478222 A7478222 A7
[技術領域] 本發明為關於具備以磁性軸承支持其旋轉軸之貫流屬 的準分子雷射裝置。 [背景技術] 第5及第6圖表示習用之準分子雷射裝置之概略構 成。第5圖表示準分子雷射裝置之縱斷面圖，第6圖表示 沿第5圖之Z-Z斷面圖。如圖所示，習用之準分子雷射裝 置於封入含有如氟素氣體之齒素氣體的雷射氣體之雷射容 器101内部設置有使雷射氣體發生預備電離之預備電離電 極（未圖示），用以獲得能夠產生雷射光之振盪之放電的— 對主放電電極102, 102。又於雷射容器101内設置有在主 放電電極102、102之間形成高速之雷射氣體流的貫流扇 103 〇 貫流扇103備有沿軸向貫通裝置内部且其兩端凸出之 旋轉軸104，該旋轉軸1〇4由設在雷射容器ιοί之兩端的 徑向磁性軸承106、107及軸向磁性軸承1〇8以非接觸的方 式’旋轉自如的支持。在通過徑向軸承1〇7之旋轉軸1〇4 的端部設有馬達109。又為了在徑向磁性軸承ι〇6、ι〇7及 轴向磁性軸承108停止動作時支承貫流扇ι〇3之旋轉軸 1 〇4而設有保護用軸承1 i j工。 雷射光之振蘯為由施加高壓於主放電電極1〇2、1〇2 之間使其發生雷射勵起放電而得。發生之雷射光為經由設 在雷射容器101之側壁的窗i 05、105取出至雷射容器1〇1 之外。Μ發生雷射勵起放電時，主放電電極jo〕 C請先閱讀背面之注意事項再填寫本頁} ·____ 經濟部智慧財產局員工消費合作社印製 本紙張尺度ϋ國國家標準（CNS)aU格⑽X 297公釐） 1 312227 4/8222 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（2 間之雷射氣體即劣化，因此放電特性變壞，以致不能發生 雷射裝置。 因此使用貫流扇103使雷射容器1〇1内的雷射氣體循 環而於主放電電極102、102間產生雷射氣體流，藉由經常 更換主放電電極102、102間之雷射氣體而得安定的雷射振 盪。雷射氣體為如第6圖之箭頭所示受整流板112的整流 而均勻的流通於主放電電極1〇2 ' 1〇2間。 然而依上述之習用的準分子雷射裝置，由於在貫風扇 103之内邛δ又置旋轉軸1〇4，構成風扇效率（風扇施加於雷 射氣體的動力/旋轉軸動力）低的問題。 亦即由於磁性軸承為將旋轉軸浮上支持，該磁性軸承 部分對於旋轉軸構成彈蓋·質量系。因此於貫流扇旋轉時， 該磁性軸承部分亦發生振動，對貫流扇構成彎曲應力，特 別因為磁性軸承本身之旋轉軸側構成要素具有相當的重 里’其彎曲應力相當大。更由於磁性軸承本身之轉子側構 成要素有相當的重量，使由該貫流扇1〇3及其軸所形成之 轉子之— 人固有振動數（三次危險速度）降低而接近該貫流 扇之動作旋轉數。而如動作4之貫流扇的旋轉數接近此一 次固有振動數時，則彎曲應力將隨著貫流扇之振動而增 大。因而貫流扇在構造上有必要補強，而使旋轉軸貫通該 貫流扇以補強其對於彎曲的剛性。 又於發生異常等以致不能由磁性軸承浮上支承旋轉軸 104時’旋轉軸1〇4將掉落於保護用軸承ii〇、上而 於掉落時之衝擊將增加對貫流扇的彎曲應力。由於該彎曲 k紙張尺度適用t關家標準（CNS)A4規格（ χ挪公髮） ζ 312227 -------------------- — ^---------^ — -------------------- (請先閱讀背面之注意事項再填寫本頁) Α7 五、發明說明（3 ) 應力使貫風扇103變形則失去旋轉平衡，因此在再度開動 時需實施平衡作業或變換貫流扇等而浪費相當多的作業時 間。由於此亦使旋轉轴104貫通貫流扇内部以增加當該貫 流扇之強度。 然而因上述理由而使旋轉軸1〇4貫通貫流扇1〇3内部 時，則如第6圖所示，由於雷射氣體為通過貫流扇1〇3内 部流通，因此旋轉軸1〇4對於氣體流構成阻礙，以致降低 貫流扇效率。例如貫流扇103通常具有4〇%程度的貫流扇 效率，而對於外徑0 D之貫流扇内部設軸經0 〇、2D之旋 轉軸104時，其效率將降低20%程度。 又由於旋轉軸104為細長之軸，隨振動之振幅容易變 大。 [發明之開示] 本發明有鑑於上述各點的問題，以提供能解決上述習 用之準为子雷射裝置的各種問題，貫流扇所需驅動力小及 振動輕微之準分子雷射裝置為目的。 亦即本發明以提供具備：封入雷射氣體之雷射容器； 配置於該雷射容器内之用以獲得能夠產生雷射光之振盪的 放電之一對主放電電極；設置在雷射容器内以形成通過前 述主放電電極間之雷射氣體流的貫風扇；於該貫風扇之軸 方向的一端與該貫風扇為同轴並向離開該貫風扇的方向凸 出而設之旋轉轴；以及支承著該旋轉軸而以單側支承樑式 保持前述貫流扇之軸承裝置為其特徵之準分子雷射裝置。 此裝置由於以單側支承樑式支承貫流扇，因此不虞有 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製[Technical Field] The present invention relates to an excimer laser device having a through-flow genus in which a rotating shaft is supported by a magnetic bearing. [Background Art] Figs. 5 and 6 show a schematic configuration of a conventional excimer laser device. Fig. 5 shows a longitudinal sectional view of the excimer laser device, and Fig. 6 shows a Z-Z sectional view along Fig. 5. As shown in the figure, a conventional excimer laser device is provided with a pre-ionization electrode (not shown) for pre-ionization of the laser gas inside a laser container 101 that encloses a laser gas containing a tooth gas such as fluorine gas. ) To obtain a discharge capable of generating oscillations of laser light—for the main discharge electrodes 102, 102. In the laser container 101, a cross-flow fan 103 that forms a high-speed laser gas flow between the main discharge electrodes 102 and 102 is provided. The cross-flow fan 103 is provided with a rotating shaft that penetrates the inside of the device in the axial direction and projects at both ends. 104. The rotating shaft 104 is supported by the radial magnetic bearings 106 and 107 and the axial magnetic bearing 108 which are freely rotated in a non-contact manner at the two ends of the laser container. A motor 109 is provided at an end of the rotation shaft 104 passing through the radial bearing 107. In addition, in order to support the rotating shaft 1 04 of the cross-flow fan 03 when the radial magnetic bearings ι06, ι07 and axial magnetic bearings 108 are stopped, a protective bearing 1i is provided. The vibration of the laser light is obtained by applying a high voltage between the main discharge electrodes 102 and 102 to cause laser discharge to occur. The generated laser light is taken out of the laser container 101 through the windows i 05 and 105 provided on the side wall of the laser container 101. Μ When a laser-induced discharge occurs, the main discharge electrode jo] C Please read the precautions on the back before filling out this page} · ____ Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, National Standard (CNS) aU Grid X 297 mm) 1 312227 4/8222 A7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. A description of the invention (the laser gas in the two rooms is degraded, so the discharge characteristics are deteriorated, so that the laser device cannot be generated. Therefore The cross-flow fan 103 is used to circulate the laser gas in the laser container 101 to generate a laser gas flow between the main discharge electrodes 102 and 102. The laser gas between the main discharge electrodes 102 and 102 is frequently replaced and stabilized. The laser gas is rectified by the rectifying plate 112 and circulates uniformly between the main discharge electrodes 10 2 ′ 102 as shown by the arrow in FIG. 6. The device, because 轴 δ is placed inside the fan 103 and the rotating shaft 104 is placed, constitutes a problem of low fan efficiency (power applied by the fan to the laser gas / rotating shaft power). That is, because the magnetic bearing floats the rotating shaft support The magnetic bearing part constitutes a spring cover and mass system for the rotating shaft. Therefore, when the cross-flow fan rotates, the magnetic bearing part also vibrates, which causes bending stress on the cross-flow fan, especially because the magnetic bearing itself has a considerable amount of components on the rotating shaft side. The bending stress is very large. Moreover, due to the considerable weight of the rotor-side components of the magnetic bearing itself, the number of human natural vibrations (three dangerous speeds) of the rotor formed by the cross-flow fan 103 and its shaft. Reduce and approach the number of rotations of the cross-flow fan. If the number of rotations of the cross-flow fan in action 4 is close to the number of natural vibrations this time, the bending stress will increase with the vibration of the cross-flow fan. Therefore, the cross-flow fan has a structure. Reinforcement is necessary so that the rotating shaft passes through the cross-flow fan to reinforce its rigidity against bending. If an abnormality occurs, such that the rotating shaft 104 cannot be supported by a magnetic bearing, the rotating shaft 104 will fall on the protective bearing ii〇 The impact when falling will increase the bending stress of the convection fan. Because the bending k paper size is applicable to the family standard (CNS) A4 Grid (χ Norwegian public hair) ζ 312227 -------------------- — ^ --------- ^ — -------- ------------ (Please read the precautions on the back before filling in this page) Α7 V. Description of the invention (3) Stress will deform the fan 103 and lose the rotation balance. A considerable amount of work time is wasted by carrying out balancing work or changing the cross-flow fan, etc. Because of this, the rotating shaft 104 is also penetrated through the cross-flow fan to increase the strength of the cross-flow fan. However, due to the above reasons, the rotating shaft 104 is penetrated through the cross-flow fan In the interior of 103, as shown in FIG. 6, since the laser gas circulates through the interior of the cross-flow fan 103, the rotating shaft 104 hinders the gas flow, thereby reducing the efficiency of the cross-flow fan. For example, the cross-flow fan 103 usually has a cross-flow fan efficiency of about 40%. When a cross-flow fan with an outer diameter of 0 D is internally provided with a 0, 2D rotating shaft 104, its efficiency will be reduced by about 20%. Since the rotating shaft 104 is an elongated shaft, it is easy to increase the amplitude with vibration. [Invention of the Invention] The present invention has been made in view of the problems described above, and aims to provide an excimer laser device that can solve the above-mentioned conventional quasi-laser devices, and has a small driving force and a slight vibration required by a cross-flow fan. . That is, the present invention provides: a laser container sealed with a laser gas; a main discharge electrode disposed in the laser container to obtain a discharge capable of generating laser light oscillation; and provided in the laser container to Forming a penetrating fan passing through the laser gas flow between the main discharge electrodes; a rotating shaft provided at one end in the axial direction of the penetrating fan and coaxial with the penetrating fan and protruding in a direction away from the penetrating fan; and a support An excimer laser device characterized by a bearing device that holds the cross-flow fan with a single-sided support beam type against the rotation axis. Because this device supports the cross-flow fan with a single-sided support beam type, it is not necessary (please read the precautions on the back before filling this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs
·------- 丨訂-------- •線丨^^·----------------------- "+ / ΟΖΖΖ 經濟部智慧財產局員工消費合作社印製 A7 " ^—— Β7 _^ ^ (4 ) " ^ 〜 如前述習用裝置之因與軸奘-μ二士 口興釉裝置有關之兀件而有過大 作用在該貫流扇上之問題。 軸承裝置可於旋轉軸的轴線方向隔以間隔設置兩個 向磁性軸承。此時最好在兩個徑向磁性軸承之間使馬達: 動連結㈣㈣。由此可將貫流扇及旋轉料構成之轉子 的重心定在兩徑向軸承之間，使該轉子之重量由兩捏向轴 承均等的支承，並可由兩側之徑向軸承適#的抑制 振動。 又最好針對旋轉軸設置軸向磁性轴承。 又可設置分別與兩徑向磁性軸承鄰接之保護用軸承， 以於徑向磁性軸承不動作時支承旋轉軸。 又可δ又置兩個貫流扇使其沿軸線方向相互整合鄰接， 此時貫流扇各自的旋轉軸係以沿軸向從與兩貫流扇相鄰接 的端部相反的相反側端部突出的方式設置。 又可在該貫流扇之與前述軸方向一端相反的相反側端 部設置振盡抑制裝置。該振動抑制裝置係與貫流扇同心地 設在前述相反側的端部上，並且可由向離開該貫流扇之方 向凸出之旋轉軸、固定於該旋轉軸之圓板、及具有貫通該 圓板之磁氣迴路之磁鐵裝置構成。 貫流扇可由沿軸方向平行配置之複數枚環狀板、貫通 該複數枚環狀板而在軸方向延伸之複數枚葉片構成之隙籠 狀構造。葉片為由輕量而高強度之鋁合金構成，其表面則 最好實施對雷射氣體之耐腐蝕處理。 [圖面之簡單說明] 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 χ 297公釐） 4 312227 I ϋ I ϋ I H ϋ ϋ ί ϋ 1· · 1· I I I ϋ I n I ϋ .1 (請先閱讀背面之注意事項再填寫本頁) I I I — — — — — — — — — — — — — — — — — — — — — I. l '發明說明（5 ) 弟1圖表不本發明證·！也 成a Θ第1實施例之準分子雷射裝置的構 _ ’第1圖（a)為全體你齡 Ά ^ 篮縱斷面圖，第1圖（b)為磁性轴承部 久馬達部之擴大斷面圖。 弟2圖表不本發日月含Sr 1 & Θ弟2實施例之準分子雷射裝置使用 ^貫流扇的構造圖。 $ 3圖表示本發明第3實施例之準分子雷射裝置之構 戍的縱斷面圖。 、第4圖表示本發明第4實施例之準分子雷射裝置之構 成的縱斷面圖。 第5圖表不習用之準分子雷射裝置之概略構成例的縱 斷面圖。 第6圖表示沿第5圖之z-Z的斷面圖。 [元件符號說明] 2，102主放電電極 4，4a，4b，104 旋轉軸 6殼體 9，10，106，107徑向磁性軸承 12，109馬達 13，14 ’ 110，111保護用轴承 9a，l〇a，11a 電磁鐵 9b，10b 9c，l〇c徑向變位感測器 9d，lOd 11 c，11 d軸向變位感測器 3a葉片 3c缺口 ‘紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 1，101雷射容 3，103貫流扇 5 ， 105 窗 7 ’ 8軸向殼體 11，108軸向磁性軸承 器 lib電磁鐵把 11 e感測器靶 312227 15 ， 16筒罩 3 b環狀板 ---------訂-------- IAW.----------------------- 478222 22定子側磁鐵 24磁束 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 A7 五、發明說明（6 ) 21振動抑制機構 23圓板 [發明之較佳實施形態] 以下參照圖面說明本發明之實施例。 第1圖表示本發明之準分子雷射裝置的構成例·，第1 圖（a)為全體縱斷面圖，第丨圖（b)為磁性軸承部及馬達部的 擴大斷面圖。本準分子雷射裝置為於封入有雷射氣體之雷 射容器1的内部設置使雷射氣體發生預備電離之預備電離 電極（未圖示）、及用以獲得能夠使雷射光振盪之放電的一 對主放電電極2、2。又於雷射容器j内設置有於主放電電 極2、2間形成高速之氣體流的貫流扇3。 雷射光之振盪為由施加高電壓於一對主放電電極2、2 之間以發生雷射勵起放電而得。發生之雷射光為由設在雷 射容器1之側壁上的窗5、5取出至雷射容器i外部。當發 生雷射勵起放電時，由於一對主放電電極2、2間之雷射氣 體發生劣化引起放電特性變壞，以致不能發生雷射振盪。 因此使用貫流扇3使雷射容器！内之雷射氣體循環，更換 主放電電極2、2間之雷射氣體以實行安定的振盪。 貫流扇3具有設在軸方向之一側端部之旋轉軸4。該 旋轉軸4由設在雷射容器i之一側端部之殼體6内之徑向 磁性軸承9、H)及設在轴向殼體7、8内之轴向磁性轴承 11以非接觸的方式加以旋轉自如的支持。又設在徑向磁性 轴承9、10之間的馬達12用以對旋轉軸供給驅動力。於徑 向磁性軸承9、10不動作時用以主拄骨 用文符貫凌扇3之旋轉轴4 本紙張尺度適用中國國家標準（CNS)A4 ^格（210 X 297公爱） !·---- -----訂---------線 ----------------------- f請先閱讀背面之注意事項再填寫本頁} 312227 ^/^222 A7· ------- 丨 Order -------- • Line 丨 ^^ · ----------------------- " + / 〇ZOZOZ Printed A7 by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs " ^ —— Β7 _ ^ ^ (4) " ^ ~ As mentioned above, the reason for the conventional device is related to the shaft-μ Ershikou glaze device However, there is a problem of excessive effect on the cross-flow fan. The bearing device may be provided with two directional magnetic bearings at intervals in the axial direction of the rotation shaft. At this time, it is better to connect the motor between two radial magnetic bearings: In this way, the center of gravity of the rotor composed of the cross-flow fan and the rotating material can be set between the two radial bearings, so that the weight of the rotor is equally supported by the two pinching bearings, and the vibration can be appropriately suppressed by the radial bearings on both sides. . It is also preferable to provide an axial magnetic bearing for the rotating shaft. Protective bearings may be provided adjacent to the two radial magnetic bearings, respectively, so as to support the rotary shaft when the radial magnetic bearings are inoperative. It is also possible to place two cross-flow fans so that they are integrated and adjacent to each other in the axial direction. At this time, the respective rotating shafts of the cross-flow fans are axially protruded from the opposite side end opposite to the end adjacent to the two cross-flow fans. Way setting. Furthermore, a vibration exhaustion suppressing device may be provided at the end of the cross-flow fan on the opposite side to the one end in the axial direction. The vibration suppression device is provided concentrically with the cross-flow fan at the end on the opposite side, and can be a rotary shaft protruding in a direction away from the cross-flow fan, a circular plate fixed to the rotary shaft, and a circular plate penetrating the circular plate The magnetic device is composed of a magnetic circuit. The cross-flow fan may have a gap-cage structure composed of a plurality of annular plates arranged in parallel in the axial direction, and a plurality of blades extending through the annular plates and extending in the axial direction. The blade is made of a light-weight and high-strength aluminum alloy, and the surface thereof is preferably subjected to a corrosion-resistant treatment to laser gas. [Simplified description of the drawing] This paper size applies the Chinese National Standard (CNS) A4 specification (21〇χ 297 mm) 4 312227 I ϋ I ϋ IH ϋ ί ί 1 ·· 1 · III ϋ I n I ϋ. 1 (Please read the notes on the back before filling out this page) III — — — — — — — — — — — — — — — — — — — I. l 'Explanation of the invention (5) Brother 1 chart is not original Invention certificate! It also becomes the structure of the excimer laser device of the first embodiment of a Θ. 'Figure 1 (a) is a vertical sectional view of the entire age ^ basket, and Figure 1 (b) is a magnetic motor Enlarged sectional view. The diagram of Brother 2 does not include the structure diagram of a cross-flow fan using the excimer laser device of the embodiment of Sr 1 & Θ Brother 2 in this issue. Fig. 3 is a longitudinal sectional view showing the structure of an excimer laser device according to a third embodiment of the present invention. Fig. 4 is a longitudinal sectional view showing the structure of an excimer laser device according to a fourth embodiment of the present invention. Fig. 5 is a longitudinal cross-sectional view of a schematic configuration example of an excimer laser device not commonly used. Fig. 6 is a sectional view taken along the line z-Z in Fig. 5; [Explanation of component symbols] 2, 102 Main discharge electrodes 4, 4a, 4b, 104 Rotary shaft 6 Housing 9, 10, 106, 107 Radial magnetic bearings 12, 109 Motors 13, 14 '110, 111 Protective bearings 9a, 10a, 11a electromagnet 9b, 10b 9c, 10c radial displacement sensor 9d, 10d 11c, 11d axial displacement sensor 3a blade 3c notch 'paper size applies Chinese national standard (CNS ) A4 size (210 X 297 mm) (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1,101 laser capacity 3,103 cross-flow fan 5, 105 window 7 ' 8 axial housing 11, 108 axial magnetic bearing lib electromagnet 11 11 sensor target 312227 15 16 cylinder cover 3 b ring plate --------- order ------ -IAW .----------------------- 478222 22 Stator side magnets 24 Magnetic beams Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 V. Description of the invention ( 6) 21 vibration suppression mechanism 23 circular plate [preferred embodiment of the invention] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 shows an example of the configuration of an excimer laser device of the present invention. Fig. 1 (a) is an overall longitudinal sectional view, and Fig. 丨 (b) is an enlarged sectional view of a magnetic bearing portion and a motor portion. The excimer laser device is provided with a pre-ionization electrode (not shown) for pre-ionizing the laser gas inside the laser container 1 sealed with the laser gas, and is used to obtain a discharge capable of oscillating laser light. A pair of main discharge electrodes 2 and 2. In the laser container j, a cross-flow fan 3 is formed to form a high-speed gas flow between the main discharge electrodes 2 and 2. The laser light oscillation is obtained by applying a high voltage between a pair of main discharge electrodes 2 and 2 to generate a laser-induced discharge. The generated laser light is taken out from the windows 5 and 5 provided on the side wall of the laser container 1 to the outside of the laser container i. When a laser excitation discharge occurs, the discharge characteristics are deteriorated due to the deterioration of the laser gas between a pair of main discharge electrodes 2, 2 so that laser oscillation cannot occur. So use cross-flow fan 3 to make the laser container! The internal laser gas is circulated, and the laser gas between the main discharge electrodes 2 and 2 is replaced to perform stable oscillation. The cross-flow fan 3 has a rotation shaft 4 provided at one end portion on one side in the axial direction. The rotating shaft 4 is non-contacted by a radial magnetic bearing 9 (H) provided in a housing 6 on one side end of the laser container i and an axial magnetic bearing 11 provided in the axial housings 7 and 8. The way to be rotated is supported freely. A motor 12 provided between the radial magnetic bearings 9 and 10 is used to supply a driving force to the rotating shaft. When the radial magnetic bearings 9 and 10 do not move, it is used to rotate the rotating shaft 4 of the main cheekbones with the rune of the fan 3. This paper size applies to the Chinese National Standard (CNS) A4 ^ (210 X 297 public love)! ... ------ Order --------- Line ----------------------- f Please read the notes on the back before filling This page} 312227 ^ / ^ 222 A7
經濟部智慧財產局員工消費合作社印製 亦即依本發明，貫流扇3之旋轉輛4為由設在該貫流 扇之一側的徑向磁性軸承9、1〇及保護用軸承i3、i4支承， 貫流扇3本身受到單側支承樑成的支持。因此只有貫流扇 3本身的重量所構成之彎矩作用在貫流扇3上，而不會如 前述習用裝置，有過大的彎矩作用在貫流扇3上之虞。又 用位向磁軸承9、1〇及軸向磁性軸承u支承時與以保護 用軸承13、14支承旋轉軸4時之軸承距卜抑幻為大致相 等，因此用其中任一軸承支承旋轉軸4，危險速度均不會 有太大的變化。亦即在保護用軸承13、14上時，由貫流扇 3及旋轉軸4等構成之轉子能振動少的安定旋轉。 又配置徑向磁性軸承9、1 0，轴向磁性軸承丨〗及馬達 12，使貫k扇3與％轉軸4構成之轉子的重心之軸向位置 為在兩徑向磁性軸承9、10之電磁鐵靶（target)9b& 1〇b 間（X-Y間）。由上述的配置使得徑向磁性軸承9、1 〇能均 等的支承負何，更由於將馬達12設在徑向磁性轴承9、1〇 之間’因此由兩徑向磁性軸承9、1 0能有效的抑制馬達i 2 產生之徑向振動。 又如上所述’由於係以單側支承樑式支承貫流扇3， 因此能與該貫流扇之彎曲剛性無關的增大旋轉軸4之彎曲 剛性。故旋轉轴4最好以縱彈性係較大，且因其為設置在 雷射容器1内而用對於雷射氣體具有耐蝕性之材料，例如 歐氏體（austenite)系不銹鋼等製成為宜。旋轉軸4則與貫 U張尺度適用中國國家標準(CNS)A4規格(21〇 X 297 — ： —- ^--------^-------------------------------- (請先閱讀背面之注意事項再填寫本頁) 478222 A7 B7 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 五、發明說明（8 ) 流扇3之送風性能無關，故可藉增大軸徑或採用中空軸而 達到高剛性化。 貫流扇3與旋轉軸4可分別製造，然後用螺栓等連結 機構連結以構成轉子。因此能以低成本製造且組裝性及維 濩性良好，更由於旋轉軸4可形成得較短而容易抑制振動 之振幅。 控向磁性軸承9為由電磁鐵9a、電磁鐵靶9b、經向變 位感測器9c及感測器靶9d構成，徑向磁性轴承1〇為由電 磁鐵10a、電磁鐵乾1〇b、徑向變位感測器i〇c及感測器乾 i〇d構成’抽向磁性軸承u為由電磁鐵lia、電磁鐵靶ub、 軸向變位感測器llc、lld及感測器靶lle構成。又馬達i2 之疋子12a、電磁鐵9a、i〇a及徑向變位感測器％、i〇c 之與轉子的對向面為以筒罩（can)15被覆，馬達12之轉子 12b之與疋子的對向面亦以筒罩1 ό被覆。 第2圖表示本發明之準分子雷射裝置使用之貫流扇構 造。貫流扇3為由複數枚葉片（blade)3a及複數枚環狀板讣 構成。於環狀板3b之外周部設有供葉片3a插入之複數個 孔或缺口 3c。葉片3a為插入該環狀板3b之孔或缺口 3c， 用嵌合或溶接等方式固定在環狀板而構成隙籠狀的貫流扇 3 〇 》 衣狀板3b用以抑制葉片本身因旋轉而由離心力所 造成的變形及保持該貫流扇的強度，且數目愈多愈堅固。 第2圖中雖顯示4枚環狀板扑，但任意數均可。又為確保 對於扭轉及彎曲的強度，於貫流扇之中心設例如相對於貫 1本紙張尺度顧巾~ 8 312227 (請先閲讀背面之注意事項再填寫本頁) Φ____ ^--1!!! I I-------I------------- 478222 A7 五、發明說明（9 ) 流扇外徑D為0.05D程度之細長的軸為補強材亦可。 又依本發明之準分子雷射裝置，貫流扇3在轉子的 成上最好盡量做成輕量。因此葉片3a及環狀板讣使用輕 量而高強度之鋁合金，又最好實施鍍鎳（Ni)等形成對雷^ 氣體具耐腐钱性之表面的耐餘處理。 第3及第4圖各表示本發明第2及第3實施例之準分 子雷射裝置之構成例。該等圖中與第圖中相 表示相同部分。 第3圖之準分子雷射裝置係將具有在軸方向之單側端 部設置旋轉軸之構造之兩個貫流扇3設置在雷射容器ι 内。兩個貫流扇3各自的旋轉軸4為由設在雷射容器 兩側端部的殼體6、6之徑向磁性軸承9、1〇及設在軸向殼 體7、8之軸向磁性轴承非接觸的方式加以旋轉自如 的支承’並由馬達12對旋轉軸4供給驅動力。 兩個貫流扇3、3在軸方向為整合的設定，使兩貫流扇 3、3大約以相同旋轉數動作，由此可得主放電電極2、2 間在長邊方向全長間有均勻的雷射氣體流。 由於將兩個貫流扇3以上述方式設置，能使貫流扇3 之軸方向的長度減短（約一半），其重量亦減小，使轉子之 振動特性更良好。又可減小設在貫流扇3與馬達12之間之 徑向磁性軸承9的負荷。其結果使貫流扇3之高速旋轉化 及磁性軸承之小型化容易。 第4圖之準分子雷射裝置使用旋轉軸4a、4b為凸出於 轴方向兩側端部之構造的貫流扇3。其一方之旋轉軸4a為 312227 訂 線 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公釐 478222 A7Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, ie according to the present invention, the rotating car 4 of the cross-flow fan 3 is supported by radial magnetic bearings 9, 10 and protective bearings i3, i4 provided on one side of the cross-flow fan The cross-flow fan 3 itself is supported by a single-sided support beam. Therefore, only the bending moment formed by the weight of the cross-flow fan 3 acts on the cross-flow fan 3, and there is no risk that the excessive bending moment acts on the cross-flow fan 3 as in the conventional device. When the bearings are supported with the orienting magnetic bearings 9 and 10 and the axial magnetic bearings u, the bearing distance is substantially the same when the protective shafts 13 and 14 are used to support the rotary shaft 4. Therefore, any one of the bearings is used to support the rotary shaft. 4. The dangerous speed will not change much. That is, when the protective bearings 13 and 14 are mounted, the rotor constituted by the cross-flow fan 3 and the rotating shaft 4 can rotate stably with less vibration. Radial magnetic bearings 9, 10, axial magnetic bearings, and motor 12 are also arranged, so that the axial position of the center of gravity of the rotor constituted by k fan 3 and% rotating shaft 4 is between the two radial magnetic bearings 9, 10 Electromagnet target (9b & 10b) (between XY). With the above configuration, the radial magnetic bearings 9 and 10 can support equally. What's more, because the motor 12 is disposed between the radial magnetic bearings 9, 10, the two radial magnetic bearings 9, 10 can Effectively suppress the radial vibration generated by the motor i 2. As described above, since the cross-flow fan 3 is supported by a single-side support beam type, the bending rigidity of the rotating shaft 4 can be increased regardless of the bending rigidity of the cross-flow fan. Therefore, it is preferable that the rotation shaft 4 has a large longitudinal elasticity, and is preferably made of a material having corrosion resistance to laser gas, such as austenite-based stainless steel, because it is installed in the laser container 1. The rotation axis 4 and the U-scale are applicable to the Chinese National Standard (CNS) A4 specification (21〇X 297 —: —- ^ -------- ^ ------------- ------------------- (Please read the precautions on the back before filling out this page) 478222 A7 B7 Printed by the Consumer Consumption Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 8) The fan fan 3 has nothing to do with the air supply performance, so it can be increased in rigidity by increasing the shaft diameter or using a hollow shaft. The cross fan 3 and the rotating shaft 4 can be separately manufactured and then connected with a connecting mechanism such as a bolt to form a rotor. It can be manufactured at low cost and has good assembly and maintenance properties. Furthermore, since the rotary shaft 4 can be formed short, it is easy to suppress the amplitude of vibration. The steerable magnetic bearing 9 is composed of an electromagnet 9a, an electromagnet target 9b, and a warp change. Position sensor 9c and sensor target 9d. Radial magnetic bearing 10 is composed of electromagnet 10a, electromagnet stem 10b, radial displacement sensor ioc and sensor stem ioc. The “pumping magnetic bearing u” is composed of an electromagnet lia, an electromagnet target ub, an axial displacement sensor 11c, 11d, and a sensor target lle. The motor 12 i2, the electromagnet 9a, The facing surface of i〇a and the radial displacement sensor% and i〇c and the rotor are covered with a can 15 (can), and the facing surface of the rotor 12 b of the motor 12 and the mule is also covered with a can 1 covering. Figure 2 shows the structure of a cross-flow fan used in the excimer laser device of the present invention. The cross-flow fan 3 is composed of a plurality of blades 3a and a plurality of annular plates 于. A plurality of holes or notches 3c are provided in the part for inserting the blade 3a. The blade 3a is a hole or notch 3c inserted into the annular plate 3b, and is fixed to the annular plate by means of fitting or welding to form a gap-shaped cross-flow fan 3 〇 >> The clothes-like plate 3b is used to suppress the deformation of the blade due to the centrifugal force caused by the rotation and maintain the strength of the cross-flow fan, and the more the number is, the stronger it is. It can be any number. To ensure the strength of torsion and bending, set the center of the cross-flow fan to a paper size relative to 1 paper ~ 8 312227 (Please read the precautions on the back before filling this page) Φ ____ ^- -1 !!! I I ------- I ------------- 478222 A7 V. Description of the invention (9) Outer diameter of flow fan D is 0.0 The slender shaft with a degree of 5D may be a reinforcing material. According to the excimer laser device of the present invention, the cross-flow fan 3 is preferably made as light as possible on the rotor. Therefore, the blade 3a and the ring plate 讣 are lightweight. For high-strength aluminum alloys, it is best to perform nickel-plating (Ni) or the like to form a corrosion-resistant surface that is resistant to lightning gas. Figures 3 and 4 each show the second and third implementations of the present invention. An example of the configuration of an excimer laser device. In these figures, the same parts as in the figure are shown. The excimer laser device shown in FIG. 3 has two cross-flow fans 3 having a structure in which a rotating shaft is provided at one end in the axial direction in a laser container ι. The respective rotating shafts 4 of the two cross-flow fans 3 are the radial magnetic bearings 9, 10 provided by the housings 6, 6 provided at the ends of both sides of the laser container, and the axial magnetic properties provided by the axial housings 7, 8 The bearing is rotatably supported in a non-contact manner, and a driving force is supplied to the rotary shaft 4 by the motor 12. The two cross-flow fans 3, 3 are integrated settings in the axial direction, so that the two cross-flow fans 3, 3 operate at about the same number of rotations, so that the main discharge electrode 2, 2 has a uniform laser over the entire length of the long side. Gas flow. Since the two cross-flow fans 3 are arranged in the above manner, the axial length of the cross-flow fans 3 can be shortened (about half), and the weight is also reduced, so that the vibration characteristics of the rotor are better. The load on the radial magnetic bearing 9 provided between the cross-flow fan 3 and the motor 12 can be reduced. As a result, the high-speed rotation of the cross-flow fan 3 and the miniaturization of the magnetic bearing are facilitated. The excimer laser device of FIG. 4 uses a cross-flow fan 3 having a structure in which the rotating shafts 4a and 4b are projected at the ends on both sides in the axial direction. The rotation axis 4a of one side is 312227. The paper size is applicable to China National Standard (CNS) A4 (21 × 297 mm) 478222 A7.