25 via an adhesive 24, and an adhesive layer 26 and a release paper 27 are sequentially laminated on the back surface of the support material 25.

The workpiece holder for polishing is made of release paper 27.
Is peeled off and bonded to the upper surface plate with the adhesive layer 26 for use. At this time, the backing material 23 is impregnated with a liquid such as water, and a workpiece is fitted into the recess hole 21a of the template 21 so as to fit the backing material 23.
Is held. In this state, a polishing pad (not shown), such as a cloth or a foam, capable of holding a polishing liquid is attached to the lower platen, and a predetermined polishing pad is brought into contact with a surface of the workpiece to be polished. Then, by rotating the upper surface plate and the lower surface plate, the polishing liquid is held by the polishing pad and the surface of the workpiece is polished. After the polishing is completed, the workpiece is detached from the workpiece holder for polishing and flown to the next step.

The fitting and detachment of the workpiece are performed manually or by holding the four corners of the workpiece 29 with a claw-like attaching / detaching jig 28 as shown in FIG. Further, a polishing substrate holder provided with a notch, which is disclosed in Japanese Patent Application Laid-Open No. 61-230866, has been used.

In these cases, the four corners of the workpiece 29 are damaged by the claw-shaped attachment / detachment jig 28, and when the thickness of the work-piece 29 is small, the claw-shaped attachment / detachment jig 28 has a small allowance for holding and is difficult to hold. Thus, the workpiece 29 may be subjected to bending stress and deformed. On the other hand, if the claw-like attachment / detachment tool is further protruded than the thickness of the workpiece in order to allow a sufficient gripping margin, the protruding claw may scratch and damage the backing material. In the case of manual work, the work efficiency may be reduced and foreign substances such as dust may adhere.

When the backing material 23 is broken,
There is a problem that a raised portion is generated in the backing material 23 which should be originally flat, and the raised portion is transferred to the workpiece 29 at the time of polishing and the flatness of the workpiece 29 is impaired.

[0011]

SUMMARY OF THE INVENTION Therefore, the present invention
An object of the present invention is to provide a workpiece holder for polishing which can suppress breakage of a workpiece or a workpiece holder itself for polishing, and a polishing method using the same.

[0012]

In order to solve the above-mentioned problems, the present invention employs the following technical means. A workpiece holder for polishing according to the present invention is a tool in which a template having a recess hole into which a workpiece is fitted and a backing material made of an elastic body for holding the workpiece are fixed to each other. Wherein a recess is provided at a position other than the end of the peripheral edge of the recess hole.

[0013] With such a configuration, when a claw-like attachment / detachment jig or the like is inserted from a concave portion provided at a location other than the end of the peripheral edge of the recess hole, the backing of the workpiece and the backing are performed as compared with the case where the jig is inserted from an end such as a corner. It is easy for air to enter between the material and the workpiece, so that the workpiece is easily removed. The recess may be a hole through the recess. With such a configuration, it is possible to prevent the workpiece backing material for polishing from being scratched or damaged by a toe of a nail-like attachment / detachment jig or the like, and to prevent poor flatness of the workpiece due to the protrusion of the backing material. Hold down. The plurality of holes may be evenly provided at each position that equally divides the outer periphery of the recess hole into four or more equal parts from a point of intersection of a perpendicular line from the center point of the recess hole and the outer periphery. With such a configuration, when the workpiece is held by the claw-shaped attachment / detachment jig or the like, the stress applied to the workpiece becomes uniform, and damage can be prevented. A positioning hole for attachment to the upper platen of the polishing machine may be provided in the template portion where the recess hole is not opened. In such a configuration, the claw-shaped attachment / detachment jig or the like can always be operated at a fixed position, and the fitting and detachment work of the workpiece can be promoted stably. A plurality of recess holes may be formed in the template. With such a configuration, a plurality of workpieces can be processed at the same time, and productivity can be improved. The method for polishing a workpiece is for bringing a processing surface of the workpiece into sliding contact with a polishing pad provided on a polishing platen. A workpiece holder is used.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

The workpiece holder for polishing according to this embodiment has the following features.
It is a workpiece holder for polishing for bringing a processing surface of a workpiece into sliding contact with a polishing pad provided on a polishing platen. And it is used, for example, when polishing a square workpiece.

As shown in FIGS. 1 to 6, the workpiece holder for polishing has a template 1 having a rectangular recess hole 1a. The template 1 is made of a material having excellent toughness and wear resistance.
Are adhered by the adhesive layer 3.

At an appropriate position on the periphery of the recess hole 1a, there is provided a hole (recess 8) for insertion of a claw-like attaching / detaching jig for attaching and detaching a workpiece.

A backing material 5 is adhered to the back surface of the backing material 2 via an adhesive layer 4, and a release paper 7 is adhered to the back surface of the backing material 5 via an adhesive layer 6. . The backing material 2 is made of a polymer that is microporously foamed so as to have fine voids inside.

The template 1 is made of an engineering plastic having excellent toughness and abrasion resistance. In addition to semi-rigid materials such as bakelite, polycarbonate, hard polyurethane, hard vinyl chloride, hard polyethylene, and epoxy with glass, the template 1 has a higher hardness. A filled resin composite sheet or the like can also be used.

Recess hole 1a opened in template 1
Is not limited to one and may be plural. The recess hole 1a is generally square in shape, for example, 600 mm square or 90 mm square.
It is determined according to the dimensions of the workpiece such as a 0 mm square, and further, such as 600 mm × 900 mm. The shape may be a circle, a triangle, a polygon having five or more angles, a star, or the like.

The size of the hole (recess 8) for fitting the workpiece and inserting the claw-shaped attachment / detachment tool depends on the shape of the claw, but is about 102% to 105% of the width of the claw. It is preferable to be configured so that If less than 102%
There is a possibility that the nail may come into contact with the template or the backing material around the hole and break them. On the other hand, 105
%, The holding power of the workpiece around the hole is reduced, the adhesion between the template 1 and the backing material 2 is broken, and the template may be damaged. In addition, a positioning hole 9 (see FIG. 6) for attachment to the upper platen of the polishing machine is provided in the template portion where the recess hole is not opened, and even if the positioning is sufficient, the workpiece for polishing is used. It is preferable that the hole has the hole width in consideration of processing variation of the holder.

The sheet material comprising the adhesive layer 4, the support material 5, the pressure-sensitive adhesive layer 6, and the release paper 7 is a double-sided pressure-sensitive adhesive tape obtained by impregnating a non-woven fabric with a pressure-sensitive adhesive, or a sheet material comprising an adhesive layer and a pressure-sensitive adhesive layer. It may be.

The template 1 is made of a material having excellent toughness and wear resistance. For example, fibrous fillers such as bakelite, high-toughness engineering plastics, highly functional inorganic fibers such as thermosetting resins and carbon fibers, or highly wear-resistant fibers such as Kevlar (DuPont) fibers and plastics, resins, or synthetics There are composites such as rubber, or these matrix substances alone or calendered. The recess hole is provided by, for example, end milling.

As the material of the template, a material having appropriate physical properties is selected in consideration of the material of the workpiece and the surface dimensions, thickness and shape. However, when the workpiece is an LCD glass, the hardness is not more than Rockwell M125. In addition, R60 or more and compressive strength in the range of 400 to 2500 kgf / cm ² are desirable, and heat resistance and abrasion resistance, that is, resistance to so-called microvibration repeated impact wear is particularly important. As for this resistance, a material having a large cumulative impact energy until breaking was given a good result by repeatedly performing a falling ball impact test at a small energy level using a falling ball impact tester.

The backing material 2 may be any material that can adsorb and hold the workpiece when the workpiece is strongly pressed by interposing a liquid such as water on the surface. Further, the backing material 2 is bonded to the support material 5 via the adhesive layer 4, but a predetermined foamed composition may be directly provided on the support material 5 and integrally formed by a wet solidification method.

Next, a method of manufacturing the workpiece holder for polishing according to this embodiment will be described.

The workpiece holder for polishing shown in FIG. 1 and FIG. 2 first has a backing material 2 on a support material 5 via an adhesive layer 4.
Laminated, fitting the workpiece to the laminated body in advance by processing such as end milling at a predetermined position on the periphery of the recess hole,
The template 1 provided with the attachment / detachment holes can be formed by adhering through the adhesive layer 3. Further, the backing material 2, the support material 5, and the adhesive layer 4 around the hole may be punched out by a mold having a predetermined size to form a through hole.
Thereafter, a positioning hole 9 for attachment to the upper platen of the polishing machine may be formed by punching with a die or the like in the template portion where the recess hole is not opened.

[0028]

Next, the configuration of the present invention will be described more specifically.

Example 1 Bakelite rectangular plate (thickness: 620 μm, outer diameter: 1000 mm × 900 mm,
After bonding a double-sided adhesive tape (manufactured by Nippon Matai Co., Ltd., L-Fan) to the center of the bakelite-made rectangular plate, 700 mm was attached to Shin Kobe Electric Co., Ltd. product name PL-FLE-P. A recess hole of × 600 mm is provided, and a hole having a diameter of 12 mm with the center point as a corner and a perpendicular line and a short diameter in the minor hole direction of the recess hole from the center point of the bakelite rectangular plate at four corners of the template peripheral edge. At the respective points dividing the periphery of the recess hole into six equal parts based on the intersection with the above, a fitting / removing hole for a workpiece having a width of 21 mm and a depth of 13 mm was provided.

A backing material (manufactured by Rodel Nitta, trade name: NF-200) having a fine foam structure on the side that receives the workpiece in the recess hole is 1000 mm × 900 m.
m, and a double-sided adhesive tape (product name # 442, manufactured by Sumitomo 3M Limited) having a polyester sheet as a core material,
The support was bonded to the backing material surface with a heat roller.

The template to which the double-sided adhesive tape has been attached and the backing material are attached by using a hot press,
A workpiece holder for polishing as shown in FIGS. 1 and 2 was obtained.

Using this workpiece holder for polishing, a polishing treatment was performed by a single-side polishing machine (an ultra-precision glass polishing machine manufactured by Hitachi Zosen Corporation). Workpiece is LCD glass (outer diameter: 700mm
× 600 mm), and polishing conditions were as follows (1) to (4). (1) Holder attachment method: The holder was attached to the carrier plate with a double-sided adhesive tape on the holder support material side. (2) Polishing conditions: polishing cloth (Supreme RN-
H), polishing slurry (CEPOL 132, 30-fold dilution), processing pressure (200 g / cm ² ), slurry flow rate (500 ml / min), processing time (10 min). (3) Workpiece mounting method: The workpiece is held by the claw-shaped attachment / detachment jig and fitted into the holder recess hole. (4) Workpiece removal method: After the polishing is completed, the workpiece fitted into the holder recess hole is grasped by a claw-like attachment / detachment jig and detached.

The time required for desorption after polishing, the state of breakage of the workpiece and the backing material, and the state of foreign matter adhered to LCD glass by visual inspection were investigated.

Then, a desorption time of 2.3 seconds per sheet was required. Furthermore, when the polishing was performed sequentially, 277 sheets could be processed while maintaining the above-mentioned desorption time to the end without causing breakage of the LCD glass and the backing material of the workpiece holder for polishing. The backing material was damaged (broken) for the first time after polishing 277 sheets. In addition, no foreign matter was attached to any of the LCD glasses. (Example 2) As in Example 1, a recess having a size of 700 mm x 600 mm is provided in the center of a rectangular plate made of bakelite. And a point 21 mm wide and 13 mm deep at each point that divides the periphery of the recess hole into four equal parts based on the intersection of the perpendicular to the minor axis direction of the recess hole and the minor axis from the center point of the bakelite rectangular plate. After the fitting and desorption holes are provided, the backing material having a fine foam structure on the side that receives the workpiece in the recess hole is 1000 mm ×
The sheet was cut to 900 mm, and a double-sided adhesive tape having a polyester sheet as a core material was bonded to the support material surface of the backing material by a heat roller to produce a workpiece holder for polishing as shown in FIG.

When the LCD glass was polished under the same polishing conditions as in Example 1, a desorption time of 3.1 seconds per sheet was required. By further polishing, 213 sheets could be processed while maintaining the above-mentioned desorption time to the end without causing breakage of the LCD glass and the backing material. The backing material was damaged (broken) for the first time after polishing 213 sheets. In addition, no foreign matter was attached to any of the LCD glasses. (Embodiment 3) After the same processing as in Embodiment 1 described above, a width of 21 mm and a depth of 2 mm inward with the outermost side of the fitting / removing hole as a base line.
A through-hole of 5 mm was punched out with a die to produce a workpiece holder for polishing as shown in FIGS.

When the LCD glass was polished under the same polishing conditions as in Example 1, a desorption time of 2.2 seconds per sheet was required. By further polishing, 384 sheets could be processed while maintaining the above-mentioned desorption time to the end without causing damage to the LCD glass and the backing material. For the first time after polishing 384 sheets, the edge of the LCD glass in contact with the claw-shaped attachment / detachment jig was damaged (cracked). Also, any L
No foreign matter was found on the CD glass. (Embodiment 4) After the same processing as in Embodiment 3, the center point between the outer periphery of the template and the outer periphery of the recess and on the extension of the perpendicular line, and the center point of the template is used as a reference. 4mm for a total of 3 points that have been moved by 120 °
A through-hole for positioning the workpiece holder for polishing of the pie on the upper surface plate was provided, and a workpiece holder for polishing as shown in FIG. 6 was produced.

When the LCD glass was polished under the same polishing conditions as in Example 1, a desorption time of 2.2 seconds per sheet was required. By further polishing, 513 sheets could be processed while maintaining the above-mentioned desorption time to the end without causing damage to the LCD glass and the backing material. The LCD glass could not be held after polishing 513 sheets. This means that the backing material has been completely deformed and has reached the life of the holding function. Also, any L
No foreign matter was found on the CD glass. (Comparative Example 1) After bonding a double-sided adhesive tape to a rectangular plate made of bakelite similar to that of the above example using a heat roller, a recess hole was provided in the center of the rectangular plate made of bakelite, A double-sided adhesive tape having a polyester sheet as a core material on a backing material in which holes having a diameter of 12 mm are provided at the four corners of the template at the four corners at the center point at the corners, and the side on which the workpiece is received in the recess hole has a fine foam structure. Are bonded to the support material surface of the backing material by a hot roller, and the template with the double-sided adhesive tape bonded thereto and the backing material are bonded by using a hot press, and a workpiece to be polished as shown in FIG. 7 is held. I got the tool.

When the LCD glass was polished under the same polishing conditions as in Example 1, a desorption time of 3.3 seconds per glass was required. When further polishing was performed, 79 substrates could be processed while maintaining the above-mentioned desorption time to the end without causing damage to the LCD glass and the backing material. After polishing 79 sheets, one corner of the LCD glass was damaged (cracked). In addition, no foreign matter was attached to any of the LCD glasses. (Comparative Example 2) After bonding a double-sided adhesive tape to a bakelite rectangular plate similar to that of the above example using a heat roller, a recess hole is provided in the center of the bakelite rectangular plate, The surface on the side that accepts the workpiece in the recess hole is bonded to a backing material having a fine foam structure with a double-sided pressure-sensitive adhesive tape having a polyester sheet as a core material, and bonded to a support material surface of the backing material with a heat roller, and a double-sided adhesive tape is applied. The bonded template and the backing material were bonded using a hot press to obtain a workpiece holder for polishing as shown in FIG.

After the same polishing conditions (1) as in Example 1 were performed, the LCD glass was manually attached, and after polishing the LCD glass under the same polishing conditions (2) as in Example 1, the LCD glass was manually polished. 13. When the LCD glass is detached by using
A 7 second desorption time was required. Further polishing, LC
108 sheets could be processed while maintaining the desorption time to the end without causing damage to the D glass and the backing material. After polishing 108 sheets, the LCD glass was broken (cracked). Also, the LCD after processing the 72nd sheet
Adhesion of foreign matter was observed on 17 sheets of glass.

As described above, the workpiece holder for polishing in this embodiment can easily attach and detach the workpiece during polishing.
The working time can be shortened, and the stress from the claw-like attachment / detachment jig can be alleviated, so that the workpiece can be prevented from being damaged, and furthermore, the backing material can be prevented from being scratched. Therefore, there is an advantage that the short life due to the breakage of the template of the workpiece holder for polishing can be overcome, the usable life can be extended and the frequency of replacement can be reduced, and the polishing operation efficiency is improved and the economy is excellent.

[0041]

The present invention is configured as described above and has the following effects.

Provided is a workpiece holder for polishing and a polishing method using the same, which make it easier to remove the workpiece, thereby suppressing damage to the workpiece and the workpiece holder for polishing than before. can do.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating Embodiment 1 of a workpiece holder for polishing according to the present invention.

FIG. 2 is a view of the polishing work holder of FIG. 1 as seen from the direction of arrows II-II.

FIG. 3 is a plan view illustrating Embodiment 2 of a workpiece holder for polishing according to the present invention;

FIG. 4 is a perspective view illustrating Embodiment 3 of a workpiece holder for polishing according to the present invention;

FIG. 5 is a view taken along line VV of the workpiece holder for polishing shown in FIG. 4;

FIG. 6 is a perspective view illustrating Embodiment 4 of a workpiece holder for polishing according to the present invention;

FIG. 7 is a plan view illustrating a comparative example 1 of a conventional workpiece holder for polishing.

FIG. 8 is a plan view illustrating a comparative example 2 of the conventional workpiece holder for polishing.

FIG. 9 is a sectional view of a main part of the workpiece holder for polishing shown in FIG. 7;

FIG. 10 is a perspective view illustrating the structure of a part of a polishing work holder of FIG. 2 including a template and a backing material.

FIG. 11 is a perspective view illustrating fitting and detachment of a workpiece to and from a workpiece holder for polishing by a claw-shaped attachment / detachment jig.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Template 1a Recess hole 2 Backing material 8 Depression 9 Positioning hole

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[Procedure amendment]

[Submission date] September 10, 1999 (1999.9.1
0)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Full text

[Correction method] Change

[Correction contents]

[Document Name] Statement

Patent application title: Workpiece holder for polishing and polishing method using the same

[Claims]

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a workpiece holder for polishing, such as glass for LCDs, color filters, ceramic substrates, reflectors, crystal oscillators, and semiconductor wafers, which requires precise planar polishing.

[0002]

2. Description of the Related Art Glass for LCDs, color filters, ceramic substrates, reflectors, crystal oscillators, semiconductor wafers and the like are polished by a polishing machine.

The polishing machine has an upper surface plate and a lower surface plate, each of which has a mechanism for rotating and rotating and revolving. A polishing pad is bonded to the lower surface plate, and a workpiece is held on the upper surface plate by a workpiece holder for polishing. Then press the workpiece against the polishing pad,
Processing is performed by supplying a polishing liquid containing abrasive grains between the two and sliding the workpiece and the polishing pad mutually.

As shown in FIGS. 7, 9 and 10, a conventional workpiece holder for polishing has a rectangular or circular template 21 provided with a recess hole 21a into which a workpiece is fitted. Have.

[0005] A backing material 23 is attached to the entire surface of the template 21 on the side attached to the upper surface plate via an adhesive 22. JP-A-63-9
As disclosed in FIG. 2 of Japanese Patent No. 3561, there is a case in which projecting holes are provided at four corners of the recess hole to assist in fitting and detaching of a workpiece.

As the backing material 23, a polymer elastic foam suitable for holding a workpiece fitted in the recess hole 21a of the template is used. The backing material 23 is fixed to the workpiece by being attracted to the workpiece by being strongly pressed through the liquid such as water. The backing material 23 is reinforced by a support material 25 via an adhesive 24, and an adhesive layer 26 and a release paper 27 are sequentially laminated on the back surface of the support material 25.

The workpiece holder for polishing is made of release paper 27.
Is peeled off and bonded to the upper surface plate with the adhesive layer 26 for use. At this time, the backing material 23 is impregnated with a liquid such as water, and a workpiece is fitted into the recess hole 21a of the template 21 so as to fit the backing material 23.
Is held. In this state, a polishing pad (not shown), such as a cloth or a foam, capable of holding a polishing liquid is attached to the lower platen, and a predetermined polishing pad is brought into contact with a surface of the workpiece to be polished. Then, by rotating the upper surface plate and the lower surface plate, the polishing liquid is held by the polishing pad and the surface of the workpiece is polished. After the polishing is completed, the workpiece is detached from the workpiece holder for polishing and flown to the next step.

The fitting and detachment of the workpiece are performed manually or by holding the four corners of the workpiece 29 with a claw-like attaching / detaching jig 28 as shown in FIG. Further, a polishing substrate holder provided with a notch, which is disclosed in Japanese Patent Application Laid-Open No. 61-230866, has been used.

In these cases, the four corners of the workpiece 29 are damaged by the claw-shaped attachment / detachment jig 28, and when the thickness of the work-piece 29 is small, the claw-shaped attachment / detachment jig 28 has a small allowance for holding and is difficult to hold. Thus, the workpiece 29 may be subjected to bending stress and deformed. On the other hand, if the claw-like attachment / detachment tool is further protruded than the thickness of the workpiece in order to allow a sufficient gripping margin, the protruding claw may scratch and damage the backing material. In the case of manual work, the work efficiency may be reduced and foreign substances such as dust may adhere.

When the backing material 23 is broken,
There is a problem that a raised portion is generated in the backing material 23 which should be originally flat, and the raised portion is transferred to the workpiece 29 at the time of polishing and the flatness of the workpiece 29 is impaired.

[0011]

SUMMARY OF THE INVENTION Therefore, the present invention
An object of the present invention is to provide a workpiece holder for polishing which can suppress breakage of a workpiece or a workpiece holder itself for polishing, and a polishing method using the same.

[0012]

In order to solve the above-mentioned problems, the present invention employs the following technical means. A workpiece holder for polishing according to the present invention is a tool in which a template having a recess hole into which a workpiece is fitted and a backing material made of an elastic body for holding the workpiece are fixed to each other. Wherein a recess is provided at a position other than the end of the peripheral edge of the recess hole.

[0013] With such a configuration, when a claw-like attachment / detachment jig or the like is inserted from a concave portion provided at a location other than the end of the peripheral edge of the recess hole, the backing of the workpiece and the backing are performed as compared with the case where the jig is inserted from an end such as a corner. It is easy for air to enter between the material and the workpiece, so that the workpiece is easily removed. The recess may be a hole through the recess. With such a configuration, it is possible to prevent the workpiece backing material for polishing from being scratched or damaged by a toe of a nail-like attachment / detachment jig or the like, and to prevent poor flatness of the workpiece due to the protrusion of the backing material. Hold down. The plurality of holes may be evenly provided at each position that equally divides the outer periphery of the recess hole into four or more equal parts from a point of intersection of a perpendicular line from the center point of the recess hole and the outer periphery. With such a configuration, when the workpiece is held by the claw-shaped attachment / detachment jig or the like, the stress applied to the workpiece becomes uniform, and damage can be prevented. A positioning hole for attachment to the upper platen of the polishing machine may be provided in the template portion where the recess hole is not opened. In such a configuration, the claw-shaped attachment / detachment jig or the like can always be operated at a fixed position, and the fitting and detachment work of the workpiece can be promoted stably. A plurality of recess holes may be formed in the template. With such a configuration, a plurality of workpieces can be processed at the same time, and productivity can be improved. The method for polishing a workpiece is for bringing a processing surface of the workpiece into sliding contact with a polishing pad provided on a polishing platen. A workpiece holder is used.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

The workpiece holder for polishing according to this embodiment has the following features.
It is a workpiece holder for polishing for bringing a processing surface of a workpiece into sliding contact with a polishing pad provided on a polishing platen. And it is used, for example, when polishing a square workpiece.

As shown in FIGS. 1 to 6, the workpiece holder for polishing has a template 1 having a rectangular recess hole 1a. The template 1 is formed of a material having excellent toughness and wear resistance, the backing material 3
Are adhered by the adhesive layer 2 .

At an appropriate position on the periphery of the recess hole 1a, there is provided a hole (recess 8) for insertion of a claw-like attaching / detaching jig for attaching and detaching a workpiece.

A support material 5 is adhered to the back surface of the backing material 3 via an adhesive layer 4, and a release paper 7 is adhered to the back surface of the support material 5 via an adhesive layer 6. . The backing material 3 is made of a polymer that is microporously foamed so as to have fine voids inside.

The template 1 is made of an engineering plastic having excellent toughness and abrasion resistance. In addition to semi-rigid materials such as bakelite, polycarbonate, hard polyurethane, hard vinyl chloride, hard polyethylene, and epoxy with glass, the template 1 has a higher hardness. A filled resin composite sheet or the like can also be used.

Recess hole 1a opened in template 1
Is not limited to one and may be plural. The recess hole 1a is generally square in shape, for example, 600 mm square or 90 mm square.
It is determined according to the dimensions of the workpiece such as a 0 mm square, and further, such as 600 mm × 900 mm. The shape may be a circle, a triangle, a polygon having five or more angles, a star, or the like.

The size of the hole (recess 8) for fitting the workpiece and inserting the claw-shaped attachment / detachment tool depends on the shape of the claw, but is about 102% to 105% of the width of the claw. It is preferable to be configured so that If less than 102%
There is a possibility that the nail may come into contact with the template or the backing material around the hole and break them. On the other hand, 105
%, The holding power of the workpiece around the hole is reduced, and the adhesion between the template 1 and the backing material 3 is broken, so that the template may be damaged. In addition, a positioning hole 9 (see FIG. 6) for attachment to the upper platen of the polishing machine is provided in the template portion where the recess hole is not opened, and even if the positioning is sufficient, the workpiece for polishing is used. It is preferable that the hole has the hole width in consideration of processing variation of the holder.

The sheet material comprising the adhesive layer 4, the support material 5, the pressure-sensitive adhesive layer 6, and the release paper 7 is a double-sided pressure-sensitive adhesive tape obtained by impregnating a non-woven fabric with a pressure-sensitive adhesive, or a sheet material comprising an adhesive layer and a pressure-sensitive adhesive layer. It may be.

The template 1 is made of a material having excellent toughness and wear resistance. For example, fibrous fillers such as bakelite, high-toughness engineering plastics, highly functional inorganic fibers such as thermosetting resins and carbon fibers, or highly wear-resistant fibers such as Kevlar (DuPont) fibers and plastics, resins, or synthetics There are composites such as rubber, or these matrix substances alone or calendered. The recess hole is provided by, for example, end milling.

As the material of the template, a material having appropriate physical properties is selected in consideration of the material of the workpiece and the surface dimensions, thickness and shape. However, when the workpiece is an LCD glass, the hardness is not more than Rockwell M125. In addition, R60 or more and compressive strength in the range of 400 to 2500 kgf / cm ² are desirable, and heat resistance and abrasion resistance, that is, resistance to so-called microvibration repeated impact wear is particularly important. As for this resistance, a material having a large cumulative impact energy until breaking was given a good result by repeatedly performing a falling ball impact test at a small energy level using a falling ball impact tester.

The backing material 3 may be any material capable of adsorbing and holding the workpiece when the workpiece is strongly pressed by interposing a liquid such as water on the surface. Although this backing material 3 is bonded to the support material 5 via the adhesive layer 4, a predetermined foamed composition may be provided directly on the support material 5 and integrally formed by a wet solidification method.

Next, a method of manufacturing the workpiece holder for polishing according to this embodiment will be described.

The workpiece holder for polishing shown in FIG. 1 and FIG. 2 first has a backing material 3 on a support material 5 with an adhesive layer 4 interposed therebetween.
Laminated, fitting the workpiece to the laminated body in advance by processing such as end milling at a predetermined position on the periphery of the recess hole,
It can be formed by bonding the template 1 provided with the attachment / detachment holes via the adhesive layer 2 . Further, the backing material 3 , the support material 5, and the adhesive layer 4 around the hole may be punched out by a mold having a predetermined size to form a through hole.
Thereafter, a positioning hole 9 for attachment to the upper platen of the polishing machine may be formed by punching with a die or the like in the template portion where the recess hole is not opened.

[0028]

Next, the configuration of the present invention will be described more specifically.

Example 1 Bakelite rectangular plate (thickness: 620 μm, outer diameter: 1000 mm × 900 mm,
After bonding a double-sided adhesive tape (manufactured by Nippon Matai Co., Ltd., L-Fan) to the center of the bakelite-made rectangular plate, 700 mm was attached to Shin Kobe Electric Co., Ltd. product name PL-FLE-P. A recess hole of × 600 mm is provided, and a hole having a diameter of 12 mm with the center point as a corner and a perpendicular line and a short diameter in the minor hole direction of the recess hole from the center point of the bakelite rectangular plate at four corners of the template peripheral edge. At the respective points dividing the periphery of the recess hole into six equal parts based on the intersection with the above, a fitting / removing hole for a workpiece having a width of 21 mm and a depth of 13 mm was provided.

A backing material (manufactured by Rodel Nitta, trade name: NF-200) having a fine foam structure on the side that receives the workpiece in the recess hole is 1000 mm × 900 m.
m, and a double-sided adhesive tape (product name # 442, manufactured by Sumitomo 3M Limited) having a polyester sheet as a core material,
The support was bonded to the backing material surface with a heat roller.

The template to which the double-sided adhesive tape has been attached and the backing material are attached by using a hot press,
A workpiece holder for polishing as shown in FIGS. 1 and 2 was obtained.

Using this workpiece holder for polishing, a polishing treatment was performed by a single-side polishing machine (an ultra-precision glass polishing machine manufactured by Hitachi Zosen Corporation). Workpiece is LCD glass (outer diameter: 700mm
× 600 mm), and polishing conditions were as follows (1) to (4). (1) Holder attachment method: The holder was attached to the carrier plate with a double-sided adhesive tape on the holder support material side. (2) Polishing conditions: polishing cloth (Supreme RN-
H), polishing slurry (CEPOL 132, 30-fold dilution), processing pressure (200 g / cm ² ), slurry flow rate (500 ml / min), processing time (10 min). (3) Workpiece mounting method: The workpiece is held by the claw-shaped attachment / detachment jig and fitted into the holder recess hole. (4) Workpiece removal method: After the polishing is completed, the workpiece fitted into the holder recess hole is grasped by a claw-like attachment / detachment jig and detached.

The time required for desorption after polishing, the state of breakage of the workpiece and the backing material, and the state of foreign matter adhered to LCD glass by visual inspection were investigated.

Then, a desorption time of 2.3 seconds per sheet was required. Furthermore, when the polishing was performed sequentially, 277 sheets could be processed while maintaining the above-mentioned desorption time to the end without causing breakage of the LCD glass and the backing material of the workpiece holder for polishing. The backing material was damaged (broken) for the first time after polishing 277 sheets. In addition, no foreign matter was attached to any of the LCD glasses. (Example 2) As in Example 1, a recess having a size of 700 mm x 600 mm is provided in the center of a rectangular plate made of bakelite. And a point 21 mm wide and 13 mm deep at each point that divides the periphery of the recess hole into four equal parts based on the intersection of the perpendicular to the minor axis direction of the recess hole and the minor axis from the center point of the bakelite rectangular plate. After the fitting / removing holes are provided, the backing material having a fine foam structure on the side for receiving the workpiece in the recess hole is 1000 mm ×
The sheet was cut to 900 mm, and a double-sided adhesive tape having a polyester sheet as a core material was bonded to the support material surface of the backing material by a heat roller to produce a workpiece holder for polishing as shown in FIG.

When the LCD glass was polished under the same polishing conditions as in Example 1, a desorption time of 3.1 seconds per sheet was required. By further polishing, 213 sheets could be processed while maintaining the above-mentioned desorption time to the end without causing breakage of the LCD glass and the backing material. The backing material was damaged (broken) for the first time after polishing 213 sheets. In addition, no foreign matter was attached to any of the LCD glasses. (Embodiment 3) After the same processing as in Embodiment 1 described above, a width of 21 mm and a depth of 2 mm inward with the outermost side of the fitting / removing hole as a base line.
A through-hole of 5 mm was punched out with a die to produce a workpiece holder for polishing as shown in FIGS.

When the LCD glass was polished under the same polishing conditions as in Example 1, a desorption time of 2.2 seconds per sheet was required. By further polishing, 384 sheets could be processed while maintaining the above-mentioned desorption time to the end without causing damage to the LCD glass and the backing material. For the first time after polishing 384 sheets, the edge of the LCD glass in contact with the claw-shaped attachment / detachment jig was damaged (cracked). Also, any L
No foreign matter was found on the CD glass. (Embodiment 4) After the same processing as in Embodiment 3, the center point between the outer periphery of the template and the outer periphery of the recess and on the extension of the perpendicular line, and the center point of the template is used as a reference. 4mm for a total of 3 points that have been moved by 120 °
A through-hole for positioning the workpiece holder for polishing of the pie on the upper surface plate was provided, and a workpiece holder for polishing as shown in FIG. 6 was produced.

When the LCD glass was polished under the same polishing conditions as in Example 1, a desorption time of 2.2 seconds per sheet was required. By further polishing, 513 sheets could be processed while maintaining the above-mentioned desorption time to the end without causing damage to the LCD glass and the backing material. The LCD glass could not be held after polishing 513 sheets. This means that the backing material has been completely deformed and has reached the life of the holding function. Also, any L
No foreign matter was found on the CD glass. (Comparative Example 1) After bonding a double-sided adhesive tape to a rectangular plate made of bakelite similar to that of the above example using a heat roller, a recess hole was provided in the center of the rectangular plate made of bakelite, A double-sided adhesive tape having a polyester sheet as a core material on a backing material in which holes having a diameter of 12 mm are provided at the four corners of the template at the four corners at the center point at the corners, and the side on which the workpiece is received in the recess hole has a fine foam structure. Are bonded to the support material surface of the backing material by a hot roller, and the template with the double-sided adhesive tape bonded thereto and the backing material are bonded by using a hot press, and a workpiece to be polished as shown in FIG. 7 is held. I got the tool.

When the LCD glass was polished under the same polishing conditions as in Example 1, a desorption time of 3.3 seconds per glass was required. When further polishing was performed, 79 substrates could be processed while maintaining the above-mentioned desorption time to the end without causing damage to the LCD glass and the backing material. After polishing 79 sheets, one corner of the LCD glass was damaged (cracked). In addition, no foreign matter was attached to any of the LCD glasses. (Comparative Example 2) After bonding a double-sided adhesive tape to a bakelite rectangular plate similar to that of the above example using a heat roller, a recess hole is provided in the center of the bakelite rectangular plate, The surface on the side that accepts the workpiece in the recess hole is bonded to a backing material having a fine foam structure with a double-sided pressure-sensitive adhesive tape having a polyester sheet as a core material, and bonded to a support material surface of the backing material with a heat roller, and a double-sided adhesive tape is applied. The bonded template and the backing material were bonded using a hot press to obtain a workpiece holder for polishing as shown in FIG.

After the same polishing conditions (1) as in Example 1 were performed, the LCD glass was manually attached, and after polishing the LCD glass under the same polishing conditions (2) as in Example 1, the LCD glass was manually polished. 13. When the LCD glass is detached by using
A 7 second desorption time was required. Further polishing, LC
108 sheets could be processed while maintaining the desorption time to the end without causing damage to the D glass and the backing material. After polishing 108 sheets, the LCD glass was broken (cracked). Also, the LCD after processing the 72nd sheet
Adhesion of foreign matter was observed on 17 sheets of glass.

As described above, the workpiece holder for polishing in this embodiment can easily attach and detach the workpiece during polishing.
The working time can be shortened, and the stress from the claw-like attachment / detachment jig can be alleviated, so that the workpiece can be prevented from being damaged, and furthermore, the backing material can be prevented from being scratched. Therefore, there is an advantage that the short life due to the breakage of the template of the workpiece holder for polishing can be overcome, the usable life can be extended and the frequency of replacement can be reduced, and the polishing operation efficiency is improved and the economy is excellent.

[0041]

The present invention is configured as described above and has the following effects.

Provided is a workpiece holder for polishing and a polishing method using the same, which make it easier to remove the workpiece, thereby suppressing damage to the workpiece and the workpiece holder for polishing than before. can do.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating Embodiment 1 of a workpiece holder for polishing according to the present invention.

FIG. 2 is a view taken along the line II-II of the workpiece holder for polishing shown in FIG. 1;

FIG. 3 is a plan view illustrating Embodiment 2 of a workpiece holder for polishing according to the present invention;

FIG. 4 is a perspective view illustrating Embodiment 3 of a workpiece holder for polishing according to the present invention;

FIG. 5 is a view taken along line VV of the workpiece holder for polishing shown in FIG. 4;

FIG. 6 is a perspective view illustrating Embodiment 4 of a workpiece holder for polishing according to the present invention;

FIG. 7 is a plan view illustrating a comparative example 1 of a conventional workpiece holder for polishing.

FIG. 8 is a plan view illustrating a comparative example 2 of the conventional workpiece holder for polishing.

FIG. 9 is a sectional view of a main part of the workpiece holder for polishing shown in FIG. 7;

FIG. 10 is a perspective view illustrating the structure of a part of a polishing work holder of FIG. 2 including a template and a backing material.

FIG. 11 is a perspective view illustrating fitting and detachment of a workpiece to and from a workpiece holder for polishing by a claw-shaped attachment / detachment jig.

[Description of Signs] 1 Template 1a Recess hole 3 Backing material 8 Concave 9 Positioning hole

Claims (6)

[Claims] 1. A polishing work holder, in which a template having a recess hole into which a work is fitted and a backing material made of an elastic body for holding the work are fixed to each other. In addition, a workpiece holder for polishing is characterized in that a recess is provided at a position other than the end of the periphery of the recess hole. 2. The workpiece holder for polishing according to claim 1, wherein said recess is penetrated. 3. The recess according to claim 1, wherein the recess is evenly divided into four or more equal parts starting from an intersection of a vertical line from the center of the recess and the outer circumference. Polishing workpiece holder. 4. The workpiece holder for polishing according to claim 1, wherein a positioning hole is provided in a portion of the template where the recess hole is not formed, when the template is mounted on a polishing machine upper surface plate. 5. The method for polishing a workpiece using the workpiece holder for polishing according to claim 1, wherein a plurality of recess holes are formed in the template. 6. A method for polishing a workpiece to bring a processing surface of the workpiece into sliding contact with a polishing pad provided on a polishing platen, wherein the holder for polishing the workpiece is provided on a holder for polishing the workpiece. A method for polishing a workpiece, comprising using the workpiece holder for polishing according to any one of claims 1 to 5.