JP2022082849A - Axial flow blower and laser oscillation device - Google Patents

Abstract

To provide an axial flow blower that can rotate at a high speed in a stable state.SOLUTION: An axial flow blower 100 comprises a cylindrical casing 6, and a pair of bearing holding parts 19 and 20 fixed to both ends of the casing 6, and holding a pair of magnetic bearing parts respectively. The bearing holding part 20 comprises a first cylindrical member 20a to which the magnetic bearing part is fixed, a second cylindrical member 20c provided on an outer peripheral side of the first cylindrical member 20a, and a plurality of supporting beams 20b radially connecting an outer peripheral part of the first cylindrical member 20a and an inner peripheral part of the second cylindrical member 20c. The second cylindrical member 20c is fixed to the casing 6 by an interference fit.SELECTED DRAWING: Figure 1

Description

The present disclosure relates to an axial blower and a laser oscillator equipped with magnetic bearings.

Patent Document 1 discloses a motor having a magnetic bearing. In Patent Document 1, a stator composed of a stator core and a stator winding that forms a stator portion of a high-speed motor is attached to the inner peripheral surface of the cylindrical casing near the center portion, and a magnetic bearing is attached to the right side surface of the casing. After attaching one of the attached side covers, the rotor shaft is inserted, and the other side cover with the magnetic bearing attached is attached to the left side surface of the casing. The side cover is attached to each end face of the casing with a fastening member of bolts or nuts.

Japanese Unexamined Patent Publication No. 2001-323899

In recent years, the laser oscillator is required to have a high output, and it is necessary to increase the cooling capacity of the laser medium gas of the laser oscillator. In order to increase the cooling capacity of the laser medium gas, it is effective to rotate the axial blower that circulates the laser medium gas at high speed. However, in Patent Document 1, since the side cover is only attached to each end surface of the casing by a fastening member, the rigidity of the fixed structure between the casing and the bearing holding portion is low. Therefore, as the rotation speed of the motor increases, the centrifugal force due to the imbalance of the rotating body increases, vibration occurs, and it is difficult to stabilize the operation of the axial blower.

The present disclosure has been made in view of the above, and an object of the present invention is to obtain an axial blower and a laser oscillator capable of rotating at high speed in a stable state.

In order to solve the above-mentioned problems and achieve the object, the axial blower in the present disclosure includes a rotor in which a rotating shaft is fixed, a stator provided around the rotor, and a pair of moving blades fixed to the rotor. , A cylindrical casing in which the stator is fixed and accommodates the stator and a pair of moving blades, a pair of magnetic bearings provided at both ends of the rotating shaft to support the rotating shaft, and a pair of magnetic bearings fixed to both ends of the casing. A pair of bearing holding portions for holding the bearing portions are provided. The pair of bearing holding portions are of a first cylindrical member to which the magnetic bearing portion is fixed, a second cylindrical member provided on the outer peripheral side of the first cylindrical member, and a first cylindrical member, respectively. It has a plurality of support beam portions that radially connect between the outer peripheral portion and the inner peripheral portion of the second cylindrical member. The second cylindrical member of the bearing holding portion is fastened and fitted to the casing.

According to the present disclosure, it has the effect of being able to rotate at high speed in a stable state.

Perspective view of the axial blower according to the first embodiment Cross-sectional view of the axial blower according to the first embodiment The figure which looked at the axial flow blower which concerns on Embodiment 1 from the axial direction Perspective view of the axial blower according to the second embodiment Cross-sectional view of the axial blower according to the second embodiment The figure which looked at the axial flow blower which concerns on Embodiment 2 from the axial direction Perspective view of the laser oscillator according to the third embodiment Cross-sectional view of the laser oscillator according to the third embodiment

Hereinafter, the axial blower and the laser oscillator according to the embodiment will be described in detail with reference to the drawings.

Embodiment 1.
FIG. 1 is a perspective view of the axial blower 100 according to the first embodiment. FIG. 2 is a cross-sectional view of the axial blower 100 according to the first embodiment. FIG. 3 is a view of the axial blower 100 according to the first embodiment as viewed from the axial direction. In FIG. 3, the axial blower 100 is viewed from the right side of FIG. 1. The central axis is indicated by the reference numeral AX. The central axis AX is the radial center of each of the casing 6, the rotating shaft 8, the rotor 1, and the stator 2. The circumferential direction of the central axis AX is indicated by the arrow D1. The axial direction, which is the extending direction of the central axis AX, is indicated by an arrow D2. The radial direction of the casing 6 is indicated by the arrow D3. The radial direction D3 is equal to the direction orthogonal to the axial direction D2, and the arrow D3 shows an example in the radial direction. Hereinafter, the configuration of the axial blower 100 according to the first embodiment will be described with reference to FIGS. 1 to 3.

The axial blower 100 includes a hollow cylindrical casing 6, a rotating shaft 8 extending in the axial direction D2, a motor 3 for rotationally driving the rotating shaft 8, a stationary wing 5, a first moving wing 11, and a first bearing. 2 moving blade 12, 1st bearing holding part 19, 2nd bearing holding part 20, 1st radial magnetic bearing 13, 2nd radial magnetic bearing 16, 1st thrust magnetic bearing 17 And a second thrust magnetic bearing 18. The first radial magnetic bearing 13 and the first thrust magnetic bearing 17 correspond to the first magnetic bearing portion, and the second radial magnetic bearing 16 and the second thrust magnetic bearing 18 correspond to the second magnetic bearing portion. do. The first radial magnetic bearing 13, the second radial magnetic bearing 16, the first thrust magnetic bearing 17, and the second thrust magnetic bearing 18 are collectively referred to as a pair of magnetic bearing portions or simply magnetic bearing portions. In some cases. Further, the first moving wing 11 and the second moving wing 12 are referred to as moving wing 11 and 12, and the first radial magnetic bearing 13 and the second radial magnetic bearing 16 are referred to as radial magnetic bearings 13 and 16. , The first thrust magnetic bearing 17 and the second thrust magnetic bearing 18 may be referred to as thrust magnetic bearings 17 and 18.

The casing 6 is a member formed of an aluminum alloy, an austenite-based stainless alloy, a copper alloy, cast iron, steel, or an iron alloy in a hollow cylindrical shape. The casing 6 has a plurality of through holes 6a, a plurality of through holes 6b, a pedestal 6c, and a plurality of screw holes 6d.

A screw (not shown) is inserted into each of the plurality of through holes 6a. The blade 54, which is a component of the stationary blade 5, is fixed by the screw inserted into the through hole 6a. In each of the plurality of through holes 6b, an inlet pipe for cooling water circulation (not shown), an outflow pipe for cooling water circulation (not shown), and a power line of a stator coil (not shown) are inserted. .. The pedestal 6c is a mounting member for fixing the axial blower 100 to the housing of the laser oscillator, which will be described later. The plurality of screw holes 6d are formed at both ends of the casing 6. The plurality of screw holes 6d are arranged apart from each other in the circumferential direction D1. A fastening member 61 such as a screw is inserted into the screw hole 6d. The fastening member 61 fixes the first bearing holding portion 19 and the second bearing holding portion 20 to the casing 6. The first bearing holding portion 19 and the second bearing holding portion 20 may be referred to as bearing holding portions 19 and 20. Details of the structure of the first bearing holding portion 19 and the second bearing holding portion 20 will be described later.

The rotary shaft 8 is a member formed of an aluminum alloy, an austenite-based stainless alloy, a copper alloy, cast iron, steel, or an iron alloy in a columnar shape. The rotation shaft 8 is an output shaft extending along the central shaft AX.

The motor 3 that rotationally drives the rotary shaft 8 is driven by a driver (not shown) at a specific output and rotation speed. The motor 3 may be either an induction motor or a permanent magnet motor. The motor 3 includes a stator 2 provided inside the casing 6 and a rotor 1 provided inside the stator 2 and on the outer peripheral portion of the rotating shaft 8.

The stator 2 is provided in the radial direction D3 so as to face the outer peripheral surface of the rotor 1. The stator 2 is provided on a concentric circle centered on the central axis AX. The stator 2 includes a stator core, which is a cylindrical magnetic material, and a stator winding. The rotor 1 is provided in the center of the area inside the stator 2 in the axial direction D2 of the rotating shaft 8. The rotor 1 is provided on a concentric circle centered on the central axis AX. The rotor 1 is a cylindrical magnetic material. The rotating shaft 8 is supported by the first radial magnetic bearing 13 and the second radial magnetic bearing 16, and the first radial magnetic bearing 13 and the second radial magnetic bearing 16 are supported by the first bearing holding portion 19 and the second. The rotor 1 is supported by the casing 6 by being supported by the bearing holding portions 20, respectively.

The rotation of the rotor 1 causes the rotation shaft 8 to rotate. In the present embodiment, the rotor 1 is fitted in the outer peripheral portion of the rotating shaft 8, but the rotor 1 may be embedded in the rotating shaft 8.

The stationary blade 5 includes a blade base 52 which is a hollow cylindrical member, and a plurality of blades 54. Examples of the material of the stationary blade 5 include an aluminum alloy, an austenite-based stainless alloy, a copper alloy, cast iron, steel, and an iron alloy. The blade base 52 is a cylindrical member extending in the axial direction D2. The blade base 52 is provided on a concentric circle centered on the central axis AX. The plurality of blades 54 are arranged apart from each other in the circumferential direction D1. The outer end of each of the plurality of blades 54 in the radial direction D3 is in contact with the inside of the casing 6.

The stator holding portion 51 is a hollow cylindrical member extending in the axial direction D2. The stator holding portion 51 is provided on a concentric circle centered on the central axis AX. The stator holding portion 51 is provided so as to cover the outer peripheral portion of the stator 2.

The stationary blade 5 is attached to and fixed to the casing 6 with a fastening member such as a screw (not shown). The stator holding portion 51 is fitted and integrated with the outer peripheral portion of the stator 2. The stator holding portion 51 is attached and fixed to the blade base 52 of the stationary blade 5 by shrink fitting or a fastening member such as a screw (not shown).

A flange portion may be formed inward at the end of the blade base portion 52 of the stationary blade 5, and the flange portion and the stator holding portion 51 may be attached and fixed by a fastening member such as a screw. The stator holding portion 51 may have a water-cooled structure. The stator holding portion 51 may be omitted, and the stator 2 may be attached and fixed to the stationary blade 5 by shrink fitting or a fastening member such as a screw.

The first moving blade 11 is provided between the stationary blade 5 and the first bearing holding portion 19. The first rotor blade 11 includes an inward flange portion 11a and a plurality of blades 11c. The plurality of blades 11c are provided outside the radial direction D3 of the inward flange portion 11a, and extend from the inward flange portion 11a toward the inner peripheral surface of the casing 6. The plurality of blades 11c are arranged apart from each other in the circumferential direction D1. Examples of the material of the first moving blade 11 include an aluminum alloy, an austenite-based stainless alloy, a copper alloy, cast iron, steel, and an iron alloy.

The first rotor blade holding portion 9 is an outward flange-shaped member provided between the rotor 1 and the first rotor blade 11. The maximum outer diameter of the first rotor blade holding portion 9 is smaller than the inner diameter of the stator 2. Examples of the material of the first moving blade holding portion 9 include an aluminum alloy, an austenite-based stainless alloy, a copper alloy, cast iron, steel, and an iron alloy. The first rotor blade holding portion 9 is provided on the outer peripheral portion of the rotor 1 and is shrink-fitted and fixed to the rotor 1.

The first rotor blade 11 is attached and fixed to the first rotor blade holding portion 9. Fastening members such as bolts are provided in the through hole 11a1 provided in the inward flange portion 11a of the first rotor blade 11 shown in FIG. 2 and the bolt through hole 9a1 provided in the first rotor blade holding portion 9. 14 is inserted and the first rotor blade 11 is fixed to the first rotor blade holding portion 9.

The second rotor blade 12 is provided between the stationary blade 5 and the second bearing holding portion 20. The second rotor blade 12 includes an inward flange portion 12a and a plurality of blades 12c. The plurality of blades 12c are provided outside the radial direction D3 of the inward flange portion 12a, and extend from the inward flange portion 12a toward the inner peripheral surface of the casing 6. The plurality of blades 12c are arranged apart from each other in the circumferential direction D1. Examples of the material of the second moving blade 12 include an aluminum alloy, an austenite-based stainless alloy, a copper alloy, cast iron, steel, or an iron alloy.

The second rotor blade holding portion 10 is an outward flange-shaped member provided between the rotor 1 and the second rotor blade 12. The maximum outer diameter of the second rotor blade holding portion 10 is smaller than the inner diameter of the stator 2. Examples of the material of the second moving blade holding portion 10 include an aluminum alloy, an austenite-based stainless alloy, a copper alloy, cast iron, steel, and an iron alloy. The second rotor blade holding portion 10 is provided on the outer peripheral portion of the rotor 1 and is shrink-fitted and fixed to the rotor 1.

The second rotor blade 12 is attached and fixed to the second rotor blade holding portion 10. Fastening members such as bolts are provided in the through hole 12a1 provided in the inward flange portion 12a of the second rotor blade 12 shown in FIG. 2 and the bolt through hole 10a1 provided in the second rotor blade holding portion 10. 15 is inserted and the second rotor blade 12 is fixed to the second rotor blade holding portion 10.

The first bearing holding portion 19 is provided at one end of the casing 6 in the axial direction D2. The first bearing holding portion 19 includes a hollow first cylindrical member 19a on the inner peripheral side, a plurality of support beam portions 19b, and a hollow second cylindrical member 19c on the outer peripheral side. The first bearing holding portion 19 has a structure in which a plurality of support beam portions 19b are radially connected between the outer circumference of the first cylindrical member 19a and the inner circumference of the second cylindrical member 19c. .. That is, the tip portion on the outer peripheral side of the plurality of support beam portions 19b is joined to the inside of the second cylindrical member 19c, and the tip portion on the inner peripheral side of the plurality of support beam portions 19b is the first cylindrical member. It is joined to the outer peripheral portion of 19a. Since the support beam portion 19b is provided in the flow path of the laser medium gas, it is formed in a beam shape so as not to obstruct the flow of the laser medium gas. As shown in FIG. 3, the plurality of support beam portions 19b are provided apart from each other in the circumferential direction D1 and are provided at intervals of 90 ° in the mechanical angle. Each root portion 19d of the plurality of support beam portions 19b has an R structure by bending, and the rigidity is enhanced. An R structure may be formed in the axial direction D2 so that the laser medium gas can easily flow in and out on the inner diameter side of the surface of the first bearing holding portion 19 opposite to the casing 6. The number of support beam portions 19b may be arbitrary.

The outer diameter of the first cylindrical member 19a is smaller than the outer diameter of the blade base 52 of the stationary blade 5 and smaller than the outer diameter of the inward flange portion 11a of the first rotor blade 11, and the laser medium gas It is a size that does not obstruct the flow path. The first cylindrical member 19a, the plurality of support beam portions 19b, and the second cylindrical member 19c constituting the first bearing holding portion 19 are integrally configured as the same component. The second cylindrical member 19c functions as a reinforcing member. Examples of the material of the first bearing holding portion 19 include aluminum alloys, austenite-based stainless alloys, copper alloys, cast iron, steel, and iron alloys.

As shown in FIG. 2, a recess 19e is formed on the inner diameter side of the end surface of the second cylindrical member 19c of the first bearing holding portion 19 in contact with the casing 6 over the entire circumference. Further, the end faces of the plurality of support beam portions 19b and the first cylindrical member 19a in contact with the casing 6 are flush with the bottom surface of the recess 19e. One end of the casing 6 is fitted in the recess 19e in the radial direction D3.

Further, a convex portion 6e is formed over the entire circumference on the inner diameter side of the end surface of the cylindrical casing 6 in contact with the first bearing holding portion 19, and the convex portion 6e is fitted into the concave portion 19e. The cylindrical convex portion 6e has a diameter smaller than the outer diameter of the cylindrical casing 6. A similar convex portion 6e is formed on the end surface of the casing 6 in contact with the second bearing holding portion 20.

The second cylindrical member 19c of the first bearing holding portion 19 is formed with four through holes 19b1. The through hole 19b1 is formed at a position corresponding to the support beam portion 19b. In the casing 6, a screw hole 6d is formed at a position corresponding to the through hole 19b1. The fastening member 61 is inserted into the screw hole 6d of the casing 6 and the through hole 19b1 of the support beam portion 19b, and the second cylindrical member 19c is fixed to the casing 6.

The convex portion 6e of the casing 6 is inserted into the concave portion 19e of the heated first bearing holding portion 19. When the temperature drops, both are fixed by a tight fit. The fastening member 61 is inserted into and fixed to the screw hole 6d of the casing 6 and the through hole 19b1 of the support beam portion 19b in order to prevent the fall during operation.

The second bearing holding portion 20 is configured in the same manner as the first bearing holding portion 19. The second bearing holding portion 20 is provided at the other end of the casing 6 in the axial direction D2. The second bearing holding portion 20 includes a first cylindrical member 20a on the inner peripheral side, a plurality of support beam portions 20b, and a second cylindrical member 20c on the outer peripheral side. Each root portion 20d of the plurality of support beam portions 20b has an R structure by bending, and the rigidity is enhanced. An R structure may be formed in the axial direction D2 so that the laser medium gas can easily flow in and out on the inner diameter side of the surface of the second bearing holding portion 20 opposite to the casing 6.

The outer diameter of the first cylindrical member 20a is smaller than the outer diameter of the blade base 52 of the stationary blade 5 and smaller than the outer diameter of the inward flange portion 12a of the second rotor blade 12, and the laser medium gas It is a size that does not obstruct the flow path. The first cylindrical member 20a, the plurality of support beam portions 20b, and the second cylindrical member 20c constituting the second bearing holding portion 20 are integrally configured as the same component. Examples of the material of the second bearing holding portion 20 include aluminum alloys, austenite-based stainless alloys, copper alloys, cast iron, steel, and iron alloys.

As shown in FIG. 2, a recess 20e is formed on the inner diameter side of the end surface of the second cylindrical member 20c of the second bearing holding portion 20 in contact with the casing 6 over the entire circumference. Further, the end faces of the plurality of support beam portions 20b and the first cylindrical member 20a in contact with the casing 6 are flush with the bottom surface of the recess 20e. A convex portion 6e formed at the other end of the casing 6 is fitted in the concave portion 20e in the radial direction D3.

The second cylindrical member 20c of the second bearing holding portion 20 is formed with four through holes 20b1. The through hole 20b1 is formed at a position corresponding to the support beam portion 20b. In the casing 6, a screw hole 6d is formed at a position corresponding to the through hole 20b1. The fastening member 61 is inserted into the screw hole 6d of the casing 6 and the through hole 20b1 of the support beam portion 20b, and the second cylindrical member 20c is fixed to the casing 6.

The convex portion 6e of the casing 6 is inserted into the concave portion 20e of the heated second bearing holding portion 20. When the temperature drops, both are fixed by a tight fit. The fastening member 61 is inserted into and fixed to the screw hole 6d of the casing 6 and the through hole 20b1 of the support beam portion 20b in order to prevent the fall during operation.

As shown in FIG. 2, the first radial magnetic bearing 13 includes a rotating portion 13a, a fixing portion 13b, and a first touchdown bearing 13c. The rotating portion 13a is a tubular member provided on the rotating shaft 8 and rotating together with the rotating shaft 8. The position where the rotating portion 13a is provided is a region closer to the first rotor blade 11 in the inner region of the first cylindrical member 19a of the first bearing holding portion 19. The fixing portion 13b is provided between the rotating portion 13a and the first cylindrical member 19a. The fixing portion 13b is fixed to the inside of the first cylindrical member 19a and is provided in the radial direction D3 so as to face the rotating portion 13a. A metal is used as the material of the rotating portion 13a, and an electromagnet is used as the fixing portion 13b.

The first touch-down bearing 13c is provided in a region closer to the tip of the rotating shaft 8 in the inner region of the first cylindrical member 19a of the first bearing holding portion 19, and the first thrust magnetic bearing 17 is provided. It is sandwiched between the fixed portions 17b of the. The touch-down bearing is for preventing the rotating body and the fixed portion of the magnetic bearing from coming into contact with each other and damaging the magnetic bearing when an abnormality occurs in the function of the magnetic bearing that supports the shaft in a non-contact manner. It is a bearing that can be contact-supported.

The second radial magnetic bearing 16 includes a rotating portion 16a, a fixing portion 16b, and a second touchdown bearing 16c. The rotating portion 16a is a tubular member provided on the rotating shaft 8 and rotating together with the rotating shaft 8. The position where the rotating portion 16a is provided is a region closer to the second rotor blade 12 in the region inside the first cylindrical member 20a of the second bearing holding portion 20. The fixing portion 16b is provided between the rotating portion 16a and the first cylindrical member 20a. The fixing portion 16b is fixed to the inside of the first cylindrical member 20a and is provided in the radial direction D3 so as to face the rotating portion 16a. Metal is used as the material of the rotating portion 16a, and an electromagnet is used for the fixing portion 16b.

The second touch-down bearing 16c is provided in a region closer to the tip of the rotating shaft 8 in the inner region of the first cylindrical member 20a of the second bearing holding portion 20, and the second thrust magnetic bearing 18 is provided. It is sandwiched between the fixed portions 18b of the.

The first thrust magnetic bearing 17 is a magnetic bearing provided on the side of the first radial magnetic bearing 13 and receiving a load in the thrust direction of the rotating shaft 8. The first thrust magnetic bearing 17 includes a rotating portion 17a and a fixing portion 17b. The rotating portion 17a is provided on the side opposite to the first moving blade 11 side of the first radial magnetic bearing 13. The rotating portion 17a is provided on the rotating shaft 8 and rotates together with the rotating shaft 8. The position where the rotating portion 17a is provided is a portion near the tip of the rotating shaft 8 protruding from the first radial magnetic bearing 13. The fixing portion 17b is fixed to the end portion of the first radial magnetic bearing 13 in the axial direction D2, and is provided in the axial direction D2 so as to face the rotating portion 17a. A metal is used for the material of the rotating portion 17a, and an electromagnet is used for the fixing portion 17b.

The second thrust magnetic bearing 18 is a magnetic bearing provided on the side of the second radial magnetic bearing 16 and receiving a load in the thrust direction of the rotating shaft 8. The second thrust magnetic bearing 18 includes a rotating portion 18a and a fixing portion 18b. The rotating portion 18a is provided on the side of the second radial magnetic bearing 16 opposite to the second rotor blade 12 side. The rotating portion 18a is provided on the rotating shaft 8 and rotates together with the rotating shaft 8. The position where the rotating portion 18a is provided is a portion near the tip of the rotating shaft 8 protruding from the second radial magnetic bearing 16. The fixing portion 18b is fixed to the end portion of the second radial magnetic bearing 16 in the axial direction D2, and is provided in the axial direction D2 so as to face the rotating portion 18a. A metal is used for the material of the rotating portion 18a, and an electromagnet is used for the fixing portion 18b.

The first thrust magnetic bearing 17 and the second thrust magnetic bearing 18 may be provided at each of both ends of the rotating shaft 8, or may be provided at only one of both ends of the rotating shaft 8. The radial magnetic bearing and the thrust magnetic bearing may be any of an active type, a passive type, and a hybrid type in which an electromagnet and a permanent magnet are used in combination. The radial magnetic bearing position detection sensor (not shown) and the thrust magnetic bearing position detection sensor may be either a capacitance type (inductance type) or an eddy current type.

In the axial blower 100, the rotating portion 13a of the first radial magnetic bearing 13 is provided at the end of the rotating shaft 8, and the first radial magnetic bearing 13 and the first radial magnetic bearing 13 are provided along the axial direction D2 of the rotating shaft 8. The moving blade 11, the rotor 1, the second moving blade 12, and the second radial magnetic bearing 16 are provided in this order. That is, the rotor 1 is provided in the center of the rotating shaft 8, the moving blades 11 and 12 are provided on both sides of the rotor 1, and the rotating portions 13a and 16a of the radial magnetic bearings 13 and 16 are provided next to the moving blades 11 and 12. Be done. Therefore, the first bearing holding portion 19 and the second bearing holding portion 20 are arranged on both end faces of the casing 6 that houses the stator 2, the first moving blade 11, the second moving blade 12, and the stationary blade 5. Ru.

In the axial blower 100 configured as described above, the rotary shaft 8, the rotor 1, the first moving blade holding portion 9, the second moving blade holding portion 10, the first moving blade 11, and the second moving blade 12 , The rotating portion 13a of the first radial magnetic bearing 13, the rotating portion 16a of the second radial magnetic bearing 16, the rotating portion 17a of the first thrust magnetic bearing 17, and the rotating portion 18a of the second thrust magnetic bearing 18. , Consists of a rotating body of the axial blower 100.

On the other hand, the casing 6, the stator 2, the stationary blade 5, the stator holding portion 51, the first bearing holding portion 19, the second bearing holding portion 20, the fixing portion 13b of the first radial magnetic bearing 13, and the first touchdown. Bearing 13c, fixed portion 16b of the second radial magnetic bearing 16, second touchdown bearing 16c, fixed portion 17b of the first thrust magnetic bearing 17, and fixed portion 18b of the second thrust magnetic bearing 18 are axial flows. It constitutes a housing portion of the blower 100.

<Assembly procedure of axial blower 100>
The procedure for assembling the axial blower 100 will be described. When the stator 2 to which the stator holding portion 51 is mounted and the casing 6 to which the stationary blade 5 is fixed are prepared, the stator holding portion 51 is attached and fixed to the stationary blade 5.

Next, the rotating body is assembled to the casing 6. In addition, this rotating body includes a rotating shaft 8, a rotor 1, a first moving wing holding portion 9, a second moving wing holding portion 10, a first moving wing 11, a second moving wing 12, and a first radial. The first movement of the rotating portion 13a of the magnetic bearing 13, the rotating portion 16a of the second radial magnetic bearing 16, the rotating portion 17a of the first thrust magnetic bearing 17, and the rotating portion 18a of the second thrust magnetic bearing 18. This is a portion excluding the blade 11, the second moving blade 12, the rotating portion 17a of the first thrust magnetic bearing 17, and the rotating portion 18a of the second thrust magnetic bearing 18. Such a rotating body is prepared, and the prepared rotating body is provided inside the stator 2.

The first moving blade 11 and the second moving blade 12 are attached and fixed to both ends of the rotating body. Next, the first bearing holding portion 19 and the second bearing holding portion 20 are attached and fixed to both ends of the casing 6. The first bearing holding portion 19 and the second bearing holding portion 20 are entirely heated by a furnace, a hot plate, or the like, or partially heated by a burner, a metal heating heater, or the like. For heating the first bearing holding portion 19 and the second bearing holding portion 20, total heating and partial heating may be used in combination. The concave portion 19e of the heated first bearing holding portion 19 is fitted into the convex portion 6e formed on one end surface of the casing 6. When the temperature drops, the convex portion 6e is tightened and fitted into the concave portion 19e. The fastening member 61 is inserted into and fixed to the screw hole 6d of the casing 6 and the through hole 19b1 of the support beam portion 19b in order to prevent the fall during operation. In the same process, the second bearing holding portion 20 is shrink-fitted and fixed to the other end surface of the casing 6 and fixed with screws.

When the first bearing holding portion 19 and the second bearing holding portion 20 are partially heated, the first bearing holding portion 19 and the second bearing holding portion 20 are first fixed to the casing 6 before being fixed to the casing 6. The fixing portion 13b of the radial magnetic bearing 13 and the fixing portion 16b of the second radial magnetic bearing 16 may be fixed to the first bearing holding portion 19 and the second bearing holding portion 20. When the first bearing holding portion 19 and the second bearing holding portion 20 are totally heated, after the first bearing holding portion 19 is fixed to the casing 6, the fixing portion 13b of the first radial magnetic bearing 13 is fixed. Is fixed to the first bearing holding portion 19, and after the second bearing holding portion 20 is fixed to the casing 6, the fixing portion 16b of the second radial magnetic bearing 16 is fixed to the second bearing holding portion 20. Ru.

Next, the first touch-down bearing 13c and the second touch-down bearing 16c are arranged. The fixing portion 17b of the first thrust magnetic bearing 17 and the fixing portion 18b of the second thrust magnetic bearing 18 are fixed to the first bearing holding portion 19 and the second bearing holding portion 20, respectively, and at the same time, the first. The touch-down bearing 13c and the second touch-down bearing 16c are sandwiched.

The rotating portion 17a, which is a component of the first thrust magnetic bearing 17, and the rotating portion 18a, which is a component of the second thrust magnetic bearing 18, are fixed to the rotating shaft 8.

The casing 6, the first bearing holding portion 19, and the second bearing holding portion 20 are fixed by surface contact over the entire circumference in the radial direction D3 with an area of fitting width. Therefore, the fixed area becomes large, and the rigidity of the housing portion is further improved. Due to the improved rigidity, the housing is damped during high-speed rotation, and the operation of the axial blower 100 is stabilized.

<Procedure for disassembling the axial blower 100>
The axial blower 100 is disassembled when maintenance is performed, such as when components such as the touchdown bearings 13c and 16c are destroyed and replaced, or when adjustment or cleaning is performed.

The procedure for disassembling the axial blower 100 is the reverse of the procedure for assembling the axial blower 100. In the first bearing holding portion 19 and the second bearing holding portion 20, a heat source such as a burner or a metal heating heater is arranged at an arbitrary position, and the first bearing holding portion 19 expands when heated and easily becomes a clearance fit. Will be removed.

<Operation of axial blower 100>
The operation of the axial blower 100 configured as described above will be described. The rotating body of the axial blower 100 is rotatably supported by the first magnetic bearing portion and the second magnetic bearing portion on the bearing holding portions 19, 20 and the casing 6 in a non-contact manner. The axial blower 100 is installed so that the central axis AX of the rotating shaft 8 is horizontal. Therefore, the rotating body provided with the first rotor blade 11 and the second rotor blade 12 for circulating the laser medium gas is in the direction in which its own weight is applied by the radial magnetic bearings 13 and 16 provided at both ends thereof. In addition, it is supported by non-contact. The non-contact is a state in which the rotating body is not in contact with the casing 6. A radial magnetic bearing position detection sensor (not shown) provided near the radial magnetic bearings 13 and 16 detects the position of the sensor target provided on the rotating shaft 8 and positions the rotating body at a preset position. The fixing portions 13b, 16b of the radial magnetic bearings 13, 16 act so as to be adjusted. The first blade 11 functions as a blade on the suction side of the laser medium gas, and the second blade 12 functions as a blade on the discharge side of the laser medium gas. The rotating body rotates by obtaining a rotational driving force from the motor 3 of the axial blower 100. The laser medium gas is blown by the rotation of the moving blades 11 and 12 provided on the rotating body. That is, the laser medium gas is sucked into the axial flow blower 100 from the axial direction D2 of the rotating shaft 8, passes through the axial flow blower 100, and flows out at a high speed. At this time, since a differential pressure is generated in the laser medium gas on the suction side and the discharge side of the axial blower 100, a force is pressed against the rotating body in the axial direction D2 of the rotating shaft 8 toward the first magnetic bearing portion. Works. A thrust magnetic bearing position detection sensor (not shown) provided near the first thrust magnetic bearing 17 detects the rotation position of the target (not shown) provided on the rotating shaft 8 and rotates to a preset position. The fixing portions 17b, 18b of the thrust magnetic bearings 17, 18 act so as to adjust the shaft 8. During high-speed rotation, the motor 3 generates heat, causing thermal deformation of the rotating body. At the same time, disproportionate vibration also occurs. The fixed portions 13b, 16b and thrust magnetism of the radial magnetic bearings 13, 16 so as to suppress this disproportionate vibration and to adjust the rotating body to a predetermined position with respect to the rotating body in which thermal deformation has occurred. The fixing portions 17b and 18b of the bearings 17 and 18 act.

As an example, when an active magnetic bearing is used, a plurality of electromagnets are used. It also includes a control system such as a controller (not shown). The position of the rotating body is detected by the radial magnetic bearing position detection sensor and the thrust magnetic bearing position detection sensor, a feedback system is configured to suppress the vibration of the rotating body, and the current is set so that the rotating body is in the predetermined position. Control is done.

<High rigidity by bearing holding parts 19 and 20 (effect 1)>
During high-speed rotation, the position of the rotating body changes due to thermal deformation or disproportionate vibration of the rotating body. Following this position change, a levitation force is generated from the magnetic bearing portion to the rotating body by the control system. When an active magnetic bearing is used, the current is controlled by the control system, and an attractive force is generated in the fixed portion (electromagnet) of the magnetic bearing portion. The reaction force of this suction force is applied to the housing portion. If the rigidity of the housing portion is low, the magnetic bearing portion serves as a vibration source and the housing portion vibrates.

As the rotation speed increases, the amount of heat generated by the motor increases and the centrifugal force due to imbalance also increases, so that a larger reaction force is applied to the housing portion. If the rigidity of the housing portion is low, the fixed portion of the magnetic bearing, which is a component, vibrates, which makes it difficult to control the position of the rotating body and stabilize the operation of the axial blower 100. there were.

As a result of the natural frequency analysis of this type of axial blower, it was found that among the components of the axial blower, the component having low rigidity is an intermediary member that mediates between the magnetic bearing portion and the casing. This intermediary member corresponds to the first bearing holding portion 19 and the second bearing holding portion 20. Since the first bearing holding portion 19 and the second bearing holding portion 20 are gas inlets and outlets, the thickness of the support beam portions 19b and 20b is restricted, and the rigidity is lowered. It ends up. When the first bearing holding portion 19 and the second bearing holding portion 20 are fastened to the casing 6 only by the fastening member 61 as in the conventional case, the rigidity is low and it is difficult to suppress vibration.

Therefore, in the first embodiment, the convex portion 6e formed on one end surface of the casing 6 is shrink-fitted and fixed to the concave portion 19e of the first bearing holding portion 19, and is fixed to the concave portion 20e of the second bearing holding portion 20. The convex portion 6e formed on the other end surface of the casing 6 is fixed by shrink fitting (tight fitting). As a result, the first bearing holding portion 19, the second bearing holding portion 20, and the casing 6 are fixed by surface contact, and the rigidity of these fixed portions is improved. Incidentally, by the natural frequency analysis, the first bearing holding portion 21 and the second bearing holding portion 22 having a structure without the second cylindrical members 21c and 22c functioning as the reinforcing ring in the second embodiment described later are obtained. When the axial blower provided and the structure of the first embodiment are compared, the natural frequency of the lowest order of the housing portion is improved by about 2.0 times in the structure of the first embodiment. Further, the rigidity is improved by forming the root portions 19d and 20d of the support beam portions 19b and 20b of the bearing holding portions 19 and 20 into an R structure by bending. Due to the improved rigidity, the housing portion is damped during high-speed rotation, and the operation of the axial blower 100 is stabilized.

<Simplification of maintenance by bearing holders 19 and 20 (effect 2)>
From the viewpoint of facilitating the maintenance of the axial blower, it is desirable to have a structure in which the bearing holding portions 19 and 20 are fixed to the casing 6 only by fastening members such as bolts or nuts, but there is a problem that the rigidity is low. In the fixed structure of the first embodiment, the bearing holding portion 19 is provided by arranging a heat source such as a burner or a metal heating heater at a position near the second cylindrical members 19c and 20c of the bearing holding portions 19 and 20. , 20 are easily removed from the casing 6. Further, in the axial blower 100, a rotor 1 is provided in the center of the rotary shaft 8, moving blades 11 and 12 are provided on both sides of the rotor 1, and radial magnetic bearings 13 and 16 are provided next to the moving blades 11 and 12. Rotating portions 13a and 16a are provided, and bearing holding portions 19 and 20 are arranged on both end faces of the casing 6. Therefore, it becomes easy to partially heat the bearing holding portions 19 and 20 from the surroundings. Therefore, it is possible to increase the rigidity of the housing portion without impairing maintainability (easiness of disassembly).

Embodiment 2.
FIG. 4 is a perspective view of the axial blower 100A according to the second embodiment. FIG. 5 is a cross-sectional view of the axial blower 100A according to the second embodiment. FIG. 6 is a view of the axial blower 100A according to the second embodiment as viewed from the axial direction. In FIG. 6, the axial blower 100A is viewed from the right side of FIG. 4. In the axial blower 100A according to the second embodiment, the first bearing holding portion 19 of the first embodiment is replaced with the first bearing holding portion 21, and the second bearing holding portion 20 of the first embodiment is the first. It is replaced with the bearing holding portion 22 of 2. Further, in the axial blower 100A according to the second embodiment, the casing 6 of the first embodiment is replaced with the casing 7. Other components are the same as the components of the first embodiment, and duplicate description will be omitted.

The axial blower 100A includes a hollow cylindrical casing 7, a rotary shaft 8, a motor 3, a stationary wing 5, a first moving wing 11, a second moving wing 12, and a first bearing holding. A portion 21, a second bearing holding portion 22, a first radial magnetic bearing 13, a second radial magnetic bearing 16, a first thrust magnetic bearing 17, and a second thrust magnetic bearing 18 are provided. ..

The casing 7 is a member formed of an aluminum alloy, an austenite-based stainless alloy, a copper alloy, cast iron, steel, or an iron alloy in a hollow cylindrical shape. A plurality of through holes 7a, a plurality of through holes 7b, a pedestal 7c, and a plurality of screw holes 7d are formed in the casing 7.

A screw (not shown) is inserted into each of the plurality of through holes 7a. The blade 54, which is a component of the stationary blade 5, is fixed by the screw inserted into the through hole 7a. In each of the plurality of through holes 7b, an inlet pipe for cooling water circulation (not shown), an outflow pipe for cooling water circulation (not shown), and a power line of a stator coil (not shown) are inserted. .. The pedestal 7c is a mounting member for fixing the axial blower 100A to the housing of the laser oscillator, which will be described later. The screw holes 7d are holes formed at both ends of the casing 7. The plurality of screw holes 7d are arranged apart from each other in the circumferential direction D1. The fastening member 61 is inserted into the screw hole 7d.

The first bearing holding portion 21 is provided at one end of the casing 7 in the axial direction D2. The first bearing holding portion 21 includes a first cylindrical member 21a, a plurality of support beam portions 21b, and a second cylindrical member 21c, as in the first embodiment. The first cylindrical member 21a and the plurality of support beam portions 21b are integrally configured as the same first component, but the second cylindrical member 21c includes the first cylindrical member 21a and the plurality of supports. The first part including the beam portion 21b is configured as a second part which is a separate part. The second cylindrical member 21c functions as a reinforcing member for increasing the rigidity. Each root portion 21d of the plurality of support beam portions 21b has an R structure by bending, and the rigidity is enhanced. An R structure may be formed in the axial direction D2 so that the laser medium gas can easily flow in and out on the inner diameter side of the surface of the first bearing holding portion 21 opposite to the casing 7. The material and basic dimensions of the first bearing holding portion 21 are the same as those of the first bearing holding portion 19 of the first embodiment, and overlapping description will be omitted.

As shown in FIG. 6, a through hole 21b1 into which a fastening member 61 such as a bolt for fixing the support beam portion 21b to the casing 7 is inserted is provided in a portion near the tip of each support beam portion 21b. The upper and lower two support beam portions 21b of the four support beam portions 21b are provided with pin holes 21b2 for positioning that are fitted with the pins 7g provided in the casing 7. Specifically, pins 7g are provided at two locations, the upper part and the lower part of the end surface of the casing 7.

A fastening member is fitted to the screw hole 7d of the casing 7 and the through hole 21b1 of the support beam portion 21b in a state where the pin 7g provided in the casing 7 is fitted into the pin hole 21b2 and the support beam portion 21b is in contact with the end surface of the casing 7. 61 is inserted. As a result, the first component including the first cylindrical member 21a and the support beam portion 21b is fixed to the casing 7. By using the pin 7g when fixing the first cylindrical member 21a and the support beam portion 21b to the casing 7, the first cylindrical member 21a is in the radial direction D3 where the weight of the rotating body is applied to the casing 7. And the support beam portion 21b is positioned and fixed with high accuracy.

As shown in FIG. 5, a convex portion 7e is formed on the end surface of the casing 7 in contact with the support beam portion 21b so as to project in the axial direction D2 of the casing 7. The convex portions 7e are provided at four locations on one end surface of the casing 7.

On the inner diameter side of the second cylindrical member 21c constituting the second component, as shown in FIG. 6, a concave notch portion that fits with the convex portion 7e of the casing 7 and the tip end portion of the support beam portion 21b. 21c1 is provided at four places.

After the first component including the first cylindrical member 21a and the support beam portion 21b is fixed to the casing 7 by the fastening member 61, the side surface of the convex portion 7e of the casing 7 and the side surface of the tip portion of the support beam portion 21b. However, it is machined so that there is no step and the surface is flat. Both side surfaces of the convex portion 7e of the casing 7 and both side surfaces of the tip end portion of the support beam portion 21b are sandwiched by the notch portion 21c1 of the second cylindrical member 21c and fixed by tightening. The casing 7 and the support beam portion 21b are fixed to the second cylindrical member 21c by surface contact. The casing 7, the first cylindrical member 21a, and the support beam portion 21b are integrated via the second cylindrical member 21c, and the rigidity is improved.

The second bearing holding portion 22 is configured in the same manner as the first bearing holding portion 21. The second bearing holding portion 22 is provided at the other end of the casing 7 in the axial direction D2. The second bearing holding portion 22 includes a first cylindrical member 22a on the inner peripheral side, a plurality of support beam portions 22b, and a second cylindrical member 22c on the outer peripheral side. The first cylindrical member 22a and the plurality of support beam portions 22b are integrally configured as the same third component, but the second cylindrical member 22c includes the first cylindrical member 22a and the plurality of supports. The third component including the beam portion 22b is configured as a fourth component which is a separate component. The second cylindrical member 22c functions as a reinforcing member for increasing the rigidity. Each root portion 22d of the plurality of support beam portions 22b has an R structure by bending, and the rigidity is increased. An R structure may be formed in the axial direction D2 so that the laser medium gas can easily flow in and out on the inner diameter side of the surface of the second bearing holding portion 22 opposite to the casing 7. The material and basic dimensions of the second bearing holding portion 22 are the same as those of the first bearing holding portion 21, and overlapping description will be omitted.

Similar to the support beam portion 21b, a through hole 22b1 into which the fastening member 61 is inserted and a pin hole (not shown) are provided in the portion near the tip of each support beam portion 22b, and the other end surface of the casing 7 is provided with a pin hole (not shown). , The pin 7g and the convex portion 7e are provided like one end surface of the casing 7, and the second cylindrical member 22c is provided with the concave notch portion 22c1 like the second cylindrical member 21c. There is. After the third component including the first cylindrical member 22a and the support beam portion 22b is fixed to the casing 7 by the fastening member 61, the side surface of the convex portion 7e of the casing 7 and the side surface of the tip portion of the support beam portion 22b. However, it is machined so that there is no step and the surface is flat. Both side surfaces of the convex portion 7e of the casing 7 and both side surfaces of the tip end portion of the support beam portion 22b are sandwiched by the notch portion 22c1 of the second cylindrical member 22c and fixed by tightening.

<Assembly procedure of axial blower 100A>
The procedure for assembling the axial blower 100A will be described. First, the fixing portion 13b of the first radial magnetic bearing 13 is fixed to the first component including the first cylindrical member 21a and the support beam portion 21b. Similarly, the fixing portion 16b of the second radial magnetic bearing 16 is fixed to the third component including the first cylindrical member 22a and the support beam portion 22b.

After that, in the same manner as in the first embodiment, when the stator 2 to which the stator holding portion 51 is mounted and the casing 7 to which the stationary blade 5 is fixed are prepared, the stator holding portion 51 is attached to the stationary blade 5. It is fixed, and the rotating body is assembled to the casing 7. Further, the first moving blade 11 and the second moving blade 12 are attached and fixed to both ends of the rotating body.

Next, the first component including the first cylindrical member 21a and the support beam portion 21b and the third component including the first cylindrical member 22a and the support beam portion 22b are attached to both ends of the casing 7 by fastening members 61. It is fixed.

Next, the first touch-down bearing 13c and the second touch-down bearing 16c are arranged. The fixing portion 17b of the first thrust magnetic bearing 17 and the fixing portion 18b of the second thrust magnetic bearing 18 are fixed to the first bearing holding portion 21 and the second bearing holding portion 22, respectively, and at the same time, the first. The touch-down bearing 13c and the second touch-down bearing 16c are sandwiched.

The rotating portion 17a, which is a component of the first thrust magnetic bearing 17, and the rotating portion 18a, which is a component of the second thrust magnetic bearing 18, are fixed to the rotating shaft 8.

Finally, the second cylindrical member 21c constituting the second component and the second cylindrical member 22c constituting the fourth component are attached and fixed to the axial blower 100A. Specifically, machining is performed so that the side surface of the convex portion 7e of the casing 7 and the side surface of the support beam portion 21b are in a flat flush state with no step. The second cylindrical member 21c is entirely heated by a furnace, a hot plate, or the like, or is partially heated by a burner, a metal heating heater, or the like. For this heating, total heating and partial heating may be used in combination. The cutout portion 21c1 of the heated second cylindrical member 21c is fitted to the convex portion 7e of the casing 7 and the tip end portion of the support beam portion 21b, and is fixed by a tight fitting when the temperature drops. In the same step, the second cylindrical member 22c is shrink-fitted and fixed to the opposite end surface of the casing 7.

Since the second cylindrical member 21c and the second cylindrical member 22c are shrink-fitted and fixed to the casing 7, the contact area for fixing is increased, and the rigidity of the housing portion of the axial blower 100A is improved. .. As an example, when an aluminum alloy is used as the material of the second cylindrical member 21c and the second cylindrical member 22c, surface treatment including alumite treatment and allodin treatment is performed, and the second cylindrical member is subjected to surface treatment. An oxide film is formed on the surfaces of the 21c and the second cylindrical member 22c. This surface treatment keeps the thermal conductivity low. When the heated second cylindrical member 21c and the second cylindrical member 22c are fitted to the casing 7, heat transfer to the casing 7 is suppressed, and the second cylindrical member 21c and the second cylindrical shape. The assembly work of the member 22c can be efficiently performed.

When the second cylindrical member 21c and the second cylindrical member 22c are partially heated, they are located near the notch 21c1 and the notch 22c1 of the second cylindrical member 21c and the second cylindrical member 22c. By arranging a plurality of heat sources such as a burner or a metal heating heater, efficient heating can be performed in a short time.

<Procedure for dismantling the axial blower>
The procedure for disassembling the axial blower 100A is the reverse of the procedure for assembling the axial blower 100A. The second cylindrical member 21c and the second cylindrical member 22c are expanded by being heated by arranging a heat source such as a burner or a metal heating heater at a position near the notch 21c1 and the notch 22c1. , It can be easily removed by fitting in the clearance.

<High rigidity by bearing holding parts 21 and 22 (effect 1)>
In the second embodiment, the convex portions 7e at both ends of the casing 7 and the tips of the support beam portions 21b and 22b are sandwiched between the notches 21c1 and 22c1 of the second cylindrical members 21c and 22c and fixed by tightening. ing. As a result, the first bearing holding portion 21, the second bearing holding portion 22, and the casing 7 are fixed by surface contact, and the rigidity of these fixed portions is improved. Further, the rigidity is improved by forming the root portions 21d and 22d of the support beam portions 21b and 22b of the bearing holding portions 21 and 22 into an R structure by bending. Due to the improved rigidity, the housing portion is damped during high-speed rotation, and the operation of the axial blower 100A is stabilized. Incidentally, according to the natural frequency analysis, the axial blower provided with the first bearing holding portion 21 and the second bearing holding portion 22 having a structure without the second cylindrical members 21c and 22c, and the structure of the second embodiment. In the structure of the second embodiment, the natural frequency of the lowest order of the housing portion is improved by about 1.5 times.

<Simplification of maintenance by bearing holding parts 21 and 22 (effect 2)>
In the fixed structure of the second embodiment, a heat source such as a burner or a metal heating heater is arranged at a position near the notches 21c1, 22c1 of the second cylindrical members 21c and 22c of the bearing holding portions 21 and 22. The bearing holding portions 21 and 22 are easily removed from the casing 7. Further, by arranging the bearing holding portions 21 and 22 on both end faces of the casing 7, it becomes easy to partially heat the bearing holding portions 21 and 22 from the surroundings. Therefore, it is possible to increase the rigidity of the housing portion without impairing maintainability (easiness of disassembly).

Regarding the bearing holding portions 21 and 22 of the second embodiment, the second cylindrical member 21c which is the second component and the second cylindrical member 22c which is the fourth component are eliminated, and the first cylindrical member is eliminated. It may be composed of a first component including 21a and a plurality of support beam portions 21b and a third component including a first cylindrical member 22a and a plurality of support beam portions 22b. In the case of this configuration, notches of a plurality of recesses are provided on both end faces of the casing 7, and the tip portions of the plurality of support beam portions 21b of the first component and the tip portions of the plurality of support beam portions 22b of the third component are provided. Is fixed in the recess of the casing 7 by tightening and fitting (baking).

Embodiment 3.
FIG. 7 is a perspective view of the laser oscillator 200 according to the third embodiment. FIG. 8 is a cross-sectional view of the laser oscillator 200 according to the third embodiment. The laser oscillator 200 includes a housing 201 that is a vacuum vessel that encloses the laser medium gas 300, a discharge unit 202 that is used to excite the discharge of the laser medium gas 300, a partial reflector 203, a full reflector 204, and a laser medium. A heat exchanger 205 for cooling the gas 300 and an axial blower 100 for circulating the laser medium gas 300 are provided. The discharge unit 202 includes a pair of discharge electrodes 202a and 202b. The total reflecting mirror 204 and the partial reflecting mirror 203 are provided on both sides of the housing 201 in the optical axis direction, and form an optical resonator. The laser 400 is emitted from the partial reflector 203. When a window is attached instead of the total reflecting mirror 204 and the partial reflecting mirror 203, the laser oscillator 200 functions as a laser amplifier. Here, the laser medium gas 300 passes through the heat exchanger 205 before entering the discharge unit 202, and is circulated inside the housing 201 by four axial blowers 100.

The operation of the laser oscillator 200 will be described. A rotary driving force is obtained from the motor 3 provided in the axial blower 100, and the rotary shaft 8 equipped with the moving blades 11 and 12 rotates at a high speed of tens of thousands of revolutions per minute. In the axial blower 100, the laser medium gas 300 flows around the motor 3 and flows linearly in the axial direction D2. The axial direction D2 is equal to the gas flow direction shown in FIG. By rotating the motor 3 at high speed and increasing the air volume, it is possible to increase the circulation cooling capacity of the laser medium gas 300, and the output of the laser oscillator 200 can be increased. As the laser oscillator 200, the axial blower 100A according to the second embodiment may be used.

The configuration shown in the above-described embodiment shows an example of the contents of the present disclosure, can be combined with another known technique, and is one of the configurations as long as it does not deviate from the gist of the present disclosure. It is also possible to omit or change the part.

1 rotor, 2 stator, 3 motor, 5 bearings, 6,7 casing, 6a, 6b, 7a, 7b, 11a1,12a1,19b1,20b1,21b1,22b1 through hole, 6c, 7c pedestal, 6d, 7d screw hole , 6e, 7e Convex part, 7g pin, 8 rotation axis, 9 1st moving wing holding part, 10 2nd moving wing holding part, 11 1st moving wing, 11c, 12c, 54 blades, 12 2nd Moving blade, 13 first radial magnetic bearing, 13a, 16a, 17a, 18a rotating part, 13b, 16b, 17b, 18b fixing part, 13c first touch-down bearing, 14, 15, 61 fastening member, 16 second Radial magnetic bearing, 16c second touchdown bearing, 17 first thrust magnetic bearing, 18 second thrust magnetic bearing, 19, 21 first bearing holder, 19a, 20a, 21a, 22a first cylinder Shape member, 19b, 20b, 21b, 22b Support beam part, 19c, 20c, 21c, 22c Second cylindrical member, 19d, 20d, 21d, 22d root part, 19e, 20e recess, 20,22 second bearing Holding part, 21b2 pin hole, 21c1,22c1 notch, 51 stator holding part, 52 blade base, 100, 100A axial blower, 200 laser oscillator, 201 housing, 202 discharge part, 202a, 202b discharge electrode, 203 part Reflector, 204 total reflector, 205 heat exchanger, 300 laser medium gas, 400 laser.

Claims (8)

The rotor to which the axis of rotation is fixed and
A stator provided around the rotor and
A pair of blades fixed to the rotor and
A cylindrical casing in which the stator is fixed and accommodates the stator and the pair of rotor blades.
A pair of magnetic bearing portions provided at both ends of the rotating shaft and supporting the rotating shaft,
A pair of bearing holding portions, which are fixed to both ends of the casing and hold the pair of magnetic bearing portions, are provided.
The pair of bearing holding portions have a first cylindrical member to which the magnetic bearing portion is fixed, a second cylindrical member provided on the outer peripheral side of the first cylindrical member, and the first cylindrical member, respectively. It has a plurality of support beam portions that radially connect between the outer peripheral portion of the cylindrical member and the inner peripheral portion of the second cylindrical member.
A shaft current blower characterized in that the second cylindrical member of the bearing holding portion is fixed to the casing by tightening and fitting. The axial blower according to claim 1, wherein the casing and the second cylindrical member of the bearing holding portion are fixed by a fastening member. The axial flow according to claim 1 or 2, wherein the first cylindrical member, the second cylindrical member, and the plurality of support beam portions are a single component integrally configured. Blower. A concave portion is formed over the entire circumference on the inner diameter side of the end surface of the second cylindrical member of the bearing holding portion, and a convex portion is formed over the entire circumference on the inner diameter side of both end faces of the casing. The axial blower according to claim 3, wherein the convex portion is fixed by tightening. The first cylindrical member and the plurality of support beam portions are first components integrally configured, and the second cylindrical member is a second component that is a separate component from the first component. The axial blower according to claim 1 or 2, characterized in that there is. Convex portions protruding in the axial direction are provided at a plurality of locations on both end faces of the casing.
Concave notches are provided at a plurality of locations on the inner diameter side of the second cylindrical member.
The axial blower according to claim 5, wherein the convex portion of the casing and the tip end portion of the support beam portion are sandwiched between the notch portions and fixed by tightening. The axial blower according to any one of claims 1 to 6, wherein the bearing holding portion is formed of an aluminum alloy, and an oxide film is formed on the surface of the bearing holding portion. A housing filled with laser medium gas and
A discharge unit that excites the laser medium gas by discharge,
The axial blower according to any one of claims 1 to 7, which circulates the laser medium gas excited by the discharge unit.
A laser oscillator including a heat exchanger for cooling the laser medium gas.

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