JP2000186912A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2000186912A5 JP2000186912A5 JP1998364352A JP36435298A JP2000186912A5 JP 2000186912 A5 JP2000186912 A5 JP 2000186912A5 JP 1998364352 A JP1998364352 A JP 1998364352A JP 36435298 A JP36435298 A JP 36435298A JP 2000186912 A5 JP2000186912 A5 JP 2000186912A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- displacement
- optical fiber
- measured
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 description 80
- 239000013307 optical fiber Substances 0.000 description 69
- 230000003287 optical effect Effects 0.000 description 54
- 238000005259 measurement Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 19
- 230000010363 phase shift Effects 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 12
- 238000000691 measurement method Methods 0.000 description 9
- 230000010287 polarization Effects 0.000 description 8
- 230000000737 periodic effect Effects 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- SUBDBMMJDZJVOS-UHFFFAOYSA-N 5-methoxy-2-{[(4-methoxy-3,5-dimethylpyridin-2-yl)methyl]sulfinyl}-1H-benzimidazole Chemical compound N=1C2=CC(OC)=CC=C2NC=1S(=O)CC1=NC=C(C)C(OC)=C1C SUBDBMMJDZJVOS-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000001131 transforming effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10364352A JP2000186912A (ja) | 1998-12-22 | 1998-12-22 | 微小変位測定方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10364352A JP2000186912A (ja) | 1998-12-22 | 1998-12-22 | 微小変位測定方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000186912A JP2000186912A (ja) | 2000-07-04 |
| JP2000186912A5 true JP2000186912A5 (enrdf_load_stackoverflow) | 2006-03-09 |
Family
ID=18481608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10364352A Pending JP2000186912A (ja) | 1998-12-22 | 1998-12-22 | 微小変位測定方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000186912A (enrdf_load_stackoverflow) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4604878B2 (ja) * | 2005-06-27 | 2011-01-05 | 横河電機株式会社 | 波長モニタ |
| JP4604879B2 (ja) * | 2005-06-27 | 2011-01-05 | 横河電機株式会社 | 波長モニタ |
| RU2343402C1 (ru) * | 2007-03-26 | 2009-01-10 | Ростовский военный институт ракетных войск им. Главного маршала артиллерии М.И.Неделина | Оптическое устройство для измерения перемещений поверхностей объектов контроля |
| CN101957246B (zh) * | 2010-07-20 | 2012-02-01 | 清华大学 | 一种用于微力微位移测量系统的集成探测器 |
| CN102496391B (zh) * | 2011-11-18 | 2013-10-23 | 江苏大学 | 一种组装式二维微位移台 |
| CN102927924B (zh) * | 2012-10-10 | 2015-04-08 | 哈尔滨工程大学 | 一种短基线差分式激光应变测量仪 |
| KR101793831B1 (ko) * | 2016-07-04 | 2017-11-06 | 한남대학교 산학협력단 | 레이저 간섭계와 목표 측정물 사이에서 광신호를 송수신하는 콜리메이팅 광학계, 그 광학계를 이용한 송수신 방법 및 그 광학계를 이용한 변위량 측정시스템 |
| CN111867657A (zh) * | 2018-01-26 | 2020-10-30 | 赛诺菲 | 用于可注射药剂的容器 |
| CN115096209B (zh) * | 2022-06-16 | 2024-12-17 | 智慧星空(上海)工程技术有限公司 | 一种非接触式辅助定位激光干涉测量系统 |
| CN117686008B (zh) * | 2024-02-01 | 2024-04-26 | 广东海洋大学 | 一种基于图像处理的光纤布拉格光栅信号解调系统与方法 |
-
1998
- 1998-12-22 JP JP10364352A patent/JP2000186912A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100225923B1 (ko) | 이상 회절 간섭계 | |
| US7821647B2 (en) | Apparatus and method for measuring surface topography of an object | |
| JPH03223609A (ja) | タッチプローブ | |
| US20070195334A1 (en) | Displacement detection apparatus, polarization beam splitter, and diffraction grating | |
| CN101788267B (zh) | 基于两组亚波长光栅的光学微位移传感器 | |
| US5122660A (en) | Distance measuring system utilizing an object with at least one inclined surface | |
| JP2000186912A5 (enrdf_load_stackoverflow) | ||
| US4729654A (en) | Laser interferometer | |
| US9127924B2 (en) | Interferometer | |
| US6611379B2 (en) | Beam splitter and method for generating equal optical path length beams | |
| JP2000186912A (ja) | 微小変位測定方法および装置 | |
| US6570660B2 (en) | Measuring instrument | |
| US6710881B1 (en) | Heterodyne interferometry for small spacing measurement | |
| JPS63277926A (ja) | 測長装置 | |
| CN104508421B (zh) | 光学测量探针和用于内直径和外直径的光学测量的方法 | |
| JP5704150B2 (ja) | 白色干渉装置及び白色干渉装置の位置及び変位測定方法 | |
| JPH08313205A (ja) | 斜入射干渉計装置 | |
| EP2336714A1 (en) | Interferometer | |
| US20070091400A1 (en) | Method and apparatus for scanning optical delay line | |
| JP3295993B2 (ja) | 面精度測定装置 | |
| JPH07270115A (ja) | 干渉計装置 | |
| US20120314200A1 (en) | Coupled multi-wavelength confocal systems for distance measurements | |
| JP2966950B2 (ja) | 試料変位測定装置 | |
| JPH11344306A (ja) | 光学的変位計測装置 | |
| Lehmann et al. | Fiber optic interferometric sensor based on mechanical oscillation |