JP2009146912A - Anisotropic conductive sheet, and electrical inspection method and electrical connection method using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet in which there is no occurrence of shift in a planar direction due to positional precision and stable electric contact can be obtained while absorbing level difference in a thickness direction due to wiring of an electric circuit board and absorbing the level difference in a thickness direction caused by variations or the like in precision in the thickness direction of an electrode part of electric circuit parts by utilizing elasticity of an elastic body material. <P>SOLUTION: This is the anisotropic conductive sheet in which a conductive part is formed by concatenating conductive particles in the thickness direction in an insulator, and places except the conductive part are constituted by a conductive sheet having elasticity, this is equipped with a metal plate for positioning of which linear expansion coefficient is 1×10<SP>-5</SP>/K or less in the peripheral part of the conductive sheet, the peripheral part of the conductive sheet and the metal plate for positioning are compounded in a state that the conductive sheet is expanded, the metal plate is constituted so that one part of the metal plate becomes to have a state to be embedded in the conductive sheet, and furthermore, the thickness of the metal plate is 0.01 to 0.8 times the thickness of the conductive sheet. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an anisotropic conductive sheet used for electrical characteristic inspection and measurement, or electrical interconnection in an electrical circuit component, electrical circuit board, etc., and an electrical inspection method and electrical circuit using the same. It relates to a connection method.

  In recent years, with the downsizing of electrical products or higher density wiring, inspection, measurement, or electrical connection between electrical circuit components, electrical circuit boards, etc. is performed through a fine inter-electrode pitch. It is becoming difficult.

  Under such circumstances, it has become difficult to obtain electrical contact by bringing the electrode of the conductive sheet into contact with an accurate position with respect to inspection electrodes such as electrical circuit components and electrical circuit boards.

  From the background described above, the anisotropic conductive sheet has excellent conduction performance at a fine wiring pitch by contacting the electrode of the conductive sheet at an accurate position with respect to the inspection electrode of an electric circuit component, electric circuit board, etc. Was necessary.

  Conventionally, in the inspection and measurement of electrical circuit components and electrical circuit boards, the conductive sheet electrodes are brought into contact with the test electrodes of the electrical circuit components and electrical circuit boards at accurate positions, and the conduction performance at a fine wiring pitch is achieved. In order to create an excellent anisotropic conductive sheet, a resin film is formed and a positioning hole on the film is used to align the object to be measured in the plane direction with the inspection electrode. It was.

  However, in anisotropic conductive sheets using resin films, film hole processing is performed by punching dies, so when trying to take out many molded products from a pair of dies, many simultaneously on the film Individual holes must be punched out, and the positioning accuracy of the positioning holes is difficult to achieve.

  Also, in order to create an anisotropic conductive sheet, it is molded by heat curing in a magnetic field, but when performing multi-sided molding for mass production, it is molded due to factors such as deflection of the resin film, dimensional change, etc. The position of the product was shifted and was not practical.

  On the other hand, by dividing the resinous film into individual pieces and setting them in the mold, it is possible to make it difficult for the film to shift on the mold. A positioning pin needs to be set up at a location corresponding to the positioning hole, which increases the mold cost. Furthermore, it was necessary to set the films one by one in the mold, and it took time.

  Furthermore, if an anisotropic conductive sheet with a resin film used for positioning is used as a contact for test sockets such as burn-in test and heat cycle test for selecting initial defects such as semiconductors, the contact due to thermal expansion of the resin film Therefore, it was difficult to measure accurately.

  An object of the present invention is to provide stable electrical continuity by contacting an electrode of a conductive sheet at an accurate position in a fine pitch area in inspection, measurement, or electrical connection between electrical circuit components and electrical circuit boards. It is to provide a large amount of anisotropic conductive sheets having

  Another object of the present invention is to provide an anisotropic conductive sheet that can be accurately positioned even in a semiconductor test over a wide temperature range.

The present invention was invented in order to achieve the problems and objects in the prior art as described above,
The anisotropic conductive sheet of the present invention is
A conductive part is formed by chaining conductive particles in the insulator in the thickness direction, and the place other than the conductive part is an anisotropic conductive sheet composed of a conductive sheet having elasticity,
A metal plate for positioning having a linear expansion coefficient of 1 × 10 ⁻⁵ / K or less is provided around the conductive sheet,
In a state where the conductive sheet is stretched, a peripheral portion of the conductive sheet and a metal plate for positioning are combined,
The metal plate is
A part of the metal plate is configured to be embedded in the conductive sheet,
Furthermore, the thickness of the metal plate is 0.01 to 0.8 times the thickness of the conductive sheet.

The anisotropic conductive sheet of the present invention is
The anisotropic conductive sheet is
Place the printing mask on the mold and print the conductive paste,
Furthermore, sandwiching the spacer, the metal plate for positioning is sandwiched between the molds,
In this state, sandwiching between the magnetic poles of the heater-attached magnetic machine, heating while applying a magnetic field in the thickness direction of the sheet, curing the conductive paste, and sandwiching the metal plate in the presence of the positioning metal plate The conductor is formed or cured.

The anisotropic conductive sheet of the present invention is
The anisotropic conductive sheet is
A metal plate for positioning with perforations in the divided parts,
The conductive sheet is combined with the metal plate and formed into a plurality of pieces in the same plane, and then cut from a perforation to be divided into a plurality of pieces. To do.

The anisotropic conductive sheet of the present invention is
The metal plate is made of an etchable metal.
The anisotropic conductive sheet of the present invention is
The conductive portion is configured to protrude from the insulator.

Moreover, the electrical inspection method of the present invention includes:
The anisotropic conductive sheet described above is disposed between a measurement board and an object to be inspected to obtain electrical continuity between the measurement board and the object to be inspected. It is characterized by conducting an inspection.

Moreover, the electrical connection method of the present invention includes:
The anisotropic conductive sheet described above is disposed between an electric circuit component and an electric circuit board to obtain electrical continuity between the electric circuit component and the electric circuit board. It is characterized by making a simple connection.

  The anisotropic conductive sheet of the present invention utilizes the elasticity of the elastic material, and causes factors such as a step in the thickness direction due to the wiring of the electric circuit board and a variation in accuracy in the thickness direction of the electrode portion of the electric circuit component. Therefore, a stable electrical contact can be obtained since the deviation in the plane direction due to the positional accuracy does not occur while absorbing the step in the thickness direction.

  In addition, even when anisotropically conductive sheets are produced in large quantities, it is possible to apply multiple faces within a pair of molds, contributing to productivity improvement. Further, by electrically connecting the positioning metal plate to the earth of the measurement system, it is easy to remove static electricity in the anisotropic conductive sheet, and there is also a shielding effect against high-frequency noise.

Furthermore, in tests over a wide temperature range, contact points positioned at room temperature by using a metal material with a linear expansion coefficient of 1 × 10 ⁻⁵ / K or less, such as invar (amber), super invar, and kovar. Since the portion is not affected by the positional deviation due to the temperature change, stable electrical contact can be obtained.

It is a typical perspective view of an anisotropic conductive sheet. It is a typical sectional view of an anisotropic conductive sheet. It is a perspective view of the state at the time of forming many pieces using an individual metal plate. It is a perspective view of the anisotropically conductive sheet with a metal plate for positioning at the time of forming many pieces. It is a top view of the anisotropically conductive sheet with a metal plate for positioning at the time of forming many pieces. It is a perspective view of the anisotropic conductive sheet with a metal plate for positioning by a guide hole. It is a perspective view of the anisotropic conductive sheet with a metal plate for positioning by an end surface. It is a conceptual diagram of a magnetic field molding machine. It is a conceptual diagram of the socket for electrical inspection. It is a conceptual diagram of the connector for electrical connection. It is a conceptual diagram which shows the manufacture example of an anisotropically conductive sheet.

The insulator used in the present invention is preferably an insulator having elasticity. As the insulator having such elasticity, a rubbery polymer is preferable.
Rubber polymers include conjugated diene rubbers such as polybutadiene, natural rubber, polyisoprene, SBR and NBR and hydrogenated products thereof, block copolymers such as styrene butadiene diene block copolymers and styrene isoprene block copolymers. Examples thereof include merging and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene propylene copolymer, ethylene propylene diene copolymer and the like.

When weather resistance is required, rubbery polymers other than conjugated diene rubbers are preferable, and silicone rubber is particularly preferable from the viewpoint of moldability and electrical characteristics.
Here, the silicone rubber will be described in more detail. As the silicone rubber, those obtained by crosslinking or condensing liquid silicone rubber are preferable. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be any of a condensation type, an addition type, a vinyl group or a hydroxyl group-containing type.

Specific examples include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methyl phenyl vinyl silicone raw rubber, and the like.
Among these, as the vinyl group-containing silicone rubber, dimethyldichlorosilane or dimethyldialkoxysilane is usually subjected to hydrolysis and condensation reaction in the presence of dimethylvinylchlorosilane or dimethylvinylalkoxysilane, for example, followed by dissolution-precipitation. It can obtain by performing the fractionation by repeating.

  Also, those containing vinyl groups at both ends are obtained when anionic polymerization is performed on a cyclic siloxane such as octamethylcyclotetrasiloxane in the presence of a catalyst and the polymerization is stopped using a terminal terminator to obtain a polymer. For example, dimethyldivinylsiloxane is used as a terminal stopper, and the reaction conditions (for example, the amount of cyclic siloxane and the amount of terminal stopper) are appropriately selected.

  Here, examples of the catalyst include alkalis such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide, or silanolate solutions thereof, and examples of the reaction temperature include 80 to 130 ° C.

  Further, the hydroxyl group-containing silicone rubber is usually obtained by subjecting dimethyldichlorosilane or dimethyldialkoxysilane to hydrolysis and condensation reaction in the presence of a hydrosilane compound such as dimethylhydrochlorosilane, methyldihydrochlorosilane, or dimethylhydroalkoxysilane. Subsequently, fractionation can be performed by repeating dissolution-precipitation.

  Also, when anionic polymerization of cyclic siloxane is carried out in the presence of a catalyst and the polymerization is stopped using a terminal stopper to obtain a polymer, reaction conditions (for example, the amount of cyclic siloxane and the amount of terminal stopper) are selected. It can be obtained by using dimethylhydrochlorosilane, methyldihydrochlorosilane or dimethylhydroalkoxysilane as a terminal terminator.

  Here, examples of the catalyst include alkalis such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide, or silanolate solutions thereof, and examples of the reaction temperature include 80 to 130 ° C.

  The rubbery polymer preferably has a molecular weight (standard polystyrene equivalent weight average molecular weight) of 10,000 to 40,000. The molecular weight distribution index of the rubber-like polymer component (the ratio between the standard polystyrene equivalent weight average molecular weight and the standard polystyrene equivalent number average molecular weight (hereinafter referred to as “Mw / Mn”) is the heat resistance of the resulting conductive elastomer. To 2.0 or less.

  Examples of the conductive particles include known simple conductive metal particles such as iron, copper, zinc, chromium, nickel, silver, cobalt, and aluminum, and alloy conductive metal particles composed of two or more of these metal elements. Can be mentioned.

Among these, simple conductive metal particles such as nickel, iron, and copper are preferable from the viewpoints of economy and conductive characteristics, and nickel particles whose surfaces are coated with gold are particularly preferable.
When silicone rubber is used as the insulator, the coverage of the silane coupling agent of the conductive particles is preferably 5% or more, more preferably 7 to 100%, more preferably 10 to 100. %, Particularly preferably 20 to 100%.

  Moreover, it is preferable that the particle diameter of electroconductive particle is 1-1000 micrometers, More preferably, it is 2-500 micrometers, More preferably, it is 5-300 micrometers, Most preferably, it is 10-200 micrometers.

  The particle size distribution (Dw / Dn) of the conductive particles is preferably 1 to 10, more preferably 1.01 to 7, more preferably 1.05 to 5, particularly preferably 1 .1-4.

The moisture content of the conductive particles is preferably 5% or less, more preferably 3% or less, more preferably 2% or less, and particularly preferably 1% or less.
According to the conductive particles having a particle size in such a range, sufficient electrical contact can be obtained between the conductive particles in use in the obtained conductive elastomer. The shape of the conductive particles is not particularly limited, but is preferably spherical or star shape from the viewpoint of ease of dispersion in the liquid silicone rubber.

  In the present invention, the nickel particles whose surfaces are particularly preferably used as the conductive particles are coated with gold. For example, the surfaces of the nickel particles are plated with gold by electroless plating.

  Thus, the nickel particles having a gold coating on the surface have extremely low contact resistance. The film thickness when gold is coated by plating is preferably 1000 angstroms or more.

  The plating amount is preferably 1% by weight or more of the particles, more preferably 2 to 10% by weight, and particularly preferably 3 to 7% by weight. In the present invention, the conductive particles are used in a proportion of 30 to 1000 parts by weight, preferably 50 to 750 parts by weight, based on 100 parts by weight of the rubber-like polymer.

  When this proportion is less than 30 parts by weight, the obtained conductive elastomer does not have a sufficiently low electric resistance value even during use, and therefore does not have a good connection function. If it exceeds 1, the cured elastomer becomes brittle and it becomes difficult to use it as a conductive elastomer.

  The conductive elastomer composition of the present invention containing the above rubbery polymer and conductive particles contains an inorganic filler such as ordinary silica powder, colloidal silica, airgel silica, alumina, etc., if necessary. be able to. By including such an inorganic filler, thixotropy when uncured is ensured, the viscosity is increased, the dispersion stability of the conductive particles is improved, and the strength of the elastomer after curing is improved.

  The amount of the inorganic filler used is not particularly limited, but if it is used too much, it is not preferable because the orientation of the conductive metal particles cannot be sufficiently achieved by the magnetic field. In addition, it is preferable that the viscosity of the composition for conductive elastomers of this invention exists in the range of 100,000-1,000,000 cp at the temperature of 25 degreeC. The composition for conductive elastomer of the present invention has a function as a conductive elastomer because a highly elastic elastomer is formed by performing a crosslinking or condensation reaction, and a specific conductive particle component is contained. It will have.

  In order to cure the composition for conductive elastomer of the present invention, a curing catalyst can be used. Examples of such a curing catalyst include organic peroxides, fatty acid azo compounds, hydroxylation catalysts, and radiation.

  Examples of the organic peroxide include benzoyl peroxide, bisdicyclobenzoyl peroxide, dicumyl peroxide, and ditertiary butyl peroxide. Examples of fatty acid azo compounds include azobisisobutyronitrile.

  Specific examples of the catalyst that can be used as a catalyst for the hydrosilylation reaction include chloroplatinic acid and its salts, platinum-unsaturated siloxane complexes, vinylsiloxane-platinum complexes, platinum and 1,3-divinyltetra Examples include known complexes such as a complex with methyldisiloxane, a complex of triorganophosphine or phosphite and platinum, an acetylacetonate platinum chelate, and a complex of cyclic diene and platinum.

  The addition method of the curing catalyst is not particularly limited, but it is preferable that the curing catalyst is preliminarily mixed with the liquid silicone rubber as the main agent from the viewpoints of storage stability and prevention of uneven distribution of the catalyst when mixing the components.

  It is preferable to use an appropriate amount of the curing catalyst in consideration of the actual curing speed and balance with the pot life. Moreover, hydrosilylation reaction control agents, such as an amino group containing siloxane and a hydroxy group containing siloxane, which are usually used for controlling the curing rate and pot life can be used in combination.

  Various materials can be used as the material of the metal plate. However, anisotropic conductive sheets used for temperature testing of electrical parts and the like have a linear expansion coefficient close to that of the substrate to be inspected or the inspection apparatus. preferable.

Such a linear expansion coefficient is preferably 1.5 × 10 ⁻⁴ / K or less, more preferably 1 × 10 ⁻⁷ / K to 1 × 10 ⁻⁴ / K. Specific examples of the metal material include iron, copper, nickel, chromium, cobalt, magnesium, manganese, molybdenum, indium, lead, palladium, titanium, tungsten, aluminum, gold, platinum, silver, and two or more of these Examples include alloys and alloy steels.

When silicon is used as the substrate material, the metal plate material preferably has a linear expansion coefficient of 1.5 × 10 ⁻⁵ / K or less, more preferably 1 × 10 ⁻⁷ / K˜ 1 × 10 ⁻⁵ / K.

  Examples of such materials include Invar type alloys such as Invar, Elinvar type alloys such as Elinvar, Super Invar, and Kovar. By using such a metal having a small coefficient of linear expansion, the contact portion positioned at room temperature is not affected by the temperature change, so that stable electrical contact can be obtained.

  The positioning metal plate to be used may be any metal that can be etched, and the material is not particularly specified. Since the hole processing on the metal plate can use photolithography and etching, the accuracy of the hole processing and the degree of freedom in designing the processing hole are high. In addition, it is more preferable that the metal plate surface is covered with an insulating material such as a resin after the etching process.

  The thickness of the metal plate is preferably 0.01 to 10 times the thickness of the conductive sheet, more preferably 0.02 to 2 times, and particularly preferably 0.03 to 0.8 times. is there. In the present invention, the metal plate is provided in the peripheral portion of the conductive sheet, and various methods are used as a method of combining the metal plate and the conductive sheet.

  For example, a method of forming or curing the conductive sheet in the presence of the metal plate, a method of fitting the metal plate and the conductive sheet, a method of joining the metal plate and the conductive sheet, and the like can be mentioned. As a method of forming or curing the conductive sheet in the presence of the metal plate, a conductive mask is printed by placing a printing mask on the mold, and the positioning metal plate is sandwiched between the molds with a spacer interposed therebetween.

  In this state, as shown in FIG. 8, it is sandwiched between the magnetic poles of the heater-attached magnetic machine and heated while applying a magnetic field in the thickness direction of the sheet to cure the conductive paste. Thereby, since resin hardens | cures in the state in which the metal particle of the magnetic body was chained in the thickness direction of the sheet | seat, electrical conduction is obtained.

  Examples of a method for joining the metal plate and the conductive sheet include a method for joining the metal plate and the conductive sheet with an adhesive. The joining (composite) portion between the metal plate and the conductive sheet may be such that the metal plate is located on the upper surface or the lower surface of the conductive sheet, but preferably, as shown in FIG. A part thereof is embedded (sandwiched) in the conductive sheet.

  Further, when the conductive sheet is combined (bonded) with the metal plate in the stretched state, the conductive sheet is less susceptible to changes such as expansion due to temperature changes. To obtain a large number of anisotropic conductive sheets with positioning metal plates at one time using a pair of molds, use a positioning metal plate with perforations in the divided parts and combine the anisotropic conductive sheets. And many are formed in the same plane.

After completion of the molding, the anisotropic conductive sheet with a positioning metal plate is cut from the perforation to obtain an anisotropic conductive sheet with a positioning metal plate of a large number of pieces.
The processing of the metal plate for positioning uses photolithography and etching, etc., and processes such as perforations, hole processing for positioning, and processing of the portion where the anisotropic conductive sheet is installed (drilling) Can be processed in a batch without increasing

The anisotropic conductive sheet is manufactured as follows, for example.
First, an elastomer material (50) made of a fluid mixture is prepared by dispersing conductive magnetic particles such as nickel in an insulating elastic polymer substance, for example, silicone rubber, as shown in FIG. This is placed in the cavity of the mold.

  This mold is composed of an upper mold (51) and a lower mold (52), each of which constitutes an electromagnet. A magnetic pole plate (53) having a flat bottom surface is provided, which is made up of a body portion (shown with diagonal lines) (M) and the other non-magnetic portion (N). 53) is brought into contact with or separated from the surface of the elastomer material layer (50) to form a gap (G).

  In this state, the electromagnets of the upper mold (51) and the lower mold (52) are operated to act on a parallel magnetic field in the thickness direction of the elastomer material. As a result, in the elastomer material layer (50), a stronger parallel magnetic field acts in the thickness direction in the ferromagnetic part (M) than in the other part (non-magnetic part (N)). Due to the parallel magnetic field, the conductive magnetic particles in the elastomer material layer (50) are gathered in the magnetic part by the ferromagnetic part (M) and further oriented in the thickness direction.

  At this time, if there is a gap (G) on the surface side of the elastomer material layer (50), the material for the polymer substance is similarly moved by the moving set of the conductive magnetic particles. The surface of the material for the polymer substance in the portion located at M) is raised, and a protruding conductive portion can be formed.

  And an anisotropic conductive sheet which consists of an electroconductive part and an insulating part is manufactured by performing a hardening process by heating etc., after applying a parallel magnetic field or removing a parallel magnetic field. Next, how to use the anisotropic conductive sheet of the present invention will be described.

  When such an anisotropic conductive sheet is used for inspection and measurement of electric circuit components or electric circuit boards, for example, as shown in FIG. 21) Manufactured in accordance with the electrode arrangement of (electric circuit component or electric circuit board), and the anisotropic conductive sheet of the present invention as shown in FIG. 6 is positioned between the measurement board and the object to be inspected. Position using and then press.

  By doing in this way, electrical continuity is obtained between the measurement board and the inspection object, and inspection and measurement of the inspection object become possible. Further, as a method not using the positioning hole, as shown in FIG. 7, positioning may be performed using the end portion of the positioning metal plate, and the positioning hole may be used for inspection and measurement.

  When the anisotropic conductive sheet according to the present invention is used for electrical connection between the electric circuit component (22) and the electric circuit board (24) as shown in FIG. A conductive sheet (11) as shown in FIG. 6 is positioned between circuit boards using a positioning metal plate (16) and sandwiched between casings (23), so that it is semipermanently pressed. Connection is possible with a structure that can be fixed, and the electric circuit component (22) can be operated on the electric circuit board (24).

Examples of the present invention are shown below. As an example, an example in which a stainless steel plate (FIG. 4) generally used as a metal mask material is used will be described.
By using photolithography and etching, the positioning metal plate to be used was able to accurately form holes such as positioning holes and holes for installing anisotropic conductive sheets.

  As shown in FIG. 5, the positioning metal plates are arranged so that a large number of anisotropic conductive sheets can be manufactured on one sheet, and the positioning metal plates with perforations in the divided portions are used. Were molded in the same plane.

  As the conductive paste (15), a nickel magnetic material surface coated with gold was used, and a silicone rubber was used as the resin material of the paste, and these were mixed to obtain a conductive paste.

  A conductive mask is printed by placing a printing mask on the mold, and a metal plate for positioning is sandwiched between the molds with a spacer in between. In this state, the conductive paste was cured by sandwiching between the magnetic poles of the heater-attached magnetic machine as shown in FIG. 8 while applying a magnetic field in the thickness direction of the sheet. As a result, the metal particles of the magnetic material are oriented in the thickness direction of the sheet, the resin is cured in a state where the metal particles are chained, and electrical conduction of the portion where the metal particles are oriented is obtained, as shown in FIG. A complex anisotropic metal sheet with a positioning metal plate was obtained.

Next, how to use the anisotropic conductive sheet of the present invention obtained above will be described.
Such an anisotropic conductive sheet was used for inspection and measurement of electric circuit components or electric circuit boards as shown in FIG. The electrode arrangement on the measurement board (20) side is manufactured in accordance with the electrode arrangement of the object to be inspected (21) (electric circuit component or electric circuit board). The conductive sheet (FIG. 6) is positioned using the positioning holes, and sandwiched and pressed to provide electrical continuity between the measurement board and the object to be inspected. Became possible.

  Although the test was repeated by changing the temperature from room temperature to 120 ° C., no misalignment or poor conduction occurred, and stable inspection and measurement could be performed over a long period of time.

10 ... Guide hole (Positioning hole)
DESCRIPTION OF SYMBOLS 11 ... Conductive sheet 12 ... Anisotropic conductive part 13 ... Upper metal mold 14 ... Lower metal mold 15 ... Conductive paste 16 ... Metal plate 17 for positioning ... Heater 18 ... Yoke 19 ... Magnetizing coil 20 ... Measurement board 21 ... DUT 22 ... Electric circuit component 23 ... Pressure fixing jig 24 ... Electric circuit board 50 ... -Elastomer material layer 51 ... Upper mold 52 ... Lower mold 53 ... Magnetic pole plate G ... Gap M ... Ferromagnetic part N ... Non-magnetic part

Claims (7)

A conductive part is formed by chaining conductive particles in the insulator in the thickness direction, and the place other than the conductive part is an anisotropic conductive sheet composed of a conductive sheet having elasticity,
A metal plate for positioning having a linear expansion coefficient of 1 × 10 ⁻⁵ / K or less is provided around the conductive sheet,
In a state where the conductive sheet is stretched, a peripheral portion of the conductive sheet and a metal plate for positioning are combined,
The metal plate is
A part of the metal plate is configured to be embedded in the conductive sheet,
Further, the anisotropic conductive sheet is characterized in that the thickness of the metal plate is 0.01 to 0.8 times the thickness of the conductive sheet. The anisotropic conductive sheet is
Place the printing mask on the mold and print the conductive paste,
Furthermore, sandwiching the spacer, the metal plate for positioning is sandwiched between the molds,
In this state, sandwiching between the magnetic poles of the heater-attached magnetic machine, heating while applying a magnetic field in the thickness direction of the sheet, curing the conductive paste, and sandwiching the metal plate in the presence of the positioning metal plate The anisotropic conductive sheet according to claim 1, wherein the conductor is formed or cured. The anisotropic conductive sheet is
A metal plate for positioning with perforations in the divided parts,
The conductive sheet is combined with the metal plate and formed into a plurality of pieces in the same plane, and then cut from a perforation to be divided into a plurality of pieces. The anisotropic conductive sheet according to claim 1 or 2.   The anisotropic conductive sheet according to any one of claims 1 to 3, wherein the metal plate is made of an etchable metal.   The anisotropic conductive sheet according to any one of claims 1 to 4, wherein the conductive portion is configured to protrude from the insulator.   The anisotropic conductive sheet according to any one of claims 1 to 5 is disposed between a measurement board and an object to be inspected, and electrical continuity is obtained between the measurement board and the object to be inspected. An electrical inspection method characterized by conducting an electrical inspection of an object to be inspected.   An anisotropic conductive sheet according to any one of claims 1 to 5 is disposed between an electric circuit component and an electric circuit board, and electrical conduction is obtained between the electric circuit component and the electric circuit board. An electrical connection method characterized by performing electrical connection of electrical circuit components.

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