JP2000138404A - エキシマレーザ装置用の貫流ファン - Google Patents

エキシマレーザ装置用の貫流ファン

Info

Publication number
JP2000138404A
JP2000138404A JP10324574A JP32457498A JP2000138404A JP 2000138404 A JP2000138404 A JP 2000138404A JP 10324574 A JP10324574 A JP 10324574A JP 32457498 A JP32457498 A JP 32457498A JP 2000138404 A JP2000138404 A JP 2000138404A
Authority
JP
Japan
Prior art keywords
rotating shaft
cross
fan
excimer laser
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10324574A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000138404A5 (enExample
Inventor
Hisashi Nara
久 奈良
Kiyoharu Nakao
清春 中尾
Kazu Mizoguchi
計 溝口
Toshihiro Nishisaka
敏博 西坂
Tatsuo Enami
龍雄 榎波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Komatsu Ltd
Original Assignee
Ebara Corp
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Komatsu Ltd filed Critical Ebara Corp
Priority to JP10324574A priority Critical patent/JP2000138404A/ja
Priority to US09/422,857 priority patent/US6337872B1/en
Publication of JP2000138404A publication Critical patent/JP2000138404A/ja
Publication of JP2000138404A5 publication Critical patent/JP2000138404A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP10324574A 1998-10-29 1998-10-29 エキシマレーザ装置用の貫流ファン Pending JP2000138404A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10324574A JP2000138404A (ja) 1998-10-29 1998-10-29 エキシマレーザ装置用の貫流ファン
US09/422,857 US6337872B1 (en) 1998-10-29 1999-10-25 Once through fan for excimer laser apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10324574A JP2000138404A (ja) 1998-10-29 1998-10-29 エキシマレーザ装置用の貫流ファン

Publications (2)

Publication Number Publication Date
JP2000138404A true JP2000138404A (ja) 2000-05-16
JP2000138404A5 JP2000138404A5 (enExample) 2005-08-25

Family

ID=18167343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10324574A Pending JP2000138404A (ja) 1998-10-29 1998-10-29 エキシマレーザ装置用の貫流ファン

Country Status (2)

Country Link
US (1) US6337872B1 (enExample)
JP (1) JP2000138404A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015213150A (ja) * 2014-04-14 2015-11-26 パナソニックＩｐマネジメント株式会社 ガスレーザ発振装置
JP2024504014A (ja) * 2020-12-31 2024-01-30 北京科益虹源光▲電▼技▲術▼有限公司 防振構造及びレーザ用のインペラロータシステム、レーザ

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4033631B2 (ja) * 1998-11-30 2008-01-16 株式会社荏原製作所 放電励起エキシマレーザ装置
JP2000183436A (ja) * 1998-12-18 2000-06-30 Komatsu Ltd エキシマレ―ザ装置
JP2001077446A (ja) * 1999-09-07 2001-03-23 Nsk Ltd エキシマレーザ装置
JP3389912B2 (ja) * 2000-02-08 2003-03-24 ウシオ電機株式会社 ガスレーザ装置
JP2001234929A (ja) * 2000-02-21 2001-08-31 Ebara Corp 磁気軸受及び循環ファン装置
US6597719B1 (en) * 2000-08-21 2003-07-22 Komatsu Ltd. Once through fan for gas laser apparatus and gas laser apparatus therewith
EP1188932A3 (en) * 2000-09-19 2003-05-02 Ntn Corporation Bearing structure for laser fan
JP2003056489A (ja) * 2001-08-21 2003-02-26 Ntn Corp エキシマレーザ装置のガス循環ファン
DE102010001538A1 (de) * 2010-02-03 2011-08-04 Trumpf Maschinen Ag Gaslaser mit Radial- und Axialgaslager
US10923986B2 (en) * 2017-06-15 2021-02-16 Dbb Technology Llc Magnetic anti-lock device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5048041A (en) * 1988-01-15 1991-09-10 Cymer Laser Technologies Compact excimer laser
CA2190697C (en) * 1996-01-31 2000-07-25 Donald Glenn Larson Blower motor with adjustable timing
JPH10173259A (ja) 1996-12-06 1998-06-26 Komatsu Ltd エキシマレーザ装置
US5848089A (en) * 1997-07-11 1998-12-08 Cymer, Inc. Excimer laser with magnetic bearings supporting fan
US6018537A (en) * 1997-07-18 2000-01-25 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate F2 laser
US6208675B1 (en) * 1998-08-27 2001-03-27 Cymer, Inc. Blower assembly for a pulsed laser system incorporating ceramic bearings

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015213150A (ja) * 2014-04-14 2015-11-26 パナソニックＩｐマネジメント株式会社 ガスレーザ発振装置
JP2024504014A (ja) * 2020-12-31 2024-01-30 北京科益虹源光▲電▼技▲術▼有限公司 防振構造及びレーザ用のインペラロータシステム、レーザ
JP7561281B2 (ja) 2020-12-31 2024-10-03 北京科益虹源光▲電▼技▲術▼有限公司 レーザ用の防振構造及びレーザ用のインペラロータシステム、エキシマレーザ

Also Published As

Publication number Publication date
US6337872B1 (en) 2002-01-08

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