JP2000146781A5 - - Google Patents
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- JP2000146781A5 JP2000146781A5 JP1998327728A JP32772898A JP2000146781A5 JP 2000146781 A5 JP2000146781 A5 JP 2000146781A5 JP 1998327728 A JP1998327728 A JP 1998327728A JP 32772898 A JP32772898 A JP 32772898A JP 2000146781 A5 JP2000146781 A5 JP 2000146781A5
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- JP
- Japan
- Prior art keywords
- sample
- preparation apparatus
- stage
- vacuum
- sample preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000523 sample Substances 0.000 description 69
- 238000010884 ion-beam technique Methods 0.000 description 6
- 230000001678 irradiating effect Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011163 secondary particle Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32772898A JP4185604B2 (ja) | 1998-11-18 | 1998-11-18 | 試料解析方法、試料作成方法およびそのための装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32772898A JP4185604B2 (ja) | 1998-11-18 | 1998-11-18 | 試料解析方法、試料作成方法およびそのための装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000146781A JP2000146781A (ja) | 2000-05-26 |
| JP2000146781A5 true JP2000146781A5 (enExample) | 2005-11-24 |
| JP4185604B2 JP4185604B2 (ja) | 2008-11-26 |
Family
ID=18202332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32772898A Expired - Lifetime JP4185604B2 (ja) | 1998-11-18 | 1998-11-18 | 試料解析方法、試料作成方法およびそのための装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4185604B2 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4616509B2 (ja) * | 2001-05-11 | 2011-01-19 | 公三 藤本 | 位置決めマーカおよび位置決め装置 |
| EP1630849B1 (en) * | 2004-08-27 | 2011-11-02 | Fei Company | Localized plasma processing |
| JP4851804B2 (ja) * | 2006-02-13 | 2012-01-11 | 株式会社日立ハイテクノロジーズ | 集束イオンビーム加工観察装置、集束イオンビーム加工観察システム及び加工観察方法 |
| JP4923716B2 (ja) * | 2006-05-11 | 2012-04-25 | 株式会社日立製作所 | 試料分析装置および試料分析方法 |
| US8835880B2 (en) * | 2006-10-31 | 2014-09-16 | Fei Company | Charged particle-beam processing using a cluster source |
| JP4937775B2 (ja) * | 2007-01-26 | 2012-05-23 | アオイ電子株式会社 | 微小試料台、その作成方法、微小試料台集合体、および試料ホルダ |
| JP2009168560A (ja) * | 2008-01-15 | 2009-07-30 | Canon Inc | 保護膜形成方法及び試料断面観察方法 |
| US20100025580A1 (en) * | 2008-08-01 | 2010-02-04 | Omniprobe, Inc. | Grid holder for stem analysis in a charged particle instrument |
| JP5281525B2 (ja) * | 2009-09-11 | 2013-09-04 | 一般財団法人電力中央研究所 | 試料作製方法 |
| WO2011055521A1 (ja) * | 2009-11-06 | 2011-05-12 | 株式会社日立ハイテクノロジーズ | 荷電粒子顕微鏡 |
| JP2012112770A (ja) * | 2010-11-24 | 2012-06-14 | Jeol Ltd | 試料保持方法及び試料保持体 |
| CN102944569A (zh) * | 2012-12-07 | 2013-02-27 | 北京泰德制药股份有限公司 | 一种脂微球/脂质乳剂微观结构的测定方法 |
| JP6286146B2 (ja) * | 2013-07-24 | 2018-02-28 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| CN103645083B (zh) * | 2013-11-22 | 2016-04-27 | 上海华力微电子有限公司 | Tem样品再制备的方法 |
| CN103900868A (zh) * | 2014-02-21 | 2014-07-02 | 上海华力微电子有限公司 | 一种平面透射电镜样品的制备方法 |
| CN105928961B (zh) * | 2016-06-13 | 2018-11-13 | 北京工业大学 | 一种原位测试样品台和原位测试方法 |
| CN106373847B (zh) * | 2016-08-30 | 2018-03-06 | 上海大学 | 一种方位可控的微运动平台及其方位控制方法 |
| DE102017212020B3 (de) * | 2017-07-13 | 2018-05-30 | Carl Zeiss Microscopy Gmbh | Verfahren zur In-situ-Präparation und zum Transfer mikroskopischer Proben, Computerprogrammprodukt sowie mikroskopische Probe |
| JP7043057B2 (ja) * | 2017-11-28 | 2022-03-29 | 株式会社日立ハイテクサイエンス | 断面加工観察方法、荷電粒子ビーム装置 |
| CN110487823B (zh) * | 2019-08-13 | 2021-11-09 | 西安工业大学 | 一种粉末颗粒透射电子显微镜试样的制备方法 |
| US12384683B2 (en) * | 2020-10-30 | 2025-08-12 | The Regents Of The University Of California | Dopant-vacancy centers in materials and methods of making thereof |
| CN116490745A (zh) * | 2021-02-24 | 2023-07-25 | 电装波动株式会社 | 三维测量系统 |
| JP7586779B2 (ja) | 2021-06-24 | 2024-11-19 | 日本電子株式会社 | 試料観察方法およびカートリッジ |
| CN114354664A (zh) * | 2022-01-10 | 2022-04-15 | 长江存储科技有限责任公司 | 使用fib制备截面样品的方法和截面样品的观察方法 |
| CN115728107B (zh) * | 2022-11-21 | 2025-02-14 | 业成科技(成都)有限公司 | 指纹识别模组的缺陷分析方法 |
| JP2025161433A (ja) | 2024-04-12 | 2025-10-24 | 日本電子株式会社 | 集束イオンビーム装置 |
| CN118603695B (zh) * | 2024-06-24 | 2025-11-14 | 河北大学 | 适用于原位压缩实验的透射电镜样品的制备方法 |
-
1998
- 1998-11-18 JP JP32772898A patent/JP4185604B2/ja not_active Expired - Lifetime
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