JP2000143343A - Dielectric porcelain composition and multilayer ceramic capacitor using the same - Google Patents

Dielectric porcelain composition and multilayer ceramic capacitor using the same

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Publication number
JP2000143343A
JP2000143343A JP10320558A JP32055898A JP2000143343A JP 2000143343 A JP2000143343 A JP 2000143343A JP 10320558 A JP10320558 A JP 10320558A JP 32055898 A JP32055898 A JP 32055898A JP 2000143343 A JP2000143343 A JP 2000143343A
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Japan
Prior art keywords
composition
range
dielectric
multilayer ceramic
ceramic capacitor
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JP10320558A
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Japanese (ja)
Other versions
JP3575299B2 (en
Inventor
Masafumi Nakayama
雅文 中山
Kazuhiro Komatsu
和博 小松
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To obtain a dielectric porcelain composition capable of providing stable electric characteristics even by baking in a nonoxidizing atmosphere and useful for a multilayer ceramic capacitor for temperature compensation. SOLUTION: This dielectric porcelain composition is obtained by adding 0.05-3.00 wt.% of one selected from the group of BaSiO3, MgSiO3 and CaSiO3 and further 0.05-0.30 wt.% of V2O5 as additives to 100 wt.% of a composition surrounded by (a)[(x)=0.49, (y)=0.50, (z)=0.01], (b)[(x)=0.25r (y)=0.50, (z)=0.25] and (c)[(x)=0.97, (y)=0.02, (z)=0.01] [with the proviso that (m) is within the range of 0.30<=(m)<=0.70; (n) is within the range of 0.70<=(n)<=0.90] in a ternary composition represented by x(MgmCa1-m)O-y(TinZr1-n)O2-zSm2O3 (x), (y), (m) and (n) denote each molar ratio; [(x)+(y)+(z)] is 1} as the formula.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はニッケルなどの卑金
属で内部電極を形成する温度補償用の積層セラミックコ
ンデンサに用いる誘電体磁器組成物およびこれを用いた
積層セラミックコンデンサに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic composition for use in a multilayer ceramic capacitor for temperature compensation in which an internal electrode is formed of a base metal such as nickel, and a multilayer ceramic capacitor using the same.

【0002】[0002]

【従来の技術】従来の積層セラミックコンデンサは、公
知の積層セラミックコンデンサの製造方法にしたがっ
て、誘電体磁器組成物を主成分とするセラミック層グリ
ーンシートと内部電極層を交互に複数層積層したグリー
ン積層体を、所定のグリーンチップ形状に切断した後、
所定温度で焼成を行い、得られた焼結体の端面に露出し
た内部電極と電気的に接続するように焼結体の端面部に
外部電極を形成する方法が一般的に行われている。
2. Description of the Related Art A conventional monolithic ceramic capacitor is formed by alternately laminating a plurality of ceramic green sheets mainly composed of a dielectric ceramic composition and a plurality of internal electrode layers according to a known method of manufacturing a monolithic ceramic capacitor. After cutting the body into a predetermined green chip shape,
A method of baking at a predetermined temperature and forming an external electrode on the end face of the sintered body so as to be electrically connected to the internal electrode exposed on the end face of the obtained sintered body is generally performed.

【0003】しかしながら近年、積層セラミックコンデ
ンサの大容量、高積層化に伴い内部電極にニッケル等の
卑金属を用いたグリーンチップを非酸化性雰囲気中で焼
結を行う方法が主流となってきている。
However, in recent years, a method of sintering a green chip using a base metal such as nickel for an internal electrode in a non-oxidizing atmosphere has become mainstream as the multilayer ceramic capacitor has a large capacity and a high lamination.

【0004】[0004]

【発明が解決しようとする課題】従来の積層セラミック
コンデンサを非酸化性雰囲気で焼成を行うのは、ニッケ
ル等の卑金属内部電極の酸化を防ぐためである。しかし
なが積層セラミックコンデンサの内、温度補償用の積層
セラミックコンデンサに用いる誘電体磁器組成物は、一
般的に主成分のMgTiO3,CaTiO3に希土類酸化
物を添加した組成が多く、この材料は非酸化性雰囲気で
焼成すると主成分中の酸化チタンが還元され易く、半導
体化して絶縁抵抗が低くなると共に所望の誘電体特性が
得られないという課題を有していた。
The reason why the conventional multilayer ceramic capacitor is fired in a non-oxidizing atmosphere is to prevent oxidation of a base metal internal electrode such as nickel. However, among the multilayer ceramic capacitors, the dielectric ceramic composition used for the multilayer ceramic capacitor for temperature compensation generally has a composition in which rare earth oxides are added to main components MgTiO 3 and CaTiO 3. When fired in a non-oxidizing atmosphere, titanium oxide in the main component is easily reduced, and has a problem that it is converted into a semiconductor and the insulation resistance is reduced, and desired dielectric properties cannot be obtained.

【0005】本発明は非酸化性雰囲気中の焼成において
も、安定した電気特性の得られる誘電体磁器組成物およ
びこれを用いた積層セラミックコンデンサを提供するこ
とを目的とするものである。
[0005] It is an object of the present invention to provide a dielectric ceramic composition capable of obtaining stable electric characteristics even when fired in a non-oxidizing atmosphere, and a multilayer ceramic capacitor using the same.

【0006】[0006]

【課題を解決するための手段】前記目的を達成するため
本発明は、一般式として、x(MgmCa1-m)O−y
(TinZr1-n)O2−zSm23(但しx+y+z=
1)で表される三成分系組成において、a(x=0.4
9、y=0.50、z=0.01)、b(x=0.2
5、y=0.50、z=0.25)、c(x=0.9
7、y=0.02、z=0.01)で囲まれた組成(但
し、mは0.30≦m≦0.70、nは0.70≦n≦
0.90の範囲)100wt%に対し、添加物としてB
aSiO3,MgSiO3,CaSiO3の群より選ばれ
た一つを0.05〜3.00wt%、更にV25を0.
05〜0.30wt%添加した組成としたものである。
The present invention for achieving the above object, according to an aspect of, as a general formula, x (Mg m Ca 1- m) O-y
(Ti n Zr 1-n) O 2 -zSm 2 O 3 ( where x + y + z =
In the ternary composition represented by 1), a (x = 0.4
9, y = 0.50, z = 0.01), b (x = 0.2
5, y = 0.50, z = 0.25), c (x = 0.9
7, y = 0.02, z = 0.01) (where m is 0.30 ≦ m ≦ 0.70, n is 0.70 ≦ n ≦
0.90 range) 100 wt%, B as an additive
a selected from the group consisting of aSiO 3 , MgSiO 3 and CaSiO 3 is 0.05 to 3.00 wt%, and V 2 O 5 is 0.1 wt%.
The composition is a composition in which the composition is added in the range of 0.5 to 0.30 wt%.

【0007】この構成により、非酸化性雰囲気中の焼成
においても電気特性の安定したものが得られることにな
る。
[0007] With this configuration, even when firing in a non-oxidizing atmosphere, stable electric characteristics can be obtained.

【0008】[0008]

【発明の実施の形態】本発明の請求項1に記載の発明
は、一般式として、x(MgmCa1-m)O−y(Tin
Zr1-n)O2−zSm23(但しx+y+z=1)で表
される三成分系組成において、a(x=0.49、y=
0.50、z=0.01)、b(x=0.25、y=
0.50、z=0.25)、c(x=0.97、y=
0.02、z=0.01)で囲まれた組成(但し、mは
0.30≦m≦0.70、nは0.70≦n≦0.90
の範囲)100wt%に対し、添加物としてBaSiO
3,MgSiO3,CaSiO3の群より選ばれた一つを
0.05〜3.00wt%、更にV25を0.05〜
0.30wt%添加した誘電体磁器組成物である。一般
式が、x(MgmCa1-m)O−y(TinZr1-n)O2
−zSm23で表され、しかもa(x=0.49、y=
0.50、z=0.01)、b(x=0.25、y=
0.50、z=0.25)、c(x=0.97、y=
0.02、z=0.01)で囲まれた本発明の三成分系
材料組成は、MgO,CaO,Sm23のモル比の和
(x+z)が、常にTiO2,ZrO2のモル比の和
(y)と等しいか、又は大きくなるように組成範囲を規
定したものである。この組成にV25を0.05〜0.
30wt%添加することにより、非酸化性雰囲気中で焼
成を行ってもV25がTiO2の還元を防止し、絶縁抵
抗が大きく、しかも設計値通りの容量温度係数の小さい
焼結体が得られる。従ってニッケル等の卑金属を内部電
極に用いる温度補償用の積層セラミックコンデンサの誘
電体磁器組成物として好適なものである。また更に、還
元されやすいTiO2の一部をZrO2で置換すること
で、更に耐還元性を向上させることができる。一方Ba
SiO3,MgSiO3,CaSiO3の群より選ばれた
一つを0.05〜3.00wt%添加することにより、
これらが焼結助材として焼結性を促進しQE、絶縁抵抗
の高い優れた焼結体を得ることができるものである。
DETAILED DESCRIPTION OF THE INVENTION According to a first aspect of the present invention, as a general formula, x (Mg m Ca 1- m) O-y (Ti n
In a ternary composition represented by Zr 1-n ) O 2 -zSm 2 O 3 (where x + y + z = 1), a (x = 0.49, y =
0.50, z = 0.01), b (x = 0.25, y =
0.50, z = 0.25), c (x = 0.97, y =
0.02, z = 0.01) (where m is 0.30 ≦ m ≦ 0.70, n is 0.70 ≦ n ≦ 0.90)
Range) 100 wt%, and BaSiO as an additive
3 , MgSiO 3 , CaSiO 3 , one selected from the group consisting of 0.05 to 3.00 wt%, and V 2 O 5 of 0.05 to 3.0 wt%.
It is a dielectric porcelain composition to which 0.30 wt% is added. General formula, x (Mg m Ca 1- m) O-y (Ti n Zr 1-n) O 2
−zSm 2 O 3 , and a (x = 0.49, y =
0.50, z = 0.01), b (x = 0.25, y =
0.50, z = 0.25), c (x = 0.97, y =
0.02, z = 0.01), the sum of the molar ratios of MgO, CaO and Sm 2 O 3 (x + z) is always equal to the molar ratio of TiO 2 and ZrO 2 . The composition range is defined so as to be equal to or larger than the sum (y) of the ratio. V 2 O 5 is added to this composition in an amount of 0.05 to 0.
By adding 30 wt%, even if firing is performed in a non-oxidizing atmosphere, V 2 O 5 prevents reduction of TiO 2 , and a sintered body having a large insulation resistance and a small capacity temperature coefficient as designed is obtained. can get. Therefore, it is suitable as a dielectric ceramic composition for a multilayer ceramic capacitor for temperature compensation using a base metal such as nickel for the internal electrodes. Further, by substituting a part of TiO 2 which is easily reduced with ZrO 2 , reduction resistance can be further improved. On the other hand, Ba
By adding one selected from the group consisting of SiO 3 , MgSiO 3 and CaSiO 3 in an amount of 0.05 to 3.00 wt%,
These promote sinterability as a sintering aid, and can provide an excellent sintered body having high Q E and high insulation resistance.

【0009】本発明の請求項2に記載の発明は、請求項
1に記載の誘電体磁器組成物の主成分x(Mgm
1-m)O−y(TinZr1-n)O2−zSm23(但し
x+y+z=1)で表される三成分系組成において、a
(x=0.49、y=0.50、z=0.01)、b
(x=0.25、y=0.50、z=0.25)、c
(x=0.97、y=0.02、z=0.01)で囲ま
れた組成(但し、mは0.30≦m≦0.70、nは
0.70≦n≦0.90の範囲)100wt%に対し、
更にAl23を2.0wt%以下、MnO2を0.5w
t%以下(但し、両方とも同時に0は除く)を添加した
ことを特徴とする請求項1に記載の誘電体磁器組成物で
ある(尚x,y,m,nはモル比を表す)。前記組成に
対しAl23及びMnO2を添加することにより焼結性
を更に向上させる。特にMnO2はTiO2の還元を防
ぎ、絶縁抵抗をより高いものとする効果がある。
According to a second aspect of the present invention, there is provided the dielectric ceramic composition according to the first aspect, wherein the main component x (Mg m C
In a 1-m) O-y (Ti n Zr 1-n) O 2 -zSm 2 O 3 ( where x + y + z = 1) ternary composition represented by, a
(X = 0.49, y = 0.50, z = 0.01), b
(X = 0.25, y = 0.50, z = 0.25), c
(X = 0.97, y = 0.02, z = 0.01) (where m is 0.30 ≦ m ≦ 0.70, n is 0.70 ≦ n ≦ 0.90) Range) 100 wt%,
Further, Al 2 O 3 is 2.0 wt% or less, and MnO 2 is 0.5 w%.
The dielectric porcelain composition according to claim 1, wherein t% or less (however, both are simultaneously excluding 0) is added (where x, y, m, and n represent a molar ratio). Sinterability is further improved by adding Al 2 O 3 and MnO 2 to the above composition. In particular, MnO 2 has the effect of preventing the reduction of TiO 2 and increasing the insulation resistance.

【0010】本発明の請求項3に記載の発明は、請求項
1及び請求項2に記載の誘電体磁器組成物からなるセラ
ミック層と、ニッケル等の卑金属の内部電極で構成した
積層セラミックコンデンサである。請求項1及び請求項
2に記載の耐還元性誘電体磁器組成物でセラミック層を
構成することによって、ニッケル等の卑金属を内部電極
に用いた積層セラミックコンデンサが非酸化性雰囲気中
での焼成が可能となり、QE、絶縁抵抗が共に高く、し
かも静電容量温度係数の小さい優れた温度補償用の積層
セラミックコンデンサを得ることができるものである。
According to a third aspect of the present invention, there is provided a multilayer ceramic capacitor comprising a ceramic layer comprising the dielectric ceramic composition according to the first and second aspects and an internal electrode of a base metal such as nickel. is there. By forming the ceramic layer from the reduction-resistant dielectric porcelain composition according to claim 1 or 2, the multilayer ceramic capacitor using a base metal such as nickel for the internal electrode can be fired in a non-oxidizing atmosphere. This makes it possible to obtain an excellent multilayer ceramic capacitor for temperature compensation, which has both a high Q E and a high insulation resistance and a small capacitance temperature coefficient.

【0011】(実施の形態1)先ず、出発原料として高
純度のMgO,CaO,TiO2,ZrO2,Sm23
25,BaSiO3粉末を(表1)〜(表5)に示す
組成比になるように秤量し、湿式混合後、脱水乾燥を行
い、得られた混合材料を高純度アルミナ質の坩堝に入
れ、空気中1150℃の温度で2時間仮焼を行う。
[0011] (Embodiment 1) First, high purity of MgO as starting materials, CaO, TiO 2, ZrO 2 , Sm 2 O 3,
V 2 O 5 and BaSiO 3 powders were weighed so as to have the composition ratios shown in (Table 1) to (Table 5), wet-mixed, dehydrated and dried, and the obtained mixed material was crucible made of high-purity alumina. And calcined in air at a temperature of 1150 ° C. for 2 hours.

【0012】[0012]

【表1】 [Table 1]

【0013】[0013]

【表2】 [Table 2]

【0014】[0014]

【表3】 [Table 3]

【0015】[0015]

【表4】 [Table 4]

【0016】[0016]

【表5】 [Table 5]

【0017】次に、仮焼材料をゴム内張りのボールミル
の中に純水とジルコニアボールと共に入れ、湿式粉砕
後、脱水乾燥を行い温度補償用の誘電体磁器組成物を作
製した。得られた温度補償用の誘電体磁器組成物に、有
機バインダーを加え造粒後、油圧プレスを用い、成形圧
力1ton/cm2で直径15mm、厚み0.4mmの円板を成形
した。
Next, the calcined material was put together with pure water and zirconia balls in a rubber-lined ball mill, wet-pulverized, dehydrated and dried to prepare a dielectric ceramic composition for temperature compensation. An organic binder was added to the obtained dielectric ceramic composition for temperature compensation, and after granulation, a disc having a diameter of 15 mm and a thickness of 0.4 mm was formed at a molding pressure of 1 ton / cm 2 using a hydraulic press.

【0018】次いで、成形した円板をアルミナ質のサヤ
に入れ、空気中にて700℃で2時間脱脂した後、非酸
化雰囲気中にて(表6)〜(表10)に示す温度で2時
間焼成し、焼結体を得た。
Next, the formed disk is placed in an alumina sheath, degreased in air at 700 ° C. for 2 hours, and then heated in a non-oxidizing atmosphere at a temperature shown in (Table 6) to (Table 10). After firing for a time, a sintered body was obtained.

【0019】得られた焼結体の両面に銅電極ペーストを
塗布した後、非酸化雰囲気において900℃の温度で焼
付けた後、誘電率、QE、絶縁抵抗、静電容量温度係数
の測定を行い、その結果を(表6)〜(表10)に示し
た。尚、誘電率、QEの測定は温度20℃、測定電圧
1.0Vrms、測定周波数1MHzで行い、絶縁抵抗は
電極間にDC50Vを1分間印加した後の抵抗値より、
また静電容量温度係数は20℃と125℃における静電
容量を測定し(数1)より求めた。
After applying a copper electrode paste to both surfaces of the obtained sintered body and baking it at 900 ° C. in a non-oxidizing atmosphere, the dielectric constant, Q E , insulation resistance and capacitance temperature coefficient were measured. The results were shown in (Table 6) to (Table 10). The dielectric constant and Q E were measured at a temperature of 20 ° C., a measurement voltage of 1.0 Vrms, and a measurement frequency of 1 MHz. The insulation resistance was determined from the resistance value after applying DC 50 V between the electrodes for 1 minute.
The capacitance temperature coefficient was determined by measuring the capacitance at 20 ° C. and 125 ° C. (Equation 1).

【0020】[0020]

【表6】 [Table 6]

【0021】[0021]

【表7】 [Table 7]

【0022】[0022]

【表8】 [Table 8]

【0023】[0023]

【表9】 [Table 9]

【0024】[0024]

【表10】 [Table 10]

【0025】[0025]

【数1】 (Equation 1)

【0026】(表6)〜(表10)に示すように、試料
2,4,18,22,23,26はTiO2が一部還元
され絶縁抵抗が極端に低下し、試料8,10,14,1
9は1350℃の温度で焼結不十分なためQE、絶縁抵
抗が共に低下し、試料5,7は1350℃の温度で焼結
しない。さらに、試料15は、静電容量温度係数がプラ
ス351ppm/℃と大きい。これに対し、試料1,3,
6,9,11,12,13,16,17,20,21,
24,25の本発明の組成範囲内のものは、Q Eが大き
く、絶縁抵抗も高く、さらに静電容量温度係数が小さい
優れた誘電体特性が得られることが明らかとなる。
As shown in Tables 6 to 10, the samples
2,4,18,22,23,26 are TiOTwoIs partially reduced
As a result, the insulation resistance was extremely reduced, and samples 8, 10, 14, 1
9 is 1350 ° C because of insufficient sintering.E, Insulation resistance
Samples 5 and 7 are sintered at a temperature of 1350 ° C.
do not do. Further, the sample 15 has a capacitance temperature coefficient
351 ppm / ° C. On the other hand, samples 1, 3,
6, 9, 11, 12, 13, 16, 17, 20, 21,
24, 25 within the composition range of the present invention EIs large
High insulation resistance and low capacitance temperature coefficient
It becomes clear that excellent dielectric properties can be obtained.

【0027】以下、それぞれの組成範囲を限定した理由
について述べる。はじめに、主成分のx,y,zの範囲
を限定した理由について述べる。(表1)の試料2,4
のように、MgOとCaO及びSm23のモル比の和
(x+z)よりも、TiO2とZrO2のモル比の和
(y)が大きい範囲、即ちy>0.50の組成は、非還
元雰囲気で焼成すると、主成分のTiO2が還元され絶
縁抵抗が低く、安定した誘電体特性が得られず実用的で
なくなる。
The reasons for limiting the respective composition ranges will be described below. First, the reason for limiting the range of x, y, and z of the main component will be described. Samples 2 and 4 in Table 1
In the range where the sum (y) of the molar ratios of TiO 2 and ZrO 2 is larger than the sum (x + z) of the molar ratios of MgO, CaO and Sm 2 O 3 , that is, the composition in which y> 0.50, When fired in a non-reducing atmosphere, TiO 2 as the main component is reduced, the insulation resistance is low, and stable dielectric properties cannot be obtained, which is not practical.

【0028】また、試料8のように、TiO2とZrO2
のモル比の和(y)が0.01の組成は1350℃の焼
成では焼結が不十分でQE、絶縁抵抗共に低くなる。従
って、yの範囲は0.02≦y≦0.50とする必要が
ある。また、試料5,7,8のように、zのモル数の2
倍の値がyのモル数と等しいか又は大きくなると、焼結
不十分か焼結が困難となり、QE、絶縁抵抗が低下する
ことがわかる。即ち、y(Ti,Zr)O2とzSm2
3との関係において、Sm23のモル数zの2倍が、
(Ti,Zr)O2のモル数yより大きくなると、焼結
が困難になることから、y≧2zとする必要がある。但
し、yの範囲は0.02≦y≦0.50とする。従っ
て、yの値が0.02から0.50の範囲で変化する
と、zの値は常にy≧2zを満たし0.01〜0.25
の範囲で変化することになる。
As shown in Sample 8, TiO 2 and ZrO 2
When the composition (sum) of the molar ratios (y) is 0.01, sintering is insufficient at 1350 ° C., and both Q E and insulation resistance are reduced. Therefore, the range of y needs to be 0.02 ≦ y ≦ 0.50. In addition, as in Samples 5, 7, and 8, the number of moles of z is 2
It can be seen that when the double value is equal to or larger than the number of moles of y, the sintering is insufficient or difficult, and the Q E and the insulation resistance decrease. That is, y (Ti, Zr) O 2 and zSm 2 O
In relation to 3 , twice the number of moles z of Sm 2 O 3 is
When the number of moles of (Ti, Zr) O 2 is larger than y, sintering becomes difficult, so it is necessary to satisfy y ≧ 2z. However, the range of y is set to 0.02 ≦ y ≦ 0.50. Therefore, when the value of y changes in the range of 0.02 to 0.50, the value of z always satisfies y ≧ 2z and is 0.01 to 0.25.
In the range.

【0029】また、x+y+z=1の関係からxの範囲
はy,zの値より必然的に決定され、本発明の主成分の
x,y,zの範囲は図1に示す点a,b,cを直線で囲
まれたモル比の範囲に限定される。
Also, from the relationship x + y + z = 1, the range of x is inevitably determined by the values of y and z, and the range of x, y, and z of the main component of the present invention is determined by points a, b, and c is limited to the range of the molar ratio enclosed by a straight line.

【0030】次にMgのモル比mの範囲を限定した理由
は、(表2)、(表7)に示すようにmの値が0.30
より小さいか、または0.70より大きい組成の試料1
0,14は1350℃の焼成でも焼結不十分なために、
E、絶縁抵抗が共に低下し実用的でなくなる。従っ
て、mの範囲は0.30≦m≦0.70に限定する必要
がある。
Next, the reason for limiting the range of the molar ratio m of Mg is that as shown in (Table 2) and (Table 7), the value of m is 0.30
Sample 1 having a composition smaller than or larger than 0.70
For 0,14, sintering was insufficient even at 1350 ° C.
Both Q E and insulation resistance are reduced, making them impractical. Therefore, the range of m needs to be limited to 0.30 ≦ m ≦ 0.70.

【0031】また、Tiのモル比nの範囲を限定した理
由は、(表3)、(表8)に示す試料15のように、n
の値が0.60の場合は静電容量温度係数がプラス方向
に極めて大きくなり、温度補償用の誘電体磁器組成物と
して実用的でなく、試料18のようにnの値が1.0
0、即ちTiO2100%の場合は、非酸化雰囲気中の
焼成でTiO2が還元され、絶縁抵抗が低くなると共
に、安定した誘電特性が得られなくなる。従って、nの
値は0.70≦n≦0.90の範囲に限定する必要があ
る。
The reason for limiting the range of the molar ratio n of Ti is that, as in Sample 15 shown in (Table 3) and (Table 8), n
Is 0.60, the temperature coefficient of capacitance becomes extremely large in the positive direction, which is not practical as a dielectric ceramic composition for temperature compensation.
0, i.e., if the TiO 2 100%, TiO 2 is reduced by firing in a non-oxidizing atmosphere, the insulation resistance is lowered, not stable dielectric characteristics. Therefore, it is necessary to limit the value of n to the range of 0.70 ≦ n ≦ 0.90.

【0032】一方、添加物のBaSiO3の添加量を限
定した理由は(表4)、(表9)に示す試料19のよう
に添加量が零の組成は、1350℃の焼成においても焼
結不十分なためにQE、絶縁抵抗が共に低下し、また、
試料22のように添加量が3.0を超えると焼成温度を
低下する効果があるが、添加したBaSiO3のSi成
分の一部がTi位置に入り込み、置換されたTiが還元
されてQEと絶縁抵抗を低下させる。従って、BaSi
3の添加範囲は、0.2〜3.0wt%の範囲に限定
する必要がある。
On the other hand, the reason why the addition amount of BaSiO 3 was limited was as shown in Table 4 and the composition with no addition amount as in sample 19 shown in Table 9 was sintered even at 1350 ° C. Insufficiently reduces both Q E and insulation resistance.
When the addition amount exceeds 3.0 as in Sample 22, the firing temperature is lowered, but a part of the added Si component of BaSiO 3 enters the Ti position, and the substituted Ti is reduced to Q E. And lower the insulation resistance. Therefore, BaSi
It is necessary to limit the addition range of O 3 to the range of 0.2 to 3.0 wt%.

【0033】更に、V25の添加量を限定した理由は、
(表5)、(表10)に示す試料23のように添加量が
零の組成は、主成分のTiO2の還元を防御することが
できず、非酸化性雰囲気中の焼成でTiO2が還元さ
れ、絶縁抵抗が低下すると共に安定した誘電特性が得ら
れなくなる。また試料26のように添加量が0.3wt
%を超えると逆にTiO2を還元させ、QEと絶縁抵抗を
低下させるため好ましくない。この原因は定かではない
が、V25がTiO2を原子価制御し半導体化するため
と思われる。従って、V25の添加量は、0.05〜
0.3wt%の範囲に限定する必要がある。
Further, the reason why the addition amount of V 2 O 5 is limited is as follows.
(Table 5), the composition amount added is zero as in Sample 23 shown in Table 10 can not protect the reduction of TiO 2 of the main component, TiO 2 is in the firing in a non-oxidizing atmosphere As a result, the insulation resistance is reduced and stable dielectric properties cannot be obtained. Also, as in Sample 26, the addition amount is 0.3 wt.
%, It is not preferable because TiO 2 is reduced and Q E and insulation resistance are reduced. The reason for this is not clear, but it is thought that V 2 O 5 controls the valence of TiO 2 and turns it into a semiconductor. Therefore, the added amount of V 2 O 5 is 0.05 to
It is necessary to limit the range to 0.3 wt%.

【0034】(実施の形態2)実施の形態1の試料12
の組成のBaSiO3に替えてMgSiO3またはCaS
iO3を(表11)の示す組成比になるように秤量した
後、以降の工程を実施の形態1と同条件で処理し、作製
した試料について実施の形態1と同様に評価し、その結
果を(表12)に示した。
(Embodiment 2) Sample 12 of Embodiment 1
MgSiO 3 or CaS in place of BaSiO 3
After weighing iO 3 so as to have the composition ratio shown in (Table 11), the subsequent steps were processed under the same conditions as in Embodiment 1, and the produced sample was evaluated in the same manner as in Embodiment 1, and the results were obtained. Are shown in (Table 12).

【0035】[0035]

【表11】 [Table 11]

【0036】[0036]

【表12】 [Table 12]

【0037】(表12)に示すように、BaSiO3
替えてMgSiO3を添加した試料27〜29、または
CaSiO3を添加した試料31〜33は、BaSiO3
添加の場合と同様にQE、絶縁抵抗共に高く、しかも静
電容量温度係数が小さい優れた誘電体特性が得られるこ
とが分かる。また、MgSiO3を添加した場合、Ba
SiO3の添加に比べ、より絶縁抵抗が高く、CaSi
3の添加はBaSiO3の添加に比べ、よりQEの大き
い誘電体磁器組成物が得られることが分かる。しかしな
がら何れの場合とも添加量が3wt%を超えると、焼成
温度を低下させる効果があるもののBaSiO3と同様
に絶縁抵抗を低下させるために好ましくない。
As shown in (Table 12), Samples 27 to 29 to which MgSiO 3 was added instead of BaSiO 3 or Samples 31 to 33 to which CaSiO 3 was added were BaSiO 3.
As in the case of the addition, it can be seen that excellent dielectric characteristics with high Q E and high insulation resistance and a small capacitance temperature coefficient can be obtained. When MgSiO 3 is added, Ba
Compared to the addition of SiO 3, the insulation resistance is higher and CaSi
It can be seen that the addition of O 3 results in a dielectric ceramic composition having a higher Q E than the addition of BaSiO 3 . However, in any case, when the addition amount exceeds 3 wt%, although the effect of lowering the firing temperature is obtained, it is not preferable because the insulation resistance is reduced similarly to BaSiO 3 .

【0038】(実施の形態3)実施の形態1の試料12
の組成に、更にAl23及びMnO2を(表13)に示
す組成となるように秤量し、以降の工程条件を実施の形
態1と同条件で処理し、作製した試料について実施の形
態1と同様に評価しその結果を(表14)に示した。
(Embodiment 3) Sample 12 of Embodiment 1
In addition, Al 2 O 3 and MnO 2 were further weighed to the composition shown in (Table 13), and the subsequent process conditions were processed under the same conditions as in Embodiment 1 to prepare a sample. The results were evaluated in the same manner as in Example 1, and the results are shown in (Table 14).

【0039】[0039]

【表13】 [Table 13]

【0040】[0040]

【表14】 [Table 14]

【0041】(表14)に示すように、本発明のAl2
3及びMnO2を添加した試料35〜38と40,4
1,43は、QE、絶縁抵抗共に更に高くなり、しかも
静電容量温度係数が小さい優れた誘電体特性が得られる
ことが分かる。これに対しAl 23の添加量が2.0w
t%を超える試料39は焼結温度を低下させる効果はあ
るものの、QEが低下し、またMnO2の添加量が0.5
wt%を超える試料42の焼結体は8μm以上の異常成
長粒子が認められ実用上好ましくない。従ってAl
23、及びMnO2の添加は夫々2.0wt%、0.5
wt%以下(但し、両方とも同時に0は除く)に限定す
る必要があることが分かる。
As shown in Table 14, the Al of the present inventionTwo
OThreeAnd MnOTwo35-38 and 40,4 added with
1,43 is QE, The insulation resistance is higher, and
Excellent dielectric characteristics with low capacitance temperature coefficient
You can see that. On the other hand, Al TwoOThree2.0w
Sample 39 exceeding t% does not have the effect of lowering the sintering temperature.
Although QEAnd MnOTwo0.5
The sintered body of Sample 42 exceeding wt% has an abnormal composition of 8 μm or more.
Long particles are observed, which is not practically preferable. Therefore, Al
TwoOThree, And MnOTwo2.0 wt% and 0.5 wt%, respectively.
wt% or less (however, excluding 0 at the same time for both)
It is necessary to understand that it is necessary.

【0042】(実施の形態4)実施の形態1から実施の
形態3で作製した本発明の誘電体磁器組成物の試料1
2,19,28,32,42,43の各誘電体粉末に酢
酸ブチル、ポリビニルブチラール、可塑剤からなるビヒ
クルを加えて、公知のドクターブレード法により厚さ3
0μmのセラミックグリーンシートを作製した。
(Embodiment 4) Sample 1 of the dielectric ceramic composition of the present invention produced in Embodiments 1 to 3
A vehicle composed of butyl acetate, polyvinyl butyral, and a plasticizer was added to each of the dielectric powders of 2, 19, 28, 32, 42, and 43, and a thickness of 3 was obtained by a known doctor blade method.
A 0 μm ceramic green sheet was produced.

【0043】次に、得られたそれぞれの組成のセラミッ
クグリーンシートを用い、公知の積層コンデンサの製造
方法に従い、内部電極とセラミックグリーンシートを交
互に15層積層したグリーン積層体を600kg/cm2
圧力で加圧圧着した後、1608タイプの積層セラミッ
クコンデンサのグリーンチップ形状に切断を行った。
尚、内部電極にはニッケル電極ペーストを用いた。次い
で、グリーンチップを空気中にて350℃の温度で2時
間脱脂した後、非酸化雰囲気中の1350℃で2時間焼
成を行った。
Next, using the obtained ceramic green sheets of the respective compositions, a green laminate in which 15 internal electrodes and ceramic green sheets were alternately laminated in a thickness of 600 kg / cm 2 was prepared according to a known method of manufacturing a multilayer capacitor. After pressure-compression bonding under pressure, a 1608 type multilayer ceramic capacitor was cut into a green chip shape.
Note that a nickel electrode paste was used for the internal electrodes. Next, the green chip was degreased in air at a temperature of 350 ° C. for 2 hours, and then baked at 1350 ° C. in a non-oxidizing atmosphere for 2 hours.

【0044】その後、得られた焼結体の内部電極が露出
した端面に外部電極を設けてそれぞれ積層セラミックコ
ンデンサを完成させた。
Thereafter, external electrodes were provided on the end faces of the obtained sintered body where the internal electrodes were exposed, thereby completing a multilayer ceramic capacitor.

【0045】得られた各積層セラミックコンデンサにつ
いて静電容量、QE、静電容量温度係数、絶縁抵抗を、
実施の形態1と同様の方法で測定を行った。また寿命試
験として125℃の恒温槽中で50Vの直流電圧を積層
セラミックコンデンサの外部電極間に1000時間連続
印加を行い、その結果を(表15)に示した。
The capacitance, Q E , temperature coefficient of capacitance, and insulation resistance of each of the obtained multilayer ceramic capacitors were calculated as follows:
The measurement was performed in the same manner as in the first embodiment. As a life test, a DC voltage of 50 V was continuously applied between external electrodes of the multilayer ceramic capacitor for 1000 hours in a thermostat at 125 ° C., and the results are shown in Table 15.

【0046】[0046]

【表15】 [Table 15]

【0047】(表15)から明らかなように、本発明の
範囲内の誘電体磁器組成物12,28,32,43を用
い作製した積層セラミックコンデンサは、QE、絶縁抵
抗が共に高く、寿命試験においても特性劣化が認められ
ないのに対し、本発明の範囲外の誘電体磁器組成物の試
料19,42で作製した積層セラミックコンデンサは絶
縁抵抗が低下し、しかも寿命試験においても特性劣化が
認められた。尚、特性劣化は寿命試験後の絶縁抵抗値が
1×1010(Ω)以下に低下したものを不良としてカウ
ントした。
As is clear from Table 15, the multilayer ceramic capacitors manufactured using the dielectric ceramic compositions 12, 28, 32 and 43 within the scope of the present invention have high Q E and high insulation resistance, and have a long service life. While no characteristic deterioration was observed in the test, the multilayer ceramic capacitors manufactured by using the dielectric ceramic composition samples 19 and 42 outside the scope of the present invention exhibited lower insulation resistance, and the life deterioration test showed no characteristic deterioration. Admitted. In addition, as for the characteristic deterioration, those whose insulation resistance value after the life test was reduced to 1 × 10 10 (Ω) or less were counted as defective.

【0048】以上本発明の誘電体磁器組成物は、内部電
極にニッケル等の卑金属を用い積層セラミックコンデン
サ用グリーンチップを作製し、これを非酸化性雰囲気中
で焼成を行っても、QE、絶縁抵抗が共に高く、また静
電容量温度変化率の小さい、しかも寿命試験においても
特性劣化が発生しない優れた積層セラミックコンデンサ
が得られることが明らかである。
The above dielectric ceramic composition of the present invention is to prepare a green chip multilayer ceramic capacitor using a base metal such as nickel internal electrodes, even when the baking it in a non-oxidizing atmosphere, Q E, It is clear that an excellent multilayer ceramic capacitor having both high insulation resistance and a small rate of change in capacitance with temperature and having no characteristic deterioration even in a life test can be obtained.

【0049】また、実施の形態1から3で誘電体磁器組
成物の作製にMgO,CaO,TiO2,ZrO2,Sm
23,BaSiO3,MgSiO3,CaSiO3,V2
5の粉末を使用したが、Mg−Ca−Ti−Zr−Oの
化合物、あるいはMg,Ca,Ti,Zr,Smの炭酸
塩、水酸化物等を本発明の組成となるように用いても、
また、主成分をあらかじめ仮焼した後、添加物を添加し
ても実施の形態と同程度の特性を得ることができる。
Further, in the first to third embodiments, the production of the dielectric ceramic composition was performed using MgO, CaO, TiO 2 , ZrO 2 , Sm.
2 O 3 , BaSiO 3 , MgSiO 3 , CaSiO 3 , V 2 O
Although the powder of No. 5 was used, a compound of Mg—Ca—Ti—Zr—O, or a carbonate, hydroxide or the like of Mg, Ca, Ti, Zr, or Sm may be used so as to have the composition of the present invention. ,
Further, even if the main component is preliminarily calcined and then an additive is added, characteristics similar to those of the embodiment can be obtained.

【0050】[0050]

【発明の効果】以上の結果に示すように、本発明の誘電
体磁器組成物は非酸化雰囲気中で焼成してもQE及び絶
縁抵抗が共に高く、しかも静電容量温度係数の小さい優
れた誘電体特性を有する焼結体が得られ、ニッケル等の
卑金属を内部電極に用いる積層セラミックコンデンサ用
の誘電体磁器組成物として使用が可能である。特に、Q
E特性が優れ、静電容量温度係数が小さいため高周波回
路などで使用する温度補償用の積層セラミックコンデン
サの誘電体磁器組成物として実用性が高いものである。
As shown in the above results, the dielectric properties of the present invention
The ceramic porcelain composition has a QEAnd absolute
Both edge resistance is high and capacitance temperature coefficient is small.
A sintered body with improved dielectric properties is obtained,
For multilayer ceramic capacitors using base metal for internal electrodes
It can be used as a dielectric ceramic composition. In particular, Q
EExcellent characteristics and low temperature coefficient of capacitance
Ceramic condenser for temperature compensation used in roads, etc.
It is highly practical as a dielectric ceramic composition.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の誘電体磁器組成物の範囲を示す三成分
系図
FIG. 1 is a ternary diagram showing the range of the dielectric ceramic composition of the present invention.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4G031 AA03 AA04 AA06 AA07 AA11 AA12 AA13 AA19 AA29 AA30 AA39 BA09 CA03 5E001 AB03 AC09 AE00 AE03 AE04 AF06 AH01 AH05 AH09 AJ01 AJ02  ────────────────────────────────────────────────── ─── Continued on the front page F term (reference) 4G031 AA03 AA04 AA06 AA07 AA11 AA12 AA13 AA19 AA29 AA30 AA39 BA09 CA03 5E001 AB03 AC09 AE00 AE03 AE04 AF06 AH01 AH05 AH09 AJ01 AJ02

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 一般式として、x(MgmCa1-m)O−
y(TinZr1-n)O 2−zSm23(但しx+y+z
=1)で表される三成分系組成において、a(x=0.
49、y=0.50、z=0.01)、b(x=0.2
5、y=0.50、z=0.25)、c(x=0.9
7、y=0.02、z=0.01)で囲まれた組成(但
し、mは0.30≦m≦0.70、nは0.70≦n≦
0.90の範囲)100wt%に対し、添加物としてB
aSiO3,MgSiO3,CaSiO3の群より選ばれ
た一つを0.05〜3.00wt%、更にV25を0.
05〜0.30wt%添加した誘電体磁器組成物(尚
x,y,m,nはモル比を表す)。
1. The general formula x (MgmCa1-m) O-
y (TinZr1-n) O Two-ZSmTwoOThree(However, x + y + z
= 1) in the ternary composition represented by a (x = 0.
49, y = 0.50, z = 0.01), b (x = 0.2
5, y = 0.50, z = 0.25), c (x = 0.9
7, y = 0.02, z = 0.01)
And m is 0.30 ≦ m ≦ 0.70, n is 0.70 ≦ n ≦
0.90 range) 100 wt%, B as an additive
aSiOThree, MgSiOThree, CaSiOThreeFrom the group of
The other one is 0.05 to 3.00 wt%, and VTwoOFiveTo 0.
The dielectric porcelain composition added with 0.5 to 0.30 wt% (note that
x, y, m, and n represent molar ratios).
【請求項2】 請求項1に記載の誘電体磁器組成物の主
成分x(MgmCa1-m)O−y(TinZr1-n)O2
zSm23(但しx+y+z=1)で表される三成分系
組成において、a(x=0.49、y=0.50、z=
0.01)、b(x=0.25、y=0.50、z=
0.25)、c(x=0.97、y=0.02、z=
0.01)で囲まれた組成(但し、mは0.30≦m≦
0.70、nは0.70≦n≦0.90の範囲)100
wt%に対し、更にAl23を2.0wt%以下、及び
MnO2を0.5wt%以下(但し両方とも同時に0の
場合は除く)を添加した請求項1に記載の誘電体磁器組
成物(尚x,y,m,nはモル比を表す)。
2. A main component x (Mg m Ca 1-m ) of the dielectric ceramic composition according to claim 1 O-y (Ti n Zr 1-n) O 2 -
In the ternary composition represented by zSm 2 O 3 (where x + y + z = 1), a (x = 0.49, y = 0.50, z =
0.01), b (x = 0.25, y = 0.50, z =
0.25), c (x = 0.97, y = 0.02, z =
0.01) (where m is 0.30 ≦ m ≦
0.70, n is in the range of 0.70 ≦ n ≦ 0.90) 100
2. The dielectric ceramic composition according to claim 1, wherein Al 2 O 3 is added in an amount of 2.0 wt% or less and MnO 2 is added in an amount of 0.5 wt% or less (except when both are 0 at the same time). (Where x, y, m, and n represent molar ratios).
【請求項3】 請求項1及び請求項2に記載の誘電体磁
器組成物からなるセラミック層と、ニッケル等の卑金属
の内部電極で構成した積層セラミックコンデンサ。
3. A multilayer ceramic capacitor comprising a ceramic layer comprising the dielectric ceramic composition according to claim 1 and an internal electrode of a base metal such as nickel.
JP32055898A 1998-11-11 1998-11-11 Dielectric ceramic composition and multilayer ceramic capacitor using the same Expired - Lifetime JP3575299B2 (en)

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Publication number Priority date Publication date Assignee Title
US6962888B2 (en) * 2000-06-29 2005-11-08 Tdk Corporation Dielectric ceramic composition and electronic device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6962888B2 (en) * 2000-06-29 2005-11-08 Tdk Corporation Dielectric ceramic composition and electronic device

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