JP2000195662A - Organic el element and its manufacture - Google Patents

Organic el element and its manufacture

Info

Publication number
JP2000195662A
JP2000195662A JP10373537A JP37353798A JP2000195662A JP 2000195662 A JP2000195662 A JP 2000195662A JP 10373537 A JP10373537 A JP 10373537A JP 37353798 A JP37353798 A JP 37353798A JP 2000195662 A JP2000195662 A JP 2000195662A
Authority
JP
Japan
Prior art keywords
organic
water
dispersion medium
layer
sealing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10373537A
Other languages
Japanese (ja)
Inventor
Satoru Tanaka
哲 田中
Toshio Miyauchi
寿男 宮内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Futaba Corp
Original Assignee
Futaba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Futaba Corp filed Critical Futaba Corp
Priority to JP10373537A priority Critical patent/JP2000195662A/en
Publication of JP2000195662A publication Critical patent/JP2000195662A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/846Passivation; Containers; Encapsulations comprising getter material or desiccants

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

PROBLEM TO BE SOLVED: To effectively suppress production of a dark spot by efficiently catching moisture in an element by a water catching material, as for an organic EL element. SOLUTION: An anode 3 of ITO, an organic layer 4 and a cathode 8 are on a substrate 2. A container part 9 is adhered to the substrate 2 by an adhesive 10 in a dry atmosphere. The container part 9 has a frame part 11 and a recess 12. A water catching layer 13 is in the recess 12. The water catching layer 13 is obtained by putting 2g of calcium oxide powder in a liquid obtained by dissolving 1g of hydroxy-propyl-cellulose in 10 cc of butyl carbitol in advance, sufficiently stirring it, pouring the liquid in the recess 12 of the container part 9, vaporizing the solvent by heating it after distributing it throughout the entire recess, and adhering its solid component. Since the water catching layer 13 is provided in a wide area throughout the almost entire internal surface of the container part 9, an absorbing area of moisture gets larger than that in the past. A quantity of entire water catching material is also bigger than that in the past. No other material to fix the water catching material is required. The depth of the recess is small, and the thickness of the element as a whole is small. Production of harmful dark spot is effectively suppressed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、水分を吸着する捕
水材を素子内に備えた有機EL素子と、その製造方法に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic EL device having a water-absorbing material for absorbing moisture therein, and a method for manufacturing the same.

【0002】[0002]

【従来の技術】有機EL素子は、蛍光性有機化合物を含
む薄膜を陰極と陽極の間に挟んだ構造であり、前記薄膜
に正孔及び電子を注入して再結合させることにより励起
子(エキシトン)を生成させ、この励起子が失活する際
の光の放出(蛍光・燐光)を利用して表示を行う素子で
ある。
2. Description of the Related Art An organic EL device has a structure in which a thin film containing a fluorescent organic compound is sandwiched between a cathode and an anode. Holes and electrons are injected into the thin film and recombined to form excitons. ) Is generated, and display is performed using light emission (fluorescence / phosphorescence) when the exciton is deactivated.

【0003】上記の原理に基づいて発光する有機EL素
子は、最近、10V程度の電圧で1000cd/m2
上の特性を示すことから、薄型で軽量な自発光型表示素
子として注目されている。
An organic EL device that emits light based on the above principle has recently attracted attention as a thin and lightweight self-luminous display device because it exhibits characteristics of 1000 cd / m 2 or more at a voltage of about 10 V.

【0004】[0004]

【発明が解決しようとする課題】ところで、上記のよう
に構成される有機EL素子の課題の一つに耐久性の改善
がある。その中でもダークスポットと呼ばれる非発光部
の発生と成長が有機EL素子の寿命を支配する要因とし
て大きな問題となっている。ダークスポットが発生する
原因としては、空気中の水分及び酸素の影響が最も大き
いとされ、特に水分は極めて微量でも大きな影響を及ぼ
すものとされている。
Incidentally, one of the problems of the organic EL device configured as described above is to improve durability. Among them, the generation and growth of non-light-emitting portions called dark spots are a major problem as a factor that governs the life of the organic EL element. The cause of the dark spot is considered to be the greatest effect of moisture and oxygen in the air. In particular, even a very small amount of moisture is considered to have a great effect.

【0005】そこで、素子への水分の侵入を極力避ける
ため、使用する有機材料の精製、成膜時の真空の質、素
子の封止など、水分を極力取り除く工夫をし、ドライプ
ロセスで有機EL素子の製作を行っている。それでも、
十分な特性が得られていないのが現状である。
Therefore, in order to minimize the invasion of moisture into the device, the organic EL used in the dry process is devised by purifying the organic material to be used, the quality of the vacuum at the time of film formation, the sealing of the device, etc. We are manufacturing devices. Still,
At present, sufficient characteristics have not been obtained.

【0006】このように、有機EL素子の課題の一つ
は、ダークスポットを根絶して長寿命化を図ることであ
る。この目的を達成するために、封止基板に酸化バリウ
ムを捕水剤として固定することにより、水分のゲッター
として使用する提案がなされている。
As described above, one of the problems of the organic EL element is to eradicate dark spots and extend the life. To achieve this object, it has been proposed to use barium oxide as a water getter by fixing barium oxide to a sealing substrate as a water catching agent.

【0007】図3は、このような捕水剤を有する従来の
有機EL素子21の構造を一例として示す断面図であ
る。22は基板、23はITOからなる第1電極、24
は発光層を含む有機層、25は第2電極である。基板2
2の上には、容器部27が接着剤で封着されて有機層等
を覆っている。図示しないが、第1及び第2の電極2
3,25は、封着部分を貫通して外部に導かれている。
基板22と容器部27で構成されたパッケージの内部に
は、露点が−70℃程度のN2 や空気等の活性の低いガ
スが封入されている。また、容器部27の中央の一部分
には凹部28が形成され、該凹部28内には捕水材29
が設けられている。この捕水材29はBaO等の粉粒体
からなり、凹部28を覆って容器部27の内面に貼り付
けられた水分透過性フィルム30によって凹部28内に
固定されている。
FIG. 3 is a cross-sectional view showing, as an example, the structure of a conventional organic EL element 21 having such a water catching agent. 22 is a substrate, 23 is a first electrode made of ITO, 24
Is an organic layer including a light emitting layer, and 25 is a second electrode. Substrate 2
On top of 2, a container 27 is sealed with an adhesive to cover the organic layer and the like. Although not shown, the first and second electrodes 2
3 and 25 are guided outside through the sealing portion.
The internal configuration package in the substrate 22 and the container portion 27, a dew point is less active gas such as N 2 or air of about -70 ° C. is sealed. A concave portion 28 is formed in a part of the center of the container portion 27, and a water catching material 29 is formed in the concave portion 28.
Is provided. The water catching material 29 is made of a granular material such as BaO, and is fixed in the concave portion 28 by a moisture permeable film 30 attached to the inner surface of the container 27 so as to cover the concave portion 28.

【0008】ところが、上述したように捕水材29を備
えた有機EL素子21であっても、これを連続点灯させ
ると、特に容器部27を基板22に封着した外周に近い
部分の発光エリアにダークスポットが多く発生し、表示
品位が低下するという問題が依然として発生していた。
また、容器部27の凹部28に捕水材29を入れて水分
透過性フィルム30で固定する構造は複雑であり工程が
面倒である。また、凹部28に粉粒状の捕水材29を入
れてフィルム30で固定する構造上、浅く広い凹部に多
くの捕水材を入れる構造にはしにくく、凹部の深さが大
きくなり、結果として素子全体としての厚さが大きくな
るという問題があった。
However, even if the organic EL element 21 provided with the water catching material 29 is continuously lit as described above, the light emitting area of the portion close to the outer periphery where the container portion 27 is sealed to the substrate 22, especially. However, there is still a problem that many dark spots are generated and display quality is deteriorated.
Further, the structure in which the water catching material 29 is put in the concave portion 28 of the container portion 27 and fixed by the moisture permeable film 30 is complicated, and the process is troublesome. In addition, since the structure in which the granular water-trapping material 29 is put in the concave portion 28 and fixed by the film 30 is difficult to have a structure in which many water-trapping materials are put in a shallow and wide concave portion, the depth of the concave portion becomes large. There has been a problem that the thickness of the entire device becomes large.

【0009】そこで、本発明は、十分な量の捕水材を簡
単な薄型の構造・製法で安定して素子内に設けることが
でき、これによって素子内の水分を効率的に捕らえてダ
ークスポットの発生及び成長を抑えることができる有機
EL素子とその製造方法を提供することを目的としてい
る。
Therefore, the present invention can stably provide a sufficient amount of water trapping material in a device by a simple and thin structure and manufacturing method. It is an object of the present invention to provide an organic EL device capable of suppressing generation and growth of the organic EL device and a method for manufacturing the same.

【0010】[0010]

【課題を解決するための手段】請求項1に記載された有
機EL素子(1)は、基板(2)と、前記基板の内面に
形成された第1の電極(陽極3)と、前記第1の電極の
上に形成された有機層(4)と、前記有機層の上に形成
された第2の電極(陰極8)と、前記第2の電極の上方
に配置されるとともに前記基板の内面の外周部に封着さ
れて前記有機層を覆う封止部材(容器部9)とを有する
有機EL素子において、捕水材を所定の厚さに固着させ
て成る捕水層(13)が、前記封止部材の内面に設けら
れたことを特徴としている。
The organic EL device (1) according to the present invention comprises a substrate (2), a first electrode (anode 3) formed on an inner surface of the substrate, and the organic EL device (1). An organic layer (4) formed on one of the electrodes, a second electrode (cathode 8) formed on the organic layer, and an In an organic EL device having a sealing member (container portion 9) sealed to the outer peripheral portion of the inner surface and covering the organic layer, a water catching layer (13) formed by fixing a water catching material to a predetermined thickness is provided. , Provided on the inner surface of the sealing member.

【0011】請求項2に記載された有機EL素子(1)
は、基板(2)と、前記基板の内面に形成された第1の
電極(陽極3)と、前記第1の電極の上に形成された有
機層(4)と、前記有機層の上に形成された第2の電極
(陰極8)と、前記第2の電極の上方に配置されるとと
もに前記基板の内面の外周部に封着されて前記有機層を
覆う封止部材(容器部9)とを有する有機EL素子にお
いて、固着媒体を介して捕水材を所定の厚さに固着させ
て成る捕水層(13)が、前記封止部材の内面に設けら
れたことを特徴としている。
An organic EL device according to claim 2 (1).
Comprises a substrate (2), a first electrode (anode 3) formed on the inner surface of the substrate, an organic layer (4) formed on the first electrode, and A formed second electrode (cathode 8), and a sealing member (container section 9) disposed above the second electrode and sealed to the outer peripheral portion of the inner surface of the substrate to cover the organic layer. And a water trapping layer (13) formed by fixing a water trapping material to a predetermined thickness via a fixing medium is provided on the inner surface of the sealing member.

【0012】請求項3に記載された有機EL素子は、請
求項2記載の有機EL素子において、前記固着媒体が揮
発性の分散媒であり、前記分散媒に分散した前記捕水材
を前記封止部材の内面に塗布して前記分散媒を蒸発させ
ることにより、前記捕水層(13)を形成したことを特
徴としている。
According to a third aspect of the present invention, in the organic EL element according to the second aspect, the fixing medium is a volatile dispersion medium, and the water trapping material dispersed in the dispersion medium is sealed. The water trapping layer (13) is formed by coating the inner surface of the stop member and evaporating the dispersion medium.

【0013】請求項4に記載された有機EL素子は、請
求項3記載の有機EL素子において、前記分散媒が有機
溶剤であることを特徴としている。
According to a fourth aspect of the present invention, there is provided the organic EL element according to the third aspect, wherein the dispersion medium is an organic solvent.

【0014】請求項5に記載された有機EL素子は、請
求項3記載の有機EL素子において、前記固着媒体がポ
リマーであることを特徴としている。
According to a fifth aspect of the present invention, in the organic EL element of the third aspect, the fixing medium is a polymer.

【0015】請求項6に記載された有機EL素子は、請
求項5記載の有機EL素子において、前記ポリマーが紫
外線硬化樹脂であり、紫外線硬化樹脂に分散した前記捕
水材を前記封止部材の内面に塗布し、紫外線を照射する
ことにより、前記捕水層(13)を形成したことを特徴
としている。
According to a sixth aspect of the present invention, in the organic EL element according to the fifth aspect, the polymer is an ultraviolet curable resin, and the water trapping material dispersed in the ultraviolet curable resin is used as the sealing member. The water trapping layer (13) is formed by applying the ultraviolet light to the inner surface and irradiating the inner surface with ultraviolet rays.

【0016】請求項7に記載された有機EL素子は、請
求項2記載の有機EL素子(1)において、前記固着媒
体が揮発性の分散媒とポリマーであり、前記ポリマーを
前記分散媒に溶解した液体に、前記捕水材を分散し、前
記液体を前記封止部材の内面に塗布して前記分散媒を蒸
発させることにより、前記捕水層(13)を形成したこ
とを特徴としている。
According to a seventh aspect of the present invention, in the organic EL element according to the second aspect, the fixing medium is a volatile dispersion medium and a polymer, and the polymer is dissolved in the dispersion medium. The water-trapping material is dispersed in the liquid, and the liquid is applied to the inner surface of the sealing member to evaporate the dispersion medium, thereby forming the water-trapping layer (13).

【0017】請求項8に記載された有機EL素子は、請
求項2記載の有機EL素子(1)において、前記固着媒
体が揮発性の分散媒と紫外線硬化樹脂であり、前記紫外
線硬化樹脂を前記分散媒に溶解した液体に、前記捕水材
を分散し、前記液体を前記封止部材の内面に塗布して前
記分散媒を蒸発させ、紫外線を照射することにより前記
紫外線硬化樹脂を硬化させ、前記捕水層(13)を形成
したことを特徴としている。
According to an eighth aspect of the present invention, in the organic EL element (1) according to the second aspect, the fixing medium is a volatile dispersion medium and an ultraviolet curable resin, and In a liquid dissolved in a dispersion medium, the water catching material is dispersed, the liquid is applied to the inner surface of the sealing member to evaporate the dispersion medium, and the ultraviolet curing resin is cured by irradiating ultraviolet rays, The water trapping layer (13) is formed.

【0018】請求項9に記載された有機EL素子の製造
方法は、基板と、前記基板の内面に形成された第1の電
極(陽極3)と、前記第1の電極の上に形成された有機
層(4)と、前記有機層の上に形成された第2の電極
(陰極8)と、前記第2の電極の上方に配置されるとと
もに前記基板の内面の外周部に封着されて前記有機層を
覆う封止部材(容器部9)とを有する有機EL素子の製
造方法において、捕水材と固着媒体を混合し、これを前
記封止部材の内面に塗布し、所定の固着処理を施して前
記捕水材からなる所定の厚さの捕水層(13)を形成す
ることを特徴としている。
According to a ninth aspect of the present invention, in the method for manufacturing an organic EL device, the substrate, the first electrode (anode 3) formed on the inner surface of the substrate, and the first electrode are formed on the first electrode. An organic layer (4), a second electrode (cathode 8) formed on the organic layer, and a second electrode (cathode 8) disposed above the second electrode and sealed to an outer peripheral portion of an inner surface of the substrate. In a method of manufacturing an organic EL device having a sealing member (container portion 9) covering the organic layer, a water-trapping material and a fixing medium are mixed, and the mixture is applied to the inner surface of the sealing member, and a predetermined fixing process is performed. To form a water catching layer (13) of a predetermined thickness made of the water catching material.

【0019】請求項10に記載された有機EL素子の製
造方法は、請求項9記載の有機EL素子の製造方法にお
いて、前記固着媒体が揮発性の分散媒であり、前記分散
媒に分散した前記捕水材を前記封止部材の内面に塗布し
て前記分散媒を蒸発させることにより、前記捕水層(1
3)を形成することを特徴としている。
According to a tenth aspect of the present invention, in the method for manufacturing an organic EL element according to the ninth aspect, the fixing medium is a volatile dispersion medium, and the fixed medium is dispersed in the dispersion medium. By applying a water catching material to the inner surface of the sealing member and evaporating the dispersion medium, the water catching layer (1
3) is formed.

【0020】請求項11に記載された有機EL素子の製
造方法は、請求項9記載の有機EL素子の製造方法にお
いて、前記固着媒体が紫外線硬化樹脂であり、紫外線硬
化樹脂に分散した前記捕水材を前記封止部材の内面に塗
布し、紫外線を照射することにより、前記捕水層(1
3)を形成することを特徴としている。
[0020] In a method of manufacturing an organic EL device according to a twelfth aspect, in the method of manufacturing an organic EL device according to the ninth aspect, the fixing medium is an ultraviolet curable resin, and the water trapping agent dispersed in the ultraviolet curable resin. By applying a material to the inner surface of the sealing member and irradiating ultraviolet rays, the water trapping layer (1) is formed.
3) is formed.

【0021】請求項12に記載された有機EL素子の製
造方法は、請求項9記載の有機EL素子の製造方法にお
いて、前記固着媒体が揮発性の分散媒とポリマーであ
り、前記ポリマーを前記分散媒に溶解した液体に、前記
捕水材を分散し、前記液体を前記封止部材の内面に塗布
して前記分散媒を蒸発させることにより、前記捕水層
(13)を形成することを特徴としている。
According to a twelfth aspect of the present invention, in the method for manufacturing an organic EL element according to the ninth aspect, the fixing medium is a volatile dispersion medium and a polymer. The water trapping layer is formed by dispersing the water catching material in a liquid dissolved in a medium, applying the liquid to an inner surface of the sealing member, and evaporating the dispersion medium. And

【0022】請求項13に記載された有機EL素子の製
造方法は、請求項9記載の有機EL素子の製造方法にお
いて、前記固着媒体が揮発性の分散媒と紫外線硬化樹脂
であり、前記紫外線硬化樹脂を前記分散媒に溶解した液
体に、前記捕水材を分散し、前記液体を前記封止部材の
内面に塗布して前記分散媒を蒸発させ、紫外線を照射す
ることにより前記紫外線硬化樹脂を硬化させ、前記捕水
層(13)を形成することを特徴としている。
According to a thirteenth aspect of the present invention, in the method for manufacturing an organic EL element according to the ninth aspect, the fixing medium is a volatile dispersion medium and an ultraviolet curable resin, The liquid obtained by dissolving the resin in the dispersion medium, the water-absorbing material is dispersed, the liquid is applied to the inner surface of the sealing member to evaporate the dispersion medium, and the ultraviolet-curable resin is irradiated with ultraviolet rays. It is characterized by being cured to form the water catching layer (13).

【0023】[0023]

【発明の実施の形態】本発明の実施の形態を図1及び図
2を参照して説明する。 (1) 第1の例 本例の有機EL素子1の構造を図1を参照して説明す
る。絶縁性及び透光性を有するガラス等の基板2を有し
ている。基板2の上には所定パターンの陽極3が形成さ
れている。本例の陽極3は、ITO(Indium Tin Oxid
e)等の透明導電膜をストライプ状にパターンニングし
たものである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. (1) First Example The structure of the organic EL element 1 of this example will be described with reference to FIG. A substrate 2 made of glass or the like having an insulating property and a light transmitting property is provided. An anode 3 having a predetermined pattern is formed on the substrate 2. The anode 3 in this example is made of ITO (Indium Tin Oxid
The transparent conductive film of e) is patterned in a stripe shape.

【0024】陽極3の上には有機化合物材料の薄膜によ
る有機層4が積層形成されている。有機層4は、例えば
陽極3の上に成膜された銅フタロシアニン(CuPc)
有機膜からなるホール注入層5と、ホール注入層5の上
に成膜されたα−NPD(Bis(N−(1−naphtyl
−N−phneyl)benzidine )有機膜からなるホール輸送
層6と、ホール輸送層6の上に成膜されたトリス(8−
キノリノラト)アルミニウム(Alq3 )有機膜からな
る発光層兼電子輸送層7の3層構造からなる。
On the anode 3, an organic layer 4 of a thin film of an organic compound material is formed. The organic layer 4 is formed, for example, of copper phthalocyanine (CuPc) formed on the anode 3.
A hole injection layer 5 made of an organic film, and α-NPD (Bis (N- (1-naphtyl
-N-phneyl) benzidine) A hole transport layer 6 composed of an organic film, and a tris (8-
It has a three-layer structure of a light emitting layer and an electron transporting layer 7 made of a (quinolinolato) aluminum (Alq 3 ) organic film.

【0025】有機層4の上には陰極8が形成されてい
る。陰極8は、例えばAl−Li等の金属薄膜が所定パ
ターン形状(例えば陽極とXYマトリクスを形成するよ
うに、陽極と直交するストライプ状)にパターンニング
されたものである。
The cathode 8 is formed on the organic layer 4. The cathode 8 is formed by patterning a metal thin film of, for example, Al-Li in a predetermined pattern shape (for example, a stripe shape orthogonal to the anode so as to form an XY matrix with the anode).

【0026】基板2の外周部分には、水分を極力取り除
いた不活性ガス(例えばドライ窒素)やドライエアによ
るドライ雰囲気において、封止部材としての容器部9が
接着剤10により固着されている。
A container 9 as a sealing member is fixed to the outer peripheral portion of the substrate 2 with an adhesive 10 in a dry atmosphere using an inert gas (eg, dry nitrogen) or dry air from which water has been removed as much as possible.

【0027】容器部9は矩形の板状であるが、周囲の枠
部(凸条部)11を残して、その内側に浅い凹部12が
形成されている。この凹部12の内部に、捕水層13が
形成されている。この捕水層13は、酸化カルシウム等
の粉粒状の捕水材を固着媒体を介して所定の厚さの層状
に固化させて形成したものである。固着媒体とは、粉粒
状の捕水材を一定の形状に固着させた状態とするため
に、粉粒状の捕水材に混合する他の材料を総称する語で
ある。本例では、有機溶剤等の揮発性分散媒や、セルロ
ースや樹脂等のポリマーを含む。
The container 9 has a rectangular plate shape, and a shallow concave portion 12 is formed inside the container portion 9 except for a peripheral frame portion (projected ridge portion) 11. A water trapping layer 13 is formed inside the recess 12. The water catching layer 13 is formed by solidifying a powdery water catching material such as calcium oxide into a layer having a predetermined thickness via a fixing medium. The term "fixing medium" is a general term for other materials that are mixed with the particulate water-trapping material in order to fix the particulate water-trapping material in a fixed shape. In the present example, a volatile dispersion medium such as an organic solvent and a polymer such as cellulose and resin are included.

【0028】なお、ここで「固着媒体を介して…形成し
た」とは、少なくとも形成時(層を形成する形成工程)
においては固着媒体が捕水材に混合されており、固着媒
体の作用・機能を利用して捕水材を所定の層形状に成形
したことを意味するものであるが、捕水材を所定の形状
に成形して得た捕水層に固着媒体が成分として残留して
いるか否かについて言及するものではない。即ち、形成
された後の捕水層には固着媒体が残留していてもよい
し、していなくてもよい。捕水層に固着媒体が残るか否
かは、固着媒体の種類・性質による。
Here, "formed through a fixing medium" means at least at the time of formation (forming step of forming a layer).
In the above, the fixation medium is mixed with the water catching material, which means that the water catching material is formed into a predetermined layer shape using the action and function of the fixation medium. It does not mention whether or not the fixation medium remains as a component in the water-trapping layer obtained by shaping into a shape. That is, the fixation medium may or may not remain in the formed water trapping layer. Whether or not the fixation medium remains in the water-trapping layer depends on the type and properties of the fixation medium.

【0029】本例の構造によれば、容器部9の内面側の
ほぼ全面にわたる広い面積に捕水層13が設けられるの
で、水分の吸着面積が従来よりも大きくなり、全体とし
ての捕水材の量も従来より多くできる。しかも捕水材を
固定する他の部材は必要ない。また、凹部12の深さは
小さくてすみ、従来のように凹部を設けるために容器部
の一部を外側に突出した構造にする必要もなく、素子全
体としての厚さも小さくて済む。
According to the structure of the present embodiment, the water trapping layer 13 is provided over a large area over substantially the entire inner surface of the container part 9, so that the water absorption area becomes larger than before, and the water trapping material as a whole is formed. Can be made larger than before. Moreover, other members for fixing the water catching material are not required. Further, the depth of the concave portion 12 may be small, and it is not necessary to form a part of the container portion so as to protrude outward in order to provide the concave portion as in the conventional case, and the thickness of the entire device may be small.

【0030】次に、本例の有機EL素子1の製造方法に
ついて図2を参照して説明する。露点−70℃以下のド
ライ窒素に置換したグローブボックス内で、ポリマーと
してのヒドロキシプロピルセルロース1gを有機溶剤と
してのブチルカルビトール10ccに予め溶解しておい
た液に、酸化カルシウム粉末2gを入れて十分に攪拌し
た。この液体を分散液15と呼ぶ。
Next, a method for manufacturing the organic EL device 1 of this embodiment will be described with reference to FIG. In a glove box replaced with dry nitrogen having a dew point of −70 ° C. or less, 2 g of calcium oxide powder is sufficiently added to a liquid in which 1 g of hydroxypropyl cellulose as a polymer is dissolved in 10 cc of butyl carbitol as an organic solvent in advance. Was stirred. This liquid is referred to as dispersion liquid 15.

【0031】図2(a)に示すように、枠部11の内側
を深さ約500μmの凹部12に加工した厚さ1.1m
mの容器部9を用意する。図2(b)に示すように、同
様のグローブボックス内で、前記容器部9の凹部12内
に前記分散液15を注ぎ、全体に行き渡らせた後、15
0℃のホットプレート上で加熱して溶剤を蒸発させ、固
定成分を凹部12内に固着させた。
As shown in FIG. 2A, the inside of the frame portion 11 is formed into a concave portion 12 having a depth of about 500 μm and has a thickness of 1.1 m.
A container section 9 of m is prepared. As shown in FIG. 2 (b), in a similar glove box, the dispersion liquid 15 is poured into the concave portion 12 of the container portion 9 and spread over the whole.
The solvent was evaporated by heating on a hot plate at 0 ° C., and the fixed component was fixed in the recess 12.

【0032】次に、前記容器部9を用いて素子の作成を
行う。まず、任意のITOパターンを形成した基板2
(厚さ1.1mm)をアセトンで超音波洗浄した後、U
Vオゾン洗浄する。
Next, an element is formed using the container portion 9. First, a substrate 2 on which an arbitrary ITO pattern is formed
(Thickness: 1.1 mm) after ultrasonic cleaning with acetone,
V ozone cleaning.

【0033】次に、蒸着装置内において、前記基板2に
CuPc20nm、α−NPD30nm、Alq3 50
nm、Al:Li200nmの各層を、大気に曝すこと
なく順次成膜する。そして、露点−70℃以下のドライ
窒素で蒸着装置をパージし、同様の窒素で置換したグロ
ーブボックス内に、大気に曝すことなく前記基板2を移
動させた。
Next, in the vapor deposition device, CuPc 20 nm, α-NPD 30 nm, Alq 350
nm, Al: Each layer of 200 nm of Li is sequentially formed without exposing to air. Then, the deposition apparatus was purged with dry nitrogen having a dew point of −70 ° C. or less, and the substrate 2 was moved into a glove box replaced with the same nitrogen without being exposed to the atmosphere.

【0034】そして、前記グローブボックス内に予め用
意しておいた前記容器部9の枠部11に、紫外線硬化樹
脂(接着剤10)を塗布し、これを基板2の上面に取り
付けた。そして、紫外線を照射して硬化させ、基板2と
容器部9を固定した。
Then, an ultraviolet curable resin (adhesive 10) was applied to the frame portion 11 of the container portion 9 prepared in advance in the glove box, and this was attached to the upper surface of the substrate 2. Then, the substrate 2 and the container 9 were fixed by irradiating ultraviolet rays to cure the substrate 2.

【0035】これによって、縦64ドット、横128ド
ットの単純マトリクス素子が完成した。素子の厚さは、
2.3mmであった。
As a result, a simple matrix device having 64 dots vertically and 128 dots horizontally was completed. The thickness of the element is
2.3 mm.

【0036】本例の製造方法によれば、容器部9の内面
側のほぼ全面にわたる広い面積範囲に凹部12を設けて
多くの捕水材を入れる構造を実現できる。このため、捕
水材の全体としての量が多く、かつ吸着面積が大きくて
も凹部の深さは小さくでき、結果として素子全体として
の厚さを小さく抑えることができる。
According to the manufacturing method of the present embodiment, it is possible to realize a structure in which the concave portion 12 is provided in a wide area covering almost the entire inner surface side of the container portion 9 and a large amount of water catching material is inserted. For this reason, the depth of the concave portion can be reduced even when the amount of the water catching material as a whole is large and the adsorption area is large, and as a result, the thickness of the entire device can be suppressed to be small.

【0037】本例の有機EL素子について寿命試験を行
った。上記の工程で作成した有機EL素子のITO電極
を正極、Al:Li電極を負極に接続し、直流電流を印
加し、電流密度10mA/cm2 の定電流駆動で連続点
灯させた。その結果、1000時間経過後の発光状態は
初期を変わらず、ダークスポットの発生は表示エリアの
どこにも見られなかった。引き続き試験を行い、500
0時間経過後には、直径数μmのダークスポットが数個
発生したが、発生場所に特定の傾向はなく、表示エリア
の中央部と端部、又は捕水材に対面する部分と、そうで
ない部分とで表示品位に差異は認められなかった。
A life test was performed on the organic EL device of this example. The ITO electrode of the organic EL device prepared in the above process was connected to the positive electrode, the Al: Li electrode was connected to the negative electrode, a direct current was applied, and the device was continuously lit by a constant current drive at a current density of 10 mA / cm 2 . As a result, the light emission state after the elapse of 1000 hours did not change from the initial state, and no dark spot was observed anywhere in the display area. Continue to test, 500
After 0 hours, several dark spots with a diameter of several μm were generated. However, there was no particular tendency in the place where the dark spots were generated, and the central part and the end part of the display area, the part facing the water catching material, and the part not so No difference was found in the display quality between

【0038】(2) 第2の例 捕水材に酸化バリウムを用いた。その他は第1の例と同
一である。この素子を、電流密度10mA/cm2 の定
電流駆動で連続点灯させた。その結果、1000時間経
過後の発光状態は初期を変わらず、ダークスポットの発
生は表示エリアのどこにも見られなかった。引き続き試
験を行い、5000時間経過後には、直径数μmのダー
クスポットが数個発生したが、発生場所に特定の傾向は
なく、表示エリアの中央部と端部、又は捕水材に対面す
る部分と、そうでない部分とで表示品位に差異は認めら
れなかった。
(2) Second Example Barium oxide was used as a water catching material. Others are the same as the first example. The device was continuously lit by constant current driving at a current density of 10 mA / cm 2 . As a result, the light emission state after the elapse of 1000 hours did not change from the initial state, and no dark spot was observed anywhere in the display area. The test was continued, and after 5,000 hours, several dark spots with a diameter of several μm were generated. However, there was no particular tendency in the place where the dark spots occurred, and the center and the end of the display area, or the portion facing the water catching material No difference was found in the display quality between the other parts and those not so.

【0039】(3) 第3の例 有機溶剤としてのブチルカルビトール10ccに酸化カ
ルシウム粉末2gを入れて十分に攪拌し、分散液とし
た。即ち、第1の例の分散液からセルロースを省いたも
のを分散液とした。この点以外は、第1の例と同一であ
る。
(3) Third Example A dispersion was prepared by adding 2 g of calcium oxide powder to 10 cc of butyl carbitol as an organic solvent and sufficiently stirring. That is, a dispersion obtained by removing cellulose from the dispersion of the first example was used as a dispersion. Except for this point, it is the same as the first example.

【0040】この素子を、電流密度10mA/cm2
定電流駆動で連続点灯させた。その結果、1000時間
経過後の発光状態は初期を変わらず、ダークスポットの
発生は表示エリアのどこにも見られなかった。引き続き
試験を行い、5000時間経過後には、直径数μmのダ
ークスポットが数個発生したが、発生場所に特定の傾向
はなく、表示エリアの中央部と端部、又は捕水材に対面
する部分と、そうでない部分とで表示品位に差異は認め
られなかった。
The device was continuously lit by constant current driving at a current density of 10 mA / cm 2 . As a result, the light emission state after the elapse of 1000 hours did not change from the initial state, and no dark spot was observed anywhere in the display area. The test was continued, and after 5,000 hours, several dark spots with a diameter of several μm were generated. However, there was no particular tendency in the place where the dark spots occurred, and the center and the end of the display area, or the portion facing the water catching material No difference was found in the display quality between the other parts and those not so.

【0041】(4) 第4の例 固着媒体であるポリマーとしての紫外線硬化樹脂と酸化
カルシウム粉末とを混合・攪拌して分散液とした。本例
の場合には、使用に供される紫外線硬化樹脂は流動性を
有しており、これによって有機溶剤等をさらに加えなく
ても捕水材と混合することができる。分散液の成分以外
は、第1の例と同一である。
(4) Fourth Example An ultraviolet curable resin as a polymer as a fixing medium and calcium oxide powder were mixed and stirred to form a dispersion. In the case of this example, the ultraviolet curable resin to be used has fluidity, so that it can be mixed with the water catching material without further adding an organic solvent or the like. Except for the components of the dispersion, they are the same as the first example.

【0042】この素子を、電流密度10mA/cm2
定電流駆動で連続点灯させた。その結果、1000時間
経過後の発光状態は初期を変わらず、ダークスポットの
発生は表示エリアのどこにも見られなかった。引き続き
試験を行い、5000時間経過後には、直径数μmのダ
ークスポットが数個発生したが、発生場所に特定の傾向
はなく、表示エリアの中央部と端部、又は捕水材に対面
する部分と、そうでない部分とで表示品位に差異は認め
られなかった。
The device was continuously lit by a constant current drive at a current density of 10 mA / cm 2 . As a result, the light emission state after the elapse of 1000 hours did not change from the initial state, and no dark spot was observed anywhere in the display area. The test was continued, and after 5,000 hours, several dark spots with a diameter of several μm were generated. However, there was no particular tendency in the place where the dark spots occurred, and the center and the end of the display area, or the portion facing the water catching material No difference was found in the display quality between the other parts and those not so.

【0043】(5) その他の例 固着媒体であるポリマーとしてのセルロースと捕水材と
を混合・攪拌して分散液としてもよい。この場合には、
使用に供されるセルロースが、製品として何らかの流動
性を有し、これによって有機溶剤等をさらに加えなくて
も捕水材と混合しうることが必要である。
(5) Other Examples Cellulose as a polymer as a fixing medium and a water catching material may be mixed and stirred to form a dispersion. In this case,
It is necessary that the cellulose to be used has some fluidity as a product and can be mixed with the water catching material without further adding an organic solvent or the like.

【0044】また、固着媒体が揮発性の分散媒(有機溶
剤等)と紫外線硬化樹脂であり、紫外線硬化樹脂を分散
媒に溶解した液体に、捕水材を分散して分散液とし、こ
の分散液を封止部材の内面に塗布して分散媒を蒸発さ
せ、さらに紫外線を照射することにより紫外線硬化樹脂
を硬化させ、捕水層を形成してもよい。このように作成
した有機EL素子も、前記第1〜第4の例と同様の優れ
た性能を示す。
Further, the fixing medium is a volatile dispersion medium (such as an organic solvent) and an ultraviolet curable resin, and a water trapping material is dispersed in a liquid obtained by dissolving the ultraviolet curable resin in the dispersion medium to form a dispersion. The liquid trapping layer may be formed by applying a liquid to the inner surface of the sealing member to evaporate the dispersion medium and further irradiating ultraviolet rays to cure the ultraviolet curable resin. The organic EL element thus produced also exhibits excellent performance similar to those of the first to fourth examples.

【0045】[0045]

【発明の効果】本発明によれば、有機溶剤やポリマー等
の固着媒体を用いて捕水材を所定の厚さに固め、容器部
の内面に捕水層を形成した。このような構造乃至製造方
法によれば、前記捕水層は、容器部の内面の広い面積に
わたって比較的薄く作ることができ、かつ捕水層を構成
する捕水材の量も従来の有機EL素子に比べて多くする
ことができた。従って、容器部と基板の封止部の近傍に
従来多く現れていたダークスポットは見られなくなり、
長時間にわたって初期と同様の発光状態を保つことが可
能となった。また、このように捕水材を広い面積にわた
って設けることが容易であるため、製造コストの低減が
図れる。さらに、発光面積の減少がほとんどないため、
非発光部に起因する電圧の上昇が抑えられ、消費電力の
増加が少なくなる。
According to the present invention, the water catching material is solidified to a predetermined thickness by using a fixing medium such as an organic solvent or a polymer, and a water catching layer is formed on the inner surface of the container. According to such a structure or a manufacturing method, the water-trapping layer can be made relatively thin over a wide area of the inner surface of the container portion, and the amount of the water-trapping material constituting the water-trapping layer is the same as that of the conventional organic EL. The number could be increased as compared with the element. Therefore, the dark spots that have conventionally appeared in the vicinity of the container and the sealing portion of the substrate are no longer seen,
It became possible to maintain the same light emitting state as the initial state for a long time. In addition, since the water catching material can be easily provided over a wide area, the manufacturing cost can be reduced. Furthermore, since there is almost no decrease in the light emitting area,
An increase in voltage due to the non-light emitting portion is suppressed, and an increase in power consumption is reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態の第1の例を示す断面図で
ある。
FIG. 1 is a cross-sectional view showing a first example of an embodiment of the present invention.

【図2】本発明の実施の形態の第1の例における捕水層
の製造工程の一部を連続的に示す図である。
FIG. 2 is a diagram continuously showing a part of a manufacturing process of a water catchment layer in the first example of the embodiment of the present invention.

【図3】従来の有機EL素子の一例を示す断面図であ
る。
FIG. 3 is a cross-sectional view illustrating an example of a conventional organic EL element.

【符号の説明】[Explanation of symbols]

1 有機EL素子 2 基板 3 第1の電極としての陽極 4 有機層 8 第2の電極としての陰極 9 封止部材としての容器部 11 枠部 12 凹部 13 捕水層 15 分散液 DESCRIPTION OF SYMBOLS 1 Organic EL element 2 Substrate 3 Anode as 1st electrode 4 Organic layer 8 Cathode as 2nd electrode 9 Container part as a sealing member 11 Frame part 12 Depression 13 Water catching layer 15 Dispersion liquid

Claims (13)

【特許請求の範囲】[Claims] 【請求項1】 基板と、前記基板の内面に形成された第
1の電極と、前記第1の電極の上に形成された有機層
と、前記有機層の上に形成された第2の電極と、前記第
2の電極の上方に配置されるとともに前記基板の内面の
外周部に封着されて前記有機層を覆う封止部材とを有す
る有機EL素子において、 捕水材を所定の厚さに固着させて成る捕水層が、前記封
止部材の内面に設けられたことを特徴とする有機EL素
子。
1. A substrate, a first electrode formed on an inner surface of the substrate, an organic layer formed on the first electrode, and a second electrode formed on the organic layer And a sealing member disposed above the second electrode and sealed to the outer peripheral portion of the inner surface of the substrate to cover the organic layer, wherein the water catching material has a predetermined thickness. An organic EL device, wherein a water-trapping layer fixed to the sealing member is provided on the inner surface of the sealing member.
【請求項2】 基板と、前記基板の内面に形成された第
1の電極と、前記第1の電極の上に形成された有機層
と、前記有機層の上に形成された第2の電極と、前記第
2の電極の上方に配置されるとともに前記基板の内面の
外周部に封着されて前記有機層を覆う封止部材とを有す
る有機EL素子において、 固着媒体を介して捕水材を所定の厚さに固着させて成る
捕水層が、前記封止部材の内面に設けられたことを特徴
とする有機EL素子。
2. A substrate, a first electrode formed on an inner surface of the substrate, an organic layer formed on the first electrode, and a second electrode formed on the organic layer. And a sealing member disposed above the second electrode and sealed to the outer peripheral portion of the inner surface of the substrate to cover the organic layer. An organic EL device, wherein a water-trapping layer formed by fixing to a predetermined thickness is provided on the inner surface of the sealing member.
【請求項3】 前記固着媒体が揮発性の分散媒であり、
前記分散媒に分散した前記捕水材を前記封止部材の内面
に塗布して前記分散媒を蒸発させることにより、前記捕
水層を形成したことを特徴とする請求項2記載の有機E
L素子。
3. The fixing medium is a volatile dispersion medium,
3. The organic E according to claim 2, wherein the water trapping layer is formed by applying the water trapping material dispersed in the dispersion medium to an inner surface of the sealing member and evaporating the dispersion medium.
L element.
【請求項4】 前記分散媒が有機溶剤である請求項3記
載の有機EL素子。
4. The organic EL device according to claim 3, wherein the dispersion medium is an organic solvent.
【請求項5】 前記固着媒体がポリマーである請求項3
記載の有機EL素子。
5. The fixing medium according to claim 3, wherein the fixing medium is a polymer.
The organic EL device according to the above.
【請求項6】 前記ポリマーが紫外線硬化樹脂であり、
紫外線硬化樹脂に分散した前記捕水材を前記封止部材の
内面に塗布し、紫外線を照射することにより、前記捕水
層を形成したことを特徴とする請求項5記載の有機EL
素子。
6. The polymer is an ultraviolet curable resin,
6. The organic EL according to claim 5, wherein the water catching material dispersed in an ultraviolet curable resin is applied to an inner surface of the sealing member, and the water catching layer is formed by irradiating ultraviolet rays.
element.
【請求項7】 前記固着媒体が揮発性の分散媒とポリマ
ーであり、前記ポリマーを前記分散媒に溶解した液体
に、前記捕水材を分散し、前記液体を前記封止部材の内
面に塗布して前記分散媒を蒸発させることにより、前記
捕水層を形成したことを特徴とする請求項2記載の有機
EL素子。
7. The fixing medium is a volatile dispersion medium and a polymer, the water catching material is dispersed in a liquid in which the polymer is dissolved in the dispersion medium, and the liquid is applied to an inner surface of the sealing member. The organic EL device according to claim 2, wherein the water trapping layer is formed by evaporating the dispersion medium.
【請求項8】 前記固着媒体が揮発性の分散媒と紫外線
硬化樹脂であり、前記紫外線硬化樹脂を前記分散媒に溶
解した液体に、前記捕水材を分散し、前記液体を前記封
止部材の内面に塗布して前記分散媒を蒸発させ、紫外線
を照射することにより前記紫外線硬化樹脂を硬化させ、
前記捕水層を形成したことを特徴とする請求項2記載の
有機EL素子。
8. The fixing medium is a volatile dispersion medium and an ultraviolet curable resin, the water catching material is dispersed in a liquid in which the ultraviolet curable resin is dissolved in the dispersion medium, and the liquid is sealed by the sealing member. Evaporating the dispersion medium by applying to the inner surface of, curing the ultraviolet curable resin by irradiating ultraviolet rays,
The organic EL device according to claim 2, wherein the water trapping layer is formed.
【請求項9】 基板と、前記基板の内面に形成された第
1の電極と、前記第1の電極の上に形成された有機層
と、前記有機層の上に形成された第2の電極と、前記第
2の電極の上方に配置されるとともに前記基板の内面の
外周部に封着されて前記有機層を覆う封止部材とを有す
る有機EL素子の製造方法において、 捕水材と固着媒体を混合し、これを前記封止部材の内面
に塗布し、所定の固着処理を施して前記捕水材からなる
所定の厚さの捕水層を形成することを特徴とする有機E
L素子の製造方法。
9. A substrate, a first electrode formed on an inner surface of the substrate, an organic layer formed on the first electrode, and a second electrode formed on the organic layer And a sealing member that is disposed above the second electrode and is sealed to an outer peripheral portion of the inner surface of the substrate to cover the organic layer. Mixing a medium, applying the mixture to the inner surface of the sealing member, and performing a predetermined fixing treatment to form a water trapping layer having a predetermined thickness made of the water trapping material.
Manufacturing method of L element.
【請求項10】 前記固着媒体が揮発性の分散媒であ
り、前記分散媒に分散した前記捕水材を前記封止部材の
内面に塗布して前記分散媒を蒸発させることにより、前
記捕水層を形成することを特徴とする請求項9記載の有
機EL素子の製造方法。
10. The method according to claim 1, wherein the fixing medium is a volatile dispersion medium, and the water trapping material dispersed in the dispersion medium is applied to an inner surface of the sealing member to evaporate the dispersion medium, thereby obtaining the water trap. The method for manufacturing an organic EL device according to claim 9, wherein a layer is formed.
【請求項11】 前記固着媒体が紫外線硬化樹脂であ
り、紫外線硬化樹脂に分散した前記捕水材を前記封止部
材の内面に塗布し、紫外線を照射することにより、前記
捕水層を形成することを特徴とする請求項9記載の有機
EL素子の製造方法。
11. The fixing medium is an ultraviolet-curable resin, and the water-capturing material dispersed in the ultraviolet-curable resin is applied to an inner surface of the sealing member, and is irradiated with ultraviolet light to form the water-capturing layer. The method for manufacturing an organic EL device according to claim 9, wherein:
【請求項12】 前記固着媒体が揮発性の分散媒とポリ
マーであり、前記ポリマーを前記分散媒に溶解した液体
に、前記捕水材を分散し、前記液体を前記封止部材の内
面に塗布して前記分散媒を蒸発させることにより、前記
捕水層を形成することを特徴とする請求項9記載の有機
EL素子の製造方法。
12. The fixing medium is a volatile dispersion medium and a polymer, the water catching material is dispersed in a liquid in which the polymer is dissolved in the dispersion medium, and the liquid is applied to an inner surface of the sealing member. The method according to claim 9, wherein the water trapping layer is formed by evaporating the dispersion medium.
【請求項13】 前記固着媒体が揮発性の分散媒と紫外
線硬化樹脂であり、前記紫外線硬化樹脂を前記分散媒に
溶解した液体に、前記捕水材を分散し、前記液体を前記
封止部材の内面に塗布して前記分散媒を蒸発させ、紫外
線を照射することにより前記紫外線硬化樹脂を硬化さ
せ、前記捕水層を形成することを特徴とする請求項9記
載の有機EL素子の製造方法。
13. The fixing medium is a volatile dispersion medium and an ultraviolet curable resin, the water catching material is dispersed in a liquid in which the ultraviolet curable resin is dissolved in the dispersion medium, and the liquid is sealed by the sealing member. The method for manufacturing an organic EL device according to claim 9, wherein the dispersion medium is evaporated on the inner surface of the substrate, and the ultraviolet curable resin is cured by irradiating ultraviolet rays to form the water trapping layer. .
JP10373537A 1998-12-28 1998-12-28 Organic el element and its manufacture Pending JP2000195662A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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JP2000195662A true JP2000195662A (en) 2000-07-14

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Country Link
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Cited By (5)

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Publication number Priority date Publication date Assignee Title
JP2003017257A (en) * 2001-06-29 2003-01-17 Sanyo Electric Co Ltd Manufacturing method of electroluminescent display
US6673436B2 (en) 2000-05-17 2004-01-06 Dynic Corporation Moisture absorbing formed article
US6909175B2 (en) 2002-06-14 2005-06-21 Nippon Sheet Glass Co., Ltd. EL device sealing plate, multiple sealing plate-producing mother glass substrate, and EL device
US7291976B2 (en) 2002-01-22 2007-11-06 Seiko Epson Corporation Light emitting device having a particular sealing structure
US8557324B2 (en) * 2000-11-14 2013-10-15 Semiconductor Energy Laboratory Co., Ltd. Light emitting device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6673436B2 (en) 2000-05-17 2004-01-06 Dynic Corporation Moisture absorbing formed article
US8557324B2 (en) * 2000-11-14 2013-10-15 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
JP2003017257A (en) * 2001-06-29 2003-01-17 Sanyo Electric Co Ltd Manufacturing method of electroluminescent display
JP4614588B2 (en) * 2001-06-29 2011-01-19 三洋電機株式会社 Method for manufacturing electroluminescence display device
US7291976B2 (en) 2002-01-22 2007-11-06 Seiko Epson Corporation Light emitting device having a particular sealing structure
US7662007B2 (en) 2002-01-22 2010-02-16 Seiko Epson Corporation Method of fabricating sealing substrate
US6909175B2 (en) 2002-06-14 2005-06-21 Nippon Sheet Glass Co., Ltd. EL device sealing plate, multiple sealing plate-producing mother glass substrate, and EL device

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