JP2000164041A - Anisotropic conductive sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet having stable electric conductivity and allowing accurate positioning by forming a conductive portion containing a conductive material with the aspect ratio of a specific value range in an insulator, forming the portion other than the conductive portion with the insulator, and providing a metal plate at a peripheral section. SOLUTION: An elastic insulator is used, e.g. polybutadiene, natural rubber or polyisoprene is used as a rubber-like polymer, and silicone rubber is preferably used in view of molding workability and electric characteristics. A conductive portion (anisotropic conductive portion 12) containing a conductive material with the aspect ratio (ratio of major axis against minor axis) 1.1-1000 is formed in the insulator, and an anisotropic conductive sheet 11 made of the insulator is formed at the portion other than the conductive portion. A metal plate (positioning metal plate 16) is provided at the peripheral section of the anisotropic conductive sheet 11. A guide hole 10 is formed as a positioning point. A stable electric contact is obtained by utilizing the elasticity of the elastic material.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anisotropic conductive sheet used for inspection and measurement of electric characteristics and electric connection between electric circuits and electric circuit boards.

[0002]

2. Description of the Related Art In recent years, with the miniaturization of electric appliances or the high-density wiring, inspection, measurement, and electrical connection between electric circuit components, electric circuit boards and the like are performed through a fine pitch between electrodes. And is becoming more difficult. Under these circumstances, it has become difficult to bring the electrodes of the conductive sheet into accurate contact with the test electrodes such as electric circuit components and electric circuit boards to obtain electrical contact. From the above background, it is necessary to provide a conductive sheet having excellent conduction performance at a fine wiring pitch by contacting an electrode of the conductive sheet at an accurate position with respect to an inspection electrode such as an electric circuit component or an electric circuit board. there were.

Conventionally, inspection of electric circuit parts and electric circuit boards,
In the measurement, the resin of the conductive sheet is made to contact the electrode of the conductive sheet at an accurate position with respect to the inspection electrode of the electric circuit component, the electric circuit board, etc., and to create a conductive sheet with excellent conduction performance at fine wiring pitch. The object to be measured is aligned with the inspection electrode in the planar direction using the positioning holes on the film. However, in conductive sheets using resin films,
Since the film hole processing is performed with a punching die, 1
When trying to remove a large number of molded products from a pair of dies, it is necessary to punch a large number of holes on the film at the same time, and it is difficult to obtain the positioning accuracy of the positioning holes. In addition, in order to create an anisotropic conductive sheet, molding is performed by heating and curing in a magnetic field, but when performing multi-sided molding for mass production, molding due to deflection of resin film, dimensional change, etc. The positioning of the product was shifted and was not practical. On the other hand, by dividing the resinous film into individual pieces and setting them in a mold, it is possible to make it difficult for the film to be displaced on the mold. It is necessary to set up a positioning pin at a position corresponding to the positioning hole, and the die cost increases. In addition, the film had to be set in a mold one by one, which required a lot of man-hours. Furthermore, when using an anisotropic conductive sheet that uses a resin film for positioning as a contact for test sockets such as burn-in tests and heat cycle tests that sort out initial failures of semiconductors, etc., due to the thermal expansion of the resin film,
Contact displacement has occurred, making accurate measurement difficult.

[0004]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for inspecting and measuring electric circuit components and electric circuit boards, or for electrically connecting them to each other. To provide a large amount of anisotropic conductive sheets having stable electrical conductivity.
Another object of the present invention is to provide an anisotropic conductive sheet that can be accurately positioned even in a semiconductor test in a wide operating temperature range.

[0005]

According to the present invention, a conductive portion containing a conductive material having an aspect ratio of 1.1 to 1000 is formed in an insulator, and portions other than the conductive portion are formed of the insulator. A conductive sheet provided with a metal plate around a periphery of the conductive sheet. In the anisotropic conductive sheet, the conductive material is preferably oriented in the thickness direction of the conductive sheet, and the insulator is preferably elastic. Further, the present invention provides a method for forming a conductive portion containing a conductive material having an aspect ratio of 1.1 to 1000 in the presence of a metal plate disposed so as to be located on a peripheral portion of an obtained anisotropic conductive sheet. An object of the present invention is to provide a method for producing an anisotropic conductive sheet, which is obtained by molding a material. The present invention further provides an aspect ratio of 1.1 to 1000.
The present invention provides a method for producing the above-described anisotropic conductive sheet, wherein a conductive sheet formed by molding a conductive portion forming material containing the conductive material is joined to a metal plate. Further, the present invention provides a connector and a circuit board inspection apparatus each including the anisotropic conductive sheet as a constituent element.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION The insulator used in the present invention is preferably an insulator having elasticity. As such an insulator having elasticity, a rubber-like polymer is preferable. Examples of the rubbery polymer include conjugated diene rubbers such as polybutadiene, natural rubber, polyisoprene, SBR and NBR and hydrogenated products thereof, and block copolymers such as styrene butadiene diene block copolymer and styrene isoprene block copolymer. Examples include coalesced and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene propylene copolymer, and ethylene propylene diene copolymer. When weather resistance is required, a rubber-like polymer other than the conjugated diene rubber is preferred, and silicon rubber is particularly preferred from the viewpoint of moldability and electrical properties.

Here, the silicone rubber will be described in more detail. As the silicone rubber, one obtained by crosslinking or condensing liquid silicone rubber is preferable. Preferably it has the following 10 ⁵ poise at a liquid silicone rubber is the viscosity of the strain rate of 10 ^{over 1} sec, condensation type, addition type, may be any of vinyl group and a hydroxyl group-containing type. Specific examples include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, and methylphenyl vinyl silicone raw rubber. Among these, as a vinyl group-containing silicone rubber, usually, dimethyldichlorosilane or dimethyldialkoxysilane, in the presence of dimethylvinylchlorosilane or dimethylvinylalkoxysilane,
It can be obtained by hydrolysis and condensation, followed by fractionation by repeated dissolution-precipitation.

[0008] Further, those containing a vinyl group at both ends are polymerized by anionic polymerization of a cyclic siloxane such as octamethylcyclotetrasiloxane in the presence of a catalyst, and the polymerization is terminated by using a terminal terminator. When obtaining, it can be obtained by using, for example, dimethyldivinylsiloxane as a terminal stopper, and appropriately selecting reaction conditions (eg, the amount of the cyclic siloxane and the amount of the terminal stopper). Here, examples of the catalyst include alkalis such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or silanolate solutions thereof, and the like.
The reaction temperature is, for example, 80 to 130 ° C.

[0009] The hydroxyl-containing silicone rubber is usually prepared by converting dimethyldichlorosilane or dimethyldialkoxysilane into a hydrosilane compound such as dimethylhydrochlorosilane, methyldihydrochlorosilane or dimethylhydroalkoxysilane.
It can be obtained by hydrolysis and condensation, followed by fractionation by repeated dissolution-precipitation. In addition, when the cyclic siloxane is anionically polymerized in the presence of a catalyst and the polymerization is terminated using a terminal stopper to obtain a polymer, the reaction conditions (for example, the amount of the cyclic siloxane and the amount of the terminal stopper) are selected. Can be obtained by using dimethylhydrochlorosilane, methyldihydrochlorosilane or dimethylhydroalkoxysilane as a terminal stopper. Here, examples of the catalyst include alkalis such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide, and silanolate solutions thereof. The reaction temperature is preferably, for example, 40 to 150 ° C., and more preferably 80 to 150 ° C.
30 ° C.

The molecular weight (weight average molecular weight in terms of standard polystyrene) of the rubbery polymer is preferably 10,000 to 40,000. The molecular weight distribution index of the rubbery polymer component (the ratio of the weight average molecular weight in terms of standard polystyrene to the number average molecular weight in terms of standard polystyrene (hereinafter referred to as “Mw / M”)
n)) is preferably 2 or less from the viewpoint of the heat resistance of the obtained conductive elastomer.

As the conductive material used for the conductive path element material, it is preferable to use a conductive magnetic material from the viewpoint that the particles can be easily oriented by a method described later. Specific examples of the conductive magnetic material include particles of a metal exhibiting magnetism such as iron and cobalt, alloys thereof, or materials containing these metals, or a material containing these materials as a core material, and a surface of the core material. To gold,
Silver, palladium, rhodium or other highly conductive metal-plated material, or a nonmagnetic metal material or an inorganic material or polymer such as glass beads as a core material, and nickel, cobalt, And a core material coated with both a conductive magnetic material and a metal having good conductivity. Among these, it is preferable to use nickel or iron as a core material, and to apply a metal having good conductivity such as gold or silver to the surface thereof, and particularly to a metal coated with gold. .
Means for coating the surface of the core material with the conductive metal is not particularly limited, but may be, for example, chemical plating or electroless plating.

When a conductive material having a core material coated with a conductive metal is used as the conductive material, from the viewpoint of obtaining good conductivity, the coverage of the conductive metal on the material surface (core material) Is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 100%.
It is.

The amount of the conductive metal to be coated is preferably 2.5 to 50% by weight of the core material, more preferably 3 to 30% by weight, further preferably 3.5 to 25% by weight, particularly preferably Preferably it is 4 to 20% by weight. The coating amount of the conductive metal to be coated is preferably 2 to 50% by weight of the core material, more preferably 2.5 to 30% by weight,
More preferably 3 to 25% by weight, particularly preferably 4 to 25% by weight.
20% by weight.

The conductive material has an aspect ratio (ratio of a major axis to a minor axis) of 1.1 to 1,000, preferably 1.2 to 500, and more preferably 1.
It is 5-100, particularly preferably 2-50. The specific shape is not particularly limited,
Preferred are whiskers, rods, fibers and the like. The minor axis of the conductive material is
It is preferably from 1 to 500 μm, more preferably from 2 to 300 μm, further preferably from 5 to 200 μm, particularly preferably from 10 to 100 μm. The distribution of the major axis of the conductive material (weight average length / number average length; Lw / L
n) is preferably 1 to 10, more preferably 1 to 7, still more preferably 1 to 5, and particularly preferably 1 to 5.
~ 4. By using a conductive material that satisfies such conditions, the resulting anisotropically conductive portion 12 can be easily deformed under pressure. Contact is obtained and the durability is excellent.

The moisture content of the conductive material is preferably 5% or less, more preferably 3% or less, further preferably 2% or less, and particularly preferably 1% or less. By using a conductive material that satisfies such conditions, bubbles may be generated in the anisotropic conductive part material layer when the anisotropic conductive part material layer is cured in the manufacturing method described below. Prevented or suppressed.

A conductive material whose surface has been treated with a coupling agent such as a silane coupling agent can be used as appropriate. When the surface of the conductive material is treated with the coupling agent, the adhesiveness between the conductive material and the elastic polymer material is increased, and as a result, the obtained anisotropic conductive portion 12 has durability in repeated use. It becomes high. The amount of the coupling agent used is appropriately selected within a range that does not affect the conductivity of the conductive material. However, the coverage of the coupling agent on the surface of the conductive material (the ratio of the coupling agent to the surface area of the conductive core material). (The ratio of the coverage area) is preferably 5% or more, more preferably 7 to 100%, more preferably 10 to 10%.
The amount is 100%, particularly preferably 20 to 100%.

Such a conductive material has a volume fraction of 5 to 80%, preferably 10 to 7%, based on the polymer material.
It is used at a ratio of 5%, more preferably 15 to 70%. When this ratio is less than 5%, an anisotropic conductive portion having a sufficiently small electric resistance value may not be obtained. On the other hand, when this ratio exceeds 80%, the obtained anisotropically conductive portion tends to be fragile, and the elasticity required for the anisotropically conductive portion may not be obtained.

The composition for a conductive elastomer can be prepared by adding the above-mentioned conductive material to an insulator such as the above rubber-like polymer. Such a composition for a conductive elastomer may contain an inorganic filler such as ordinary silica powder, colloidal silica, airgel silica, and alumina, if necessary. By including such an inorganic filler, the thixotropy at the time of uncuring is ensured, the viscosity is increased, the dispersion stability of the conductive material is improved, and the strength of the elastomer after curing is improved.

The amount of the inorganic filler used is not particularly limited. However, an excessively large amount is not preferable because the orientation of the conductive metal material by the magnetic field cannot be sufficiently achieved. The viscosity of the composition for a conductive elastomer is 100,000 to 1,000 at a temperature of 25 ° C.
It is preferably within the range of 0.000 cp. The above-mentioned composition for a conductive elastomer has a function as a conductive elastomer by a crosslinking or condensation reaction being performed to form a highly elastic elastomer, and further containing a specific conductive material component. Become.

The composition for a conductive elastomer described above includes:
A curing catalyst can be used for curing. Examples of such a curing catalyst include an organic peroxide, a fatty acid azo compound, a hydroxylation catalyst, and radiation.
Examples of the organic peroxide include benzoyl peroxide, bisdicyclobenzoyl peroxide, dicumyl peroxide, and ditertiary butyl peroxide. Examples of the fatty acid azo compound include azobisisobutyronitrile. Specific examples of the catalyst that can be used as the hydrosilylation reaction catalyst include chloroplatinic acid and salts thereof, and platinum-
Siloxane complex containing unsaturated group, complex of vinylsiloxane and platinum, complex of platinum and 1,3-divinyltetramethyldisiloxane, complex of triorganophosphine or phosphite and platinum, acetylacetonate platinum chelate, cyclic diene And known complexes such as complexes of platinum with platinum.

It is preferable to use an appropriate amount of the curing catalyst in consideration of the balance between the actual curing speed and the pot life. Further, a hydrosilylation reaction control agent such as an amino group-containing siloxane or a hydroxy group-containing siloxane, which is usually used for controlling the curing rate and the pot life, can be used in combination.

Various materials can be used as the material of the metal plate. However, in an anisotropic conductive sheet used for a temperature test of an electric component or the like, the coefficient of linear expansion corresponds to the coefficient of linear expansion of a substrate to be inspected or an inspection apparatus. A closer one is preferred. Such a coefficient of linear expansion is preferably 1.5 × 10 ⁻⁴ / K or less, more preferably 1 × 10 ⁻⁷ / K to 1 × 10 ⁻⁴ / K. Specific examples of the metal material include iron, copper, nickel, chromium, cobalt, magnesium, manganese, molybdenum, indium, lead, palladium, titanium, tungsten, aluminum, gold, platinum, silver, and the like, and two or more of these. Alloys and alloy steels are exemplified. When silicon is used as the substrate material, the material of the metal plate preferably has a coefficient of linear expansion of 1.5 × 10 ⁻⁵ / K or less, more preferably 1 × 10 ⁻⁷ / K to 1 ×. 10 ^-5 /
K. Examples of such a material include an Invar-type alloy such as Invar, an Elinvar-type alloy such as Elinvar, Super Invar, Kovar, and 42 alloy.
By using such a metal having a small coefficient of linear expansion, the contact portion positioned at normal temperature is not affected by a temperature change, so that stable electrical contact can be obtained.

The material of the metal plate used is not particularly specified, but is preferably an etchable metal. Because the hole processing on the metal plate can use photolithography and etching, the accuracy of the hole processing and
The degree of freedom in designing the machined holes is high. It is more preferable that the surface of the metal plate be covered with an insulating material such as a resin after the etching step. The thickness of the metal plate is preferably 0.01 to 10 times the thickness of the conductive sheet, and more preferably 0.1 to 10 times.
The ratio is from 02 to 2 times, particularly preferably from 0.03 to 0.8 times.

In the present invention, the metal plate is provided on the periphery of the conductive sheet, and various methods are used as a method of combining the metal plate and the conductive sheet. For example, there are a method of molding or curing a conductive sheet in the presence of a metal plate, a method of fitting a metal plate and a conductive sheet, and a method of bonding a metal plate and a conductive sheet. As a method of molding or curing a conductive sheet in the presence of a metal plate, a printing mask is placed on a mold, and a conductive elastomer composition containing a conductive material in a rubber-like polymer is applied by printing. Then, the positioning metal plate is sandwiched by the mold with the spacer interposed therebetween. In this state, as shown in FIG. 6, the sheet is heated while applying a magnetic field in the thickness direction of the sheet sandwiched between the magnetic poles of the heater-attached porcelain to cure the conductive elastomer composition. Then, the conductive elastomer composition is cured while keeping the magnetic conductive material in a state of being chained in the thickness direction of the sheet, so that the conductive material can be electrically conducted in the thickness direction of the sheet.

As another manufacturing method, a through hole is formed in a previously prepared insulating sheet at a position where a conductive portion is to be provided, and the hole is filled with the conductive elastomer composition as described above. The conductive portion can be formed by orienting with a magnetic field as needed, and, if necessary, curing the conductive elastomer composition. A metal plate may be bonded or composited to the insulating sheet in advance, or the metal plate may be bonded or composited after forming the conductive portion.

As a method of joining the metal plate and the conductive sheet, for example, the metal plate and the conductive sheet are separately manufactured,
The method of joining with an adhesive is mentioned. In the joint (composite) portion between the metal plate and the conductive sheet, the metal plate may be located in the middle of the conductive sheet, or may be located on the upper surface or the lower surface. FIG. 2 is preferable in terms of durability and the like.
As shown in (2), a part of a metal plate is embedded (sandwiched) in a conductive sheet. Further, when the conductive sheet is composited (joined) with the metal plate in a stretched state, it is less susceptible to a change such as expansion due to a temperature change.

The metal plate may be provided with a positioning point to provide a conductive sheet with a positioning metal plate. Such a positioning point may be an optically identifiable mark such as a + mark, or may be a mechanical alignment point such as a hole or a concave or convex portion. Among these, those with holes are preferable in terms of workability and operation. The number of alignment points may be one, but preferably two or more, more preferably 2 to 10,
Particularly preferably, it is 2 to 4.

As a method of obtaining a large number of anisotropic conductive sheets with a positioning metal plate at a time by using a pair of dies,
For example, a positioning metal plate having perforations in divided portions is used, and anisotropic conductive sheets are compounded to form a large number of pieces in the same plane. After the completion of the molding, the anisotropic conductive sheet with the positioning metal plate can be cut from the perforations to obtain a large number of individual pieces of the anisotropic conductive sheet with the positioning metal plate. Photolithography and etching are used to process the metal plate for positioning, so that processing such as perforation, hole processing for positioning, and processing of the portion where the anisotropic conductive sheet is installed (drilling) can be reduced. It can be processed at once without increasing. In these respects, it is preferable to use a hole having a hole 10 as shown in FIG. 2 in terms of excellent workability and positional accuracy.

The above-described anisotropic conductive sheet is manufactured, for example, as follows. First, an insulating elastic polymer material,
For example, an elastomer material (50) made of a mixture having fluidity is prepared by dispersing a conductive magnetic material such as nickel coated with gold or the like in silicon rubber, and the elastomer material (50) is formed as shown in FIG. Placed in the cavity.

This mold comprises an upper mold (51) and a lower mold (52), each of which forms an electromagnet. The upper mold (51) has a pattern corresponding to a connection electrode of a measurement board or an electric circuit board. A ferromagnetic part (shown with diagonal lines) (M);
A pole plate (53) having a flat lower surface is provided, which is made up of other non-magnetic portions (N), and the flat lower surface of the pole plate (53) is a surface of the elastomer material layer (50). And a gap (G) is formed by being in contact with or separated from.

In this state, the electromagnets of the upper die (51) and the lower die (52) are operated to apply a parallel magnetic field in the thickness direction of the elastomer material. As a result, the elastomer material layer (5
In (0), a stronger parallel magnetic field is applied in the thickness direction in the ferromagnetic portion (M) than in the other portion (non-magnetic portion (N)). The conductive magnetic material in the material layer (50) assembles into a magnetic force portion formed by the ferromagnetic material portion (M) and is further oriented in the thickness direction.

At this time, if there is a gap (G) on the surface side of the elastomer material layer (50), the material for the polymer substance is similarly moved by the moving and gathering of the conductive magnetic material. The surface of the material for a polymer substance in the portion located in the body part (M) may be raised to form a protruding conductive portion. Then, an anisotropic conductive sheet including a conductive portion and an insulating portion is manufactured by performing a hardening treatment by heating or the like while the parallel magnetic field is applied or after removing the parallel magnetic field.

Next, the method of using the anisotropic conductive sheet of the present invention will be described. When the anisotropic conductive sheet is used for inspection and measurement of an electric circuit component or an electric circuit board, for example, as shown in FIG. 7, the electrode arrangement on the measurement board (20) side is changed to the object to be inspected (21) ( An electric circuit component or an electric circuit board) is manufactured in accordance with the electrode arrangement, and the anisotropic conductive sheet of the present invention as shown in FIG. And press it. By doing so, electrical continuity is obtained between the measurement substrate and the object to be inspected, and inspection and measurement of the object to be inspected become possible. As a method not using the positioning holes, positioning may be performed using the end of the metal plate, and the positioning may be used for inspection and measurement.

When the anisotropic conductive sheet according to the present invention is used for electrical interconnection between the electric circuit component (22) and the electric circuit board (24) as shown in FIG.
The anisotropic conductive sheet (11) of the present invention as shown in FIG. 2 is positioned between the electric circuit component and the electric circuit board by using the positioning metal plate (16), and is positioned in the housing (23). By sandwiching, the connection is possible with a structure that can be fixed semi-permanently by pressure, and the electric circuit component (22) can be operated on the electric circuit board (24).

[0035]

Examples of the present invention will be described below. As an example, an example using a stainless steel plate (FIG. 4) generally used as a metal mask material will be described. By using photolithography and etching, the metal plate for positioning used was able to accurately process holes such as positioning holes and holes for installing an anisotropic conductive sheet. As shown in FIG. 5, the positioning metal plate is arranged so that a large number of conductive sheets can be manufactured in one sheet, and a positioning metal plate having perforations in divided portions is used. It was made to be molded in.

The conductive paste (15) is a rod-shaped magnetic material made of nickel as a conductive material coated with gold, and silicone rubber is used as an insulating material. An elastomer composition was obtained. The conductive elastomer composition is printed by placing a printing mask on a mold, and the positioning metal plate is sandwiched by the mold with the spacer interposed therebetween. In this state, the sheet was sandwiched between the magnetic poles of a heater-attached magnetic machine as shown in FIG. 6 and heated while applying a magnetic field in the thickness direction of the sheet to cure the conductive paste. As a result, the conductive material of the magnetic material is oriented in the thickness direction of the sheet, and the conductive elastomer composition is cured in such a state that the conductive material is chained, and the electrical conduction of the portion where the conductive material is oriented is performed. Was obtained, and a composite anisotropic conductive sheet with a positioning metal plate as shown in FIG. 2 was obtained.

Next, the method of using the anisotropic conductive sheet of the present invention obtained above will be described. The anisotropic conductive sheet,
As shown in FIG. 7, it was used for inspection and measurement of electric circuit components or electric circuit boards. The electrode arrangement on the side of the measurement substrate (20) is manufactured in accordance with the electrode arrangement of the inspection object (21) (electric circuit component or electric circuit board), and between the measurement substrate and the inspection object, By positioning the anisotropic conductive sheet (FIG. 2) using the positioning holes 10 and sandwiching and pressing the sheet with pressure (P), electrical conduction between the measurement substrate and the inspection object can be obtained. Inspection and measurement of the object can be performed. The test was repeated while changing the temperature from room temperature to 120 ° C., but no displacement or poor conduction occurred, and the inspection and measurement could be performed stably for a long period of time.

[0038]

The anisotropic conductive sheet provided with the positioning metal plate according to the present invention utilizes the elasticity of the elastic material to provide a step in the thickness direction due to the wiring of the electric circuit board and the thickness direction of the electrode portion of the electric circuit component. In this case, a level difference in the thickness direction due to a factor such as a variation in accuracy is absorbed, and a displacement in a planar direction due to positional accuracy does not occur, so that stable electrical contact can be obtained. In addition, even when a large number of anisotropic conductive sheets are produced, multiple sheets can be provided in a pair of molds, which contributes to an improvement in productivity. In addition, by electrically connecting the positioning metal plate to the ground of the measurement system, static electricity in the anisotropic conductive sheet can be easily removed, and there is an effect of shielding high frequency noise.

[0039] Further, in the test temperature range spans a wide area, linear expansion coefficient, such as a silicon wafer is small (about 3 × 10 ^{- 6} / K) If the object to be inspected is subject Invar (Invar as a metal material ), Super Invar, Kovar, 42 alloy etc. have a linear expansion coefficient of 1 × 10 ^-5
By using a metal of / K or less, the contact portion positioned at room temperature is not affected by a positional shift due to a temperature change, so that stable electrical contact can be obtained. Further, an anisotropic conductive sheet having excellent conductivity and excellent repetition durability can be obtained. The anisotropic conductive sheet of the present invention can be suitably used for various connectors, jigs for electrical inspection of circuit boards and electronic circuits, heat transfer materials, and the like.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of an anisotropic conductive sheet.

FIG. 2 is a schematic cross-sectional view of an anisotropic conductive sheet.

FIG. 3 is a perspective view of a state in which a large number of individual metal plates are formed.

FIG. 4 is a perspective view of an anisotropic conductive sheet with a positioning metal plate when forming a large number of pieces.

FIG. 5 is a plan view of an anisotropic conductive sheet with a positioning metal plate when forming a large number of pieces.

FIG. 6 is a conceptual diagram of a magnetic field forming machine.

FIG. 7 is a conceptual diagram of an electrical inspection socket.

FIG. 8 is a conceptual diagram of an electrical connector.

FIG. 9 is a conceptual diagram showing an example of manufacturing an anisotropic conductive sheet.

[Explanation of symbols]

(10) ... Guide hole (positioning hole) (11) ... Anisotropic conductive sheet (12) ... Anisotropic conductive part (13) ... Upper die (14) ... Lower mold (15) ... conductive elastomer composition (16) ... metal plate for positioning (17) ... heater (18) ... yoke (19) ... magnetized coil (20) ··· Measurement board (21) ··· DUT (22) ··· Electric circuit component (23) ··· Pressure fixing jig (24) ··· Electric circuit board (50) ··· Conductivity (51) ・ ・ ・ Upper mold (52) ・ ・ ・ Lower mold (53) ・ ・ ・ Magnetic pole plate (54) ・ ・ ・ Positioning pin for individual metal plate (55) ・ ・ ・ Positioning for mold Pin / positioning pin for metal plate (G) ... Gap (M) ... Ferromagnetic material part (N ... non-magnetic portion (P) ··· pressure

Claims (8)

[Claims] 1. An insulator having an aspect ratio of 1.1 to 10
A conductive portion containing the conductive material of No. 00 is formed, and the other portion than the conductive portion is an anisotropic conductive sheet made of an insulator, and a metal plate is provided around the conductive sheet. A conductive sheet characterized by the above-mentioned. 2. The anisotropic conductive sheet according to claim 1, wherein the conductive material is oriented in a thickness direction of the conductive sheet. 3. The anisotropic conductive sheet according to claim 1, wherein the insulator has elasticity. 4. The anisotropic conductive sheet according to claim 1, wherein the metal plate has a coefficient of linear expansion of 1 × 10 ⁻⁵ / K or less. 5. A conductive portion forming material containing a conductive material having an aspect ratio of 1.1 to 1000 in the presence of a metal plate disposed on a peripheral portion of the obtained anisotropic conductive sheet. A method for producing an anisotropic conductive sheet, characterized by comprising: 6. A conductive sheet formed by molding a conductive portion forming material containing a conductive material having an aspect ratio of 1.1 to 1000, and a metal plate joined to the conductive sheet. A method for producing an anisotropic conductive sheet. 7. A connector comprising the anisotropic conductive sheet according to claim 1 as a component. 8. A circuit board inspection apparatus comprising the anisotropic conductive sheet according to claim 1 as a constituent element.